CN110763689B - Surface detection device and method - Google Patents
Surface detection device and method Download PDFInfo
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- CN110763689B CN110763689B CN201911112590.6A CN201911112590A CN110763689B CN 110763689 B CN110763689 B CN 110763689B CN 201911112590 A CN201911112590 A CN 201911112590A CN 110763689 B CN110763689 B CN 110763689B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N2021/4735—Solid samples, e.g. paper, glass
Abstract
The embodiment of the invention discloses a surface detection device and a surface detection method. The surface detection device includes: the rotating mechanism, the reflecting module and the light receiving module are sequentially arranged along the light propagation path; the reflection module and the light receiving module are fixed on the rotating mechanism; a through hole is arranged in the rotating mechanism and comprises a vertical part and an inclined part; the reflection module is arranged in the vertical part; the rotating mechanism rotates around a first rotating shaft, the first rotating shaft is parallel to the central symmetry axis of the vertical part, and the first rotating shaft is perpendicular to the plane of the surface of the measured object and is overlapped with the projection of the reflecting module on the plane of the surface of the measured object; the reflection module is used for reflecting the detection light beam incident along the vertical part into a reflected light beam which is incident to the surface of the object to be detected; the light receiving module is used for converting scattered light beams formed after the reflected light beams are scattered by the surface of the object to be measured into parallel light beams and emitting the parallel light beams. The surface detection device provided by the embodiment of the invention can realize the effect of improving the detection efficiency.
Description
Technical Field
The embodiment of the invention relates to the technical field of semiconductors, in particular to a surface detection device and a surface detection method.
Background
With the rapid development of large-scale integrated circuits, the influence of the particle condition on the surface of a silicon wafer on the manufacture of devices is more and more paid attention by people.
Fig. 1 is a schematic structural diagram of a typical measurement apparatus for performing scattering measurement on particles on a surface of a silicon wafer, and as shown in fig. 1, the measurement apparatus includes a body 200, wherein a workpiece stage 220 for placing a silicon wafer 210 to be measured, an emission unit 230 for emitting normal incident light λ and oblique incident light μ, and a photodetector 240 are disposed inside the body 200. The normal incident light λ and the oblique incident light μ emitted by the emitting unit 230 irradiate the surface of the silicon wafer 210 to be tested on the workpiece stage 220, and the particle condition detection on the surface of the silicon wafer 210 to be tested is realized by analyzing the reflected light and the scattered light γ on the surface of the silicon wafer 210 to be tested. In order to realize the detection of the whole silicon wafer, the workpiece stage 220 is provided with an x-direction moving stage and a y-direction moving stage, and the scanning detection of the whole area of the silicon wafer 210 to be detected is realized by moving the moving stages in the x direction and the y direction or by arranging a rotating stage (fig. 2) rotating around a z axis and simultaneously moving along the x axis in a single direction.
However, the detection method by moving the workpiece stage in the prior art is inefficient.
Disclosure of Invention
The invention provides a surface detection device and a surface detection method, which aim to achieve the effect of improving detection efficiency.
An embodiment of the present invention provides a surface detection apparatus, including: the rotating mechanism, the reflecting module and the light receiving module are sequentially arranged along the light propagation path; the reflection module and the light receiving lens are fixed in the rotating mechanism;
a through hole is formed in the rotating mechanism and comprises a vertical part and an inclined part; the transmitting module is arranged in the vertical part; the rotating mechanism rotates around a first rotating shaft, the first rotating shaft is parallel to the central symmetry axis of the vertical part, and the first rotating shaft is perpendicular to the plane of the surface of the measured object and is overlapped with the projection of the reflecting module on the plane of the surface of the measured object;
the reflection module is used for reflecting the detection light beam incident along the vertical part into a reflection light beam and then the reflection light beam is incident to the surface of the object to be detected through the inclined part;
the light receiving module is used for converting scattered light beams formed by the reflected light beams after being scattered by the surface of the object to be measured into parallel light beams and then emitting the parallel light beams.
