CN106244996B - A kind of metallized film processing thickening coating apparatus - Google Patents
A kind of metallized film processing thickening coating apparatus Download PDFInfo
- Publication number
- CN106244996B CN106244996B CN201610840515.1A CN201610840515A CN106244996B CN 106244996 B CN106244996 B CN 106244996B CN 201610840515 A CN201610840515 A CN 201610840515A CN 106244996 B CN106244996 B CN 106244996B
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- evaporation
- evaporation boat
- hinged
- movable plate
- telescopic device
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
Abstract
The present invention discloses a kind of metallized film processing and thickeies coating apparatus, according to technological process preheating mechanism, the first evaporation coating device, the second evaporation coating device successively from front to back；The preheating mechanism includes jointed gear unit, heater, the first telescopic device；First evaporation coating device includes the first vapor deposition drum, the first evaporation boat；First evaporation boat is arranged in the lower section of the first vapor deposition drum；The open top region of first evaporation boat is provided with the first movable plate component for adjusting the first evaporation boat openings of sizes；Second evaporation coating device includes screening arrangement, the second evaporation boat, the second vapor deposition drum, and second evaporation boat is arranged in the lower section of the second vapor deposition drum；The screening arrangement falls width on insulation film, region to limit the metal evaporated from the opening of second evaporation boat.The present invention has the advantages that preheat that uniform, pre- heat is adjustable, the processing that is applicable in Multiple Type film, coating film thickness is adjustable.
Description
Technical field
The present invention relates to coating machine technical field more particularly to a kind of metallized film processing thickening coating apparatus.
Background technology
The quality of critical piece of the metallized film as capacitor, quality directly affects the service life of capacitor.
Currently, metallized film mainly by vacuum coating machine prepare, including insulation film intake mechanism, film-coating mechanism and
Plate the winding film mechanism after metal layer.However, the vacuum coating equipment of the prior art has the following disadvantages：
（1）Existing vacuum coating equipment is after feeding unit feeding, and if directly carrying out plated film by film-coating mechanism, insulation is thin
The temperature of film surface is relatively low, and plating membrane stability is poor.Solution is made to improve the interface on its surface by the way that preheating device is arranged
With.But preheating device is mostly fixed, and it is non-adjustable, it causes to preheat uneven.The prior art such as patent application
201520245919.7 although a kind of disclosed vacuum coating equipment provides can be along the heating device that arc-shaped guide rail moves simultaneously
Heating device adjustable angle is realized by metallic flexible hose, and still, which is the physics using metallic flexible hose itself
Property is bent, it has not been convenient to the realization of automatic adjustment；In addition, arc-shaped guide rail movement can drive heating device movement that can only realize
Linear two-dimensional is adjusted, and cannot meet the adjusting of stereoscopic three-dimensional, it is difficult to realize that the control of pre- calorific intensity, pre- thermal uniformity also need to be carried
It is high.
（2）Film-coating mechanism passes through evaporation boat molten metal so that evaporation of metal to the insulation film that drum surface is deposited is formed
Metal layer realizes coating process.But the distance between its vapor deposition drum of traditional film-coating mechanism and evaporation boat are mostly definite value；And
And the openings of sizes of evaporation boat is also fixed, according to the thickness t of the coat of metal on basement membrane0=w0/（πph2）, it is known that, pass through tune
It saves the openings of sizes of evaporation boat and vapor deposition rouses the distance between evaporation boat and can control the thickness of the coat of metal.
（3）Some metallized films are plated again on the basis of aluminium film, then in intermediate region into one layer of enhancement layer, by secondary
Plated film improves the pressure-resistant performance and self-healing performance of film, it is therefore desirable to which corresponding plated film prepares two sets of evaporation boats, wherein with
The opening that enhancement layer corresponds to evaporation boat needs that screening arrangement is arranged, as a kind of 200810200949.0 aluminium of patent application thickeies gold
The vacuum evaporating coating machine of categoryization capacitor membrane, patent application 201310324470.9 are a kind of soft around vaporation-type vacuum coating
Machine realizes that region thickeies effect by screening arrangement.But the screening arrangement of existing technology is also mostly fixed, is in addition shielded
Straight slot structure, the shape covered on device are immutable, cause a setting that can only process a kind of film of model, if shielding dress can be realized
It sets automatic interchangeable, evaporation boat opening area and its spacing between vapor deposition drum is adjustable, then can meet the life of Multiple Type film
Production.
