JP7304970B2 - Surface detection device and method - Google Patents

Description

TECHNICAL FIELD Embodiments of the present invention relate to the field of semiconductor technology, and more particularly to surface detection apparatus and methods.

At present, with the rapid development of large-scale integrated circuits, people pay more and more attention to the influence of particles on the surface of silicon wafers on the production of components. FIG. 1 is a typical structural illustration of a measuring apparatus for scattering measurement of particles on the surface of a silicon wafer at present. As shown in FIG. 1, the measuring apparatus includes a body 200, where inside the body 200 is a component table 220 on which a silicon wafer 210 to be measured is placed, and a front incident light λ and an oblique incident light μ. and a photodetector 240 are provided. The front incident light λ and the oblique incident light μ emitted from the radiation unit 230 are irradiated onto the surface of the silicon wafer 210 to be measured on the component table 220, and the reflected light and the scattered light γ on the surface of the silicon wafer 210 to be measured. Detecting the particle condition on the surface of the silicon wafer 210 to be measured is realized by analyzing against. In order to detect the entire silicon wafer, the component table 220 is provided with an x-direction moving table and a y-direction moving table. By moving the carriage in the x-direction and the y-direction, or by providing a rotating device (FIG. 2) that rotates about the Z-axis, it can be rotated about the Z-axis and at the same time about the x-axis. It is realized to move in a single direction to scan and detect the entire area of the silicon wafer 210 to be measured.

However, detection by moving the component table of the prior art is inefficient.

INDUSTRIAL APPLICABILITY The present invention provides a surface detection device and method, and can achieve the effect of increasing detection efficiency.

An embodiment of the present invention provides a surface detection device, the surface detection device includes a rotating mechanism, a first reflective module and a light receiving module arranged in sequence along a light propagation path, wherein the first The reflecting module and the light receiving module are fixed in the rotating mechanism, the rotating mechanism is provided with a through hole including a vertical portion and an inclined portion, the first reflecting module is provided in the vertical portion, The rotation mechanism is rotated around a first rotation axis, the first rotation axis being parallel to the central symmetry axis of the vertical portion, and the first rotation axis being the plane on which the surface to be detected exists. is perpendicular and overlaps the projection of the first reflective module on the plane in which the surface of the object to be detected exists, the first reflective module converts the detection beam incident along the vertical portion into a reflected beam. after being reflected to the surface of the object to be detected through the inclined part, and the light receiving module converts the scattered beam formed after the reflected beam is scattered by the surface of the object to be detected into a parallel beam. to release.

the light collecting module is provided on the inclined portion, the first reflecting module, the light collecting module and the light receiving module are arranged in order along a light propagation path; The focal point of the collecting module is superimposed with the focal point of the receiving module, the focal point corresponding to the scanning point of the surface of the object to be detected.

Also, the shape of the first reflection module includes either one of a pyramid and a truncated pyramid, the central axis of the first reflection module is parallel to the first rotation axis, and the first The reflective module comprises a plurality of outer walls arranged adjacent to each other in sequence, and a reflective mirror is provided on the outer wall of at least a portion of said first reflective module, said reflective mirror reflecting said detection beam.

Also, the light receiving module includes a plurality of light receiving units.

Further, the reflecting mirrors are continuously arranged on the outer wall of the entire circumference of the first reflecting module, and the through hole includes one of the vertical portions and a plurality of the inclined portions, and the light receiving unit and the The inclined portions are provided in one-to-one correspondence.

At least two of the plurality of light receiving units use optical elements with different optical characteristics, and the optical elements with different optical characteristics include different lenses or different spherical mirrors.

In addition, the light collection module is fixed in the rotation mechanism, the through hole includes a vertical portion and a plurality of inclined portions, and the first reflection module includes a plurality of adjacent ones provided in sequence. including reflecting mirrors, the angle between each reflecting mirror and a plane on which a detection target exists is different, the light collecting module includes a plurality of light collecting units, the light receiving module includes a plurality of light receiving units, The number of the inclined portion, the reflecting mirror, the condensing unit, and the light receiving unit are the same and are provided in one-to-one correspondence, and each condensing unit of the condensing module is the condensing unit. and the distances from the center point of each light receiving unit of the light receiving module to the first rotation axis are different, and the focal point of each light receiving unit is the focal point of the corresponding light collecting unit. wherein the first reflective module uses one of its reflectors to reflect a detection beam incident along the vertical portion into a reflected beam, the reflected beam being reflected by the reflector; After being collected by the collecting unit in the corresponding inclined part, the scattered beams incident on the surface of the detection object and formed after being scattered on the surface of the detection object are converted into parallel beams by the corresponding light receiving units. after being released.

Also, the first reflecting module includes a first reflecting mirror and a second reflecting mirror, the light receiving module includes a first light receiving unit and a second light receiving unit, and the first reflecting mirror and The first light-receiving unit is correspondingly provided, the first light-receiving unit converts the first scattered beam into a parallel beam and then emits the first scattered beam, the first scattered beam a scattered beam formed after the reflected beam of the reflecting mirror is collected by a collecting unit corresponding to the first reflecting mirror and then scattered by the surface of the object to be detected; is provided correspondingly with the second light receiving unit, the second light receiving unit converts the second scattered beam into a parallel beam and then emits the second scattered beam, the second scattered beam being the second reflected beam; a scattered beam formed after a reflected beam of a mirror is collected by a collecting unit corresponding to the second reflecting mirror and then scattered by the surface of the object to be detected; The included angle with the plane on which the object exists is smaller than the included angle between the second reflecting mirror and the plane on which the detection object exists, and the distance from the center point of the first light receiving unit to the first rotation axis is , greater than the distance from the center point of the second light receiving unit to the first rotation axis.

In addition, the first reflecting module includes a first reflecting mirror to n-th reflecting mirrors that are arranged adjacent to each other in order, and an included angle between the first reflecting mirror and a plane on which the detection object exists. The included angles between the n-th reflecting mirror and the plane on which the detection target exists are θ ₁ , θ ₂ . . . . . . θ _n−1 and θ _n , and the light receiving module includes first to n light receiving units arranged in sequence, and the i th reflector and the i th light receiving unit correspond to each other. and i is greater than or equal to 1 and less than or equal to n, and the distance from the center point of the first light receiving unit to the first rotation axis or the number of n light receiving units The distances from the center point to said first axis of rotation are respectively L ₁ , L ₂ . . . . . . L _n−1 and L _n where θ ₁ <θ ₂ < . . . . . . θ _n−1 <θ _n and L ₁ >L ₂ > . . . . . . L _n−1 >L _n .

Also, L _i −L _i−1 =K, where K is a fixed value.

Further comprising a parabolic mirror and a photoelectric detector, wherein the first reflective module, the light receiving module, the parabolic mirror and the photoelectric detector are arranged in order along a light propagation path to The axis of symmetry of the object mirror is parallel to the first axis of rotation, and the photosensitive surface of the photodetector is located at the focal point of the parabolic mirror.

Further, the axis of symmetry of the parabolic mirror is superimposed on the first axis of rotation, the photosensitive surface of the photoelectric detector is located at the focal point of the parabolic mirror, and the photosensitive surface of the photoelectric detector is located at the focal point of the parabolic mirror. perpendicular to the axis of symmetry of the parabolic mirror.

Also, further comprising a second reflective module and a photoelectric detector, wherein the second reflective module and the photoelectric detector are fixed within the rotating mechanism, and the first reflective module, the light receiving module, the second a reflective module and the photodetector are arranged in sequence along a light propagation path, and the second reflective module reflects the parallel beam to the photodetector.

Also, further comprising a second reflective module and a photoelectric detector, wherein the second reflective module and the photoelectric detector are fixed within the rotating mechanism, and the first reflective module, the light receiving module, the second and the photoelectric detector are arranged in order along a light propagation path, the second reflective module reflects the parallel beam to the photoelectric detector, and the second reflective module and the photoelectric The detector includes a plurality of second reflection units and a plurality of photoelectric detectors, respectively, and the number of the second reflection units and the number of the photoelectric detectors is equal to the number of the inclined portion, the reflecting mirror and the light receiving unit. and are provided to correspond to each other.