Further, the surface detection apparatus further includes: a light condensing module; the light-gathering module is arranged on the inclined part; the reflection module, the light condensation module and the light receiving module are sequentially arranged along a light propagation path;
the focus of the light condensation module coincides with the focus of the light receiving module, and the focus corresponds to a scanning point on the surface of the measured object.
Further, the shape of the reflection module comprises any one of a pyramid or a frustum of a pyramid; the central axis of the reflection module is parallel to the first rotating shaft; the reflection module is provided with a plurality of outer side walls which are sequentially arranged in an adjacent mode, at least one part of outer side walls of the reflection module is provided with a first plane mirror, and the first plane mirror is used for reflecting the detection light beams.
Further, the light receiving lens comprises a plurality of light receiving units.
Further, at least two of the plurality of light receiving units adopt optical elements with different optical characteristics; the optical elements of different optical characteristics comprise different lenses and/or different spherical mirrors.
Further, the surface detection apparatus further includes: parabolic mirrors and photodetectors; the reflection module, the light receiving module, the paraboloidal mirror and the photoelectric detector are sequentially arranged along a light propagation path; the symmetry axis of the parabolic mirror is parallel to the first rotation axis, and the photosensitive surface of the photodetector is disposed at the focus of the parabolic mirror.
Furthermore, the symmetry axis of the parabolic mirror coincides with the first rotation axis, the photosensitive surface of the photodetector is located at the focus of the parabolic mirror, and the photosensitive surface of the photodetector is perpendicular to the symmetry axis of the parabolic mirror.
Further, the surface detection apparatus further includes: a second flat mirror and a photodetector; the second plane mirror and the photoelectric detector are fixed in the rotating mechanism; the reflection module, the light receiving module, the second plane mirror and the photoelectric detector are sequentially arranged along a light propagation path; the second plane mirror is used for reflecting the parallel light beams to the photoelectric detector.
Further, the surface detection apparatus further includes: a transmitting module; the emitting module is located along a light propagation path and is used for emitting the detection light beam.
Further, the surface detection apparatus further includes: a work table;
the object to be measured is placed on the workbench, and the workbench moves along a first direction;
wherein, what the reflected light beam reflects to the surface of the measured object is the scanning of second direction, first direction and the second direction is crossing.
Based on the same inventive concept, the embodiment of the invention also provides a surface detection method, which is realized based on the surface detection device;
the surface detection method comprises the following steps:
s1, controlling the reflection module to reflect the detection light beam incident along the vertical part into a reflected light beam, and then, controlling the reflection module to enter the surface of the object to be detected through the inclined part;
s2, converting the scattered light beam formed by the reflected light beam scattered by the surface of the object to be measured into a parallel light beam through the light receiving module and then emitting the parallel light beam.
Further, the surface detection apparatus further includes: a work table; after S1, further comprising: controlling the workbench to move a preset distance along a first direction; alternatively, the first and second electrodes may be,
s2, further comprising:
controlling the workbench to move a preset distance along a first direction;
wherein, what the reflected light beam reflects to the surface of the measured object is the scanning of second direction, first direction and the second direction is crossing.
The technical scheme of this embodiment, through being fixed in on the slewing mechanism around first rotation axis rotation with receiving the optical module with the reflection module, because during the scanning, the reflection module is rotatory along with slewing mechanism around first rotation axis together with receiving the optical module, so make the incident facula that reflects through the reflection module form one section scanning circular arc on the surface of testee, further cooperate slewing mechanism's high-speed rotation, realize the high frequency scanning to the testee surface, and then realize improving detection efficiency's effect.
