CN106244985B - Film-coating mechanism is used in a kind of processing of metallized film - Google Patents
Film-coating mechanism is used in a kind of processing of metallized film Download PDFInfo
- Publication number
- CN106244985B CN106244985B CN201610840616.9A CN201610840616A CN106244985B CN 106244985 B CN106244985 B CN 106244985B CN 201610840616 A CN201610840616 A CN 201610840616A CN 106244985 B CN106244985 B CN 106244985B
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- Prior art keywords
- evaporation
- evaporation boat
- movable plate
- hinged
- coating
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The present invention discloses a kind of metallized film processing film-coating mechanism, and the first evaporation coating device, the second evaporation coating device are set gradually from front to back according to process flow；Film-coating mechanism includes the first evaporation coating device, including the first vapor deposition drum, the first evaporation boat；The lower section of the first vapor deposition drum is arranged in first evaporation boat；The top opening region of first evaporation boat is provided with the first movable plate component for adjusting the first evaporation boat openings of sizes；Second evaporation coating device, including the second vapor deposition drum, the second evaporation boat, screening arrangement；The lower section of the second vapor deposition drum is arranged in second evaporation boat；The top opening region of second evaporation boat is provided with the second movable plate component for adjusting the second evaporation boat openings of sizes；Screening arrangement is to limit the width fallen on insulation film from the metal that the opening of the second evaporation boat evaporates, region.The present invention has the advantages that be applicable in that the processing of Multiple Type film, coating film thickness is adjustable.
Description
Technical field
The present invention relates to coating machine technical fields more particularly to a kind of processing of metallized film to use film-coating mechanism.
Background technique
The quality of main component of the metallized film as capacitor, quality directly affects the service life of capacitor.
Currently, metallized film mainly by vacuum coating machine prepare, including insulation film intake mechanism, film-coating mechanism and
Winding film mechanism after plating metal layer.However, the vacuum coating equipment of the prior art has the following disadvantages:
(2) existing vacuum coating equipment is after feeding unit feeding, if directly carrying out plated film by film-coating mechanism, insulate thin
The temperature of film surface is lower, and plating membrane stability is poor.Solution is that the interface work on its surface is improved by setting preheating device
With.But preheating device is mostly fixed, and it is non-adjustable, cause preheating uneven.The prior art such as patent application
201520245919.7 although a kind of disclosed vacuum coating equipment provides can be along the heating device that arc-shaped guide rail moves simultaneously
Heating device adjustable angle is realized by metallic flexible hose, and still, which is the physics using metallic flexible hose itself
Property is bent, it has not been convenient to the realization of automatic adjustment；In addition, arc-shaped guide rail movement can drive heating device movement that can only realize
Linear two-dimensional is adjusted, and is not able to satisfy the adjusting of stereoscopic three-dimensional, it is difficult to realize the control of pre- calorific intensity, pre- thermal uniformity also needs to be mentioned
It is high.
(3) film-coating mechanism is by evaporation boat molten metal, so that evaporation of metal is formed to the insulation film that drum surface is deposited
Metal layer realizes coating process.But the distance between its vapor deposition drum of traditional film-coating mechanism and evaporation boat are mostly definite value；And
And the openings of sizes of evaporation boat is also fixation, according to the thickness t of the coat of metal on basement membrane0=w0/ (π ph2), it is known that, pass through tune
The openings of sizes and the distance between vapor deposition drum and evaporation boat that save evaporation boat can control the thickness of the coat of metal.
Summary of the invention
In view of the deficiencies of the prior art, the present invention provides a kind of processing for being applicable in Multiple Type film, coating film thickness are adjustable
Film-coating mechanism is used in metallized film processing.
