CN106435513B - Vacuum coating equipment is used in a kind of processing of metallized film - Google Patents
Vacuum coating equipment is used in a kind of processing of metallized film Download PDFInfo
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- CN106435513B CN106435513B CN201610840535.9A CN201610840535A CN106435513B CN 106435513 B CN106435513 B CN 106435513B CN 201610840535 A CN201610840535 A CN 201610840535A CN 106435513 B CN106435513 B CN 106435513B
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- Prior art keywords
- film
- coating
- elevating mechanism
- evaporation
- vacuum chamber
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The present invention discloses a kind of metallized film processing vacuum coating equipment, including vacuum chamber and the intake mechanism being arranged in the vacuum chamber, film-coating mechanism, winding mechanism.Intake mechanism includes the first elevating mechanism, feeding unit；Preheating mechanism is provided between intake mechanism and film-coating mechanism；The top opening region of first evaporation boat is provided with the first movable plate component for adjusting the first evaporation boat openings of sizes；The top opening region of second evaporation boat is provided with the second movable plate component for adjusting the second evaporation boat openings of sizes；Film clamping device of film is provided between intake mechanism and film-coating mechanism, between film-coating mechanism and winding mechanism；Winding mechanism includes the 5th elevating mechanism, winding device；The telescopic end of 5th elevating mechanism cooperates with winding device to drive winding device to move up and down.High degree of automation that the present invention has, feed supplement/rewinding be convenient, in time, preheating is uniform, pre- heat is adjustable, the processing that is applicable in Multiple Type film, the advantage that coating film thickness is adjustable.
Description
Technical field
The present invention relates to coating machine technical fields more particularly to a kind of processing of metallized film to use vacuum coating equipment.
Background technique
The quality of main component of the metallized film as capacitor, quality directly affects the service life of capacitor.
Currently, metallized film mainly by vacuum coating machine prepare, including insulation film intake mechanism, film-coating mechanism and
Winding film mechanism after plating metal layer.However, the vacuum coating equipment of the prior art has the following disadvantages:
(1) since the metal layer such as aluminium plated is easy to oxidize, so entire process equipment carries out under vacuum conditions, and
Intake mechanism as feeding insulation film generallys use feeding roller, and the amount for winding insulation film is limited, when on feeding roller
At the end of insulation film is unwound fastly, needs to rechange roller or rewind film, such as patent application publication
201320431310.X one kind disclosed in super-high sheet resistance metalized film vacuum coating equipment, patent application 201310324470.9 is soft
There is the above problem around vaporation-type vacuum coating equipment.Vacuum coating equipment disclosed in patent application 200910303404.7 passes through load
Disk is loaded into the uninterrupted feeding that film cooperation transport mechanism realizes film, but is loaded into film with load plate and measures few, Wu Faman after all
The mass production requirement of foot industry, it is to be improved in terms of the convenience of feed supplement, timeliness.
(2) existing vacuum coating equipment is after feeding unit feeding, if directly carrying out plated film by film-coating mechanism, insulate thin
The temperature of film surface is lower, and plating membrane stability is poor.Solution is that the interface work on its surface is improved by setting preheating device
With.But preheating device is mostly fixed, and it is non-adjustable, cause preheating uneven.The prior art such as patent application
201520245919.7 although a kind of disclosed vacuum coating equipment provides can be along the heating device that arc-shaped guide rail moves simultaneously
Heating device adjustable angle is realized by metallic flexible hose, and still, which is the physics using metallic flexible hose itself
Property is bent, it has not been convenient to the realization of automatic adjustment；In addition, arc-shaped guide rail movement can drive heating device movement that can only realize
Linear two-dimensional is adjusted, and is not able to satisfy the adjusting of stereoscopic three-dimensional, it is difficult to realize the control of pre- calorific intensity, pre- thermal uniformity also needs to be mentioned
It is high.
(3) film-coating mechanism is by evaporation boat molten metal, so that evaporation of metal is formed to the insulation film that drum surface is deposited
Metal layer realizes coating process.But the distance between its vapor deposition drum of traditional film-coating mechanism and evaporation boat are mostly definite value；And
And the openings of sizes of evaporation boat is also fixation, according to the thickness t of the coat of metal on basement membrane0=w0/(πph2), it is known that, pass through
The openings of sizes and the distance between vapor deposition drum and evaporation boat that adjust evaporation boat can control the thickness of the coat of metal.
(4) metallized film having is plated again on the basis of aluminium film, then in intermediate region into one layer of enhancement layer, by secondary
Plated film improves the pressure-resistant performance and self-healing performance of film, it is therefore desirable to which corresponding plated film prepares two sets of evaporation boats, wherein with
The opening that enhancement layer corresponds to evaporation boat needs that screening arrangement is arranged, as a kind of aluminium of patent application 200810200949.0 thickeies gold
The vacuum evaporating coating machine of categoryization capacitor membrane, patent application 201310324470.9 are a kind of soft around vaporation-type vacuum coating
Machine realizes that region thickeies effect by screening arrangement.But the screening arrangement of existing technology be also mostly it is fixed, in addition shield
Through slot structure, the shape covered on device are immutable, cause one the film that can only process a kind of model is arranged, if being able to achieve shielding dress
It sets automatic interchangeable, evaporation boat opening area and its spacing between vapor deposition drum is adjustable, be then able to satisfy the life of Multiple Type film
It produces.
(5) winding device there are the problem of it is exactly the same with feeding unit, have in terms of the convenience of rewinding, timeliness
Wait improve.
(6) insulation film during transportation, if tension is uneven, it is found that the phenomenon that floating influences the normal biography of film
It is defeated.
Summary of the invention
In view of the deficiencies of the prior art, the present invention provides a kind of high degree of automation, feed supplement/rewinding are convenient, timely, pre-
Heat is uniform, pre- heat is adjustable, the processing that is applicable in Multiple Type film, coating film thickness is adjustable, the stable metallized film of transmission is processed
Use vacuum coating equipment.