Invention content
That in view of the deficiencies of the prior art, the present invention provides a kind of preheatings is uniform, pre- heat is adjustable, is applicable in Multiple Type film
Processing, the processing of coating film thickness adjustable metallized film is with thickening coating apparatus.
The present invention is realized by following technological means solves above-mentioned technical problem：A kind of metallized film processing thickening
Coating apparatus, according to technological process preheating mechanism, the first evaporation coating device, the second evaporation coating device successively from front to back；
The preheating mechanism includes jointed gear unit, heater, the first telescopic device；The jointed gear unit include fixed link,
Drive link；The higher one end in position is arranged by the second elevating mechanism on the inner roof wall of the vacuum chamber in the fixed link,
The higher one end in position is hinged in the lower one end in position and the drive link in the fixed link, in the drive link position compared with
Low one end is equipped with the heater；The fixing end of first telescopic device be hinged on second elevating mechanism with it is described
On the join domain of fixed link, the other end and the drive link of first telescopic device are hinged；
First evaporation coating device includes the first vapor deposition drum, the first evaporation boat；First evaporation boat is arranged in institute
State the lower section of the first vapor deposition drum；The open top region of first evaporation boat, which is provided with, adjusts the first evaporation boat opening greatly
The first small movable plate component；
Second evaporation coating device includes screening arrangement, the second evaporation boat, the second vapor deposition drum, second evaporation boat
It is arranged in the lower section of the second vapor deposition drum；The screening arrangement evaporates to limit from the opening of second evaporation boat
Metal fall width on insulation film, region.
Preferably：Belt conveyer is provided with below the preheating mechanism, the belt conveyer will be from institute
The insulation film for stating intake mechanism feeding is transmitted to the film-coating mechanism.
Preferably：The first movable plate component includes the first left movable plate, the first right movable plate, the first left flexible dress
It sets, the first right telescopic device；Lower one end in position and the one of the top of first evaporation boat in the first left movable plate
End is hinged, the higher one end position in position free end；The fixing end of the first left telescopic device and first evaporation boat
Outer wall is hinged, and the telescopic end and the described first left movable plate of the first left telescopic device are hinged；
The lower one end in position and the other end at the top of first evaporation boat are hinged in the first right movable plate,
The higher one end in position is free end, and the fixing end of the first right telescopic device is hinged with the outer wall of first evaporation boat,
The telescopic end of the first right telescopic device is hinged with the described first right movable plate.
Preferably：Third elevating mechanism, the third elevating mechanism are provided with below first evaporation coating device
To drive the first evaporation coating device elevating movement.
Preferably：The screening arrangement includes link transmission shielding body, including fixed seat, barricade, the second flexible dress
It sets；The lower one end in position is arranged by pedestal in the inner bottom wall of the vacuum chamber in the fixed seat, in the fixed seat
The higher one end in position and one end of the barricade are hinged, and the other end of the barricade can be from the opening of two evaporation boat
The one end at place extends to the other end；The telescopic end of second telescopic device is hinged with the barricade, fixing end and fixation
Seat is hinged；Straight slot is provided on the barricade, the directed parallel of the straight slot is in insulation film transmission direction.
Preferably：Link transmission shielding body quantity is two, and is symmetricly set on the both sides of second evaporation boat.
The advantage of the invention is that：The present invention has the processing that preheating is uniform, pre- heat is adjustable, is applicable in Multiple Type film, plating
The advantage that film thickness is adjustable.
Further, drive link is driven to swing by the stretching motion of the first telescopic device, to drive heater or so to put
It is dynamic.Meanwhile coordinating the elevating movement of the second elevating mechanism, drive heater to move up and down so that heater realizes 3 D stereo
Movement, and can realize the movement in same level, more uniform preheating carried out to insulation film, and can by adjusting plus
The height of hot device realizes the control to the pre- calorific intensity of heater.