Also including a workbench,
The object to be detected is placed on the workbench, the workbench is moved along a first direction, wherein the reflected beam is reflected off the surface of the object to be detected to complete a second , and the first direction and the second direction intersect.

Based on the same inventive idea, an embodiment of the present invention provides a surface detection method, said surface detection method is realized based on said surface detection device, said surface detection method controls a first reflection module. a step S11 of reflecting the detection beam incident along the vertical portion into a reflected beam and then incident on the surface of the object to be detected through the inclined portion; is scattered on the surface to be detected, converting the formed scattered beam into a parallel beam and emitting a step S12.

In addition, the surface detection apparatus further includes a work table, and after performing step S11, further includes controlling the work table to move a preset distance along a first direction, or step S12. moving the worktable a preset distance along a first direction, wherein the reflected beam is completed by reflecting off the surface to be detected when performing the second It is a directional scan, and the first direction and the second direction intersect.

Based on the same inventive idea, an embodiment of the present invention provides a surface detection method, said surface detection method is realized based on said surface detection device, said surface detection method controls a first reflection module. After reflecting the detection beam incident along the vertical portion into a reflected beam, the reflected beam passes through the condensing module of the inclined portion and is incident on the surface of the object to be detected S21, and the light receiving module is used to convert the reflected beam is scattered on the surface to be detected, converting the formed scattered beam into a parallel beam and emitting S22.

The surface detection device further includes a workbench, the first reflection module includes a first reflector and a second reflector, and the light receiving module includes a first light receiving unit and a second light receiving unit. a light receiving unit, wherein the first reflecting mirror is provided to correspond to the first light receiving unit; the second reflecting mirror is provided to correspond to the second light receiving unit; The included angle between the first reflecting mirror and the plane on which the detection target exists is smaller than the included angle between the second reflecting mirror and the plane on which the detection target exists, and the angle from the center point of the first light receiving unit to the first light receiving unit is smaller than that between the second reflecting mirror and the plane on which the detection target exists. The distance to one rotation axis is greater than the distance from the center point of the second light receiving unit to the first rotation axis, and the surface detection method controls the first reflecting mirror to make the light incident along the vertical part. After the detected beam is reflected into a reflected beam, it is collected by a collecting unit in an inclined portion provided corresponding to the first reflecting mirror, and then incident on the surface of the object to be detected for first scattering. forming a beam S211, using the first receiving unit to convert the first scattered beam into a parallel beam to emit S212, controlling the second reflecting mirror to make the detection beam incident along the vertical section. into a reflected beam, and then condensed by a condensing unit in an inclined portion provided corresponding to the second reflecting mirror, and then incident on the surface of the object to be detected to form a second scattered beam S213, using a second light receiving unit to convert and emit a second scattered beam into a parallel beam S214, and controlling the worktable to move a preset distance along a first direction. S215, wherein the reflected beam is reflected off the surface of the object to be detected to complete a scan in a second direction, the first direction and the second direction crossing. do.

In the technical solution of this embodiment, the first reflection module and the light receiving module are fixed to a rotation mechanism that rotates about the first rotation axis, so that the first reflection module and the light receiving module rotate during scanning. rotating together with the mechanism about the first rotation axis so that the incident light spot reflected from the first reflection module forms a scanning arc on the surface to be detected, and rotating the rotation mechanism at high speed; By combining them, it is possible to realize high-frequency scanning of the surface of the detection target, and to improve the detection efficiency.

The foregoing and other objects, features and advantages of the modes of implementation of the present invention can be easily understood from the following detailed description with reference to the drawings. In the drawings, several modes of implementation of the present invention are illustrated by way of example and not by way of limitation.

1 is a structural illustration of one surface measuring device in the prior art; FIG. 1 is a plan view of one prior art surface measuring device; FIG. 1 is a structural illustration diagram of a surface detection device according to an embodiment of the present invention; FIG. FIG. 2 is an exemplary diagram of a scanning path detected with respect to a surface to be detected by the surface detection device according to the embodiment of the present invention; FIG. 4 is a structural illustration of another surface detection device according to an embodiment of the present invention; FIG. 4 is a structural illustration of another surface detection device according to an embodiment of the present invention; FIG. 4 is a bottom view illustrating the structure of the surface detection device according to the embodiment of the present invention; FIG. 4 is a structural illustration diagram of a first reflective module according to an embodiment of the present invention; FIG. 4 is a structural illustration of another surface detection device according to an embodiment of the present invention; FIG. 4 is a structural illustration of another surface detection device according to an embodiment of the present invention; FIG. 4 is a structural illustration of another surface detection device according to an embodiment of the present invention; 4 is a flow chart of a surface detection method according to an embodiment of the invention; FIG. 4 is a structural illustration of another first reflective module according to an embodiment of the present invention; FIG. 4B is a bottom structural illustration of another surface detection device according to an embodiment of the present invention; FIG. 4B is an exemplary diagram of the position of the reflected beam reflected on the surface of the detection target when the included angle between the reflecting mirror of the first reflection module and the plane on which the detection target exists is different according to the embodiment of the present invention; FIG. 4 is a structural illustration of another surface detection device according to an embodiment of the present invention; FIG. 4 is a structural illustration of another surface detection device according to an embodiment of the present invention; 5 is a flow chart of yet another surface detection method according to an embodiment of the present invention; 5 is a flow chart of yet another surface detection method according to an embodiment of the present invention;

The principles and spirits of the present invention are explained below with reference to several exemplary implementations. It is understood that providing such an implementation is merely for the better understanding of the invention by those skilled in the art, and does not limit the scope of the invention in any way.

FIG. 3 is a structural illustration diagram of a surface detection device according to an embodiment of the present invention. As shown in FIG. 3, the surface detection device includes a rotating mechanism 10, a first reflective module 20 and a light receiving module 40 arranged along a light propagation path. The first reflecting module 20 and the light receiving module 40 are fixed to the rotating mechanism 10 . A through hole 11 is provided in the rotation mechanism 10 . The through-hole 11 includes a two-part structure of a vertical portion 111 and an inclined portion 112 . The first reflective module 20 is provided within the vertical section 111 . The rotation mechanism 10 rotates around the first rotation axis Z. As shown in FIG. The first rotation axis Z is parallel to the central axis of symmetry of the vertical portion 111 . The first rotation axis Z is perpendicular to the plane in which the surface of the detection object 50 lies and overlaps the projection of the first reflection module 20 on the plane in which the surface of the detection object 50 lies. The detection beam a is incident on the first reflection module 20 along the vertical portion 111 of the through hole 11, reflected by the first reflection module 20 to form a reflection beam b, and passed through the inclined portion 112 for detection. It is incident on the surface of object 50 . The light receiving module 40 converts the scattered beam c formed after the reflected beam b is scattered by the surface of the detection object 50 into a parallel beam d and emits the same.

Here, the first reflection module 20 may include, for example, a plane mirror, but the embodiment is not limited to this as long as the detection beam a is reflected on the surface of the detection target 50 . The light-receiving module 40 may include a lens, for example. This embodiment is not limited to this. Since the rotation mechanism 10 is rotated about the first rotation axis Z, the first reflection module 20 and the light receiving module 40 are rotated about the first rotation axis Z. As shown in FIG. Since the first reflecting module 20 is rotated about the first rotation axis Z, the reflected beam b reflected by the first reflecting module 20 forms a scanning arc on the surface of the detection object 50 . If there is a defect on the surface of the detection target 50, the reflected beam b incident on the surface of the detection target 50 is scattered to form a scattered beam c. The scattered beam c passes through the light-receiving module 40 and is then emitted forming a parallel beam d.