The present invention, which passes through following technological means and realizes, solves above-mentioned technical problem: plated film is used in a kind of metallized film processing
Mechanism, including the first evaporation coating device, the second evaporation coating device, first evaporation coating device, the second evaporation coating
Device is set gradually from front to back according to process flow；The film-coating mechanism includes the first evaporation coating device, including first steams
Plating drum, the first evaporation boat；The lower section of the first vapor deposition drum is arranged in first evaporation boat；The top of first evaporation boat
Open area is provided with the first movable plate component for adjusting the first evaporation boat openings of sizes；The second evaporation coating dress
It sets, including the second vapor deposition drum, the second evaporation boat, screening arrangement；Second evaporation boat is arranged under the second vapor deposition drum
Side；The top opening region of second evaporation boat is provided with the second activity board group for adjusting the second evaporation boat openings of sizes
Part；The screening arrangement is to limit the width fallen on insulation film from the metal that the opening of second evaporation boat evaporates
Degree, region.
Preferably: the first movable plate component includes the first left movable plate, the first right movable plate, the first left flexible dress
It sets, the first right telescopic device；Lower one end in position and the one of the top of first evaporation boat in the first left movable plate
End is hinged, the higher one end position in position free end；The fixing end of the first left telescopic device and first evaporation boat
Outer wall is hinged, and the telescopic end and the described first left movable plate of the first left telescopic device are hinged；
The lower one end in position and the other end at the top of first evaporation boat are hinged in the first right movable plate,
The higher one end in position is free end, and the fixing end of the first right telescopic device and the outer wall of first evaporation boat are hinged,
The telescopic end and the described first right movable plate of the first right telescopic device are hinged.
Preferably: third elevating mechanism, the third elevating mechanism are provided with below first evaporation coating device
To drive the first evaporation coating device elevating movement.
Preferably: the second movable plate component includes the second left movable plate, the second right movable plate, the second left flexible dress
It sets, the second right telescopic device；Lower one end in position and the one of the top of second evaporation boat in the second left movable plate
End is hinged, and the higher one end in position is free end；The fixing end of the second left telescopic device and second evaporation boat
Outer wall is hinged, and the telescopic end and the described second left movable plate of the second left telescopic device are hinged；
The lower one end in position and the other end at the top of second evaporation boat are hinged in the second right movable plate,
The higher one end in position is free end, and the fixing end of the second right telescopic device and the outer wall of second evaporation boat are hinged,
The telescopic end and the described second right movable plate of the second right telescopic device are hinged.
Preferably: the screening arrangement includes link transmission shielding body, including fixing seat, barricade, the second flexible dress
It sets；The lower one end in position is arranged in the inner bottom wall of the vacuum chamber by pedestal in the fixing seat, in the fixing seat
The higher one end in position and one end of the barricade are hinged, and the other end of the barricade can be from the opening of two evaporation boat
The one end at place extends to the other end；The telescopic end and the barricade of second telescopic device are hinged, fixing end and fixation
Seat is hinged；Through slot is provided on the barricade, the directed parallel of the through slot is in insulation film transmission direction.
Preferably: link transmission shielding body quantity is two, and is symmetricly set on the two sides of second evaporation boat.
Preferably: the 4th elevating mechanism, the 4th elevating mechanism are provided with below second evaporation coating device
To drive the second evaporation coating device elevating movement.
The present invention has the advantages that the present invention has the advantages that be applicable in, the processing of Multiple Type film, coating film thickness is adjustable.
Further, by the first left telescopic device, the stretching motion of the first right telescopic device, drive the first left movable plate,
The free end of first right movable plate deviates from or moves toward one another, to control openings of sizes, reaches the technology effect for adjusting plated film amount
Fruit.
Further, the elevating movement of third elevating mechanism drives the first evaporation boat to rouse close to or far from the first vapor deposition, passes through
The first evaporation boat is adjusted at a distance from the first vapor deposition drum to be the technical effect realizing plated film amount and adjusting.
Further, drive barricade rotation, when needing to shield, barricade is turned by the stretching motion of the second telescopic device
It moves to horizontal position.At this point, the intermediate region of insulation film can only be plated in by through slot from the metal in the second evaporation boat, realize
The technical effect selectively thickeied.
Further, link transmission shielding body quantity is two, and is symmetricly set on the two sides of the second evaporation boat.Difference screen
Through slot in shield plate is of different size.The present invention has the through slot width of different through slot width by providing, and realizes and thickeies width
Alternative, convenient for the processing of different model film.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention.
Fig. 2 is the structural schematic diagram of the first evaporation coating device in the present invention.