Drawings
FIG. 1 is a schematic diagram of a prior art surface measurement apparatus;
FIG. 2 is a top view of a surface measuring device of the prior art;
FIG. 3 is a schematic structural diagram of a surface inspection apparatus according to an embodiment of the present invention;
fig. 4 is a schematic diagram of a scanning path of a surface detection device for detecting a surface of an object to be detected according to an embodiment of the present invention;
FIG. 5 is a schematic structural diagram of another surface inspection apparatus according to an embodiment of the present invention;
FIG. 6 is a schematic structural diagram of another surface inspection apparatus according to an embodiment of the present invention;
FIG. 7 is a bottom view of a surface inspection apparatus according to an embodiment of the present invention;
fig. 8 is a schematic structural diagram of a reflection module according to an embodiment of the present invention;
FIG. 9 is a schematic structural diagram of another surface inspection apparatus according to an embodiment of the present invention;
FIG. 10 is a schematic structural diagram of another surface inspection apparatus according to an embodiment of the present invention;
FIG. 11 is a schematic structural diagram of another surface inspection apparatus according to an embodiment of the present invention;
fig. 12 is a flowchart of a surface inspection method according to an embodiment of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.
Fig. 3 is a schematic structural diagram of a surface inspection apparatus according to an embodiment of the present invention, and as shown in fig. 3, the surface inspection apparatus includes: the light source comprises a rotating mechanism 10, a reflecting module 20 and a light receiving module 30 which are sequentially arranged along a light propagation path; the reflection module 20 and the light receiving module 30 are fixed on the rotating mechanism 10; a through hole 11 is formed in the rotating mechanism 10, the through hole 11 comprises a vertical part 111 and an inclined part 112, and the reflection module 20 is arranged in the vertical part 111; the rotating mechanism 10 rotates around a first rotation axis Z, which is parallel to the central symmetry axis of the vertical part 111, is perpendicular to the plane of the surface of the object to be measured 40 and overlaps with the projection of the reflection module 20 on the plane of the surface of the object to be measured 40; the detection light beam a enters the reflection module 20 along the vertical part 111 of the through hole 11, forms a reflected light beam b after being reflected by the reflection module 20, and enters the surface of the object to be measured 40 through the inclined part 112; the light receiving module 30 is configured to convert a scattered light beam c formed by scattering the reflected light beam b through the surface of the object 40 into a parallel light beam d and emit the parallel light beam d.
The reflection module 20 may include a plane mirror, for example, but the embodiment is not limited thereto as long as the detection beam a can be reflected to the surface of the object to be measured 40. The light receiving module 30 may include a lens, for example, but the embodiment is not limited thereto, as long as the light receiving module can convert a scattered light beam c formed by scattering the reflected light beam b through the surface of the object 40 to a parallel light beam d and emit the parallel light beam d. The rotating mechanism 10 rapidly rotates around the first rotation axis Z, and then drives the reflection module 20 and the light receiving module 30 to rotate around the first rotation axis Z. Since the reflection module 20 rotates Z around the first rotation axis, the reflected light beam b reflected by the reflection module 20 forms a scanning arc on the surface of the object to be measured 40. If the surface of the object 40 to be measured is defective, the reflected beam b incident on the surface of the object 40 to be measured is scattered to form a scattered beam c, and the scattered beam c passes through the light receiving module 30 to form a parallel beam d to be emitted.
Specifically, the detection beam a enters the reflection module 20 along the vertical portion 111 of the through hole 11, and is reflected by the reflection module 20 to form a reflected beam b and then enters the surface of the object 40 to be measured. Since the rotating mechanism 10 rotates rapidly around the first rotation axis Z, and the reflection module 20 is fixed on the rotating mechanism 10, the reflection module 20 also rotates rapidly around the first rotation axis Z, so that the reflected light beam b reflected by the reflection module 20 forms a scanning arc on the surface of the object to be measured 40, as shown in fig. 4, fig. 4 is a schematic scanning path of the surface detection device for detecting the surface of the object to be measured according to the embodiment of the present invention. If the surface of the object 40 to be measured is defective, the reflected beam b incident on the surface of the object 40 to be measured is scattered to form a scattered beam c, and the scattered beam c passes through the light collecting lens 30 to form a parallel beam d to be emitted. According to the technical scheme, the reflection module 20 can be driven to rotate around the first rotating shaft Z rapidly through the rapid rotation of the rotating mechanism 10, so that the reflected light beam b reflected by the reflection module 20 forms a section of scanning arc on the surface of the object to be measured 40, the rapid scanning of the whole surface of the object to be measured 40 is realized by combining the movement of the workpiece table 100, and the scanning speed is improved.