Specifically, the detection beam a is incident on the first reflection module 20 along the vertical portion 111 of the through-hole 11 and reflected by the first reflection module 20 to form the reflection beam b. It is incident on the surface of object 50 . Since the rotation mechanism 10 is rapidly rotated about the first rotation axis Z, and the first reflection module 20 is fixed to the rotation mechanism 10, the first reflection module 20 is also rapidly rotated about the first rotation axis Z. so that the reflected beam b reflected by the first reflecting module 20 forms a scanning arc on the surface of the detection object 50 . As shown in FIG. 4, FIG. 4 is an exemplary diagram of a scanning path detected with respect to a surface to be detected by the surface detection device according to the embodiment of the present invention. If there is a defect on the surface of the detection target 50, the reflected beam b incident on the surface of the detection target 50 is scattered to form a scattered beam c. The scattered beam c passes through the receiving lens 30 and is then emitted as a parallel beam d. This technical scheme uses the fast rotation of the rotating mechanism 10 to rapidly rotate the first reflecting module 20 around the first rotation axis Z, so that the reflected beam b reflected by the first reflecting module 20 is A scanning arc is formed on the surface of the detection object 50, and in combination with the movement of the component table 100, high-speed scanning of the entire surface of the detection object 50 is achieved, and the scanning efficiency is improved.
Book

In the technical solution of the embodiment, the first reflecting module and the light receiving module are fixed in a rotating mechanism rotating about the first rotation axis, so that the first reflecting module and the light receiving module are fixed during scanning. rotating the module together with the rotating mechanism about the first rotating axis, so that the incident light spot reflected by the first reflecting module forms one scanning arc on the surface to be detected, and rotating the rotating mechanism at high speed; By combining with , a high-frequency scan is realized with respect to the surface of the detection target, and the effect of improving the detection efficiency is realized.

Based on the above technical solution, optionally, FIG. 5 is a structural illustration of another surface detection device according to an embodiment of the present invention. As shown in FIG. 5, the surface detection device further includes a light collection module 30 . The condensing module 30 is provided within the inclined portion 112 of the through hole 11 . The first reflecting module 20, the collecting module 30 and the receiving module 40 are arranged along the light propagation path. The focus of the light collection module 30 and the focus of the light reception module 40 are superimposed, and these two superimposed focal points Q are located on the surface of the detection object 50 and correspond to the scan points on the surface of the detection object 50 .

Here, the light collection module 30 may include, for example, a lens. This embodiment is not limited to this. When the incident detection beam a and the first rotation axis Z are superimposed, the incident detection beam a passes through the vertical portion 111 of the through hole 11 and is reflected by the first reflection module 20 to form a reflected beam b. can be directly focused on the same point on the detection target 50 . When the incident detection beam a is deviated from the first rotation axis Z (FIG. 5), the incident light spot of the first reflection module 20 is directed vertically (perpendicular to the plane on which the surface of the detection target 50 exists). direction) changes as the rotating mechanism 10 rotates. Therefore, the position where the reflected beam b reflected by the first reflecting module 20 is projected onto the surface of the detection target 50 changes with respect to the light receiving module 40 during the scanning process. In addition, the receiving module 40 influences the collecting effect on the scattered beam c to influence the detection result. In this technical solution, the light collection module 30 is installed in the inclined portion 112 of the through hole 11 along the direction of the light propagation path. The focal point of the collecting module 30 is superimposed with the focal point of the receiving module 40 , and the two superimposed focal points Q are located on the surface of the detection object 50 . Accordingly, even if the incident detection beam a and the first rotation axis Z are not superimposed, the scan point where the reflected beam b is incident on the surface of the detection object 50 is positioned at the superimposed focus. .

In the present technical scheme, a light collection module is installed in the inclined part 112 of the through hole 11 along the direction of the light propagation path, so that the detection beam leaving the first rotation axis is reflected by the first reflection module The relative position between the scanning point where the reflected beam is focused on the surface to be detected and the receiving module remains unchanged. That is, the scanning point is located at the superimposed focal point of the light collecting module and the light receiving module, so that the parallel beam formed by passing through the light receiving module is conveniently detected, and the accuracy of the detection result is improved. increase

Based on the above technical solution, alternatively, FIG. 6 is a structural illustration of another surface detection device according to an embodiment of the present invention, and FIG. 7 is a bottom view of the surface detection device according to an embodiment of the present invention. 8 is a structural illustration of the first reflection module of FIG. 6; FIG. As shown in FIGS. 6 and 8, the shape of the first reflective module 20 includes either one of a pyramid or a truncated pyramid. The central axis of the first reflection module 20 and the first rotation axis Z are parallel. The first reflective module 20 comprises a plurality of outer walls 21 arranged adjacent in sequence. At least a part of the outer wall 21 of the first reflecting module 20 is provided with a reflecting mirror to reflect the detection beam a.

Here, the first reflective module 20 comprises either one of a pyramid or a truncated pyramid, the cross-section of which is polygonal, for example triangular. Correspondingly, the first reflector module 20 comprises three outer walls (see FIG. 8) which are arranged adjacent in sequence. A reflecting mirror is provided on at least one of the three outer walls. Preferably, the reflective mirrors are continuously arranged on the outer wall of the first reflective module 20 all around.

Illustratively, the first reflective module 20 is a trihedron. Correspondingly, the first reflective module 20 comprises three outer walls which are arranged adjacent in sequence. All three outer walls are provided with reflectors. The central axis of the trihedron is overlapped with the first rotation axis Z, and the trihedron is rapidly rotated about its central axis. When the rotating mechanism 10 is rotated once, scanning of three arcs can be realized to improve the scanning efficiency.

Exemplarily, N is the number of reflecting mirrors provided in the first reflecting module 20 . According to a rough calculation, the central angle corresponding to one scanning arc formed by being reflected by one reflecting mirror is 2π/N. If N is large enough, the central angle will be small and the scan arc will approximate a single straight line. N scans can be achieved each time the first reflection module 20 is rotated once. Furthermore, high-frequency scanning of the surface to be detected is realized in combination with the high-speed rotation of the rotating mechanism.

However, the shape of the first reflecting module 20 is not limited to the above examples, and the cross section of the first reflecting module 20 includes, but is not limited to, a triangle. Persons skilled in the art can independently select the shape of the first reflective module 20 and set the number of cross-sectional sides according to the needs of the product, and the present invention is specifically directed to this. not limited to 6 and 8 only exemplarily show that the shape of the first reflecting module 20 is a truncated pyramid and the cross section of the first reflecting module 20 is triangular. On the other hand, the number of reflecting mirrors can be provided as required.

In this technical proposal, the shape of the first reflecting module is either a pyramid or a truncated pyramid, and a reflecting mirror is provided on at least a part of the outer wall of the first reflecting module, so that the rotation mechanism is When it is rotated once, it can complete the scanning of multiple arcs, further enhancing the scanning efficiency.

Based on the above technical solution, optionally continue to refer to FIG. 7 , wherein the light receiving module 40 includes a plurality of light receiving units 41 . At least two light receiving units 41 out of the plurality of light receiving units 41 use optical elements with different optical characteristics.

Based on the above technical solution, optionally, the reflective mirrors are continuously arranged on the outer wall of the first reflective module. Continuing to refer to FIG. 7 , here, the light receiving module 40 includes a plurality of light receiving units 41 . The through-hole 11 includes one vertical portion 111 and multiple inclined portions 112 . The light receiving unit 41 and the inclined portion 112 are provided so as to correspond to each other on a one-to-one basis. At least two light receiving units 41 out of the plurality of light receiving units 41 use optical elements with different optical characteristics.

Here, the three light receiving units 41 can include either one of lenses or spherical mirrors, for example. The shape of the light-receiving unit 41 can include, for example, a circular shape or a square shape. There are no restrictions on the type and shape of

In this embodiment, three light receiving units 41 are provided. However, it is not limited to three. The light receiving characteristics of each light receiving unit 41 may be the same or different. Alternatively, different optical elements (not shown) can be installed in each light receiving unit 41 to obtain different light receiving characteristics.

Illustratively, at least two of the three light receiving units 41 can use different optical designs. For example, installing lenses with different hole diameters and combining different apertures to achieve different light receiving angles, and/or using different polarization detection sheets to achieve different polarization property selections, and /or different wavelength filters are used to achieve different wavelength selections.

Specifically, the first reflected beam b is scattered by the surface of the detection object 50 to form scattered beams c with different angles. Said scattered beam c is received by a plurality of receiving units 41 having different receiving characteristics. In this technical solution, the light receiving units 41 with different optical designs are used, so that when the first reflective module is rotated around, the light receiving units with different optical designs have different angles or different polarization characteristics. Alternatively, scattering signals with different wavelengths can be collected, so that different defects can be detected, which increases detection efficiency and improves detection quality at the same time.