Further, the first telescopic device of the invention, the second elevating mechanism also can be servo-cylinder or servo cylinder, lead to
It crosses controller and controls its work, further realize automation.
Further, by the first left telescopic device, the stretching motion of the first right telescopic device, drive the first left movable plate,
The free end of first right movable plate deviates from or moves toward one another, and to control openings of sizes, reaches the technology effect for adjusting plated film amount
Fruit.
Further, the elevating movement of third elevating mechanism drives the first evaporation boat to be roused close to or far from the first vapor deposition, passes through
The first evaporation boat is adjusted at a distance from the first vapor deposition drum to be the technique effect realized plated film amount and adjusted.
Further, drive barricade rotation, when needing shielding, barricade is turned by the stretching motion of the second telescopic device
It moves to horizontal position.At this point, the intermediate region of insulation film can only be plated in by straight slot from the metal in the second evaporation boat, realize
The technique effect selectively thickeied.
Further, link transmission shielding body quantity is two, and is symmetricly set on the both sides of the second evaporation boat.Difference screen
Straight slot in shield plate is of different size.The present invention realizes by straight slot width of the offer with different straight slot width and thickeies width
Alternative is convenient for the processing of different model film.
Description of the drawings
Fig. 1 is the structural diagram of the present invention.
Fig. 2 is the structural schematic diagram of preheating mechanism in the present invention.
Fig. 3 is the structural schematic diagram of the first evaporation coating device in the present invention.
Fig. 4 is the structural schematic diagram of the second evaporation coating device in the present invention.
Specific implementation mode
To further describe the present invention, it is described further with reference to embodiment.
As shown in Figure 1, the present invention discloses a kind of metallized film processing thickening coating apparatus, in the past according to technological process
Preheating mechanism, the first evaporation coating device, the second evaporation coating device successively after.
As shown in Fig. 2, preheating mechanism includes jointed gear unit, heater 202, the first telescopic device 203.Link transmission
Mechanism includes fixed link 2011, drive link 2012.The higher one end in position is arranged on the interior top of vacuum chamber 401 in fixed link 2011
On wall, the lower one end in position and higher one end in position in drive link 2012 are hinged in fixed link 2011, in drive link 2012
Having heaters 202 is installed in the lower one end in position, and reflector 204 can also be arranged in the periphery of heater 202.
As shown in Fig. 2, further, the higher one end in position is arranged by the second elevating mechanism 205 in fixed link 2011
On the inner roof wall of vacuum chamber 401.It is provided with connecting plate 206 between fixed link 2011 and the second elevating mechanism 205.
The fixing end of first telescopic device 203 is hinged on connecting plate 206, the telescopic end and biography of the first telescopic device 203
Lever 2012 is hinged.
Drive link 2012 is driven to swing by the stretching motion of the first telescopic device 203, to drive heater 202 or so
It swings.Meanwhile coordinating the elevating movement of the second elevating mechanism 205, drive heater 202 to move up and down so that heater 202 is real
The movement of existing 3 D stereo, and can realize the movement in same level, more uniform preheating is carried out to insulation film 501,
And it can be by adjusting control of the height realization of heater 202 to 202 pre- calorific intensity of heater.
Preferably, the first telescopic device 203 of the invention, the second elevating mechanism 205 also can be servo-cylinder or servo
Cylinder controls its work by controller, further realizes automation.
As shown in Figure 1, as a preferred option：Belt conveyer 207 is provided with below preheating mechanism, belt passes
Device 207 is sent to transmit the insulation film 501 fed from intake mechanism to film-coating mechanism.Since belt is transmitted as plane transmission,
Make the smooth conveying on belt of insulation film 501, further increases the uniformity of preheating.
As shown in Figure 1, film-coating mechanism includes the first evaporation coating device, including the first vapor deposition drum 3011, the first evaporation boat
3012.First evaporation boat 3012 is arranged in the lower section of the first vapor deposition drum 3011.The open top region of first evaporation boat 3012 is set
It is equipped with the first movable plate component of control 3012 openings of sizes of the first evaporation boat.
