CN106404794B - A kind of high-speed measuring device and method of the scattering of heavy caliber material surface - Google Patents
A kind of high-speed measuring device and method of the scattering of heavy caliber material surface Download PDFInfo
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- CN106404794B CN106404794B CN201610902337.0A CN201610902337A CN106404794B CN 106404794 B CN106404794 B CN 106404794B CN 201610902337 A CN201610902337 A CN 201610902337A CN 106404794 B CN106404794 B CN 106404794B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N2021/4735—Solid samples, e.g. paper, glass
Abstract
The invention proposes the high-speed measuring devices and method of a kind of scattering of heavy caliber material surface, including laser, laser beam expanding system, the first high reflective mirror, the polarizer, polarization splitting prism, quarter wave plate, the second high reflective mirror, rotating prism, galvanometer, telecentricity field lens, sample, detector for scattered light, reflection light detector and row triggering detector.Measuring system passes through the scattered signal on detector for scattered light collection material surface, laser beam is realized in the high-velocity scanning of heavy caliber sample surfaces in conjunction with the movement of the composite rotating of prism and galvanometer, so as to complete the measurement of heavy caliber material surface scattering, compared with the measuring technique of traditional heavy caliber material surface scattering, the high speed measurement of heavy caliber sample surfaces scattering may be implemented in the measuring device and method that the invention patent proposes, thus greatly reduce the time required for heavy caliber material surface scatterometry, measuring system structural compactness with higher and lower construction cost simultaneously.
Description
Technical field
The present invention relates to the fields of measurement of material surface scattering, especially a kind of high speed of heavy caliber material surface scattering is surveyed
Measure device and method.
Background technique
In high-tech areas such as precision optics engineering, semiconductors manufacture, precision machinery manufacture and defence and militaries, to used
The surface defect of material has strict requirements, and the surface defect of material refers to be produced in the various links such as material processing and carrying
The tiny flaws such as the different scratch of raw geomery and point.The surface defect of material can seriously affect the workability of component
Can, as its laser damage threshold, while surface defect pair can be greatly reduced in the surface defect of material in high power laser system
Incident intense laser beam will cause different degrees of heat absorption, and on material, high energy laser radiates increasing for number, material
Surface defect will cause optical component damage even destroy, in addition the surface defect of material can cause laser beam dissipate
It penetrates, to reduce the capacity usage ratio of laser beam, the strong influence working performance of strong laser system.Thus material surface lacks
Sunken accurate measurement has great significance for the performance of evaluation material, the processing technology of improvement material.
It mainly include both at home and abroad at present visual method, micro-imaging to the detection method of ultra-smooth material surface tiny flaw
Method, laser defusing measure method.Visual method mainly completes defects detection by artificial eye observation, strong with subjectivity,
It can not quantify, the disadvantages such as resolution ratio is low, testing result reliability is low.Micro-imaging method (bibliography CN1563957A) is to pass through
The mode that dark field illumination and microoptic CCD imaging system combine, is imaged and is spliced to tested optical surface, from
And the detection of the quantization to material surface tiny flaw is realized, but the disadvantage is that detection speed is slow, while subsequent digitation figure
As the processing time is longer.
Laser defusing measure method is widely used in fault in material detection due to having the advantages that highly sensitive, general at present
All over use heavy caliber sample surfaces scattering measuring technique be use sample fix, by the way of two-dimensional scanning light source and detector
Measure the scattering of heavy caliber sample surfaces, light source and the detection system initial position that is moved to sample, device to be detected are complete first
After collection at scattering light, light source and detection system then move to next measurement position of sample, and detector continues to complete
The collection of light is scattered, then measuring system repeats the above scanning motion and scatters the acquisition movement of light, until in entire sample table
The collection of scattering light is completed in face, and then realizes the measurement of heavy caliber sample surfaces scattering.The major defect of the measurement method is to survey
The amount time is very slow, and the sample for being such as 500mm × 500mm for size, the measurement need of work of surface scattering is up to
Several days time, in prolonged measurement process, many unknown variations can occur for measurement environment, and then can bring and can not neglect
Measurement error slightly, while the longer working efficiency for also seriously reducing measuring system of time of measuring.