Based on the above technical solution, optionally, FIG. 9 is a structural illustration of another surface detection device according to an embodiment of the present invention. As shown in FIG. 9, the surface detection device further includes a parabolic mirror 71 (a minute portion of the parabolic mirror is shown in the drawing) and a photodetector 60 . The first reflecting module 20, the receiving module 40, the parabolic mirror 71 and the photoelectric detector 60 are arranged in order along the light propagation path. The axis of symmetry of the parabolic mirror 71 is parallel to the first rotation axis Z, and the photosensitive surface of the photoelectric detector 60 is provided at the focal point of the parabolic mirror 71, thereby emitting parallel beams d at different positions. It passes through the object plane mirror 71 and is focused on the photodetector 60 to achieve efficient and full-area detection of the scattered beam c.

Based on the above technical solution, alternatively, FIG. 10 is a structural illustration of another surface detection device according to an embodiment of the present invention (the rotation mechanism is omitted). The symmetry axis of the parabolic mirror 71 is superimposed with the first rotation axis Z, the photosensitive surface of the photoelectric detector 60 is located at the focal point of the parabolic mirror 71, and the photosensitive surface of the photoelectric detector 60 is the parabolic mirror. perpendicular to the axis of symmetry of 71.

Here, when the rotating mechanism 10 is rotated, the reflected beam b can realize an arc scanning on the surface of the detection object 50 . However, since the reflected beam b has a different scanning arc position on the surface of the detection target 50, the scattered beam c formed after the scanning is completed passes through the light receiving module 40 and is converted into a parallel beam d. After passing through the parabolic mirror 71 and condensed, they are incident on the photodetector 60 at different angles. The photosensitivity of the photodetector 60 is generally affected by the angle of incidence of the light, thus introducing systematic errors. In order to avoid these errors, the embodiment of the present invention adjusts the parabolic mirror 71 so that the scattered beam c formed after the scan is completed passes through the light receiving module 40 even if the scan arc positions are different. After being converted into a parallel beam d, it passes through a parabolic mirror 71 and is incident on the photosensitive surface of the photodetector 60 at the same incident angle.

Specifically, the symmetry axis of the parabolic mirror 71 is superimposed with the first rotation axis Z, the photosensitive surface of the photoelectric detector 60 is located at the focal point of the parabolic mirror 71, and the photosensitive surface of the photoelectric detector 60 is perpendicular to the axis of symmetry of the parabolic mirror 71 . As a result, even if the positions of the scan arcs are different, the scattered beam c formed after scanning passes through the light receiving module 40 and is converted into a parallel beam d. It is incident on the photosensitive surface of the photodetector 60 . In this technical solution, a parabolic mirror 71 is installed, the axis of symmetry of the parabolic mirror 71 and the first rotation axis Z overlap, and the photosensitive surface of the photoelectric detector 60 is positioned at the focal point of the parabolic mirror 71. and the photosensitive surface of the photodetector 60 is perpendicular to the axis of symmetry of the parabolic mirror 71 to eliminate system errors, reduce errors, and improve detection quality.

Alternatively, FIG. 11 is a structural illustration of another surface detection device according to an embodiment of the present invention. The surface detection device further includes a second reflective module 72 and a photodetector 60, as shown in FIG. The second reflective module 72 and the photodetector 60 are all provided fixedly within the rotating mechanism 10 . The first reflective module 20, the light receiving module 40, the second reflective module 72 and the photoelectric detector 60 are arranged in sequence along the light propagation path. A second reflective module 72 reflects the collimated beam d to the photodetector 60 .

Embodiments of the present invention use the second reflector module 72 to allow the scattered beam c formed after scanning to pass through the receiver module 40 and be converted into a parallel beam d, even though the scanning arc positions are different. Afterwards, they all pass through the second reflective module 72 and enter the photosensitive surface of the photodetector 60 at the same incident angle, so that the detection quality can be improved. Optionally, continuing to refer to FIGS. 9 and 11, the surface detection device further includes a radiation module 80 according to the above technical solution. A radiation module 80 is positioned in the light propagation path. The radiation module 80 emits a detection beam a. The second reflective module of the invention can be a reflector.

Here, the radiation module 80 can include any one of semiconductor laser, fiber laser, solid state laser or gas laser, for example. The emission module 80 can emit, for example, a laser beam or a continuous wavelength beam. This embodiment is not limited to this as long as it can detect defects on the surface of the detection target 50 .

Optionally, the surface detection device further includes a third reflective module 90 . The third reflective module 90 is arranged in the light propagation path to allow the detection beam a emitted from the radiation module 80 to pass through the vertical section 111 and be reflected to the first reflective module 20 . By providing a third reflective module 90 in the light propagation path, the flexibility of the position of the emitting module 80 can be increased.

Optionally, continuing to refer to FIG. A detection target 50 is placed on a work table 100, and the parts table 100 is moved along the first direction X. As shown in FIG. Here, the scanning in the second direction Y is completed by reflecting the first reflected beam b on the surface of the detection object 50 . The first direction X and the second direction Y intersect.

Specifically, the reflected beam b reflected by the first reflecting module 20 in which the incident detection beam a is rotated forms one scanning arc on the surface of the detection target 50 . The direction of the scan arc is the second direction Y. As shown in FIG. At the same time, the detection target 50 placed on the workbench 100 is moved along the first direction X. As shown in FIG. By repeating this process, the scanning detection of the entire area of the detection target 50 can be completed. Alternatively, the reflected beam b reflected by the first reflecting module 20, which rotates the incident detection beam a, completes one arc scan in the second direction Y on the surface of the detection object 50. , the worktable 100 is stepped along the first direction X to the next single scan position. By repeating this process, the scanning detection of the entire area of the detection target 50 can be completed.

In this technical solution, after or when the reflected beam is reflected by the surface of the object to be detected to complete one arc scan in any one of the second directions, the workbench is preset along the first direction. It is possible to complete the scan detection of the entire area of the detection object by controlling the movement by a certain distance.

Based on the same inventive idea, embodiments of the present invention further provide a surface detection method. The surface detection method is implemented based on the surface detection device. FIG. 11 is a flowchart of a surface detection method according to an embodiment of the invention. As shown in FIG. 11, the surface detection method controls the first reflection module to reflect the detection beam incident along the vertical part into a reflected beam, and then passes through the inclined part to detect the object to be detected. and using a light receiving module to convert the scattered beam formed after the reflected beam is scattered by the surface to be detected into a parallel beam and then emit S12.

In the technical solution of this embodiment, the first reflective module and the light receiving module are fixed to a rotating mechanism that rotates about the first rotation axis, and when scanning is performed, the first reflecting module and the light receiving module are rotated by the rotating mechanism. The incident light spot rotated together about the first rotation axis and reflected by the first reflection module forms one scanning arc on the surface to be detected, further combined with the high speed rotation of the rotation mechanism, the detection High-frequency scanning can be achieved on the surface of the object to obtain the effect of increasing the detection efficiency.

Based on the above technical solution, optionally, after performing step S11, further comprising controlling the worktable to move a preset distance along the first direction, or
When performing step S12,
Further comprising controlling the worktable to move a preset distance along the first direction.

Here, the reflected beam is reflected by the surface of the object to be detected to complete scanning in the second direction, and the first direction and the second direction intersect.

In this technical solution, after or when the reflected beam is reflected by the surface of the object to be detected and the scanning in the second direction is completed, the workbench is controlled to move a preset distance along the first direction. Then, scanning detection of the whole area of the detection object can be completed.