The present invention, which passes through following technological means and realizes, solves above-mentioned technical problem: vacuum is used in a kind of metallized film processing
Coating machine, including vacuum chamber and the intake mechanism being arranged in the vacuum chamber, preheating mechanism, film-coating mechanism, winding mechanism；
The intake mechanism, preheating mechanism, film-coating mechanism, winding mechanism are set gradually from front to back according to process flow；It is fed described
Enter between mechanism and film-coating mechanism, be provided with film clamping device of film between the film-coating mechanism and winding mechanism；The film
Clamping device includes upper film clamp component and lower film clamp component；The upper film clamp component is located at insulation film
Top, the lower film clamp component are located at the lower section of film；The upper film clamp component, lower film clamp component are transported in opposite directions
It employs to be limited to film；
The intake mechanism includes the first elevating mechanism, feeding unit；The telescopic end of first elevating mechanism with it is described
Feeding unit cooperation is to drive the feeding unit to move up and down；The winding mechanism includes the 5th elevating mechanism, winding dress
It sets；The telescopic end and winding device of 5th elevating mechanism cooperate to drive the winding device to move up and down；
The preheating mechanism is arranged on the inner roof wall of the vacuum chamber；The preheating mechanism include jointed gear unit,
Heater, the first telescopic device；The jointed gear unit includes fixed link, drive rod；Position is higher in the fixed link
One end is arranged on the inner roof wall of the vacuum chamber by the second elevating mechanism, the lower one end in position and institute in the fixed link
It is hinged to state the higher one end in position in drive rod, the lower one end in position is equipped with the heater in the drive rod；It is described
The fixing end of first telescopic device is hinged on second elevating mechanism and the join domain of the fixed link, and described first stretches
The other end of compression apparatus and the drive rod are hinged；
The film-coating mechanism includes the first evaporation coating device, the second evaporation coating device；The first evaporation coating dress
It sets including the first vapor deposition drum, the first evaporation boat；The lower section of the first vapor deposition drum is arranged in first evaporation boat；Described first
The top opening region of evaporation boat is provided with the first movable plate component for adjusting the first evaporation boat openings of sizes；
Second evaporation coating device includes the second vapor deposition drum, the second evaporation boat, screening arrangement；Second evaporation boat
The lower section of the second vapor deposition drum is set；The top opening region of second evaporation boat, which is provided with, adjusts second evaporation
Second movable plate component of boat openings of sizes；The screening arrangement is evaporated to limit from the opening of second evaporation boat
Metal fall in width on insulation film, region.
Preferably: a contact includes first connecting rod, the first idler wheel, first idler wheel and the insulation film
Outermost layer be in rolling contact, the lower one end in position connects in described higher one end in first connecting rod position and the first baffle
It connects, the first connecting rod position is rolled compared with the one end at bottom and first idler wheel to be cooperated；Stating the second contact includes the second company
The outermost layer of extension bar, the second idler wheel, second idler wheel and metallized film is in rolling contact；Second connecting rod position is higher
One end connect with lower one end in position in the second baffle, second connecting rod position is compared with the one end at bottom and described the
Second wheel is rotatably assorted.
Preferably: the intake mechanism further includes first close to induction mechanism, the first automatic conveying device；Described first connects
Near-induction mechanism includes first baffle, the first contact；The higher one end in position is arranged with being rotatably assorted in the first baffle
On the fixed transverse rod of the first support frame upper end, the lower one end in position and position in first contact in the first baffle
Higher one end connection is set, the lower one end in position can be with the insulation film in the feeding roller most in first contact
Outer layer；The described first close relatively described baffle plate setting of switch is on the fixed transverse rod of first support frame；Described
One automatic conveying device includes first shell, the first scroll wheel；First elevating mechanism is arranged in the first shell, institute
The bottom that the first scroll wheel is mounted on said first shell is stated, first scroll wheel is driven by the second driving device；Institute
It states and is provided with second in vacuum chamber close to switch, the described second close switch is to monitor the intake mechanism in the vacuum chamber
In position, third is provided at the upstream end of the vacuum chamber close to switch on the outside of the vacuum chamber, the third connects
Nearly switch is to monitor position of the intake mechanism outside vacuum chamber；It is provided at the upstream end of the vacuum chamber into room
Door；
The winding mechanism further includes the second automatic conveying device identical with the first automatic conveying device structure, second connects
Near-induction mechanism；Described second close to induction mechanism include second baffle, the second contact；Position is higher in the second baffle
One end be set in being rotatably assorted on the fixed transverse rod of the second support frame upper end, lower one end in position in the second baffle
It is connect with higher one end in position in second contact, the lower one end in position can be with the volume in second contact
The outermost layer of metallized film in roller contacts；Described 4th is arranged close to the relatively described second baffle of switch described second
On the fixed transverse rod of support frame；The 5th is provided in the vacuum chamber close to switch, the described 5th close switch is to monitor
Position of the winding mechanism in the vacuum chamber, the vacuum chamber outside are provided at the outlet end of the vacuum chamber
6th close to switch, and the described 6th close switch is to monitor position of the winding mechanism outside vacuum chamber；It is set in the outlet end
It is equipped with out room door.
Preferably: belt conveyer is provided with below the preheating mechanism, the belt conveyer will be from institute
The insulation film for stating intake mechanism feeding is transmitted to the film-coating mechanism.
Preferably: the first movable plate component includes the first left movable plate, the first right movable plate, the first left flexible dress
It sets, the first right telescopic device；Lower one end in position and the one of the top of first evaporation boat in the first left movable plate
End is hinged, the higher one end position in position free end；The fixing end of the first left telescopic device and first evaporation boat
Outer wall is hinged, and the telescopic end and the described first left movable plate of the first left telescopic device are hinged；In the first right movable plate
The lower one end in position and the other end at the top of first evaporation boat are hinged, and the higher one end in position is free end, institute
The fixing end for stating the first right telescopic device and the outer wall of first evaporation boat are hinged, the telescopic end of the first right telescopic device
It is hinged with the described first right movable plate；
The second movable plate component includes the second left movable plate, the second right movable plate, the second left telescopic device, second right side
Telescopic device；The lower one end in position and the one end at the top of second evaporation boat are hinged in the second left movable plate,
The higher one end in position is free end；The fixing end of the second left telescopic device and the outer wall of second evaporation boat are hinged,
The telescopic end and the described second left movable plate of the second left telescopic device are hinged；Position is lower in the second right movable plate
The other end of one end and the top of second evaporation boat is hinged, and the higher one end in position is free end, and second right side is stretched
The fixing end of compression apparatus and the outer wall of second evaporation boat are hinged, the telescopic end and described second of the second right telescopic device
Right movable plate is hinged；
Preferably: third elevating mechanism, the third elevating mechanism are provided with below first evaporation coating device
To drive the first evaporation coating device elevating movement；The 4th lifting is provided with below second evaporation coating device
Mechanism, the 4th elevating mechanism is to drive the second evaporation coating device elevating movement.
