CN111175205A

CN111175205A - Air cylinder

Info

Publication number: CN111175205A
Application number: CN202010100135.0A
Authority: CN
Inventors: 陈坪
Original assignee: Yangtze Memory Technologies Co Ltd
Current assignee: Yangtze Memory Technologies Co Ltd
Priority date: 2020-02-18
Filing date: 2020-02-18
Publication date: 2020-05-19

Abstract

The embodiment of the application discloses cylinder, the cylinder includes: a housing; the piston structure is arranged in the shell in a sliding mode and used for dividing the inner part of the shell into a first cavity and a second cavity; the gas guide structure is used for communicating the first cavity with an external gas source device and adjusting the gas pressure in the first cavity; a magnetic structure located inside the housing; wherein, the magnetic structure includes: the first magnetic block and the second magnetic block are fixedly arranged on two opposite sides in the shell respectively, and the third magnetic block is fixedly arranged in the piston structure; the third magnetic block is respectively mutually attracted with the first magnetic block and mutually repelled with the second magnetic block.

Description

Air cylinder

Technical Field

The embodiment of the application relates to but not limited to particle count technical field, especially relates to a cylinder.

Background

In a particle counter, a cylinder component is generally used to switch between a diagonal mode and a direct mode of incident light. In the related art, the cylinder is actuated by utilizing a spring and vacuum, and after the spring is used for a long time, the push rod cannot be moved in place easily due to elastic fatigue, so that the particle counter cannot normally switch modes. In addition, because particle counter board structure is complicated, and operating space is little, and it takes 8 ~ 10 hours to change the cylinder every time, consumes great time cost. Accordingly, there is a need for improvements in gas cylinders that reduce the probability of particle counters failing due to spring failure.

Disclosure of Invention

In view of this, the embodiment of the present application provides a cylinder.

The technical scheme of the embodiment of the application is realized as follows:

the embodiment of the application provides a cylinder, the cylinder includes:

a housing;

the piston structure is arranged in the shell in a sliding mode and used for dividing the inner part of the shell into a first cavity and a second cavity;

the gas guide structure is used for communicating the first cavity with an external gas source device and adjusting the gas pressure in the first cavity;

a magnetic structure located inside the housing;

wherein, the magnetic structure includes: the first magnetic block and the second magnetic block are fixedly arranged on two opposite sides in the shell respectively, and the third magnetic block is fixedly arranged in the piston structure;

the third magnetic block is respectively mutually attracted with the first magnetic block and mutually repelled with the second magnetic block.

The cylinder that this application embodiment provided utilizes magnetic structure and vacuum to actuate, realizes the reciprocating motion of piston in the cylinder, because the magnetism of magnet is more stable among the magnetic structure, can not lead to the magnetic force to become invalid because long-time the use to when adopting spring and vacuum to actuate among the prior art can be solved, because the spring uses the problem that the piston push-and-pull in the cylinder is not in place that appears elastic fatigue for a long time, can effectively reduce the probability that the cylinder broke down.

Drawings

FIG. 1A is a schematic diagram illustrating a cylinder structure when a light incident mode of a particle counter is switched to a direct-illumination mode in the related art;

FIG. 1B is a schematic diagram illustrating a structure of a cylinder when a light incident mode of a particle counter is switched to an oblique mode in the related art;

FIG. 2 is a schematic diagram of a cylinder assembly according to an embodiment of the present disclosure;

FIG. 3A is a schematic diagram of a cylinder piston structure according to an embodiment of the present disclosure moving to a first position;

FIG. 3B is a schematic diagram of a cylinder piston structure moving to a second position according to an embodiment of the present disclosure;

FIG. 4 is a schematic structural diagram of a cylinder provided in an embodiment of the present application;

fig. 5A is a schematic structural diagram of a cylinder provided in an embodiment of the present application in a direct injection mode;

fig. 5B is a schematic structural diagram of the cylinder in the oblique fire mode according to the embodiment of the present application.