The technical scheme of this embodiment sets up the reflection module and receives the optical module through the slewing mechanism internal fixation around first rotation axis is rotatory to during making the scanning, reflection module and receive the optical module and revolve around first rotation axis along with slewing mechanism together, so make the incident facula that reflects through the reflection module form one section scanning circular arc on the surface of testee, further cooperate slewing mechanism's high-speed rotation, realize the high frequency scanning to the testee surface, and then realize improving detection efficiency's effect.
On the basis of the above technical solution, optionally, fig. 5 is a schematic structural diagram of another surface detection apparatus provided in an embodiment of the present invention. As shown in fig. 5, the surface detecting apparatus further includes: a light-collecting module 50, the light-collecting module 50 being disposed in the inclined portion 112 of the through-hole 11; the reflection module 20, the light-gathering module 50 and the light-receiving module 30 are arranged in sequence along the light propagation path; the focus of the light-collecting module 50 coincides with the focus of the light-collecting module 30, and the two coincident focuses Q are located on the surface of the object to be measured 40 and correspond to the scanning point on the surface of the object to be measured 40.
The light-collecting module 50 may include a lens, for example, but the embodiment is not limited thereto, as long as the relative position of the scanning point for focusing the reflected light beam b on the surface of the object 40 to be measured and the light-collecting module 30 is kept unchanged. When the incident detection beam a coincides with the first rotation axis Z, the reflected beam b reflected by the incident detection beam a after passing through the vertical portion 111 of the through hole 11 to the reflection module 20 may be directly focused on the same point of the object 40 to be measured. However, when the incident detection beam a deviates from the first rotation axis Z (as shown in fig. 5), the height value of the spot incident on the reflection module 20 in the vertical direction (the direction perpendicular to the plane of the surface of the object to be measured 40) changes with the rotation of the rotating mechanism 10, so that the position of the reflected beam b reflected by the reflection module 20 and irradiated on the surface of the object to be measured 40 changes relative to the light receiving module 30 during the scanning process, and the collection effect of the light receiving module 30 on the scattered beam c is affected, thereby affecting the detection result. In the present technical solution, in the direction of the light propagation path, the light-gathering module 50 is disposed in the inclined portion 112 of the through hole 11, the focal point of the light-gathering module 50 coincides with the focal point of the light-gathering module 30, and the two coincident focal points Q are located on the surface of the object to be measured 40, so that even if the incident detection light beam a does not coincide with the first rotation axis Z, the reflected light beam b enters the scanning point on the surface of the object to be measured 40 at the coincident focal point.
According to the technical scheme, the light condensing module is arranged in the inclined part 112 of the through hole 11 in the direction along the light propagation path, so that the relative position of a scanning point, which is formed by focusing a reflected light beam of a detection light beam deviating from the first rotating shaft on the surface of a detected object through the reflection module, and the light receiving module is kept unchanged, namely the scanning point is positioned at the focus point where the light condensing module and the light receiving module are overlapped, a parallel light beam is conveniently formed through the light receiving module to be detected, and the accuracy of a detection result is improved.
Based on the above technical solution, optionally, fig. 6 is a schematic structural diagram of another surface detecting device provided in an embodiment of the present invention, fig. 7 is a bottom view of the surface detecting device provided in the embodiment of the present invention, fig. 8 is a schematic structural diagram of the reflection module in fig. 6, and as shown in fig. 6 and fig. 8, the shape of the reflection module 20 includes any one of a pyramid or a frustum of a pyramid; the central axis of the reflection module 20 is parallel to the first rotation axis Z; the reflection module 20 has a plurality of outer sidewalls 21 disposed adjacently in sequence, and at least a portion of the outer sidewalls 21 of the reflection module 20 is provided with a first plane mirror for reflecting the detection beam a.