Preferably: the screening arrangement includes link transmission shielding body, including fixing seat, barricade, the second flexible dress
It sets；The lower one end in position is arranged in the inner bottom wall of the vacuum chamber by pedestal in the fixing seat, in the fixing seat
The higher one end in position and one end of the barricade are hinged, and the other end of the barricade can be from the opening of two evaporation boat
The one end at place extends to the other end；The telescopic end and the barricade of second telescopic device are hinged, fixing end and fixation
Seat is hinged；Through slot is provided on the barricade, the directed parallel of the through slot is in insulation film transmission direction.
Preferably: link transmission shielding body quantity is two, and is symmetricly set on the two sides of second evaporation boat.
Preferably: the upper film clamp component includes upper elevating mechanism, upper limit plate, the fixation of the upper elevating mechanism
End is arranged on the inner roof wall of the vacuum chamber, and the telescopic end of the upper elevating mechanism is connect with the upper limit plate；Under described
Film clamp component includes lower elevating mechanism, lower limiting board, and the vacuum chamber is arranged in the fixing end of the lower elevating mechanism
In inner bottom wall, the telescopic end of the lower elevating mechanism is connect with the lower limiting board.
Preferably: being provided with rubber layer at the top of the bottom of the upper limit plate, lower limiting board.
The present invention has the advantages that the present invention has, high degree of automation, feed supplement/rewinding are convenient, timely, preheating is uniform,
Pre- heat is adjustable, is applicable in Multiple Type film processing, the advantage that coating film thickness is adjustable.
Further, feeding unit is supported by the first support frame due to the first elevating mechanism of the invention, can be realized feeding
Device moves up and down, can be by the first elevating mechanism to the height of feeding unit if the rotation precision of first driving device declines
Degree is adjusted, to guarantee feeding roller its height fed every time, position consistency, tension caused by avoiding thus is unstable to be showed
As.
Further, the first elevating mechanism of the invention is preferably servo-cylinder or servo cylinder, is controlled by controller.Into
One step guarantees that the first scroll wheel does not deviate by since the bottom of the first scroll wheel is embedded in guide rail, realizes that motion profile is consistent
Technical effect.
Further, drive rod is driven to swing by the stretching motion of the first telescopic device, so that heater or so be driven to put
It is dynamic.Meanwhile cooperating the elevating movement of the second elevating mechanism, drive heater to move up and down, so that heater realizes 3 D stereo
Movement, and be able to achieve the movement in same level, carry out more uniform preheating to insulation film, and can by adjusting plus
The height of hot device realizes the control to the pre- calorific intensity of heater.
Further, the first telescopic device of the invention, the second elevating mechanism also can be servo-cylinder or servo cylinder, lead to
It crosses controller and controls its work, further realize automation.
Further, by the first left telescopic device, the stretching motion of the first right telescopic device, drive the first left movable plate,
The free end of first right movable plate deviates from or moves toward one another, to control openings of sizes, reaches the technology effect for adjusting plated film amount
Fruit.
Further, the elevating movement of third elevating mechanism drives the first evaporation boat to rouse close to or far from the first vapor deposition, passes through
The first evaporation boat is adjusted at a distance from the first vapor deposition drum to be the technical effect realizing plated film amount and adjusting.
Further, drive barricade rotation, when needing to shield, barricade is turned by the stretching motion of the second telescopic device
It moves to horizontal position.At this point, the intermediate region of insulation film can only be plated in by through slot from the metal in the second evaporation boat, realize
The technical effect selectively thickeied.
Further, link transmission shielding body quantity is two, and is symmetricly set on the two sides of the second evaporation boat.Difference screen
Through slot in shield plate is of different size.The present invention has the through slot width of different through slot width by providing, and realizes and thickeies width
Alternative, convenient for the processing of different model film.
Further, when intake mechanism, which removes vacuum chamber, prepares roll change, by setting film clamp component to insulation film
It is clamped, so that insulation film can only be unwound out from feeding roller, it will not be from winding mechanism by plated film winding
Metallized film is unwound out, prevents film from inversely moving.
Further, when insulation film is in transmission, pass through upper elevating mechanism, lower elevating mechanism controls upper grip block, lower folder
Plate spacing is held, the limit of vertical direction is carried out to film, prevents film from generating in transmit process since tension is uneven floating
Dynamic phenomenon, guarantees film smooth transport.
Further, rubber layer is provided at the top of the bottom of upper grip block, lower grip block.Pass through the flexibility of rubber layer
Property avoids insulation film from contacting with grip block and generates scratch print.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention.
Fig. 2 be in the present invention intake mechanism close to third close to switch state flowering structure schematic diagram.
Fig. 3 be in the present invention winding mechanism close to the 6th close to switch state flowering structure schematic diagram.
Fig. 4 is the structural schematic diagram of feeding unit in the present invention.
Fig. 5 is the structural schematic diagram of winding device in the present invention.
Fig. 6 is the structural schematic diagram of feeding roller in the operating condition in the present invention.
Fig. 7 is the structural schematic diagram of take-up roll in the operating condition in the present invention.
Fig. 8 be the present invention in first close to switch not with the structural schematic diagram under first baffle relative status.
Fig. 9 is the first structural schematic diagram close under switch and first baffle relative status in the present invention.
Figure 10 be the present invention in second close to switch not with the structural schematic diagram under second baffle relative status.
Figure 11 is the second structural schematic diagram close under switch and second baffle relative status in the present invention.
Figure 12 is the structural schematic diagram of automatic conveying device in the present invention.
Figure 13 is the structural schematic diagram that mechanism is preheated in the present invention.
Figure 14 is the structural schematic diagram of the grip block in the present invention with rubber layer.
Figure 15 is the structural schematic diagram of the first evaporation coating device in the present invention.
Figure 16 is the structural schematic diagram of the second evaporation coating device in the present invention.
Specific embodiment
To further describe the present invention, it is described further below with reference to embodiment.
As shown in Figure 1, the present invention discloses a kind of metallized film processing vacuum coating equipment, including vacuum chamber 401 and
Intake mechanism, film-coating mechanism, winding mechanism in vacuum chamber 401 are set.Intake mechanism, film-coating mechanism, winding mechanism according to
Process flow is set gradually from front to back.