Summary of the invention
In order to solve the problems, such as that existing heavy caliber material surface scatterometry technology, the present invention provide a kind of high speed
Realize the device and method of heavy caliber material surface scatterometry.
Technical solution of the invention is as follows:
A kind of high-speed measuring device of heavy caliber material surface scattering, including laser, laser beam expanding system, the first height are anti-
Mirror, the polarizer, polarization splitting prism, quarter wave plate, the second high reflection mirror, rotating prism, galvanometer, telecentricity field lens, scattering light is penetrated to visit
Survey device, reflection light detector and row triggering detector；
The laser beam of the described laser transmitting passes through described the after the laser beam expanding system collimator and extender
One high reflection mirror is incident on the polarizer and generates S-polarization light beam, is incident on after the reflection which passes through polarization splitting prism
Circularly polarized light is generated in quarter wave plate, which is incident on rotating prism after passing through the second high reflection mirror, and rotating prism will
The incoming laser beam continuous scanning within the scope of certain angle in the horizontal direction, while being reflected on galvanometer, which incident will swash
The light beam vertically continuous scanning within the scope of certain angle, while being reflected on telecentricity field lens, which will be incident
In laser beam vertical focusing to the surface of sample, the detector for scattered light collects the scattering light on sample surface,
The reflection light detector collects the reflected light on sample surface, and row triggering detector is used for heavy-calibre element measurement process
In accurately control the movement of rotating prism and galvanometer, each component passes through computer and realizes long-range control.
A kind of high speed measurement method of heavy caliber material surface scattering, comprising the following steps:
1. making testing laser beam be radiated at the initial samples position of heavy caliber sample by adjusting rotating prism and galvanometer；
2. combining rotating prism and galvanometer, transport incoming laser beam at the uniform velocity from initial samples position on the surface of sample to be tested
The next position is moved, meanwhile, detector for scattered light keeps continuous light intensity signal collection, and the time of integration of light intensity signal, which is equal to, swashs
Light light beam records the collected light of detector for scattered light from the time required for the uniform motion to the next position of initial samples position
Strong signal value, is denoted as χ1；
3. repeating step 2., the scanning until completing the first row on sample to be tested surface obtains scattered light intensity signal χ2,
χ3... ...；
4. combining rotating prism 8 and galvanometer 9, laser beam is made to be moved to the second row on sample to be tested surface in vertical direction
Original position, 2. and 3. repeat step, the scanning survey until completing the second row on sample to be tested surface；
5. step is repeated 4., until laser beam completes scanning in sample to be tested whole surface；
6. the signal χ measured based on detector for scattered light1, χ2, χ3……χn-1And χn, obtain sample to be tested heavy caliber surface
Scattered signal distribution.
The laser beam of laser transmitting is high anti-by described first after the laser beam expanding system collimator and extender
It penetrates mirror and is incident on polarizer generation S-polarization light beam, be incident on 1/4 wave after the reflection which passes through polarization splitting prism
Circularly polarized light is generated in piece, which is incident on rotating prism after passing through the second high reflection mirror, and rotating prism will be incident
The laser beam continuous scanning within the scope of certain angle in the horizontal direction, while being reflected on galvanometer, the galvanometer is by incoming laser beam
The vertically continuous scanning within the scope of certain angle, while being reflected on telecentricity field lens, the telecentricity field lens is by incident laser
In beam vertical focusing to the surface of sample, the detector for scattered light collects the scattering light on sample surface, described
Reflection light detector collect the reflected light on sample surface, row triggering detector is for essence in heavy-calibre element measurement process
The really movement of control rotating prism and galvanometer, each component realize long-range control by computer.