Fig. 3 is the structural schematic diagram of the second evaporation coating device in the present invention.
Specific embodiment
To further describe the present invention, it is described further below with reference to embodiment.
As shown in Figure 1, film-coating mechanism includes the first evaporation coating device, including the first vapor deposition drum 3011, the first evaporation boat
3012.The lower section of the first vapor deposition drum 3011 is arranged in first evaporation boat 3012.The top opening region of first evaporation boat 3012 is set
It is equipped with the first movable plate component of control 3012 openings of sizes of the first evaporation boat.
As shown in Fig. 2, as a preferred option: the first movable plate component includes the first left movable plate 30131, the first right work
Movable plate 30132, the first left telescopic device 30133, the first right telescopic device 30134.Position is lower in first left movable plate 30131
One end and the top of the first evaporation boat 3012 one end it is hinged, the higher one end in position be free end.First left flexible dress
It sets 30133 fixing end and the outer wall of the first evaporation boat 3012 is hinged, the telescopic end of the first left telescopic device 30133 and first left
Movable plate 30131 is hinged.
The lower one end in position and the other end at the top of the first evaporation boat 3012 are hinged in first right movable plate 30132,
The higher one end in its position is free end, and the fixing end of the first right telescopic device 30134 and the outer wall of the first evaporation boat 3012 are cut with scissors
It connects, the telescopic end of the first right telescopic device 30134 and the first right movable plate 30132 are hinged.
By the first left telescopic device 30133, the stretching motion of the first right telescopic device 30134, the first left activity is driven
Plate 30131, the first right movable plate 30132 free end deviate from or move toward one another, to control openings of sizes, reach adjusting plating
The technical effect of film amount.
As shown in Figure 1, further, be provided with third elevating mechanism 3014 below the first evaporation coating device, third liter
Descending mechanism 3014 is to drive the first evaporation coating device to go up and down.The first evaporation coating device and third elevating mechanism 3014 it
Between be provided with the second support frame (not marking in figure).
3014 elevating movement of third elevating mechanism drives the first evaporation boat 3012 close or drum 3011 is deposited far from first,
It is the technical effect realizing plated film amount and adjusting by adjusting the first evaporation boat 3012 at a distance from the first vapor deposition drum 3011.
Preferably, the first left telescopic device 30133 of the invention, the first right telescopic device 30134, third elevating mechanism
3014 also can be servo-cylinder or servo cylinder, its work be controlled by controller, to further realize automation.
As shown in Figure 1, film-coating mechanism further includes the second evaporation coating device, including the second vapor deposition drum 3021, second evaporates
Boat 3022.The lower section of the second vapor deposition drum 3021 is arranged in second evaporation boat 3022.The top opening region of second evaporation boat 3022
It is provided with the second movable plate component of control 3022 openings of sizes of the second evaporation boat.
As shown in figure 3, the second movable plate component includes the second left movable plate 30231, the second right movable plate 30232, second
Left telescopic device, the second right telescopic device.The lower one end in position and the second evaporation boat 3022 in second left movable plate 30231
The one end at top is hinged, and the higher one end in position is free end.The fixing end and the second evaporation boat of second left telescopic device
3022 outer wall is hinged, and the telescopic end of the second left telescopic device and the second left movable plate 30231 are hinged.
The lower one end in position and the other end at the top of the second evaporation boat 3022 are hinged in second right movable plate 30232,
The higher one end position in its position free end, the fixing end of the second right telescopic device and the outer wall of the second evaporation boat 3022 are hinged, the
The telescopic end of two right telescopic devices and the second right movable plate 30232 are hinged.
The effect of second movable plate component and the effect and working principle phase of working principle and the second movable plate component
Together, the present embodiment is not repeated herein.