As shown in Figure 1, intake mechanism includes the first elevating mechanism 101, feeding unit.First elevating mechanism 101 stretches
End cooperates with feeding unit to drive feeding unit to move up and down.
As shown in Figure 1, vacuum chamber 401 includes the chamber door 4011 of upstream end and the door of room out 4012 of outlet end.
As shown in Figure 1, feeding unit includes the first support frame, the first rotating cylinder 1022, feeding roller 1023.First rotation
Cylinder 1022 is rotatably assorted with the first support frame, and the first rotating cylinder 1022 can be around itself center axis rotation.Several
Feeding roller 1023 is distributed on the first rotating cylinder 1022 around the central axis of the first rotating cylinder 1022 and 1023 energy of feeding roller
Around the center axis rotation of itself.
As shown in figure 4, as a preferred option, the first rotating cylinder 1022 includes the first left plectane being oppositely arranged
10221, the first right plectane 10222.Connected between first left plectane 10221, the first right plectane 10222 by first rotating shaft 10223
It connecing, the center of the first left plectane 10221 is exposed in one end of first rotating shaft 10223 and one end of the first support frame is rotatably assorted, the
The other end of one shaft 10223 exposes the center of the first right plectane 10222 and the other end of the first support frame is rotatably assorted.Feeding
The end of roller 1023 is rotatably assorted with corresponding plectane.
Above-mentioned each rotation connection is preferably realized by first bearing (being not drawn into figure).Such as first rotating shaft 10223
End connected by corresponding with the first support frame end of first bearing.The end of feeding roller 1023 by second bearing with it is right
The plectane connection answered.
Above-mentioned each rotation connection is preferably also that the end of first rotating shaft 10223 passes through in the first support frame corresponding end
Through-hole, the end of feeding roller 1023 pass through the upper through-hole of corresponding plectane, and end can rotate realization in corresponding through-hole.When
So, between the end of first rotating shaft 10223 and the first support frame, the rotating manner of the end of feeding roller 1023 and corresponding plectane
It can be realized using other existing technologies.
As shown in figure 4, as a preferred option, the other end of first rotating shaft 10223 exposes in the first right plectane 10222
The another of the first support frame is arranged in the input axis connection of the heart and first driving device 1024, the fixing end of first driving device 1024
One end.
As shown in figure 4, as a preferred option: intake mechanism further includes first close to induction mechanism.First close induction
Mechanism includes first baffle 1031, the first contact.The higher one end in position is set in being rotatably assorted in first baffle 1031
On the fixed transverse rod 10213 of first support frame upper end, the lower one end in position and position in the first contact in first baffle 1031
Set the connection of higher one end, in the first contact the lower one end in position can with it is exhausted in the feeding roller 1023 in feeding state
The outermost layer of edge film 501 contacts.First is arranged on fixed transverse rod 10213 close to the opposite first baffle 1031 of switch 1033.
As shown in Fig. 4,6, as a preferred option: the first contact includes first connecting rod 10321, the first idler wheel
10322, the outermost layer of the first idler wheel 10322 and insulation film 501 is in rolling contact.10321 position of first connecting rod higher one
End is connect with lower one end in position in first baffle 1031, and 10321 position of first connecting rod passes through pin shaft (figure compared with the one end at bottom
In do not mark) be rotatably assorted with the first idler wheel 10322.
As shown in Fig. 1,12, as a preferred option: intake mechanism further includes the first automatic conveying device, and first is automatic defeated
Sending device includes first shell 1041, the first scroll wheel 1042.First elevating mechanism 101 is arranged in first shell 1041, the
One scroll wheel 1042 is mounted on the bottom of first shell 1041, and the first scroll wheel 1042 is driven by the second driving device 1043.
Second is provided in vacuum chamber 401 close to switch 105, the second close switch 105 is to monitor intake mechanism in vacuum chamber 401
In position, the outside of vacuum chamber 401 is provided with third close to switch 106 at the upstream end of vacuum chamber 401, and third is approached and opened
106 are closed to monitor position of the intake mechanism outside vacuum chamber 401.
As shown in figure 12, as a preferred option: the with the cooperation of the first automatic conveying device is provided in vacuum chamber 401
One guide rail 107.The bottom of first scroll wheel 1042 is embedded in the first guide rail 107.
As shown in Figure 1, first driving device 1024 of the invention, the second driving device 1043 are driven by controller,
The interior or outdoor setting station 701 of vacuum chamber 401, is arranged the controller in station 701.First driving dress of the invention
Setting the 1024, second driving device 1043 is preferably servo motor or servo motor.
As shown in Fig. 1,2,4,12, each feeding roller 1023 for being wound with insulation film 501 is placed sequentially in first turn
On dynamic cylinder 1022, the feeding of insulation film 501 in the feeding roller 1023 nearest apart from film-coating mechanism is subjected to coating film treatment, when
Insulation film 501 in the feeding roller 1023 close to when unwinding complete, the rotation of first baffle 1031 to first close to switch
1033 corresponding positions, first issues signal to controller close to switch 1033, and controller drives 1043 turns of the second driving device
Dynamic, driving chamber door 4011 is opened, other elements stop working in control vacuum tank, and the rotation of the second driving device 1043 drives the
One scroll wheel 1042 is moved along the first guide rail 107 to the upstream end of vacuum chamber 401, and feeding unit is removed vacuum chamber 401.When
When feeding unit is moved to close to the position of the close switch 106 of third, the close sending signal of switch 106 of third to controller,
Controller controls the second driving device 1043 and stops operating, while first driving device 1024 being driven to rotate, first driving device
1024 rotations drive the first rotating cylinder 1022 to rotate certain angle, angle of the angle between two neighboring feeding roller 1023
Degree.Require supplementation with is that angle between the two neighboring feeding roller 1023 of the present embodiment is all the same.At this point, staff will be above-mentioned fast
The terminal of remaining insulation film 501 in complete feeding roller 1023 is unwound to need to insulate in the feeding roller 1023 fed with next
The beginning of film 501 connects, then by the start button on operation station 701, drives the second driving device by controller
1043 rotate backward, and the rotation of the second driving device 1043 drives the first scroll wheel 1042 along the first guide rail 107 to vacuum chamber 401
Upstream end it is mobile, when feeding unit is moved to close to second close to the position of switch 105, second close to the hair of switch 105
Signal to controller, controller controls the second driving device 1043 and stops operating out, meanwhile, driving chamber door 4011 is closed, is controlled
Other elements are started to work in vacuum tank processed.