Compared with the measuring technique of traditional heavy caliber material surface scattering, the heavy caliber material surface of the invention patent proposition
The measuring device and method of scattering mainly have the advantage that
(1) the high speed measurement of heavy caliber sample surfaces scattering can be achieved.Since system is using continuous moving prism and step
The scanning of heavy caliber sample surfaces is realized into the mode of galvanometer (size is small, light-weight), and detector for scattered light is protected always
It holds in continual signal acquisition process, (size is big, again with the moving light source and detector that use in conventional measurement techniques
Amount is high) measurement scheme (detector for scattered light completes the measurement of the optical signal at one position first, then light source and detector shifting
Next measurement position is moved, then detector for scattered light starts signal acquisition next time again) it compares, the invention patent can be real
The high speed measurement of existing heavy caliber material surface scattering, in face of the sample of same size size, in the feelings for choosing same sampling number
Under condition, the time needed for heavy caliber sample surfaces scatterometry can be reduced to 1 the percent or less of conventional method.
(2) measuring system is compact-sized, and construction cost is low.Since system is using continuous moving prism and galvanometer (size
It is small, light-weight) mode come realize heavy caliber sample surfaces scanning, with the mobile light source used in conventional measurement techniques and spy
Survey device (size is big, weight is high) measurement scheme compare, measuring system used by the invention patent it is compact-sized, building is opened
Cost is relatively low for hair.
Detailed description of the invention
Fig. 1 is the structure chart of heavy caliber material surface scatterometry device of the invention
Fig. 2 is scanning route schematic diagram of the present invention in heavy caliber material surface scatterometry when institute laser beam.
Specific embodiment
The present invention is described in detail with specific embodiment below in conjunction with the accompanying drawings, but guarantor of the invention should not be limited with this
Protect range.
Embodiment:
Fig. 1 is the structural schematic diagram of the present embodiment, and the device mainly includes lasers 1, laser beam expanding system 2, and first is high
Reflecting mirror 3, the polarizer 4, polarization splitting prism 5, quarter wave plate 6, the second high reflection mirror 7, rotating prism 8, galvanometer 9, telecentricity field lens
10, sample 11, detector for scattered light 12, reflection light detector 13 and row trigger detector 14.
For laser 1 using the stable type He-Ne laser of Thorlabs company, issuing central wavelength is 632.99nm's
One-wavelength laser, the stability of laser emitting power are ± 0.2%, and 2 be the Galileo laser beam expanding system of Thorlabs company,
It can provide the ratio that expands of 2 times to 5 times or 5 times to 10 times continuous variables, 3 be the broadband medium film high reflection of Thorlabs company
Mirror, under 0 to 45 ° of incidence angles, the reflectivity of S and P component polarization light is all larger than 99%, and wavelength wavelength operating range is 400nm-
7500nm, polarizing film 4 use the LPVIS050-MP2 shape linear polarizer of Thorlabs company, and extinction ratio can reach 10000 or more,
Polarization splitting prism 5 is using the wideband polarization beam splitting block prism of Thorlabs company, and 6 be quarter wave plate, and the second high reflective mirror 7 is adopted
With the broadband medium film high reflection mirror of Thorlabs company, under 0 to 45 ° of incidence angles, the reflectivity of S and P component polarization light is equal
Greater than 99%, wavelength wavelength operating range is 400nm -7500nm, and 8 be rotating prism, and 9 be galvanometer, and 10 be telecentricity field lens, and 11 are
Sample (quartz glass), size are 500mm × 500mm, and 12 be detector for scattered light, and 13 be reflection light detector,
14 be row triggering detector.
Laser 1 is used to provide laser beam for test macro, and laser beam expanding system 2, which plays, collimates laser beam
With the effect expanded, then the laser beam after collimator and extender generates S by being incident in the polarizer 4 after the first high reflection mirror 3
Light beam, S-polarization light beam are incident in quarter wave plate 6 after then passing through the reflection of polarization splitting prism 5, so that it is inclined to generate circle
Shake light, and (rotating prism 8 can be by incoming laser beam edge by being incident on rotating prism 8 after the second high reflection mirror 7 for circularly polarized light
Horizontal direction continuous scanning within the scope of certain angle), laser beam is incident on galvanometer 9 after the reflection of rotating prism 8
(galvanometer 9 can by incoming laser beam vertically the continuous scanning within the scope of certain angle), then galvanometer 9 be by incident laser
Beam is reflected on telecentricity field lens 10, and telecentricity field lens 10 is scattered in laser beam vertical focusing to the surface of sample 11
Optical detector 12 is mounted near sample measurement position, for collecting the scattering light on 11 surface of sample, reflects optical detection
Device 13 is used to collect the reflected light on 11 surface of sample.