As shown in figure 3, as a preferred option：First movable plate component includes the first left movable plate 30131, the first right work
Movable plate 30132, the first left telescopic device 30133, the first right telescopic device 30134.Position is relatively low in first left movable plate 30131
One end and the first evaporation boat 3012 top one end it is hinged, the higher one end in position is free end.First left flexible dress
It sets 30133 fixing end to be hinged with the outer wall of the first evaporation boat 3012, the telescopic end of the first left telescopic device 30133 and first left side
Movable plate 30131 is hinged.
The lower one end in position and the other end at the top of the first evaporation boat 3012 are hinged in first right movable plate 30132,
The higher one end in its position is free end, and the fixing end of the first right telescopic device 30134 and the outer wall of the first evaporation boat 3012 are cut with scissors
It connects, the telescopic end of the first right telescopic device 30134 and the first right movable plate 30132 are hinged.
By the first left telescopic device 30133, the stretching motion of the first right telescopic device 30134, the first left activity is driven
Plate 30131, the first right movable plate 30132 free end deviate from or move toward one another, to control openings of sizes, reach adjusting plating
The technique effect of film amount.
As shown in Figure 1, further：Third elevating mechanism 3014, third liter are provided with below first evaporation coating device
Descending mechanism 3014 to drive the first evaporation coating device lift.The first evaporation coating device and third elevating mechanism 3014 it
Between be provided with the second supporting rack（It is not marked in figure）.
3014 elevating movement of third elevating mechanism drives 3012 close or separate first vapor deposition drum 3011 of the first evaporation boat,
It is the technique effect realized plated film amount and adjusted by adjusting the first evaporation boat 3012 at a distance from the first vapor deposition drum 3011.
Preferably, the first left telescopic device 30133 of the invention, the first right telescopic device 30134, third elevating mechanism
3014 also can be servo-cylinder or servo cylinder, its work is controlled by controller, to further realize automation.It is preferred that
Each elevating mechanism, the telescopic device of the ground present invention is connect with controller respectively.
As shown in Figure 1, film-coating mechanism further includes the second evaporation coating device, including the second vapor deposition drum 3021, second evaporates
Boat 3022.Second evaporation boat 3022 is arranged in the lower section of the second vapor deposition drum 3021.The open top region of second evaporation boat 3022
It is provided with the second movable plate component of control 3022 openings of sizes of the second evaporation boat.
As shown in figure 4, the second movable plate component includes the second left movable plate 30231, the second right movable plate 30232, second
Left telescopic device, the second right telescopic device.The lower one end in position and the second evaporation boat 3022 in second left movable plate 30231
The one end at top is hinged, and the higher one end in position is free end.The fixing end of second left telescopic device and the second evaporation boat
3022 outer wall is hinged, and the telescopic end of the second left telescopic device and the second left movable plate 30231 are hinged.
The lower one end in position and the other end at the top of the second evaporation boat 3022 are hinged in second right movable plate 30232,
The higher one end position in its position free end, the fixing end of the second right telescopic device and the outer wall of the second evaporation boat 3022 are hinged, the
The telescopic end of two right telescopic devices and the second right movable plate 30232 are hinged.
Effect and operation principle phase of the effect and operation principle of second movable plate component with the second movable plate component
Together, the present embodiment is not repeated herein.
As shown in Figure 4, it is preferable that the second evaporation coating device further includes screening arrangement 3024, screening arrangement 3024 to
It limits the metal melting that is evaporated from the opening of the second evaporation boat 3022 and falls width on insulation film 501, region.Shielding
Device 3024 includes link transmission shielding body, including fixed seat 30241, barricade 30242, the second telescopic device 30243.Gu
The lower one end in position is arranged by pedestal 30244 in the inner bottom wall of vacuum chamber 401 in reservation 30241, in fixed seat 30241
The higher one end in position and one end of barricade 30242 are hinged, and the other end of barricade 30242 can be from the opening of two evaporation boats
One end extend to the other end.The fixing end of second telescopic device 30243 is hinged with fixed seat 30241, the second telescopic device
30243 telescopic end is hinged with barricade 30242.Straight slot is provided on barricade 30242, the directed parallel of straight slot is in insulation
501 transmission direction of film.Preferably, straight slot is located at the intermediate region of barricade 30242, certainly also can be in barricade 30242
Both sides.