Detailed Description

In order to make the purpose, technical solutions and advantages of the present application clearer, the technical solutions of the present application are further described in detail with reference to the drawings and the embodiments, the described embodiments should not be considered as limiting the present application, and all other embodiments obtained by a person of ordinary skill in the art without creative efforts belong to the protection scope of the present application.

In the following description, reference is made to "some embodiments" which describe a subset of all possible embodiments, but it is understood that "some embodiments" may be the same subset or different subsets of all possible embodiments, and may be combined with each other without conflict.

Where similar language of "first/second" appears in the specification, the following description is added, and where reference is made to the term "first \ second \ third" merely to distinguish between similar items and not to imply a particular ordering with respect to the items, it is to be understood that "first \ second \ third" may be interchanged with a particular sequence or order as permitted, to enable the embodiments of the application described herein to be performed in an order other than that illustrated or described herein.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing embodiments of the present application only and is not intended to be limiting of the application.

In order to better understand the technical solution of the present application, a composition structure of a cylinder part of a particle counter and a process of switching a direct mode and a diagonal mode of incident light by using the cylinder part in the related art will be described first.

In the related art, the cylinder is used for controlling whether incident light can irradiate on the reflector by pulling the reflector connected with one end of the push rod of the cylinder in a reciprocating manner, so that the function of adjusting the angle of the incident light is achieved. When the particle counter works, the light incidence mode can be divided into a direct incidence mode and an oblique incidence mode according to the incident light angle. The principle of switching the direct mode and the oblique mode of the incident light in the particle counter is as follows: whether incident light can irradiate on the reflector is controlled by adjusting the position of the reflector, and when the incident light does not irradiate on the reflector, the angle of the incident light is direct; when an incident ray is irradiated onto the mirror, the incident ray angle is changed to oblique.

In the related technology, the cylinder is actuated by a spring and vacuum, and the piston is controlled to drive the push rod and the reflector to move. Fig. 1A is a schematic structural diagram of the cylinder when the light incident mode of the particle counter is switched to the direct incident mode, as shown in fig. 1A, the first cavity 11 in the cylinder is in a vacuum state, and the gas pressure in the second cavity 12 pushes the piston 20 to drive the push rod 30 to move toward the first cavity 11, so that the reflective mirror 40 fixedly disposed on the push rod 30 moves to the first target position, thereby avoiding light reflection, and thus switching the light incident mode of the particle counter to the direct incident mode.

Fig. 1B is a schematic structural diagram of the cylinder when the light incident mode of the particle counter is switched to the oblique mode, as shown in fig. 1B, the first cavity 11 in the cylinder is in a vacuum-off state, the piston moves to the second cavity (not shown in fig. 1B) side by the elastic force of the spring 20, and drives the push rod 30 to move, so that the reflective mirror 40 fixedly disposed on the push rod 30 moves to the second target position, and light reflection is performed, thereby switching the light incident mode of the particle technologist to the oblique mode.

The embodiment of the application provides a cylinder, and fig. 2 is the component structure schematic diagram of the cylinder of the embodiment of the application, as shown in fig. 2, this cylinder includes: a housing 110, a piston structure 120 slidably disposed inside the housing 110, an air guide structure (not shown in fig. 2), and a magnetic structure 130 disposed inside the housing 110; wherein:

the piston structure 120, which is used to divide the interior of the housing 110 into a first cavity 111 and a second cavity 112;

the gas guide structure is used for communicating the first cavity 111 with an external gas source device and adjusting the gas pressure in the first cavity 111;

the magnetic structure 130 includes: a first magnetic block 131 and a second magnetic block 132 fixedly disposed at two opposite sides in the housing 110, respectively, and a third magnetic block (not shown in fig. 2) fixedly disposed in the piston structure 120;

the third magnetic block is respectively attracted to the first magnetic block 131 and repelled from the second magnetic block 132.

In practice, any suitable gas-tight material may be used for the housing 110 and the piston structure 120. The piston structure 120 is slidably disposed inside the housing 110, and can be forced to slide inside the housing 110.