FIG. 13 is a structural illustration diagram of a first reflection module according to an embodiment of the present invention, and FIG. 14 is a structural illustration diagram of a surface detection device viewed from the bottom surface according to an embodiment of the present invention. be. As shown in FIGS. 6, 13 and 14, the surface detection device includes a rotating mechanism 10, a first reflection module 20, a light collection module 30 and a light reception module arranged in order along the light propagation path. 40 included. The first reflecting module 20 , the collecting module 30 and the receiving module 40 are fixed within the rotating mechanism 10 . A through hole 11 is provided in the rotation mechanism 10 . The through-hole 11 includes one vertical portion 111 and multiple inclined portions 112 . The first reflective module 20 includes a plurality of reflective mirrors 21 arranged adjacently in sequence. The light collection module 30 includes multiple light collection units 31 . The light receiving module 40 includes a plurality of light receiving units 41 . The number of reflecting mirrors 21, inclined portions 112, light collecting units 31 and light receiving units 41 is the same, and they are provided in one-to-one correspondence. The first reflective module 20 is provided within the vertical portion 111 of the through hole 11 . The included angle between each reflecting mirror 21 of the first reflecting module 20 and the plane in which the detection target 50 exists is different. Each condensing unit 31 of the condensing module 30 is provided in an inclined portion 112 corresponding to said condensing unit 31 . The center point of each light receiving unit 41 of the light receiving module 40 has a different distance from the first rotation axis Z, and the focus of each light receiving unit 41 and the corresponding focus of the light collecting unit 31 are overlapped. The rotation mechanism 10 is rotated around the first rotation axis Z. As shown in FIG. The first rotation axis Z is parallel to the central axis of symmetry of the vertical portion 111 . The first rotation axis Z is perpendicular to the plane in which the surface of the detection object 50 lies and overlaps the projection of the first reflection module 20 on the plane in which the surface of the detection object 50 lies. Here, the first reflecting module 20 uses one reflecting mirror 21 therein to reflect the detection beam a incident along the vertical portion 111 into a reflected beam b. The reflected beam b is condensed by the condensing unit 31 in the inclined portion 112 corresponding to the reflecting mirror 21, is incident on the surface of the detection target 50, and is formed after scattering on the surface of the detection target 50. The scattered beam c is emitted after being converted into a parallel beam d by the corresponding receiving unit 41 .

Here, the shape of the first reflection module 20 includes either one of a pyramid or a truncated pyramid, and its cross section (direction parallel to the plane on which the detection target 50 exists) is a polygon, for example , is a quadrilateral. Correspondingly, the first reflector module 20 is provided with four reflectors 21 which are arranged adjacent in sequence (see FIG. 13). The light collection unit 31 of the light collection module 30 may include, for example, a lens, but the present embodiment is not limited thereto. The light-receiving unit 41 of the light-receiving module 40 can include, for example, at least one of a lens or a spherical mirror, and the shape of the light-receiving unit 41 can be, for example, circular or square. This embodiment is not limited to this as long as the scattered beam c formed after being scattered by the surface of the object 50 is converted into a parallel beam d and emitted.

Illustratively, the first reflective module 20 is a truncated pyramid. Correspondingly, the first reflecting module 20 comprises four reflecting mirrors 21 arranged adjacently in sequence, as shown in FIG. The center axis of the truncated square pyramid overlaps with the first rotation axis Z. As shown in FIG. The rotation mechanism 10 rapidly rotates around the first rotation axis Z to rotate the first reflection module 20, the light collection module 30 and the light reception module 40 around the first rotation axis Z, i.e. a square pyramid. Cause the platform to rotate rapidly around its central axis. When the detection beam a is incident on one of the reflecting mirrors 21 of the first reflecting module 20 along the vertical portion 111 of the through hole 11, the reflected beam formed after being reflected by the reflecting mirror 21 is The scanning point to which b is focused on the surface of the detection object 50 by the focusing unit 31 to which it corresponds is located at the focal position of said focusing unit 31 . That is, by being positioned at the focal point of the light receiving unit 41 corresponding to the light collecting unit 31, the detection beam a passes through each of the reflecting mirrors 21 and the light collecting unit 31 corresponding thereto, and then passes through the detection target 50. The scanning point incident on the surface of is fixed relative to the incident light receiving unit 41 corresponding to the reflecting mirror 21 and the light collecting unit 31. This is because the scattered beam c formed at the scanning point is parallel Advantageously, detection is performed after being converted into light d to improve detection accuracy. By rotating the rotating mechanism 10 , each time the detection beam a passes through any one of the reflecting mirrors 21 of the first reflecting module 20 , one scanning arc is formed on the surface of the detection target 50 . When the rotating mechanism 10 is rotated once, it can realize scanning of four arcs, forming one scanning unit AA (see FIG. 4), realizing high-frequency scanning of the surface of the detection object 50, Improve scanning efficiency.

Further, FIG. 15 is an illustration of the position where the reflected beam is reflected on the surface of the detection target when the included angle between the reflector of the first reflection module according to the embodiment of the present invention and the plane on which the detection target exists is different. It is a diagram. Referring to FIGS. 4, 13 and 15, the included angles between the reflecting mirrors 21 and the plane on which the detection target 50 exists are different. That is, the reflecting mirrors 211/21, 212/21, and 213/21 have included angles of θ ₁ , θ ₂ , θ ₃ and θ ₄ . The detection beams a are reflected by the respective reflecting mirrors 21, and the positions of the scanning points where they are focused on the surface of the detection object 50 by the corresponding focusing units 31 are different. That is, the different scan points formed on the surface of the detection object 50 are Q ₁ , Q ₂ , Q ₃ and Q ₄ respectively. Therefore, when the rotation mechanism 10 rotates once, the movement speed of the detection object 50 is restricted and the actual moving speed is reduced by realizing the scanning of the four scan arcs on the premise that the detection object 50 is not moving. It can avoid affecting the scanning speed and accuracy by the difference between and the expected speed, and can improve the scanning effect and accuracy.

However, the shape of the first reflective module 20 is not limited to the above examples, and the cross section of the first reflective module 20 can include, but is not limited to, a quadrilateral. The shape of the first reflective module 20 can be selected and the number of sides of the cross section can be set according to the needs of the present invention, and the present invention is not specifically limited. 3 and 4 only exemplify that the shape of the first reflection module 20 is a truncated pyramid and the cross section of the first reflection module 20 is a square.

In summary, the present invention provides a plurality of sensors in which a first reflection module and a light receiving module are fixed to a rotation mechanism rotating around a first rotation axis, and the first reflection module has different included angles with respect to a plane on which a detection target exists. By including a reflector, the position of the scan point at which the detection beam is incident on the surface to be detected is different. Therefore, when the rotating mechanism is rotated once, it is possible to realize scanning of multiple scanning arcs on the premise that the detection object is not moving, and limit the moving speed of the detection object or the actual speed of the movement. Scanning speed and accuracy can be avoided from being affected by differences between expected velocities, and scanning efficiency and accuracy can be improved. In addition, the light collecting module is installed in the inclined part, and the focal points of the light collecting module and the light receiving module are overlapped, so that the detection beam separated from the first rotation axis is reflected by the first reflection module. is focused on the surface of the object to be detected and the relative positions of the light receiving module do not change. That is, the scanning point is located at the superimposed focal point, so that the parallel beams formed by the light receiving module are conveniently detected, and the accuracy of the detection result is enhanced.

4, 13, 14 and 15, optionally based on the above technical scheme, the first reflecting module 20 comprises a first reflecting mirror 211/21 and a second reflecting mirror 211/21. Includes reflector 212/21. The light receiving module 40 includes a first light receiving unit 411/41 and a second light receiving unit 412/41. The first reflecting mirror 211/21 and the first light receiving unit 411/41 are provided correspondingly. The first receiver unit 411/41 emits after transforming the first scattered beam _c1 into a parallel beam d. The first scattered beam _c1 is the scattered beam formed after the reflected beam b of the first reflector 211/21 is collected by the collection module 30 and then scattered on the surface of the detection object 50. . A second reflecting mirror 212/21 and a second light receiving unit 412/41 are provided correspondingly. A second receiving unit 412/41 emits the second scattered beam _c2 after converting it into a parallel beam. The second scattered beam _c2 is the scattered beam formed after the reflected beam b of the second reflector 212/21 is collected by the collection module 30 and then scattered on the surface of the detection object 50. . The included angle _θ1 between the first reflecting mirror 211/21 and the plane on which the detection target 50 exists is smaller than the included angle _θ2 between the second reflecting mirror 212/21 and the plane on which the detection target 50 exists. The distance from the center point of the first light receiving unit 411/41 to the first rotation axis Z is greater than the distance from the center point of the second light receiving unit 412/41 to the first rotation axis Z.