The reflection module 20 includes any one of a pyramid or a frustum of a pyramid, and the cross section of the reflection module is polygonal, for example, a triangle, and accordingly, the reflection module 20 has three outer sidewalls (see fig. 8) adjacently disposed in sequence, and at least one of the three outer sidewalls is provided with a first plane mirror. Preferably, the first plane mirror is continuously disposed on the entire outer sidewall of the reflection module 20.
Illustratively, the reflection module 20 is a prism, and accordingly the reflection module 20 has three outer sidewalls adjacently disposed in sequence, each of the three outer sidewalls being provided with a first plane mirror. The central axis of the prism coincides with the first axis of rotation Z, about which the prism rotates rapidly. When the rotating mechanism 10 rotates for one circle, the scanning of three arcs can be realized, and the scanning efficiency is improved.
For example, another N is the number of the first plane mirrors arranged on the reflection module 20, and it can be obtained through rough calculation that the central angle corresponding to a section of the scanning arc formed by reflection of one first plane mirror is 2 pi/N. When N is large enough, the central angle becomes small and the scanning arc will approach a straight line. N scans can be achieved for each revolution of the reflective module 20. And further matching with the high-speed rotation of the reflecting rotary drum, the high-frequency scanning of the surface of the measured object is realized.
It should be noted that the shape of the reflection module 20 is not limited to the above examples, and the cross section of the reflection module 20 includes but is not limited to a triangle, and a person skilled in the art can select the shape of the reflection module 20 and set the number of sides of the cross section according to the needs of the product, and the invention is not limited in particular, and fig. 6 and 8 only illustrate the shape of the reflection module 20 as a frustum of a prism, and the cross section of the reflection module 20 as a triangle. In addition, the number of the first plane mirrors can be set according to needs.
According to the technical scheme, the reflecting module is set to be any one of a pyramid or a frustum, and at least one part of the outer side wall of the reflecting module is provided with the first plane mirror, so that when the rotating mechanism rotates for one circle, the scanning of a plurality of arcs can be completed, and the scanning efficiency is further improved.
On the basis of the above technical solution, optionally, with reference to fig. 7, the light receiving module 30 includes a plurality of light receiving units 31. At least two light receiving units 31 of the plurality of light receiving units 31 employ optical elements having different optical characteristics.
The three light receiving units 31 may include any one of lenses and spherical mirrors, for example. The shape of the light receiving unit 31 may include, for example, a circle, a square, or the like, but the type and the shape of the light receiving unit 31 are not limited thereto as long as they have a focusing function and can convert the scattered light beam c passing through the object to be measured 40 into the parallel light beam d.
The present embodiment provides 3 light receiving units 31, but is not limited to 3. The light receiving characteristics of each light receiving unit 31 may be the same or different, or different light receiving characteristics may be obtained by providing different optical elements (not shown) in each light receiving unit 31.
For example, at least two of the three light receiving units 31 may adopt different optical designs, such as lenses with different apertures and different diaphragms being matched to achieve different light receiving angles, and/or different polarization detection sheets being adopted to achieve different polarization characteristic selections, and/or different wavelength filters being adopted to achieve different wavelength selections.
Specifically, the first reflected light beam b is scattered by the surface of the object to be measured 40 to form a scattered light beam c of different angles, and the scattered light beam c is received by the plurality of light receiving units 31 having different light receiving characteristics. This technical scheme utilizes the light receiving unit 31 of different optical design, and when reflection module rotated one week, the scattered light signal of different angles, different polarization characteristic or different wavelength can be gathered to the light receiving unit of different optical design, and then can detect out different defects, improves detection quality when improving detection efficiency.