It drives barricade 30242 to rotate by the stretching motion of the second telescopic device 30243, when needing shielding, will shield
Plate 30242 turns to horizontal position.At this point, from the metal in the second evaporation boat 3022 insulation film can only be plated in by straight slot
The technique effect selectively thickeied is realized in 501 intermediate region.
As a preferred option：Link transmission shielding body quantity is two, and is symmetricly set on the second evaporation boat 3022
Both sides.Straight slot on different barricades 30242 is of different size.The present invention is wide by straight slot of the offer with different straight slot width
Degree realizes the alternative for thickening width, is convenient for the processing of different model film.
As shown in Figure 1, as a preferred option：The 4th elevating mechanism is provided with below second evaporation coating device
3025, the 4th elevating mechanism 3025 is driving the second evaporation coating device elevating movement.4th elevating mechanism 3025 is to second
The effect of evaporation coating device is identical to the effect of the first evaporation coating device as third elevating mechanism 3025.
The second left telescopic device, the second right telescopic device, the second telescopic device 30243, the 4th elevating mechanism of the present invention
3025 can also be servo-cylinder or servo cylinder, its work is controlled by controller, to further realize automation.
In some embodiments, the first evaporation boat of the invention, the second evaporation boat outer wall on thermal insulation layer can also be set.In this way, then first,
Second left telescopic device and the first, second right telescopic device are arranged on the outer wall of thermal insulation layer.Thermal insulation layer can be aluminium sheet with
And the heat insulation foam or polyurethane resin coat being arranged between aluminium sheet, evaporation boat.
The preferred embodiment that these are only the invention is not intended to limit the invention creation, all in the present invention
All any modification, equivalent and improvement etc., should be included in the guarantor of the invention made by within the spirit and principle of creation
Within the scope of shield.
Claims (5)
1. a kind of processing of metallized film is with thickening coating apparatus, according to technological process preheating mechanism, first successively from front to back
Evaporation coating device, the second evaporation coating device；It is characterized in that：The preheating mechanism include jointed gear unit, heater,
First telescopic device；The jointed gear unit includes fixed link, drive link；The higher one end in position passes through in the fixed link
Second elevating mechanism is arranged on the inner roof wall of vacuum chamber, the lower one end in position and position in the drive link in the fixed link
It is hinged to set higher one end, the lower one end in position is equipped with the heater in the drive link；First telescopic device
Fixing end be hinged on the join domain of second elevating mechanism and the fixed link, first telescopic device it is another
End is hinged with the drive link；
First evaporation coating device includes the first vapor deposition drum, the first evaporation boat；First evaporation boat setting is described the
The lower section of one vapor deposition drum；The open top region of first evaporation boat, which is provided with, adjusts the first evaporation boat openings of sizes
First movable plate component；
Second evaporation coating device includes screening arrangement, the second evaporation boat, the second vapor deposition drum, the second evaporation boat setting
In the lower section of the second vapor deposition drum；The screening arrangement is limiting the gold evaporated from the opening of second evaporation boat
Belong to the width fallen on insulation film, region.
2. a kind of metallized film processing thickening coating apparatus according to claim 1, it is characterised in that：Described first
Movable plate component includes the first left movable plate, the first right movable plate, the first left telescopic device, the first right telescopic device；Described
The lower one end in position and the one end at the top of first evaporation boat are hinged in one left movable plate, the higher one end position in position
Free end；The fixing end of the first left telescopic device is hinged with the outer wall of first evaporation boat, the described first left flexible dress
The telescopic end set is hinged with the described first left movable plate；
The lower one end in position and the other end at the top of first evaporation boat are hinged in the first right movable plate, position
Higher one end is free end, and the fixing end of the first right telescopic device is hinged with the outer wall of first evaporation boat, described
The telescopic end of first right telescopic device is hinged with the described first right movable plate.