In some embodiments, the preferential work of vacuum pump vacuum chamber 401 being vacuum-treated in above-mentioned other elements
Make, it is for example true by the pressure sensor being arranged in vacuum chamber 401 after the vacuum degree in vacuum chamber 401 reaches setting range
Empty sensor issues signal to controller, drives other elements to work again by controller.When the vacuum degree in vacuum chamber 401 not
Reach setting range, other elements stop working.
As shown in Figure 1, in addition, since the first elevating mechanism 101 of the invention passes through the first support frame 108 support feeding dress
It sets, can be realized moving up and down for feeding unit, if the rotation precision of first driving device 1024 declines, the first lifting can be passed through
The height of feeding unit is adjusted in mechanism 101, thus guarantee feeding roller 1023 its height fed every time, position consistency,
The phenomenon of tension shakiness caused by avoiding thus.
Further, the first elevating mechanism 101 of the invention is preferably servo-cylinder or servo cylinder, by controller control
System.Further, since the bottom of the first scroll wheel 1042 is embedded in guide rail, guarantee that the first scroll wheel 1042 does not deviate by, it is real
The existing consistent technical effect of motion profile.
As shown in Figure 1, being provided with preheating mechanism between intake mechanism and film-coating mechanism, preheating mechanism is to feeding machine
The insulation film 501 of structure feeding is preheated.Preheating mechanism is preferably provided on the inner roof wall of vacuum chamber 401.
As shown in figure 13, preheating mechanism includes jointed gear unit, heater 202, the first telescopic device 203.Connecting rod passes
Motivation structure includes fixed link 2011, drive rod 2012.The higher one end in position is arranged in vacuum chamber 401 in fixed link 2011
On roof, the lower one end in position and higher one end in position in drive rod 2012 are hinged in fixed link 2011, drive rod 2012
Having heaters 202 is installed in middle lower one end in position, and reflector 204 can also be arranged in the periphery of heater 202.
As shown in figure 13, further, the higher one end in position is arranged by the second elevating mechanism 205 in fixed link 2011
On the inner roof wall of vacuum chamber 401.Connecting plate 206 is provided between fixed link 2011 and the second elevating mechanism 205.
The fixing end of first telescopic device 203 is hinged on connecting plate 206, the telescopic end and biography of the first telescopic device 203
Lever 2012 is hinged.
Drive rod 2012 is driven to swing by the stretching motion of the first telescopic device 203, to drive heater 202 or so
It swings.Meanwhile cooperating the elevating movement of the second elevating mechanism 205, drive heater 202 to move up and down, so that heater 202 is real
The movement of existing 3 D stereo, and it is able to achieve the movement in same level, more uniform preheating is carried out to insulation film 501,
And it can be by adjusting control of the height realization of heater 202 to the pre- calorific intensity of heater 202.
Preferably, the first telescopic device 203 of the invention, the second elevating mechanism 205 also can be servo-cylinder or servo
Cylinder controls its work by controller, further realizes automation.
As shown in Figure 1, as a preferred option: being provided with belt conveyer 207 below preheating mechanism, belt passes
Device 207 is sent to transmit the insulation film 501 fed from intake mechanism to film-coating mechanism.Since belt is transmitted as plane transmission,
So that the smooth conveying on belt of insulation film 501, further increases the uniformity of preheating.
As shown in Figure 1, film-coating mechanism includes the first evaporation coating device, including the first vapor deposition drum 3011, the first evaporation boat
3012.The lower section of the first vapor deposition drum 3011 is arranged in first evaporation boat 3012.The top opening region of first evaporation boat 3012 is set
It is equipped with the first movable plate component of control 3012 openings of sizes of the first evaporation boat.
As shown in figure 15, as a preferred option: the first movable plate component includes that the first left movable plate 30131, first is right
Movable plate 30132, the first left telescopic device 30133, the first right telescopic device 30134.In first left movable plate 30131 position compared with
One end of low one end and the top of the first evaporation boat 3012 is hinged, and the higher one end in position is free end.First is left flexible
The fixing end of device 30133 and the outer wall of the first evaporation boat 3012 are hinged, the telescopic end and first of the first left telescopic device 30133
Left movable plate 30131 is hinged.
The lower one end in position and the other end at the top of the first evaporation boat 3012 are hinged in first right movable plate 30132,
The higher one end in its position is free end, and the fixing end of the first right telescopic device 30134 and the outer wall of the first evaporation boat 3012 are cut with scissors
It connects, the telescopic end of the first right telescopic device 30134 and the first right movable plate 30132 are hinged.
By the first left telescopic device 30133, the stretching motion of the first right telescopic device 30134, the first left activity is driven
Plate 30131, the first right movable plate 30132 free end deviate from or move toward one another, to control openings of sizes, reach adjusting plating
The technical effect of film amount.
As shown in Figure 1, further, be provided with third elevating mechanism 3014 below the first evaporation coating device, third liter
Descending mechanism 3014 is to drive the first evaporation coating device to go up and down.The first evaporation coating device and third elevating mechanism 3014 it
Between be provided with the second support frame (not marking in figure).
3014 elevating movement of third elevating mechanism drives the first evaporation boat 3012 close or drum 3011 is deposited far from first,
It is the technical effect realizing plated film amount and adjusting by adjusting the first evaporation boat 3012 at a distance from the first vapor deposition drum 3011.
Preferably, the first left telescopic device 30133 of the invention, the first right telescopic device 30134, third elevating mechanism
3014 also can be servo-cylinder or servo cylinder, its work be controlled by controller, to further realize automation.
As shown in Figure 1, film-coating mechanism further includes the second evaporation coating device, including the second vapor deposition drum 3021, second evaporates
Boat 3022.The lower section of the second vapor deposition drum 3021 is arranged in second evaporation boat 3022.The top opening region of second evaporation boat 3022
It is provided with the second movable plate component of control 3022 openings of sizes of the second evaporation boat.
As shown in figure 16, the second movable plate component includes the second left movable plate 30231, the second right movable plate 30232, second
Left telescopic device, the second right telescopic device.The lower one end in position and the second evaporation boat 3022 in second left movable plate 30231
The one end at top is hinged, and the higher one end in position is free end.The fixing end and the second evaporation boat of second left telescopic device
3022 outer wall is hinged, and the telescopic end of the second left telescopic device and the second left movable plate 30231 are hinged.