On the basis of the above technical solution, optionally, fig. 9 is a schematic structural diagram of another surface detection apparatus provided in an embodiment of the present invention, as shown in fig. 9, the surface detection apparatus further includes a parabolic mirror 51 (shown as a tiny part of the parabolic mirror) and a photodetector 60, and the reflection module 20, the light receiving module 30, the parabolic mirror 51, and the photodetector 60 are sequentially arranged along a light propagation path; the symmetry axis of the parabolic mirror 51 is parallel to the first rotation axis Z, and the photosensitive surface of the photodetector 60 is disposed at the focus of the parabolic mirror 51, so that the parallel light beams d at different positions can be focused on the photodetector 60 after passing through the parabolic mirror 51, thereby realizing efficient and comprehensive detection of the scattered light beam c;
based on the above technical solution, optionally, fig. 10 is a schematic structural diagram (a rotation mechanism is omitted) of another surface detection apparatus provided in the embodiment of the present invention, a symmetry axis of the parabolic mirror 51 coincides with the first rotation axis Z, a light-sensing surface of the photodetector 60 is located at a focus of the parabolic mirror 51, and the light-sensing surface of the photodetector 60 is perpendicular to the symmetry axis of the parabolic mirror 51.
Wherein, when the rotating mechanism 10 rotates, the reflected beam b can scan a section of arc on the surface of the object 40 to be measured. However, the positions of the scanning arcs of the reflected light beam b on the surface of the object 40 to be measured are different, so that the scattered light beam c formed after scanning is converted into a parallel light beam d by the light receiving module 30, and then the parallel light beam d is focused by the parabolic mirror 51 and then enters the photodetector 60 at different angles, and the photosensitive characteristic of the photodetector 60 is generally affected by the incident angle of light, thereby causing system errors. In order to avoid such errors, in the embodiment of the present invention, by adjusting the parabolic mirror 51, even if the positions of the scanning arcs are different, the scattered light beam c formed after scanning is converted into the parallel light beam d by the light receiving module 30, and then enters the photosensitive surface of the photodetector 60 at the same incident angle after passing through the parabolic mirror 51.
Specifically, the symmetry axis of the parabolic mirror 51 coincides with the first rotation axis Z, the light sensing surface of the photodetector 60 is located at the focus of the parabolic mirror 51, and the light sensing surface of the photodetector 60 is perpendicular to the symmetry axis of the parabolic mirror 51. Thus, even if the positions of the scanning arcs are different, the scattered light beam c formed after scanning is converted into a parallel light beam d by the light receiving module 30, and the parallel light beam d passes through the parabolic mirror 51 and then enters the photosensitive surface of the photodetector 60 at the same incident angle. According to the technical scheme, by arranging the parabolic mirror 51, the symmetry axis of the parabolic mirror 51 is coincident with the first rotation axis Z, the photosensitive surface of the photoelectric detector 60 is positioned at the focus of the parabolic mirror 51, and the photosensitive surface of the photoelectric detector 60 is perpendicular to the symmetry axis of the parabolic mirror 51, so that system errors are removed, errors are reduced, and the detection quality can be improved.
Optionally, fig. 11 is a schematic structural diagram of another surface detection apparatus provided in an embodiment of the present invention, as shown in fig. 10, the surface detection apparatus further includes a second flat mirror 52 and a photodetector 60, and both the second flat mirror 52 and the photodetector 60 are fixedly disposed in the rotating mechanism 10; the reflection module 20, the light receiving module 30, the second plane mirror 52 and the photodetector 60 are sequentially arranged along the light propagation path; the second flat mirror 52 is used to reflect the parallel light beam d to the photodetector 60.
Even if the positions of the scanning arcs are different, the scattered light beam c formed after scanning is converted into the parallel light beam d by the light receiving module 30 and then enters the photosensitive surface of the photodetector 60 at the same incident angle after passing through the second plane mirror 52, so that the detection quality can be improved. On the basis of the above technical solution, optionally, with continuing reference to fig. 9 and 11, the surface detection apparatus further includes: a transmitting module 80; the emitting module 80 is located along the light propagation path, and the emitting module 80 is used for emitting the detection light beam a.
The emitting module 80 may include any one of a semiconductor laser, a fiber laser, a solid laser, or a gas laser, for example, and the emitting module 80 may emit a laser beam or a continuous wavelength beam, for example, which is not particularly limited in this embodiment as long as the defect on the surface of the object to be measured 40 can be detected.