Specifically, since the included angle between the reflecting mirror 21 and the plane on which the detection target 50 exists is different, the position of the scanning light spot incident on the surface of the detection target 50 is different on the surface of the detection target 50. The position of the light receiving unit 41 is determined. That is, the larger the included angle between the reflecting mirror 21 and the plane on which the detection target 50 exists, the smaller the distance from the corresponding center point of the light receiving unit 41 to the first rotation axis Z. In this embodiment, the first reflecting module 20 includes a first reflecting mirror 211/21 and a second reflecting mirror 212/21, and correspondingly, the receiving module 40 includes a first receiving unit 411/41 and a second receiving unit 411/41. , and the larger the included angle between the reflecting mirror 21 and the plane on which the detection target 50 exists, the smaller the distance from the center point of the corresponding light receiving unit 41 to the first rotation axis Z. The position of the scan point where the detection beam a is incident on the surface of the detection object 50 is different. Therefore, when the rotation mechanism 10 is rotated once, it is possible to realize scanning of a plurality of scan arcs on the premise that the detection object 50 is not moving, and limit the movement speed of the detection object 50 or the actual movement speed of the detection object 50. Scanning speed and accuracy can be avoided from being affected by the presence of a difference between speed and expected speed, and scanning efficiency and accuracy can be improved.

Alternatively, continuing to refer to FIGS. 4, 13, 14 and 15, the first reflecting module 20 comprises first reflecting mirrors 21 through n-th reflecting mirrors which are arranged adjacently in order. 21. The included angle between the first reflecting mirror 21 and the plane on which the detection target 50 exists or the included angle between the n-th reflecting mirror 21 and the plane on which the detection target 50 exists are θ ₁ , θ ₂ . . . . . . θ _n−1 and θ _n . The light receiving module 40 includes a first light receiving unit 41 to n-th light receiving units 41 provided in order. The i-th reflecting mirror 21 and the i-th light receiving unit 41 are provided correspondingly. i is greater than or equal to 1 and less than or equal to n. The distance from the center point of the first light receiving unit 41 to the first rotation axis Z or the distance from the center point of the n-th light receiving units 41 to the first rotation axis Z are L ₁ , L ₂ . . . . . . L _n−1 and L _n . where θ ₁ <θ ₂ < . . . . . . θ _n−1 <θ _n and L ₁ >L ₂ > . . . . . . L _n−1 >L _n .

However, in the actual installation process, the distance from the center point of each light receiving unit 41 to the first rotation axis Z is set according to the change in the included angle between the reflecting mirror 21 and the plane on which the detection target 50 exists. If the scanning point at which the reflected beam b that has passed through the reflecting mirror 21 corresponding to the light receiving unit 41 is incident on the surface of the detection target 50 is positioned at the focal point of the corresponding light receiving unit 41, this embodiment is not specifically limited. do not. This embodiment is not specifically limited as long as the scattered beam c at the scanning point can be converted into a parallel beam d and emitted. Alternatively, the light-collecting units 31 of the light-collecting module 30 can be arranged at different light-collecting parameters, and the distances from the center point of the light-receiving unit 41 corresponding to the light-collecting unit 31 to the first rotation axis Z can be different. . The invention is not specifically limited to this.

Alternatively, the light receiving characteristics of each light receiving unit 41 can be the same or different, or different optical elements (not shown) can be installed in each light receiving unit 41 to obtain different light receiving characteristics. Illustratively, at least two of the light receiving units 41 can use different optical designs. For example, installing lenses with different hole diameters and combining different apertures to achieve different light receiving angles, and/or using different polarization detection sheets to select different polarization properties, and/or Different wavelength filters can be used to achieve different wavelength selections. When the first reflective module 20 is rotated once, the receiving units with different optical designs can collect scattered signals with different angles, different polarization characteristics or different wavelengths, so that different defects can be detected. , the detection efficiency can be increased and the detection quality can be improved at the same time.

Based on the above proposal, optionally continuing to refer to FIGS. 4, 14 and 15, L _i −L _i−1 =K, where K is a fixed value.

In this embodiment, the distance from the center point of the two adjacent light receiving units 41 to the first rotation axis Z is gradually increased or decreased, so that the scanning arc incident on the surface of the detection target 50 is Ensure that the distances between positions on the surface are the same. That is, referring to FIG. 7, the distance between any two scan arcs is β. Exemplarily, referring to FIG. 5, L ₄ −L ₃ =K, L ₃ −L ₂ =K, L ₂ −L ₁ =K, where L ₁ is the first light receiving unit 411/ 41 to the first rotation axis Z, _L2 is the distance from the center point of the second light receiving unit 412/41 to the first rotation axis Z, _L3 is the distance from the third is the distance from the center point of the light receiving unit 413/41 to the first rotation axis Z, and _L4 is the distance from the center point of the fourth light receiving unit 414/41 to the first rotation axis Z; This technical solution can achieve uniform scanning of the surface of the detection object 50, so that the accuracy can be increased and the detection quality can be improved.

FIG. 16 is a structural illustration diagram of another surface detection device according to an embodiment of the present invention. Based on the above technical solution, optionally referring to FIG. The first reflecting module 20, the collecting module 30, the receiving module 40, the parabolic mirror 71 and the photoelectric detector 60 are arranged in order along the light propagation path. The symmetry axis of the parabolic mirror 71 and the first rotation axis Z are parallel, and the photosensitive surface of the photoelectric detector 60 is provided at the focal point of the parabolic mirror 71 . This allows the parallel beams d with different positions to pass through the parabolic mirror 71 and be focused on the photodetector 60, thus realizing highly efficient and comprehensive detection of the scattered beams c. can be done.

Based on the above technical solution, optionally, continuing to refer to FIG. 10, the symmetry axis of the parabolic mirror 71 and the first rotation axis Z are overlapped. The photosensitive surface of the photoelectric detector 60 is located at the focal point of the parabolic mirror 71 and the photosensitive surface of the photoelectric detector 60 is perpendicular to the axis of symmetry of the parabolic mirror 71 .

Here, when the rotation mechanism 10 is rotated, the reflected beam b can achieve a plurality of arc scans on the surface of the detection target 50 . However, the position of the scanning arc where the reflected beam b completes scanning on the surface of the detection object 50 is different. After passing through the object mirror 71 and converging, they are incident on the photodetector 60 at different angles. The photosensitivity of the photodetector 60 is generally affected by the angle of incidence of the light beam, thus introducing systematic errors. In order to avoid these errors, the embodiment of the present invention adjusts the parabolic mirror 71 so that the scattered beam c formed after being scanned is the light receiving module 40 even if the scanning arc position is different. , and converted into a parallel beam d, which passes through the parabolic mirror 71 and is incident on the photosensitive surface of the road photoelectric detector 60 at the same incident angle.

Specifically, the symmetry axis of the parabolic mirror 71 is superimposed on the first rotation axis Z, the photosensitive surface of the photoelectric detector 60 is located at the focal point of the parabolic mirror 71, and the photosensitive surface of the photoelectric detector 60 is It is perpendicular to the axis of symmetry of the parabolic mirror 71 . Therefore, even though the scanning arc positions are different, the scattered beam c formed after scanning passes through the light receiving module 40 and is converted into a parallel beam d, and after passing through the parabolic mirror 71, the same incident beam c It is incident on the photosensitive surface of the corner road photodetector 60 . In this technical solution, a parabolic mirror 71 is installed, the symmetry axis of the parabolic mirror 71 overlaps with the first rotation axis Z, and the photosensitive surface of the photoelectric detector 60 is located at the focal point of the parabolic mirror 71. , the photosensitive surface of the photodetector 60 is perpendicular to the axis of symmetry of the parabolic mirror 71, which can eliminate system errors, reduce errors, and improve detection quality.

FIG. 17 is a structural illustration of another surface detection device according to an embodiment of the present invention. Based on the above technical solution, optionally referring to FIG. 17 , the surface detection device further includes a second reflective module 72 and a photodetector 60 . The second reflective module 72 and the photodetector 60 are fixed within the rotating mechanism 10 . The first reflecting module 20, the collecting module 30, the receiving module 40, the second reflecting module 72 and the photodetector 60 are arranged in order along the light propagation path. A second reflective module 72 reflects the collimated beam d to the photodetector 60 . Each of the second reflective module 72 and the photoelectric detector 60 includes a plurality of second reflective units and a plurality of photoelectric detectors, and the number of the second reflective units and the photoelectric detectors is equal to the tilt part, the reflector, The number of the condensing units and the light receiving units is the same, and they are provided in one-to-one correspondence.