3. a kind of metallized film processing thickening coating apparatus according to claim 1, it is characterised in that：Described first
It is provided with third elevating mechanism below evaporation coating device, the third elevating mechanism is driving first evaporation coating
Device elevating movement.
4. a kind of metallized film processing thickening coating apparatus according to claim 1, it is characterised in that：The shielding
Device includes link transmission shielding body, including fixed seat, barricade, the second telescopic device；Position is relatively low in the fixed seat
One end be arranged in the inner bottom wall of the vacuum chamber by pedestal, the higher one end in position and the shielding in the fixed seat
One end of plate is hinged, and the other end of the barricade can extend to the other end from one end of the opening of two evaporation boat；Institute
The telescopic end for stating the second telescopic device is hinged with the barricade, and fixing end is hinged with fixed seat；It is arranged on the barricade
There is straight slot, the directed parallel of the straight slot is in insulation film transmission direction.
5. a kind of metallized film processing thickening coating apparatus according to claim 4, it is characterised in that：Link transmission
Shielding body quantity is two, and is symmetricly set on the both sides of second evaporation boat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610840515.1A CN106244996B (en) | 2016-09-22 | 2016-09-22 | A kind of metallized film processing thickening coating apparatus |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610840515.1A CN106244996B (en) | 2016-09-22 | 2016-09-22 | A kind of metallized film processing thickening coating apparatus |
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| CN106244996A CN106244996A (en) | 2016-12-21 |
| CN106244996B true CN106244996B (en) | 2018-09-21 |
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| CN201610840515.1A Expired - Fee Related CN106244996B (en) | 2016-09-22 | 2016-09-22 | A kind of metallized film processing thickening coating apparatus |
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108754430A (en) * | 2018-09-04 | 2018-11-06 | 宝鸡市创信金属材料有限公司 | A kind of adjustable tungsten thin-walled evaporation boat of disengagement area |
| CN110600264A (en) * | 2019-09-02 | 2019-12-20 | 海宁钟江智能科技有限公司 | Capacitor film and double-sided metal stacking process thereof |
| CN110597422B (en) * | 2019-09-02 | 2023-01-06 | 海宁光圣晶体材料有限公司 | Aluminum metal grid capacitor touch film and manufacturing method thereof |
| CN112210757B (en) * | 2020-09-23 | 2022-10-25 | 铜陵市超越电子有限公司 | Belt type isolation device for metallized film evaporation |
| CN113930719A (en) * | 2021-09-18 | 2022-01-14 | 铜陵市超越电子有限公司 | Vacuum coating machine for processing metallized film of capacitor |
| CN113930727B (en) * | 2021-09-18 | 2023-12-15 | 铜陵市超越电子有限公司 | Evaporation device for omnibearing flanging metallized film |
| CN113936930B (en) * | 2021-09-18 | 2023-05-02 | 铜陵市超越电子有限公司 | Thickened film plating device for metallized film of capacitor |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202390535U (en) * | 2011-12-09 | 2012-08-22 | 深圳市创益科技发展有限公司 | Continuous vacuum plating facility with heating device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6902622B2 (en) * | 2001-04-12 | 2005-06-07 | Mattson Technology, Inc. | Systems and methods for epitaxially depositing films on a semiconductor substrate |
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Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202390535U (en) * | 2011-12-09 | 2012-08-22 | 深圳市创益科技发展有限公司 | Continuous vacuum plating facility with heating device |
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Effective date of registration: 20211208 Address after: 244000 No. 1111, east section of Weiyi Road, Shizishan District, Tongling City, Anhui Province (1 plant and 2 warehouse) Patentee after: TONGLING BEYOND ELECTRONICS Co.,Ltd. Address before: 244000 No. 1111, east section of Weiyi Road, Tongguan District, Tongling City, Anhui Province (plant 1) Patentee before: TONGLING TONGCHUANG ELECTRONIC TECHNOLOGY CO.,LTD. |
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