Optionally, the surface detecting apparatus further includes a third plane mirror 90, and the third plane mirror 90 is located along the light propagation path and is used for reflecting the detecting light beam a emitted by the emitting module 80 to the reflecting module 20 through the vertical part 111. By arranging the third flat mirror 90 along the light propagation path, flexibility in the position of the emission module 80 can be increased.
On the basis of the above technical solution, optionally, with continued reference to fig. 1, the method further includes: a work table 100; the object to be measured 40 is placed on the workbench 100, and the workpiece table 100 moves along the first direction X; wherein the reflection of the first reflected light beam b onto the surface of the object 40 to be measured is a scanning in a second direction Y, the first direction X intersecting the second direction Y.
Specifically, the incident detection beam a forms a scanning arc on the surface of the object 40 through the reflected beam b reflected by the rotating reflection module 20, the scanning arc is in the second direction Y, and meanwhile, the object 40 placed on the table 100 moves along the first direction X, and the scanning detection of the whole area of the object 40 is completed repeatedly. Alternatively, after the incident detection beam a is reflected by the rotating reflection module 20 to perform a circular arc scan on the surface of the object to be measured 40 in the second direction Y, the stage 100 is stepped to the next scanning position in the first direction X, and the scanning detection on the whole area of the object to be measured 40 is also performed repeatedly.
According to the technical scheme, after or when the reflected light beam is reflected to the surface of the measured object to complete the arc scanning in the second direction, the workbench is controlled to move for the preset distance along the first direction, and the scanning detection of the whole area of the measured object can be completed.
Based on the same inventive concept, the embodiment of the invention also provides a surface detection method, which is realized based on the surface detection device; fig. 11 is a flowchart of a surface inspection method according to an embodiment of the present invention, and as shown in fig. 11, the surface inspection method includes:
s1, controlling the reflection module to reflect the detection light beam incident along the vertical part into a reflected light beam, and then, controlling the reflection module to enter the surface of the object to be detected through the inclined part;
s2, converting the scattered light beam formed by the reflected light beam scattered by the surface of the object to be measured into a parallel light beam through the light receiving module and then emitting the parallel light beam.
The technical scheme of this embodiment, through being fixed in on the slewing mechanism around first rotation axis rotation with receiving the optical module with the reflection module, because during the scanning, the reflection module is rotatory along with slewing mechanism around first rotation axis together with receiving the optical module, so make the incident facula that reflects through the reflection module form one section scanning circular arc on the surface of testee, further cooperate slewing mechanism's high-speed rotation, realize the high frequency scanning to the testee surface, and then realize improving detection efficiency's effect.
On the basis of the above scheme, optionally, after S1, the method further includes: controlling the workbench to move a preset distance along a first direction; alternatively, the first and second electrodes may be,
s2, further comprising:
controlling the workbench to move a preset distance along a first direction;
wherein, what the reflected light beam reflects to the surface of the measured object is the scanning of second direction, first direction and the second direction is crossing.
According to the technical scheme, after or when the reflected light beam is reflected to the surface of the measured object to complete scanning in the second direction, the workbench is controlled to move for the preset distance along the first direction, and scanning detection of the whole area of the measured object can be completed.
It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.
Claims (11)
1. A surface sensing device, comprising: the rotating mechanism, the reflecting module and the light receiving module are sequentially arranged along the light propagation path; the reflection module and the light receiving module are fixed in the rotating mechanism;
a through hole is formed in the rotating mechanism and comprises a vertical part and an inclined part; the reflection module is arranged in the vertical part; the rotating mechanism rotates around a first rotating shaft, the first rotating shaft is parallel to the central symmetry axis of the vertical part, and the first rotating shaft is perpendicular to the plane of the surface of the measured object and is overlapped with the projection of the reflecting module on the plane of the surface of the measured object;
the reflection module is used for reflecting the detection light beam incident along the vertical part into a reflection light beam and then the reflection light beam is incident to the surface of the object to be detected through the inclined part;
the light receiving module is used for converting scattered light beams formed by the reflected light beams after being scattered by the surface of the object to be measured into parallel light beams and then emitting the parallel light beams.