The lower one end in position and the other end at the top of the second evaporation boat 3022 are hinged in second right movable plate 30232,
The higher one end position in its position free end, the fixing end of the second right telescopic device and the outer wall of the second evaporation boat 3022 are hinged, the
The telescopic end of two right telescopic devices and the second right movable plate 30232 are hinged.
The effect of first movable plate component and the effect and working principle phase of working principle and the second movable plate component
Together, the present embodiment is not repeated herein.
As shown in figure 16, it is preferable that the second evaporation coating device further includes screening arrangement 3024, screening arrangement 3024 to
Limit the width fallen on insulation film 501 from the metal melting that the opening of the second evaporation boat 3022 evaporates, region.Shielding
Device 3024 includes link transmission shielding body, including fixing seat 30241, barricade 30242, the second telescopic device 30243.Gu
The lower one end in position is arranged in the inner bottom wall of vacuum chamber 401 by pedestal 30244 in reservation 30241, in fixing seat 30241
The higher one end in position and one end of barricade 30242 are hinged, and the other end of barricade 30242 can be from the opening of the second evaporation boat
The one end at place extends to the other end.The fixing end and fixing seat 30241 of second telescopic device 30243 are hinged, the second telescopic device
30243 telescopic end and barricade 30242 is hinged.Through slot is provided on barricade 30242, the directed parallel of through slot is in insulation
501 transmission direction of film.Preferably, through slot is located at the intermediate region of barricade 30242, certainly also can be in barricade 30242
Both sides.
It drives barricade 30242 to rotate by the stretching motion of the second telescopic device 30243, when needing to shield, will shield
Plate 30242 turns to horizontal position.At this point, from the metal in the second evaporation boat 3022 insulation film can only be plated in by through slot
The technical effect selectively thickeied is realized in 501 intermediate region.
As a preferred option: link transmission shielding body quantity is two, and is symmetricly set on the second evaporation boat 3022
Two sides.Through slot on different barricades 30242 is of different size.The present invention has the through slot of different through slot width wide by providing
Degree realizes the alternative for thickening width, convenient for the processing of different model film.
As shown in Figure 1, as a preferred option: being provided with the 4th elevating mechanism below the second evaporation coating device
3025, the 4th elevating mechanism 3025 is to drive the second evaporation coating device elevating movement.4th elevating mechanism 3025 is to second
The effect of evaporation coating device is identical as effect of the third elevating mechanism 3025 to the first evaporation coating device.
The left telescopic device of of the invention second, the second right telescopic device, the second telescopic device 30243, the 4th elevating mechanism
3025 are also possible to servo-cylinder or servo cylinder, control its work by controller, to further realize automation.?
In some embodiments, the first evaporation boat of the invention, the second evaporation boat outer wall on thermal insulation layer can also be set.In this way, then first,
Second left telescopic device and the first, second right telescopic device are arranged on the outer wall of thermal insulation layer.Thermal insulation layer can be aluminium sheet with
And the heat insulation foam between aluminium sheet, evaporation boat or polyurethane resin coat are set.
As shown in Figure 1, being provided with film between intake mechanism and film-coating mechanism, between film-coating mechanism and winding mechanism
Clamping device.Film clamping device of film includes upper film clamp component and lower film clamp component.Upper film clamp component is located at
The top of film, lower film clamp component are located at the lower section of film.Upper film clamp component, lower film clamp component move toward one another
To clamp film.
The present embodiment is introduced for the film clamping device of film effect between intake mechanism and film-coating mechanism, film-coating mechanism
Film clamping device of film effect between winding mechanism and the film clamping device of film effect between intake mechanism and film-coating mechanism are such as
A rut out.
The effect of the device is to cooperate intake mechanism, when intake mechanism, which removes vacuum chamber 401, prepares roll change, by setting
Film clamp component is set to clamp insulation film 501, so that insulation film 501 can only be unwound out from feeding roller 1023,
The metallized film 801 of plated film winding will not be unwound out from winding mechanism, prevent film from inversely moving.
And the effect of the film clamping device of film between film-coating mechanism and winding mechanism is cooperation winding mechanism, works as winding mechanism
When removing the preparation roll change of vacuum chamber 401, metallized film 801 is clamped by the way that film clamp component is arranged, so that metal
Changing film 801 can only unwind out from take-up roll, will not unwind out non-plated film insulation film 501 from intake mechanism, prevent
Film inversely moves.
As shown in Figure 1, as a preferred option: upper film clamp component includes upper elevating mechanism 40011, upper grip block
40012, the fixing end of upper elevating mechanism 40011 is arranged on the inner roof wall of vacuum chamber 401, and upper elevating mechanism 40011 stretches
End is connect with upper grip block 40012.Lower film clamp component includes lower elevating mechanism 4013, lower grip block 4014, lower elevator
The fixing end of structure 4013 is arranged in the inner bottom wall of vacuum chamber 401, the telescopic end of lower elevating mechanism 4013 and lower grip block 4014
Connection.
Due to the setting of upper elevating mechanism 40011, lower elevating mechanism 4013, so that film clamping device of film has following function again
Effect: when insulation film 501 is in transmission, by upper elevating mechanism 40011, lower elevating mechanism 4013 control upper grip block 40012,
Lower 4014 spacing of grip block carries out the limit of vertical direction to insulation film 501, prevents insulation film 501 in transmit process
The floating phenomenon generated since tension is uneven, guarantees 501 smooth transport of insulation film.
As shown in figure 14, preferably: being provided with rubber at the bottom of upper grip block 40012, the top of lower grip block 4014
Glue-line 4015.By the flexible nature of rubber layer 4015, avoids insulation film 501 from contacting with grip block and generate scratch print.
Upper elevating mechanism 40011 of the invention, lower elevating mechanism 4013 also can be servo-cylinder or servo cylinder, pass through
Controller controls its work, to further realize automation.
As a preferred solution: chamber door 4011 of the invention, out room 4012 are automatic seal door, specifically can be unidirectional
Door, bidirectional gate, shutter door, rolling screen door, one kind of folding door or other prior arts automatic seal door.Such as patent application
201220092640.6 a kind of automatic lifting sealing disclosed in disclosed two way seal door, patent application 201521020622.7
Automatic lifting airtight door device, 201420166265.4 disclosure of patent application disclosed in door, patent application 200820193008.4
Intelligent transport vehicle double-sealed door.
Intake mechanism of the invention is similar with winding mechanism structure, and winding mechanism includes the 5th elevating mechanism, winding device.