As shown in Figure 3, it is preferable that the second evaporation coating device further includes screening arrangement 3024, screening arrangement 3024 to
Limit the width fallen on insulation film 501 from the metal melting that the opening of the second evaporation boat 3022 evaporates, region.Shielding
Device 3024 includes link transmission shielding body, including fixing seat 30241, barricade 30242, the second telescopic device 30243.Gu
The lower one end in position is arranged in the inner bottom wall of vacuum chamber 401 by pedestal 30244 in reservation 30241, in fixing seat 30241
The higher one end in position and one end of barricade 30242 are hinged, and the other end of barricade 30242 can be from the opening of two evaporation boats
One end extend to the other end.The fixing end and fixing seat 30241 of second telescopic device 30243 are hinged, the second telescopic device
30243 telescopic end and barricade 30242 is hinged.Through slot is provided on barricade 30242, the directed parallel of through slot is in insulation
501 transmission direction of film.Preferably, through slot is located at the intermediate region of barricade 30242, certainly also can be in barricade 30242
Both sides.
It drives barricade 30242 to rotate by the stretching motion of the second telescopic device 30243, when needing to shield, will shield
Plate 30242 turns to horizontal position.At this point, from the metal in the second evaporation boat 3022 insulation film can only be plated in by through slot
The technical effect selectively thickeied is realized in 501 intermediate region.
As a preferred option: link transmission shielding body quantity is two, and is symmetricly set on the second evaporation boat 3022
Two sides.Through slot on different barricades 30242 is of different size.The present invention has the through slot of different through slot width wide by providing
Degree realizes the alternative for thickening width, convenient for the processing of different model film.
As shown in Figure 1, as a preferred option: being provided with the 4th elevating mechanism below the second evaporation coating device
3025, the 4th elevating mechanism 3025 is to drive the second evaporation coating device elevating movement.4th elevating mechanism 3025 is to second
The effect of evaporation coating device is identical as effect of the third elevating mechanism 3025 to the first evaporation coating device.
The left telescopic device of of the invention second, the second right telescopic device, the second telescopic device 30243, the 4th elevating mechanism
3025 are also possible to servo-cylinder or servo cylinder, control its work by controller, to further realize automation.?
In some embodiments, the first evaporation boat of the invention, the second evaporation boat outer wall on thermal insulation layer can also be set.In this way, then first,
Second left telescopic device and the first, second right telescopic device are arranged on the outer wall of thermal insulation layer.Thermal insulation layer can be aluminium sheet with
And the heat insulation foam between aluminium sheet, evaporation boat or polyurethane resin coat are set.
Preferably, each elevating mechanism of the invention, telescopic device are connect with controller respectively.Pass through above-mentioned automation
Control, realize insulation film 501 it is quick, efficiently fill into, preheat, plated film, winding, saved the operating time, saved worker
Work load.
Certainly, the present invention can also be realized by non-automated.For example, manufacturing vacuum chamber using transparent glass or true
Observation window is installed in empty room or monitor is installed on vacuum chamber, by actual conditions in the direct observation ward of staff, is led to
Cross the working condition that station manually controls all parts.
The above is only the preferred embodiments of the invention, are not intended to limit the invention creation, all in the present invention
Made any modifications, equivalent replacements, and improvements etc., should be included in the guarantor of the invention within the spirit and principle of creation
Within the scope of shield.
Claims (5)
1. a kind of metallized film processing film-coating mechanism, including the first evaporation coating device, the second evaporation coating device, described
First evaporation coating device, the second evaporation coating device are set gradually from front to back according to process flow；It is characterized by: described
Film-coating mechanism includes the first evaporation coating device, including the first vapor deposition drum, the first evaporation boat；First evaporation boat is arranged in institute
State the lower section of the first vapor deposition drum；The top opening region of first evaporation boat, which is provided with, adjusts the first evaporation boat opening greatly
The first small movable plate component；Second evaporation coating device, including the second vapor deposition drum, the second evaporation boat, screening arrangement；Institute
State the lower section that the second vapor deposition drum is arranged in the second evaporation boat；The top opening region of second evaporation boat is provided with adjusting
Second movable plate component of the second evaporation boat openings of sizes；The screening arrangement is to limit from second evaporation boat
The metal that opening evaporates falls in width on insulation film, region.