Embodiments of the present invention use the second reflective module 72 so that the scattered beam c formed after being scanned passes through the correspondingly mounted receiver module 40, even though the scan arc is at a different position. , after being converted into a parallel beam d, pass through the corresponding second reflective module 72 and are all incident on the photosensitive surface of the photodetector 60 at the same incident angle, thereby improving the detection quality. can.

Optionally, continuing to refer to FIG. A detection target 50 is placed on a workbench 100, and the workbench 100 is moved along the first direction X. As shown in FIG. Here, the scanning in the second direction Y is completed when the reflected beam b is incident on the surface of the detection object 50, and the first direction X and the second direction Y intersect.

Specifically, after the incident detection beam a passes through each reflecting mirror 21 of the rotated first reflecting module 20 , the generated reflected beam b passes through the light collection module 30 and passes through the detection target 50 . , forming multiple scan arcs. The direction of these scan arcs is the second Y direction. After the first reflection module 20 rotates once to achieve scanning of multiple arcs, the detection object 50 placed on the worktable 100 is moved along the first direction X. As shown in FIG. By repeating this process, scanning detection can be completed for the entire area of the detection target 50 . In the present application, when the rotation mechanism 10 is rotated once, the detection object 50 does not move, and after the rotation mechanism 10 rotates once, the detection object 50 is stepped to the preset position. In other words, even if the detection target 50 is not moving, scanning of a plurality of scan arcs can be realized, and there is a limit to the moving speed of the detection target 50 and a difference between the actual moving speed and the expected speed. By doing so, it is possible to avoid affecting the scanning speed or accuracy, and improve the scanning efficiency and accuracy.

Based on the same inventive idea, the embodiments of the present invention also provide a surface detection method. The surface detection method is implemented based on the surface detection device. FIG. 18 is a flowchart of a surface detection method according to an embodiment of the invention. As shown in FIG. 18, the surface detection method controls the first reflection module to reflect the detection beam incident along the vertical part into a reflection beam, and then the light collection module in the inclined part. Step S21 of passing through and impinging on the surface of the object to be detected, and step S22 of converting the scattered beam formed after the reflected beam is scattered on the surface of the object to be detected into a parallel beam and emitting it by means of a light receiving module S22. ,including.

According to the present invention, a first reflection module, a light collection module, and a light reception module are fixed to a rotation mechanism that rotates about a first rotation axis, and the first reflection modules have different included angles with respect to a plane on which a detection target exists. , the position of the scan point where the detection beam is incident on the surface to be detected is different. Therefore, when the rotating mechanism is rotated once, it is possible to realize scanning of multiple scanning arcs on the premise that the detection object is not moving, and the moving speed limit of the detection object and the actual moving speed and the expected speed can be realized. Scanning speed and accuracy can be avoided from being affected by the presence of a difference between speeds, and scanning efficiency and accuracy can be improved. In addition, by providing the light collecting module in the inclined portion and overlapping the focal points of the light collecting module and the light receiving module, the detection beam that departs from the first rotation axis is reflected by the first reflection module, and the reflected beam becomes the detection target. To keep the relative positions of the scan points concentrated on the surface and the light receiving module unchanged. That is, since the scanning point is positioned at the superimposed focal point, it is convenient to detect the parallel beam formed by passing through the light receiving module, and the precision of the detection result can be enhanced.

FIG. 19 is a flowchart of another surface detection method according to an embodiment of the invention. Optionally, the first reflector module includes a first reflector and a second reflector. The light receiving module includes a first light receiving unit and a second light receiving unit. The first reflecting mirror and the first light receiving unit are provided correspondingly. A second reflecting mirror and a second light receiving unit are provided correspondingly. The included angle between the first reflecting mirror and the plane on which the detection target exists is smaller than the included angle between the second reflecting mirror and the plane on which the detection target exists. The distance from the center point of the first light receiving unit to the first rotation axis is greater than the distance from the center point of the second light receiving unit to the first rotation axis.

Referring to FIG. 19, the surface detection method comprises:
After controlling the first reflecting mirror to reflect the detection beam incident along the vertical portion into a reflected beam, it is collected by the collecting unit in the inclined portion provided corresponding to the first reflecting mirror. step S211 of illuminating and then incident on the surface of the object to be detected to form a first scattered beam; using a first light receiving unit to convert the first scattered beam into a parallel beam and emitting a step S212; After controlling the second reflecting mirror to reflect the detection beam incident along the vertical portion into a reflected beam, the light is collected by the collecting unit in the inclined portion provided corresponding to the second reflecting mirror. and then making it incident on the surface of the object to be detected to form a second scattered beam (S213); using a second light receiving unit to convert the second scattered beam into a parallel beam and emit it (S214); and controlling the worktable to move a preset distance along the first direction S215.

Here, the reflection of the reflected beam off the surface of the object to be detected completes the scanning in the second direction, and the first direction and the second direction intersect.

In the present application, when the rotating mechanism rotates once, even if the detection object is not moving, it can realize the scanning of multiple scanning arcs, and the limit of the movement speed of the detection object and the actual speed of movement can be realized. It can avoid affecting the scanning speed and accuracy due to the existence of a difference between the and the expected speed, and can improve the scanning effect and accuracy.

It should be noted that the above is the preferred embodiment of the present invention and the principles of the technology used. It can be understood by a person skilled in the art that the present invention is not limited to the above-mentioned specific embodiments, and that a person skilled in the art can make obvious modifications, adaptations and replacements without departing from the scope of protection of the present invention. can be done. Therefore, even though the foregoing embodiments describe the invention in detail, the invention is not limited to the foregoing embodiments only, without departing from the spirit of the invention, and in accordance with one equivalent. Examples can be included, and the scope of the invention is determined by the appended claims.

10 rotating mechanism 11 through hole 20 first reflecting module 21 reflecting mirror 30 light collecting module 31 light collecting unit 40 light receiving module 41 light receiving unit 50 detection object 60 photoelectric detector 71 parabolic mirror 80 radiation module 90 third reflecting module 100 work table 111 vertical part 112 inclined part 200 main body 210 silicon wafer 220 component table 230 radiation unit 240 photoelectric detector

Claims (19)