The telescopic end of 5th elevating mechanism cooperates with winding device to drive winding device to move up and down.
Winding device includes the second support frame, the second rotating cylinder, take-up roll.Second rotating cylinder and the second support frame turn
Dynamic cooperation, and the second rotating cylinder can be around itself center axis rotation.Several take-up rolls are in the second rotating cylinder
Mandrel is distributed on the second rotating cylinder, and take-up roll can be around itself center axis rotation.
As a preferred option, the second rotating cylinder includes the second left plectane being oppositely arranged, the second right plectane.Second is left
It is connected between plectane, the second right plectane by the second shaft, the center and second of the second left plectane is exposed in one end of the second shaft
One end of support frame is rotatably assorted, and the other end of the second shaft exposes the center of the second right plectane and the other end of the second support frame
It is rotatably assorted.The end of take-up roll is rotatably assorted with corresponding plectane.
Above-mentioned each rotation connection is preferably realized by second bearing.As the end of the second shaft passes through second bearing
End connection corresponding with the second support frame.The end of take-up roll is connected by second bearing with corresponding plectane.
Above-mentioned each rotation connection is preferably also that the end of the second shaft passes through the through-hole in the second support frame corresponding end,
The end of take-up roll passes through the upper through-hole of corresponding plectane, and end can rotate realization in corresponding through-hole.Certainly, the second shaft
End and the second support frame between, the end of take-up roll and the rotating manner of corresponding plectane can also use other existing technologies
To realize.
As a preferred option, the other end of the second shaft exposes the defeated of center and the third driving device of the second right plectane
Enter axis connection, the other end of the second support frame is arranged in the fixing end of third driving device.
As shown in Figure 1,5, preferably: the power resources of film transmission of the present invention are in the 4th driving of driving take-up roll rotation
Device 5012 and belt conveyer 207.
5th elevating mechanism, third driving device, fourth drive device 5012 also can be servo-cylinder or servo cylinder,
And it is controlled by controller.
As shown in figure 5, as a preferred option: winding mechanism further includes second close to induction mechanism.Second close induction
Mechanism includes second baffle, the second contact.The higher one end in position is set in the second support with being rotatably assorted in second baffle
On the fixed transverse rod of frame upper end, the lower one end in position is connect with higher one end in position in the second contact in second baffle,
The lower one end in position can connect with the outermost layer of the metallized film 801 in the take-up roll in reeling condition in second contact
Touching.4th is arranged on fixed transverse rod close to the opposite second baffle of switch 5011.
As shown in Figure 4,5, the present invention provides the structure of the first support frame of one kind, the second support frame, includes fixed transverse rod
10213, left branching rod 10211, right strut 10212.Wherein, left branching rod 10211 includes one end of corresponding support frame, right strut
10212 include the other end of corresponding support frame.Certainly, first support frame of the invention, the second support frame structure be not limited only to
Such structure, the support frame or make through the support frame of the present invention that can reach that the prior art is enlightened that any prior art provides
Support frame should be within the scope of the present invention.
As shown in fig. 7, as a preferred option: the second contact include the second connecting rod, the second idler wheel, the second idler wheel with
The outermost layer of metallized film 801 is in rolling contact.The second higher one end in connecting rod position and position in second baffle are lower
One end connection, the second connecting rod position are rotatablely connected compared with the one end at bottom by the second pin shaft and the second idler wheel.
As shown in Figure 1,3, as a preferred option: winding mechanism further includes identical with the first automatic conveying device structure
Second automatic conveying device.The 5th is provided in vacuum chamber 401 to roll up close to switch 901 to monitor close to switch 901, the 5th
Around position of the mechanism in vacuum chamber 401, it is close that 401 outside of vacuum chamber is provided with the 6th at the outlet end of vacuum chamber 401
Switch 1001, the 6th close switch 1001 is to monitor position of the winding mechanism outside vacuum chamber 401.
As a preferred option: the second guide rail with the cooperation of the second automatic conveying device is provided in vacuum chamber 401.
As illustrated in figs. 8-11, the difference of winding mechanism and intake mechanism is: (1) intake mechanism is to solve the problems, such as feed supplement,
Winding mechanism is to solve discharging problem, but principle is similar.(2) the close switch 1033 of first in intake mechanism is to work as feeding roller
For insulation film 501 in 1023 close to when unwinding complete, the rotation of first baffle 1031 is extremely corresponding close to switch 1033 with first
Position；And in winding mechanism the 4th close to open 5011 be when the metallized film 801 in take-up roll is wound to certain thickness,
Second baffle rotate to the 4th close to the corresponding position of switch 5011.
401 many places of vacuum chamber of the present invention are provided with jockey pulley, deflector roll, convenient for the conduction of film and the control of tension,
Chill roll 1301, the cooling effect after further increasing plated film are additionally provided between film-coating mechanism, winding mechanism.
It is of the invention close to switch be a kind of position or displacement sensor.In some embodiments: of the invention is each
Wheel prepares the limited block for preventing it from doing relative motion on respective axis.Limited block is symmetricly set on wheel two sides and is interference fitted and is arranged
In the periphery of respective shaft；Or it is located at respective shaft periphery and is bolted its position.Certainly, limited block of the invention also can
It is realized using other prior arts.
As shown in figure 12, as a preferred option: each scroll wheel includes driving wheel, several driven wheels, and driving wheel is by right
The driving device driving answered, it is specific: dress is directly driven or be arranged between driving device and driving wheel by driving device
The gear-box 1044 of gear is carried, the gear rotation in driving device rotation driven gear case, then driving wheel rotation is driven by gear,
And driven wheel is driven by driving wheel.Mounting rack 1045 is provided on shell, the fixing end of driving device is arranged on mounting rack.
The driving method of automatic conveying device of the invention is also not necessarily limited to the two-wheeled of the structure that the embodiment refers to or the prior art
Driving, four-wheel drive or other existing driving methods.
Preferably, each elevating mechanism of the invention, telescopic device, driving device, close switch connect with controller respectively
It connects.By above-mentioned automation control, realize insulation film 501 it is quick, efficiently fill into, preheat, plated film, winding, saving
Operating time, the work load for saving worker.
Certainly, the present invention can also be realized by non-automated.For example, using transparent glass manufacture vacuum chamber 401 or
Observation window is installed on vacuum chamber 401 or monitor is installed on vacuum chamber 401, by real in the direct observation ward of staff
Border situation manually controls the working condition of all parts by station 701.