The gas guide structure is communicated with the first cavity 111 and an external gas source device, and the external gas source device can extract gas from the first cavity 111 or fill gas into the first cavity 111 through the gas guide structure so as to adjust the gas pressure in the first cavity 111. In some embodiments, the external gas source device can completely pump out the gas in the first chamber 111 through the gas guide structure, so that the first chamber 111 is in a vacuum state. In practice, the gas directing structure may be any structure capable of gas transport. In some embodiments, the gas directing structure may be a gas directing tube.

The first magnetic block 131, the second magnetic block 132, and the third magnetic block may be permanent magnets or electromagnets, and those skilled in the art can freely select the magnetic blocks according to actual situations when implementing the magnetic blocks, and the embodiment of the present application is not limited to this.

In some embodiments, the first magnetic block 131, the second magnetic block 132, and the third magnetic block are all permanent magnets; the magnetic poles of the first magnetic block 131 and the third magnetic block are arranged oppositely to provide a repulsive force; the magnetic pole of the second magnetic block 132 is the same as that of the third magnetic block, and is used for providing attraction. Thus, in the absence of external force, the piston structure 120 moves toward the second cavity side due to the attractive force between the third magnetic block and the first magnetic block 131 and the repulsive force between the third magnetic block and the second magnetic block 132.

In some embodiments, the gas directing structure is configured to: the first chamber 111 is adjusted to be in a vacuum state by the external air source device, so that the piston structure 120 is pushed to move to the first position towards the first chamber 111 side by the air pressure in the second chamber 112, so that the volume of the first chamber 111 is compressed to the minimum.

In some embodiments, the first position may be a position at which the piston structure is located such that the first chamber 111 volume is compressed to zero. As shown in fig. 3A, the piston structure 120 is pushed by the gas pressure in the second chamber 112 to move to the first position where the volume of the first chamber 111 is compressed to the minimum.

In some embodiments, the gas directing structure is further configured to: the first cavity 111 is adjusted to be in a vacuum-removed state by the external air source device, so that the piston structure 120 is pushed to move to the second cavity 112 side to a second position by using the repulsive force between the first magnetic block 131 and the third magnetic block and the attractive force between the second magnetic block 132 and the third magnetic block, so that the volume of the second cavity 112 is compressed to a minimum.

In some embodiments, the second position may be a position at which the piston structure is located such that the volume of the second cavity 112 is compressed to zero. As shown in fig. 3B, at this time, the piston structure 120 is subjected to the repulsive force between the first magnetic block 131 and the third magnetic block and the attractive force between the second magnetic block 132 and the third magnetic block, and moves to the second position, which makes the volume of the second cavity 112 compress to the minimum.

The embodiment of the application provides a cylinder, and fig. 4 is the component structure schematic diagram of the cylinder of the embodiment of the application, as shown in fig. 4, this cylinder includes: a housing 110, a piston structure 120 slidably disposed inside the housing, an air guide structure (not shown in fig. 4), a magnetic structure 130 disposed inside the housing, a push rod 140, and a reflector 150 fixedly disposed on the push rod 140; wherein:

the magnetic structure 130 includes: a first magnetic block 131 and a second magnetic block 132 fixedly disposed at two opposite sides in the housing 110, respectively, and a third magnetic block (not shown in fig. 4) fixedly disposed in the piston structure 120;

the third magnetic block is respectively mutually attracted with the first magnetic block 131 and mutually repelled with the second magnetic block 132;

one end of the push rod 140 is connected to the piston structure 120 and penetrates through the second cavity 112, and the other end is connected to the reflector 150;

the mirror 150 is configured to: when the light irradiates the reflector 150, the light angle is adjusted;

when the piston structure 120 moves, the push rod 140 is pushed by the thrust generated by the movement of the piston structure 120 to move the reflector 150 to a target position, so as to control the reflector 150 to adjust the light angle.

Here, the piston structure 120 is actuated by using the magnetic force of the magnetic structure 130 and the gas pressure difference between the first chamber 111 and the second chamber 112, and the principle of the movement of the piston structure 120 can be referred to the description of the foregoing embodiments, and will not be described herein.