a rotating mechanism, a first reflective module and a light receiving module arranged in sequence along a light propagation path, the first reflective module and the light receiving module fixed within the rotating mechanism;
The rotation mechanism is provided with a through hole including a vertical portion and an inclined portion, the first reflection module is provided in the vertical portion, the rotation mechanism is rotated about a first rotation axis, and the A first rotation axis is parallel to a central axis of symmetry of the vertical part, the first rotation axis is perpendicular to a plane on which a surface to be detected exists, and the surface to be detected of the first reflection module. is superimposed on the projection on the plane in which
the first reflecting module reflects the detection beam incident along the vertical portion into a reflected beam, and then passes through the inclined portion to impinge on the surface of the object to be detected;
The surface detecting device, wherein the light receiving module converts the scattered beam formed after the reflected beam is scattered on the surface of the detection target into a parallel beam and emits the same. further comprising a light collecting module, wherein the light collecting module is provided on the inclined part, the first reflecting module, the light collecting module and the light receiving module are arranged in order along a light propagation path;
2. The surface detection apparatus according to claim 1, wherein the focal point of said light-collecting module coincides with the focal point of said light-receiving module, said focal point corresponding to a scan point on the surface of said object to be detected. The shape of the first reflective module includes either one of a pyramid or a truncated pyramid, the central axis of the first reflective module is parallel to the first rotation axis, and the first reflective module comprises a plurality of outer walls provided adjacent to each other in sequence, and a reflector provided on the outer wall of at least a portion of said first reflective module, said reflector reflecting said detection beam. 2. The surface detection device according to claim 1. 4. The surface detecting device according to claim 3, wherein the light receiving module includes a plurality of light receiving units. The reflecting mirrors are continuously arranged on the outer wall of the entire circumference of the first reflecting module, and the through hole includes one of the vertical portions and a plurality of the inclined portions, and the light receiving unit and the inclined portions are arranged. 5. The surface detection device according to claim 4, wherein the parts are provided in one-to-one correspondence. 5. The method according to claim 4, wherein at least two light receiving units out of the plurality of light receiving units use optical elements with different optical characteristics, and the optical elements with different optical characteristics include different lenses or different spherical mirrors. A surface detection device as described. the light collection module is fixed within the rotating mechanism;
the through hole includes one vertical portion and a plurality of inclined portions;
The first reflecting module includes a plurality of reflecting mirrors arranged adjacent to each other in order, the included angles between the respective reflecting mirrors and a plane in which the detection target exists, and
the light collection module includes a plurality of light collection units;
The light receiving module includes a plurality of light receiving units,
the number of the inclined portions, the reflecting mirrors, the light collecting units, and the light receiving units are the same, and are provided in one-to-one correspondence;
Each light-collecting unit of the light-collecting module is provided in an inclined portion corresponding to the light-collecting unit, and has a different distance from the center point of each light receiving unit of the light receiving module to the first rotation axis. the focus of the light receiving unit coincides with the focus of the corresponding light collecting unit;
Here, the first reflecting module uses one of the reflecting mirrors to reflect the incident detection beam along the vertical portion into a reflected beam, and the reflected beam has an inclination corresponding to the reflecting mirror. After being condensed by a condensing unit in the section, the scattered beam formed after being incident on the surface of the detection object and scattered on the surface of the detection object is converted into a parallel beam by a corresponding light receiving unit. 3. The surface sensing device of claim 2, wherein . the first reflecting module includes a first reflecting mirror and a second reflecting mirror; the receiving module includes a first receiving unit and a second receiving unit;
The first reflecting mirror and the first light-receiving unit are provided correspondingly, and the first light-receiving unit converts the first scattered beam into a parallel beam and then emits the first scattered beam. the beam is a scattered beam formed after the reflected beam of the first reflecting mirror is collected by a collecting unit corresponding to the first reflecting mirror and then scattered on the surface of the object to be detected;
The second reflecting mirror and the second light-receiving unit are correspondingly provided, and the second light-receiving unit converts the second scattered beam into a parallel beam and then emits the second scattered beam. the beam is a scattered beam formed after the reflected beam of the second reflector is collected by a collection unit corresponding to the second reflector and then scattered on the surface of the object to be detected;
The included angle between the first reflecting mirror and the plane on which the detection target exists is smaller than the included angle between the second reflecting mirror and the plane on which the detection target exists, and the angle from the center point of the first light receiving unit is 8. The surface detection device according to claim 7, wherein the distance to said first rotation axis is greater than the distance from the center point of said second light receiving unit to said first rotation axis. The first reflecting module includes first to n-th reflecting mirrors which are arranged adjacent to each other in order, and includes an included angle between the first reflecting mirror and a plane on which the detection target exists to the n-th reflecting mirror. The included angles between the reflecting mirrors and the plane on which the detection target exists are respectively θ ₁ , θ ₂ . . . . . . θ _n−1 and θ _n ,
The light-receiving module includes first to n-th light-receiving units arranged in sequence, the i-th reflecting mirror and the i-th light-receiving unit are correspondingly arranged, and i is greater than 1. is the same and is less than or equal to n, and the distance from the center point of the first light receiving unit to the first rotation axis or the distance from the center point of the nth light receiving unit to the first rotation axis The distances are L ₁ , L ₂ . . . . . . L _n-1 and L _n ;
where θ ₁ <θ ₂ < . . . . . . θ _n−1 <θ _n and L ₁ >L ₂ > . . . . . . 8. The surface detection device of claim 7, wherein L _n-1 >L _n . 10. The surface detector of claim 9, wherein L _i -L _i-1 =K, where K is a fixed value. further comprising a parabolic mirror and a photoelectric detector, wherein the first reflective module, the light receiving module, the parabolic mirror and the photoelectric detector are arranged in order along a light propagation path, forming the paraboloid 8. Surface according to claim 1 or 7, characterized in that the axis of symmetry of the mirror is parallel to the first axis of rotation and the photosensitive surface of the photodetector is arranged at the focal point of the parabolic mirror. detection device. The axis of symmetry of the parabolic mirror coincides with the first axis of rotation, the photosensitive surface of the photoelectric detector is located at the focal point of the parabolic mirror, and the photosensitive surface of the photoelectric detector is aligned with the paraboloid. 12. The surface detection device of claim 11, wherein the plane is perpendicular to the axis of symmetry of the mirror. further comprising a second reflective module and a photodetector, wherein the second reflective module and the photodetector are fixed within the rotating mechanism, the first reflective module, the light receiving module, the second reflective module; 8. The method according to claim 1 or claim 7, wherein the modules and the photodetector are arranged in sequence along the light propagation path, and the second reflecting module reflects the parallel beam to the photodetector. A surface detection device as described. further comprising a second reflective module and a photodetector, wherein the second reflective module and the photodetector are fixed within the rotating mechanism, the first reflective module, the light receiving module, the second reflective module; a module and the photodetector are arranged in sequence along a light propagation path, the second reflective module reflecting the parallel beam to the photodetector;
The second reflective module and the photoelectric detector each include a plurality of second reflective units and a plurality of photoelectric detectors, and the number of the second reflective units and the photoelectric detectors is equal to the inclined portion, 8. The surface detecting device according to claim 7, wherein the number of the reflecting mirrors and the number of the light receiving units are the same as the number of the light receiving units, and are arranged in one-to-one correspondence. further comprising a workbench;
the object to be detected is placed on the workbench, the workbench moves along a first direction;
wherein the reflected beam is incident on the surface of the object to be detected to complete scanning in a second direction , the first direction intersecting the second direction; 8. A surface detection device according to claim 7. In a surface detection method realized based on the surface detection device according to any one of claims 1 to 6, 11, 12, 13 and 15,
step S11 of controlling the first reflecting module to reflect the detection beam incident along the vertical portion into a reflected beam, and then pass through the inclined portion to impinge on the surface of the object to be detected;
A method for detecting a surface, comprising a step S12 of using a light receiving module to convert the scattered beam formed after the reflected beam is scattered by the surface to be detected into a parallel beam and emit the beam. The surface detection device further comprises a workbench,
after performing step S11, further comprising controlling the worktable to move a preset distance along a first direction; or
When performing step S12,
further comprising controlling the worktable to move a preset distance along a first direction, wherein the reflected beam is incident on the surface to be detected and scanning in a second direction is 17. The method of surface detection of claim 16, wherein completing , said first direction and said second direction intersect. In a surface detection method realized based on the surface detection device according to any one of claims 6 to 14,
The surface detection method comprises:
Step S21 of controlling the first reflecting module to reflect the detection beam incident along the vertical portion into a reflected beam, and then pass through the collecting module of the inclined portion to impinge on the surface to be detected;
A method for detecting a surface, comprising a step S22 of using a light receiving module to convert the scattered beam formed after the reflected beam is scattered by the surface to be detected into a parallel beam and emit the beam. The surface detection device further includes a workbench, the first reflecting module includes a first reflecting mirror and a second reflecting mirror, and the light receiving module includes a first light receiving unit and a second light receiving unit. wherein the first reflecting mirror and the first light receiving unit are provided correspondingly, the second reflecting mirror and the second light receiving unit are provided correspondingly, and the first is smaller than the included angle between the second reflecting mirror and the plane on which the detection target exists, and the first rotation from the center point of the first light receiving unit the distance to the axis is greater than the distance from the center point of the second light receiving unit to the first rotation axis;
The surface detection method comprises:
After controlling the first reflecting mirror to reflect the detection beam incident along the vertical portion into a reflected beam, it is collected by the collecting unit in the inclined portion provided corresponding to the first reflecting mirror. step S211 of illuminating and then impinging on the surface to be detected to form a first scattered beam;
converting the first scattered beam into a parallel beam and emitting it using the first light receiving unit S212;
After controlling the second reflecting mirror to reflect the detection beam incident along the vertical portion into a reflected beam, it is collected by the collecting unit in the inclined portion provided corresponding to the second reflecting mirror. step S213 of illuminating and then impinging on the surface of the object to be detected to form a second scattered beam;
converting S214 the second scattered beam into a parallel beam and emitting it using a second light receiving unit ; and
S215 controlling the worktable to move a preset distance along a first direction ;
including
19. The method according to claim 18, wherein the reflected beam impinges on the surface of the object to be detected to complete scanning in a second direction , the first direction and the second direction intersecting. The surface detection method described.

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