The above is only the preferred embodiments of the invention, are not intended to limit the invention creation, all in the present invention
Made any modifications, equivalent replacements, and improvements etc., should be included in the guarantor of the invention within the spirit and principle of creation
Within the scope of shield.
Claims (6)
1. a kind of metallized film processing vacuum coating equipment, including vacuum chamber and the feeding machine being arranged in the vacuum chamber
Structure, preheating mechanism, film-coating mechanism, winding mechanism；The intake mechanism, preheating mechanism, film-coating mechanism, winding mechanism are according to technique
Process is set gradually from front to back；It is characterized by:
Film clamp dress is provided between the intake mechanism and film-coating mechanism, between the film-coating mechanism and winding mechanism
It sets；The film clamping device of film includes upper film clamp component and lower film clamp component；The upper film clamp component position
In the top of insulation film, the lower film clamp component is located at the lower section of film；The upper film clamp component, lower film folder
Component is held to move toward one another to limit film；
The intake mechanism includes the first elevating mechanism, feeding unit；The telescopic end of first elevating mechanism and the feeding
Device cooperation is to drive the feeding unit to move up and down；The winding mechanism includes the 5th elevating mechanism, winding device；Institute
The telescopic end for stating the 5th elevating mechanism and winding device cooperation are to drive the winding device to move up and down；
The preheating mechanism is arranged on the inner roof wall of the vacuum chamber；The preheating mechanism includes jointed gear unit, heating
Device, the first telescopic device；The jointed gear unit includes fixed link, drive rod；Higher one end in position in the fixed link
It is arranged on the inner roof wall of the vacuum chamber by the second elevating mechanism, the lower one end in position and the biography in the fixed link
The higher one end in position is hinged in lever, and the lower one end in position is equipped with the heater in the drive rod；Described first
The fixing end of telescopic device is hinged on second elevating mechanism and the join domain of the fixed link, the described first flexible dress
The other end set and the drive rod are hinged；
The film-coating mechanism includes the first evaporation coating device, the second evaporation coating device；The first evaporation coating device packet
Include the first vapor deposition drum, the first evaporation boat；The lower section of the first vapor deposition drum is arranged in first evaporation boat；First evaporation
The top opening region of boat is provided with the first movable plate component for adjusting the first evaporation boat openings of sizes；
Second evaporation coating device includes the second vapor deposition drum, the second evaporation boat, screening arrangement；The second evaporation boat setting
In the lower section of the second vapor deposition drum；The top opening region of second evaporation boat is provided with adjusting second evaporation boat and opens
Second movable plate component of mouth size；The screening arrangement is to limit the gold evaporated from the opening of second evaporation boat
Belong to the width fallen on insulation film, region.
2. a kind of metallized film processing vacuum coating equipment according to claim 1, it is characterised in that: in the preheating
Be provided with belt conveyer below mechanism, the belt conveyer by from the insulation film that the intake mechanism is fed to
The film-coating mechanism transmission.
3. a kind of metallized film processing vacuum coating equipment according to claim 1, it is characterised in that: described first steams
Third elevating mechanism is provided with below hair coating apparatus, the third elevating mechanism is to drive first evaporation coating to fill
Set elevating movement；Be provided with the 4th elevating mechanism below second evaporation coating device, the 4th elevating mechanism to
Drive the second evaporation coating device elevating movement.
4. a kind of metallized film processing vacuum coating equipment according to claim 3, it is characterised in that: link transmission screen
Covering mechanism quantity is two, and is symmetricly set on the two sides of second evaporation boat.
5. a kind of metallized film processing vacuum coating equipment according to claim 1, it is characterised in that: the upper film
Clamp assemblies include upper elevating mechanism, upper limit plate, and the interior top of the vacuum chamber is arranged in the fixing end of the upper elevating mechanism
On wall, the telescopic end of the upper elevating mechanism is connect with the upper limit plate；The lower film clamp component includes lower elevator
The fixing end of structure, lower limiting board, the lower elevating mechanism is arranged in the inner bottom wall of the vacuum chamber, the lower elevating mechanism
Telescopic end is connect with the lower limiting board.
6. a kind of metallized film processing vacuum coating equipment according to claim 5, it is characterised in that: in the upper limit
Rubber layer is provided at the top of the position bottom of plate, lower limiting board.
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| CN201610840535.9A CN106435513B (en) | 2016-09-22 | 2016-09-22 | Vacuum coating equipment is used in a kind of processing of metallized film |
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| CN201610840535.9A CN106435513B (en) | 2016-09-22 | 2016-09-22 | Vacuum coating equipment is used in a kind of processing of metallized film |
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| CN112368813A (en) * | 2018-06-14 | 2021-02-12 | 应用材料公司 | Vaporizer for depositing material on substrate, method of forming vaporizer, and vaporization apparatus for depositing material on flexible substrate |
| CN112366081B (en) * | 2020-09-24 | 2022-05-27 | 铜陵市超越电子有限公司 | Inclined-plane type metallized film and preparation device and processing method thereof |
| CN113930719A (en) * | 2021-09-18 | 2022-01-14 | 铜陵市超越电子有限公司 | Vacuum coating machine for processing metallized film of capacitor |
| CN115747711B (en) * | 2022-11-18 | 2024-03-29 | 江门市兆业科技有限公司 | Metallized film coating machine capable of avoiding abrupt temperature change |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101768726A (en) * | 2008-12-30 | 2010-07-07 | 深圳市鹏桑普太阳能股份有限公司 | Continuous winding magnetic control sputtering vacuum coating device |
| CN201857424U (en) * | 2010-11-05 | 2011-06-08 | 北京星汉特种印刷有限公司 | Novel vacuum coating machine |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10140351A (en) * | 1996-11-05 | 1998-05-26 | Kobe Steel Ltd | Inline type vacuum film forming device |
| EP0913714B1 (en) * | 1997-05-16 | 2007-10-31 | Hoya Kabushiki Kaisha | Mechanism for imparting water repellency to both sides simultaneously |
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2016
- 2016-09-22 CN CN201610840535.9A patent/CN106435513B/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101768726A (en) * | 2008-12-30 | 2010-07-07 | 深圳市鹏桑普太阳能股份有限公司 | Continuous winding magnetic control sputtering vacuum coating device |
| CN201857424U (en) * | 2010-11-05 | 2011-06-08 | 北京星汉特种印刷有限公司 | Novel vacuum coating machine |
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