2. a kind of metallized film processing film-coating mechanism according to claim 1, it is characterised in that: first activity
Board group part includes the first left movable plate, the first right movable plate, the first left telescopic device, the first right telescopic device；Described first is left
The lower one end in position and the one end at the top of first evaporation boat are hinged in movable plate, and the higher one end position in position is freely
End；The fixing end of the first left telescopic device and the outer wall of first evaporation boat are hinged, the first left telescopic device
Telescopic end and the described first left movable plate are hinged；
The lower one end in position and the other end at the top of first evaporation boat are hinged in the first right movable plate, position
Higher one end is free end, and the fixing end of the first right telescopic device and the outer wall of first evaporation boat are hinged, described
The telescopic end of first right telescopic device and the described first right movable plate are hinged.
3. a kind of metallized film processing film-coating mechanism according to claim 1, it is characterised in that: first evaporation
Third elevating mechanism is provided with below coating apparatus, the third elevating mechanism is to drive first evaporation coating device
Elevating movement.
4. a kind of metallized film processing film-coating mechanism according to claim 1, it is characterised in that: second activity
Board group part includes the second left movable plate, the second right movable plate, the second left telescopic device, the second right telescopic device；Described second is left
The lower one end in position and the one end at the top of second evaporation boat are hinged in movable plate, and the higher one end in position is freely
End；The fixing end of the second left telescopic device and the outer wall of second evaporation boat are hinged, the second left telescopic device
Telescopic end and the described second left movable plate are hinged；
The lower one end in position and the other end at the top of second evaporation boat are hinged in the second right movable plate, position
Higher one end is free end, and the fixing end of the second right telescopic device and the outer wall of second evaporation boat are hinged, described
The telescopic end of second right telescopic device and the described second right movable plate are hinged.
5. a kind of metallized film processing film-coating mechanism according to claim 1, it is characterised in that: second evaporation
The 4th elevating mechanism is provided with below coating apparatus, the 4th elevating mechanism is to drive second evaporation coating device
Elevating movement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610840616.9A CN106244985B (en) | 2016-09-22 | 2016-09-22 | Film-coating mechanism is used in a kind of processing of metallized film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610840616.9A CN106244985B (en) | 2016-09-22 | 2016-09-22 | Film-coating mechanism is used in a kind of processing of metallized film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106244985A CN106244985A (en) | 2016-12-21 |
| CN106244985B true CN106244985B (en) | 2019-01-11 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201610840616.9A Expired - Fee Related CN106244985B (en) | 2016-09-22 | 2016-09-22 | Film-coating mechanism is used in a kind of processing of metallized film |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107385395B (en) * | 2017-06-15 | 2019-07-05 | 嘉兴敏胜汽车零部件有限公司 | A kind of composite film coating device |
| CN113930719A (en) * | 2021-09-18 | 2022-01-14 | 铜陵市超越电子有限公司 | Vacuum coating machine for processing metallized film of capacitor |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51106640A (en) * | 1975-03-17 | 1976-09-21 | Matsushita Electric Ind Co Ltd | IONPUREETEINGUSOCHI |
| JPH03264668A (en) * | 1990-03-13 | 1991-11-25 | Canon Inc | Vacuum deposition device |
| CN202898522U (en) * | 2012-10-25 | 2013-04-24 | 上海宏昊企业发展有限公司 | Height adjustable evaporation tank system |
| CN104944793A (en) * | 2015-06-30 | 2015-09-30 | 中山市格兰特实业有限公司 | Magnetron sputtering glass coating device with adjustable sputtering range |
-
2016
- 2016-09-22 CN CN201610840616.9A patent/CN106244985B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51106640A (en) * | 1975-03-17 | 1976-09-21 | Matsushita Electric Ind Co Ltd | IONPUREETEINGUSOCHI |
| JPH03264668A (en) * | 1990-03-13 | 1991-11-25 | Canon Inc | Vacuum deposition device |
| CN202898522U (en) * | 2012-10-25 | 2013-04-24 | 上海宏昊企业发展有限公司 | Height adjustable evaporation tank system |
| CN104944793A (en) * | 2015-06-30 | 2015-09-30 | 中山市格兰特实业有限公司 | Magnetron sputtering glass coating device with adjustable sputtering range |
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| CN106244985A (en) | 2016-12-21 |
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