Rotating prism 8 is for incoming laser beam to be carried out continuous angle scanning within the scope of certain angle in the present embodiment
Device, realize that the device of the function further includes but is not limited to galvanometer, acousto-optic modulator, electrooptic modulator, rotating electric machine.
Detector for scattered light 12 and reflection light detector 13 are the device for realizing photoelectric conversion in the present embodiment, realize the function
The device of energy includes but is not limited to photodiode, charge coupled cell, photomultiplier tube.
In the measuring system that heavy caliber material surface as shown in Figure 1 scatters, the laser beam that laser 1 issues passes through
After a series of transmission of optical components, it is radiated on the surface of sample 11, if the surface of sample 11 does not have defect,
Then for incoming laser beam after backtracking to quarter wave plate 6, laser beam becomes P-polarized light, and P-polarized light passes through polarization splitting prism 5
It is incident on after transmission on reflection light detector 13, reflection light detector 13 reflects the reflectivity on 11 surface of sample, if tested
The surface of sample 11 is defective, then incoming laser beam scatters, and scattering light is received by detector for scattered light 12, scatters optical detection
Scattered signal of the signal that device is collected into as sample to be tested surface defect.
In the measurement process of heavy caliber material surface scattering, rotating prism 8 is always maintained at lasting rotary motion, thus
Make the incoming laser beam continuous scanning within the scope of certain angle in the horizontal direction, while galvanometer 9 is always maintained at step motion, thus
Incoming laser beam can be made vertically to complete stepping within the scope of certain angle, after the effect of telecentricity field lens 10, rotation
The effect for turning 9 aggregate motion of prism 8 and galvanometer is exactly on the surface of sample 11, and the laser beam of vertical incidence realizes
Continuous two-dimensional scanning campaign, scanning track of the laser beam on 11 surface of sample as shown in Fig. 2, laser beam from position
Set P1Uniform motion is to position P2, it is intermediate not stop, continue uniform motion to next point, until completing entire surface to be measured
Scanning.
During the uniform motion of testing laser light beam, detector for scattered light 12 is constantly in continual data and adopts
During collection, run duration of the time of integration and laser beam of 12 data of detector for scattered light acquisition between two sample position
Keep height consistent, if laser beam is from position P1Uniform motion is to position P2The required time and 12 data of scattering detector adopts
The time of integration of collection is the same, and within the time of integration, the light intensity signal (formulae express is as follows) that detector for scattered light 12 is collected is i.e.
As sample to be tested 11 in P1P2Scattered signal at regional location.
When laser beam is after the whole surface of sample to be tested 11 completes scanning, detector for scattered light 12 is also collected and is completed
Scattered light intensity at each position in surface to be measured can be obtained the intensity point of heavy caliber sample surfaces scattering by computer disposal
Cloth.
Based on the high-speed measuring device that heavy caliber material surface as shown in Figure 1 scatters, the invention patent proposes simultaneously
A kind of high speed measurement method of heavy caliber material surface scattering, mainly comprises the steps that
1. making laser beam on 11 surface of sample to be tested by rotating prism 8, from position P1Uniform motion is to position P2,
Detector for scattered light 12 is set to keep continuous light intensity signal collection simultaneously, the time of integration of light intensity signal is equal to laser beam from position
Set P1Uniform motion is to position P2The required time records the collected light intensity signal value of detector for scattered light, is denoted as χ1；
2. the position P on 11 surface of sample to be tested respectively2With position P3Between, position P3With position P4Between ... ... weight
1., the scanning until completing the first row on sample to be tested (11) surface obtains scattered light intensity signal χ to multiple step2, χ3... ...；
3. rotating galvanometer 9, laser beam is made to be moved to the start bit of the second row on 11 surface of sample to be tested in vertical direction
1. and 2. it sets place, repeats step, the scanning survey until completing the second row on 11 surface of sample to be tested；
4. step is repeated 3., until laser beam completes scanning in 11 whole surface of sample to be tested.