In implementation, the reflecting mirror 150 may be a plane reflecting mirror or a curved reflecting mirror, and those skilled in the art may select an appropriate reflecting mirror according to actual situations in implementation, which is not limited in the embodiment of the present application.

In some embodiments, the cylinder is applied to a particle counter for: the light incident mode of the particle counter is switched by using the magnetic force of the magnetic structure 130 or the gas pressure in the second chamber 112.

Here, the light incidence manner may include a direct mode and an oblique mode. When the light incidence mode is a direct incidence mode, the incident light vertically irradiates the object to be detected, the reflected light reflected by the object to be detected can be collected, and the quantity of particles existing on the object to be detected can be determined by detecting the difference between the incident light intensity and the reflected light intensity. When the light incidence mode is the oblique incidence mode, the incident light is obliquely emitted to the object to be detected, the quantity of particles existing on the object to be detected can be determined by collecting light scattered by particles existing on the object to be detected and detecting the scattered light intensity of the collected particles.

In some embodiments, the particle counter is configured to detect the number of particles on the wafer, and the oblique mode is a mode of determining the number of particles on the wafer to be detected by detecting the scattered light intensity of the particles in the photosensitive region; the direct projection mode is a mode of determining the number of particles on the wafer to be detected by detecting the difference between the incident light intensity and the reflected light intensity of the photosensitive area.

In some embodiments, the cylinder is for: when the piston structure 120 moves to the first position, the push rod 140 pushes the reflector 150 to a third position to avoid light reflection, so that the light incident mode of the particle counter is switched to a direct light mode; when the piston structure 120 moves to the second position, the push rod 140 pushes the reflector 150 to a fourth position for light reflection, so that the light incident mode of the particle counter is switched to an oblique mode. Here, the third position is a position of the mirror when the incident light cannot irradiate the mirror, the mirror can avoid light reflection in the third position, the fourth position is a position of the mirror when the incident light can irradiate the mirror, and the mirror can reflect light in the fourth position. In practice, a person skilled in the art may determine the appropriate third position and fourth position according to practical situations, which is not limited in the embodiments of the present application.

Fig. 5A is a schematic structural diagram of the cylinder in the direct injection mode according to the embodiment of the present invention, as shown in fig. 5A, at this time, the piston structure 120 is pushed by the gas pressure in the second cavity 112 to move to the first position where the volume of the first cavity 111 is compressed to the minimum, and drives the push rod 140 to push the reflector 150 to move to the third position where light reflection can be avoided.

Fig. 5B is a schematic structural diagram of the cylinder in the oblique mode according to the embodiment of the present application, and as shown in fig. 5B, the piston structure 120 receives the repulsive force between the first magnetic block 131 and the third magnetic block and the attractive force between the second magnetic block 132 and the third magnetic block, and moves to the second position where the volume of the second cavity 112 is compressed to the minimum, and drives the push rod 140 to push the reflector 150 to move to the fourth position where light can be reflected.

The cylinder that this application embodiment provided utilizes magnetic structure and vacuum to actuate, realizes the reciprocating motion of piston in the cylinder to promote the reflector through driving the push rod and remove to the position of difference and carry out light angular adjustment, because the magnetism of magnet is more stable among the magnetic structure, can not lead to the magnetic force inefficacy because of long-time the use, can effectively reduce the probability that the cylinder broke down. Further, the air cylinder can be applied to the particle counter, light incidence mode switching is carried out by pushing the reflector to move to different positions, the probability that the particle counter cannot normally work due to air cylinder faults can be effectively reduced, and the working stability of the particle counter is improved.

It should be appreciated that reference throughout this specification to "one embodiment" or "an embodiment" means that a particular feature, structure or characteristic described in connection with the embodiment is included in at least one embodiment of the present application. Thus, the appearances of the phrases "in one embodiment" or "in an embodiment" in various places throughout this specification are not necessarily all referring to the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments. It should be understood that, in the various embodiments of the present application, the sequence numbers of the above-mentioned processes do not mean the execution sequence, and the execution sequence of each process should be determined by its function and inherent logic, and should not constitute any limitation to the implementation process of the embodiments of the present application. The above-mentioned serial numbers of the embodiments of the present application are merely for description and do not represent the merits of the embodiments.