2. The surface sensing device of claim 1, further comprising: a light condensing module; the light-gathering module is arranged on the inclined part; the reflection module, the light condensation module and the light receiving module are sequentially arranged along a light propagation path;
the focus of the light condensation module coincides with the focus of the light receiving module, and the focus corresponds to a scanning point on the surface of the measured object.
3. The surface sensing device of claim 1, wherein the shape of the reflection module comprises any one of a pyramid or a frustum of a pyramid; the central axis of the reflection module is parallel to the first rotating shaft; the reflection module is provided with a plurality of outer side walls which are sequentially arranged in an adjacent mode, at least one part of outer side walls of the reflection module is provided with a first plane mirror, and the first plane mirror is used for reflecting the detection light beams.
4. The surface sensing device of claim 3, wherein the light receiving module comprises a plurality of light receiving units.
5. The surface sensing device of claim 4, wherein at least two of the light receiving units employ optical elements having different optical properties; the optical elements of different optical characteristics comprise different lenses or different spherical mirrors.
6. The surface sensing device of claim 1, further comprising: parabolic mirrors and photodetectors; the reflection module, the light receiving module, the paraboloidal mirror and the photoelectric detector are sequentially arranged along a light propagation path; the symmetry axis of the parabolic mirror is parallel to the first rotation axis, and the photosensitive surface of the photodetector is disposed at the focus of the parabolic mirror.
7. The surface sensing device of claim 6, wherein the axis of symmetry of the parabolic mirror coincides with the first axis of rotation, the photosensitive surface of the photodetector is located at a focal point of the parabolic mirror, and the photosensitive surface of the photodetector is perpendicular to the axis of symmetry of the parabolic mirror.
8. The surface sensing device of claim 1, further comprising: a second flat mirror and a photodetector; the second plane mirror and the photoelectric detector are fixed in the rotating mechanism; the reflection module, the light receiving module, the second plane mirror and the photoelectric detector are sequentially arranged along a light propagation path; the second plane mirror is used for reflecting the parallel light beams to the photoelectric detector.
9. The surface sensing device of claim 1, further comprising: a work table;
the object to be measured is placed on the workbench, and the workbench moves along a first direction;
wherein, what the reflected light beam reflects to the surface of the measured object is the scanning of second direction, first direction and the second direction is crossing.
10. A surface inspection method, characterized in that the surface inspection method is implemented based on the surface inspection apparatus according to any one of claims 1 to 9;
the surface detection method comprises the following steps:
s1, controlling the reflection module to reflect the detection light beam incident along the vertical part into a reflected light beam, and then, controlling the reflection module to enter the surface of the object to be detected through the inclined part;
s2, converting the scattered light beam formed by the reflected light beam scattered by the surface of the object to be measured into a parallel light beam through the light receiving module and then emitting the parallel light beam.
11. The surface inspection method according to claim 10, wherein the surface inspection apparatus further comprises: a work table; after S1, further comprising: controlling the workbench to move a preset distance along a first direction; alternatively, the first and second electrodes may be,
s2, further comprising:
controlling the workbench to move a preset distance along a first direction;
wherein, what the reflected light beam reflects to the surface of the measured object is the scanning of second direction, first direction and the second direction is crossing.
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| CN201911112590.6A CN110763689B (en) | 2019-11-14 | 2019-11-14 | Surface detection device and method |
| KR1020217036540A KR20210151160A (en) | 2019-11-14 | 2020-04-14 | Surface detection device and method |
| JP2021568020A JP7304970B2 (en) | 2019-11-14 | 2020-04-14 | Surface detection device and method |
| PCT/CN2020/084704 WO2021093264A1 (en) | 2019-11-14 | 2020-04-14 | Surface detection apparatus and method |
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