5. the signal χ measured based on detector for scattered light1, χ2, χ3……χn-1And χn, obtain 11 heavy caliber table of sample to be tested
The scattered signal in face is distributed.
Particular embodiments described above has carried out further in detail the purpose of the present invention, technical scheme and beneficial effects
Describe in detail bright, it should be understood that the above is only a specific embodiment of the present invention, is not intended to restrict the invention, it is all
Within the spirit and principles in the present invention, any modification, equivalent substitution, improvement and etc. done should be included in protection of the invention
Within the scope of.
Claims (2)
1. a kind of high-speed measuring device of heavy caliber material surface scattering, which is characterized in that including laser (1), laser beam expanding
System (2), the first high reflection mirror (3), the polarizer (4), polarization splitting prism (5), quarter wave plate (6), the second high reflection mirror (7),
Rotating prism (8), galvanometer (9), telecentricity field lens (10), detector for scattered light (12), reflection light detector (13) and row triggering are visited
It surveys device (14)；
The laser beam of laser (1) transmitting is after described laser beam expanding system (2) collimator and extender, by described
First high reflection mirror (3) is incident on the polarizer (4) and generates S-polarization light beam, which passes through polarization splitting prism (5)
It is incident on after reflection in quarter wave plate (6) and generates circularly polarized light, which is incident on rotation after passing through the second high reflection mirror (7)
Turn on prism (8), rotating prism (8) continuous scanning within the scope of certain angle in the horizontal direction by incoming laser beam, while anti-
It is mapped on galvanometer (9), the galvanometer (9) vertically continuous scanning within the scope of certain angle by incoming laser beam, while anti-
Be mapped on telecentricity field lens (10), the telecentricity field lens (10) by the surface of incoming laser beam vertical focusing to sample (11),
The detector for scattered light (12) collects the scattering light on sample (11) surface, and the reflection light detector (13) is collected
The reflected light on sample (11) surface, by rotating prism (8) scan laser beam some be incident on row triggering detection
Line triggering signal, row triggering detector (14), for accurately control rotation in heavy-calibre element measurement process are generated on device (14)
The movement of prism (8) and galvanometer (9), each component realize long-range control by computer.
2. a kind of high-speed measuring device scattered using heavy caliber material surface described in claim 1 carries out heavy caliber material table
The high speed measurement method of area scattering, which comprises the following steps:
1. making testing laser beam be radiated at the initial samples position of heavy caliber sample by adjusting rotating prism (8) and galvanometer (9)
It sets；
2. combining rotating prism (8) and galvanometer (9), make incoming laser beam on the surface of sample to be tested (11) from initial samples position
Uniform motion to the next position, meanwhile, detector for scattered light (12) keeps continuous light intensity signal collection, the integral of light intensity signal
Time is equal to laser beam from the time required for the uniform motion to the next position of initial samples position, records detector for scattered light
(12) collected light intensity signal value, is denoted as χ1；
3. repeating step 2., the scanning until completing the first row on sample to be tested (11) surface obtains scattered light intensity signal χ2,
χ3... ...；
4. combining rotating prism (8) and galvanometer (9), laser beam is made to be moved on sample to be tested (11) surface the in vertical direction
2. and 3. the original position of two rows repeats step, the scanning survey until completing the second row on sample to be tested (11) surface；
5. step is repeated 4., until laser beam completes scanning in sample to be tested (11) whole surface；
6. the signal χ measured based on detector for scattered light1, χ2, χ3……χn-1And χn, obtain sample to be tested (11) heavy caliber surface
Scattered signal distribution.
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| CN201610902337.0A CN106404794B (en) | 2016-10-17 | 2016-10-17 | A kind of high-speed measuring device and method of the scattering of heavy caliber material surface |
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| CN201610902337.0A CN106404794B (en) | 2016-10-17 | 2016-10-17 | A kind of high-speed measuring device and method of the scattering of heavy caliber material surface |
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