It should be noted that, in this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.

In the several embodiments provided in the present application, it should be understood that the disclosed apparatus and method may be implemented in other ways. The above-described device embodiments are merely illustrative, for example, the division of the unit is only a logical functional division, and there may be other division ways in actual implementation, such as: multiple units or components may be combined, or may be integrated into another system, or some features may be omitted, or not implemented. In addition, the coupling, direct coupling or communication connection between the components shown or discussed may be through some interfaces, and the indirect coupling or communication connection between the devices or units may be electrical, mechanical or other forms.

The units described as separate parts may or may not be physically separate, and parts displayed as units may or may not be physical units; can be located in one place or distributed on a plurality of network units; some or all of the units can be selected according to actual needs to achieve the purpose of the solution of the embodiment.

In addition, all functional units in the embodiments of the present application may be integrated into one processing unit, or each unit may be separately regarded as one unit, or two or more units may be integrated into one unit; the integrated unit can be realized in a form of hardware, or in a form of hardware plus a software functional unit.

The above description is only for the embodiments of the present application, but the scope of the present application is not limited thereto, and any person skilled in the art can easily conceive of changes or substitutions within the technical scope of the present application, and shall be covered by the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims

1. A cylinder, characterized in that it comprises:

a housing;

a magnetic structure located inside the housing;

2. The cylinder of claim 1, wherein the first, second, and third magnetic blocks are all permanent magnets; wherein the content of the first and second substances,

the magnetic poles of the first magnetic block and the third magnetic block are arranged oppositely and used for providing repulsive force;

and the magnetic poles of the second magnetic block and the third magnetic block are arranged in the same way and are used for providing attraction.

3. The cylinder of claim 2, wherein the air directing structure is configured to:

and adjusting the first cavity to be in a vacuum state through the external air source device, so that the piston structure is pushed to move to the first cavity side to a first position by utilizing the air pressure in the second cavity, and the volume of the first cavity is compressed to the minimum.

4. The cylinder of claim 3, wherein the air directing structure is further configured to:

and adjusting the first cavity to be in a vacuum-removed state through the external air source device, so that the piston structure is pushed to move towards the second cavity side to a second position by using the repulsive force between the first magnetic block and the third magnetic block and the attractive force between the second magnetic block and the third magnetic block, and the volume of the second cavity is compressed to the minimum.

5. The cylinder of claim 4, wherein the gas directing structure is a gas directing tube.

6. The cylinder of claim 4, further comprising: push rod and fixed setting are in reflector on the push rod, wherein:

one end of the push rod is connected with the piston structure and penetrates through the second cavity, and the other end of the push rod is connected with the reflector;

when the piston structure moves, the push rod is pushed by thrust generated by the movement of the piston structure to move the reflector to a target position so as to control the reflector to adjust the light angle.

7. The cylinder according to claim 6, characterized in that it is applied to a particle counter for:

and switching the light incidence mode of the particle counter by using the magnetic force of the magnetic structure or the gas pressure in the second cavity.

8. The cylinder of claim 7, wherein the oblique incidence mode is a mode for determining the number of particles on a wafer to be detected by detecting the scattered light intensity of the particles in the photosensitive region;

the direct projection mode is a mode of determining the number of particles on the wafer to be detected by detecting the difference between the incident light intensity and the reflected light intensity of the photosensitive area.

9. The cylinder of claim 7, wherein the cylinder is configured to:

when the piston structure moves to the first position, the push rod pushes the reflector to a third position to avoid light reflection, so that the light incidence mode of the particle counter is switched to a direct incidence mode;

when the piston structure moves to the second position, the push rod pushes the reflector to a fourth position to reflect light, so that the light incidence mode of the particle counter is switched to an oblique incidence mode.