CN108531872B - A kind of double-ion beam metal coating automation equipment - Google Patents
A kind of double-ion beam metal coating automation equipment Download PDFInfo
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- CN108531872B CN108531872B CN201810889248.6A CN201810889248A CN108531872B CN 108531872 B CN108531872 B CN 108531872B CN 201810889248 A CN201810889248 A CN 201810889248A CN 108531872 B CN108531872 B CN 108531872B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
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Abstract
The present invention relates to a kind of double-ion beam metal coating automation equipments, vacuum film coating chamber is provided at the top of equipment rack, it is provided with main ion source in the middle part of the inner cavity left side wall of vacuum film coating chamber, it is respectively equipped with target sliding block in the inner cavity top of vacuum film coating chamber, auxiliary source sliding block, target sliding block is always positioned at the left side of auxiliary source sliding block, and target sliding block, auxiliary source sliding block can back and forth be moved back and forth along same level rectilinear direction, target is equipped on target sliding block, it is installed with assisting ion source in the bottom of the auxiliary source sliding block, the outer wall in the main ion source and assisting ion source is both provided with cooling covering layer.The present invention provides one kind can be by heat radiation protection lifting device service life and effect, and by the form of a variety of adjustings to adapt to the double-ion beam metal coating automation equipment of more body profile dimensions plated films.
Description
Technical field
The present invention relates to ion-plating technique field, especially a kind of double-ion beam metal coating automation equipment.
Background technology
In well known technical field, ion beam sputtering deposition technology provides the new of thin film coated for scientific research and production
Technique, new technology, be high temperature alloy conductor thin film, magnetic thin film devices, thin film integrated circuit, thin film sensor, optical thin film,
Film preparation etc. in the film preparation of metal heterogeneous structural, material modification, which is widely applied, provides new technological means.With
The continuous extension and extension of ion beam deposition technical applications, the requirement to ion beam sputter deposition membrane equipment is increasingly
It is high.However present this kind of equipment, still based on the ion beam sputtering film coating machine of simple function, while having assisted deposition function
Do not have cosputtering function, does not have the work of assisted deposition function or machine while either having cosputtering function again
The technological parameter of parameter and film forming cannot be adjusted independently, and there are uniformities that bad, film quality is dredged for the film of this kind of equipment deposit
Pine, needle pore defect is more, adhesion property is poor, internal stress is big, can not produce the defects of nanometer scale film, it is difficult to which satisfaction prepares high property
The requirement of energy film.
For this purpose, those skilled in the technology concerned improve this, such as Chinese Patent Application No. is
CN200420068277.X propose " a kind of Double-ion-beam co-sputtering deposition atomic-layer nano film device, by vacuum chamber, it is main from
The compositions such as component, assisting ion source, deposition target, rotational workpieces platform, electronics averager, baffle, composite evacuated system and rack, institute
Vacuum chamber is stated with the composite evacuated system below rack to be connected；The baffle of handle adjusting is installed below rotational workpieces platform ",
Although the device can be realized the atomistic binding of different film interlayers, made with the film by atomic layer deposition of nano-scale
It obtains film layer and is provided with the advantages of adhesiveness is firm, uniformity and compactness are good, minimum internal stress, greatly increase the property of film
Energy；But shortcoming is existed simultaneously, if the main ion source, assisting ion source and deposition target installation site of the device are fixed, ion
Incident angle can not be adjusted significantly, and not provide the specific mounting means of rotary table, and device is caused to be merely able to shape
Smaller workpiece carries out whole face plated film, and when workpiece configurations are larger or shape is not plane, film layer is difficult covering whole table
Face is susceptible to the bad defect of uniformity of film, while not being provided on the main ion source of the device and assisting ion source
Good cooling effect is not achieved in body cooling scheme, works at high operating temperatures be easy to have an impact device for a long time, reduce
Service using life.
Based on this, the present invention devises a kind of double-ion beam metal coating automation equipment, to solve the above problems.
Invention content
The purpose of the present invention is to provide a kind of double-ion beam metal coating automation equipments, to solve the master of above-mentioned apparatus
Ion source, assisting ion source and deposition target installation site are fixed, and ion incident angles can not be adjusted significantly, and do not provide rotation
The specific mounting means of revolving worktable causes device to be merely able to the workpiece smaller to shape and carries out whole face plated film, when workpiece configurations compared with
When big or when shape is not plane but shaped face, film layer is difficult covering whole surface, is susceptible to uniformity of film not
Good defect, while not providing specific cooling scheme on the main ion source of above-mentioned apparatus and assisting ion source, it is not achieved good
Cooling effect, for a long time work at high operating temperatures be easy device is had an impact, reduce service using life the problem of.
To achieve the above object, the present invention provides the following technical solutions：A kind of double-ion beam metal coating automation equipment,
Including equipment rack, vacuum film coating chamber is provided at the top of the equipment rack, the intracavity bottom of the equipment rack is provided with
Vacuum plant, the vacuum plant are connected with vacuum film coating chamber, and the right side wall of the vacuum film coating chamber is provided with sealing door body,
The left side wall bottom of the vacuum film coating chamber is provided with air inlet, is provided with and splashes at the intracavity bottom center of the vacuum film coating chamber
Deposition station is penetrated, film-coating workpiece is provided at the top of the sputtering deposit platform, is set in the middle part of the inner cavity left side wall of the vacuum film coating chamber
It is equipped with main ion source, hinged seat is equipped between the main ion source and vacuum film coating chamber, in the inner cavity of the vacuum film coating chamber
Top is respectively equipped with target sliding block, auxiliary source sliding block, and the target sliding block is always positioned at the left side of auxiliary source sliding block, and the target is slided
Block, auxiliary source sliding block can back and forth be moved back and forth along same level rectilinear direction, target is equipped on the target sliding block, described
The bottom of auxiliary source sliding block is installed with assisting ion source, and the outer wall in the main ion source and assisting ion source is both provided with cooling
Covering layer, is additionally provided with water cooling plant on the vacuum film coating chamber, and the cooling covering layer is connected with water cooling plant.
Further, the water cooling plant includes that water tank, water circulating pump, heat dissipation row and water-supply-pipe, the cooling are wrapped up in
The side wall of layer has for the logical vessel of cooling liquid stream, and the side wall of the cooling covering layer is provided with the feed liquor being connected with the vessel
Mouth and liquid outlet, the inlet of cooling covering layer described in two groups are commonly connected to the water outlet of water tank, cooling covering layer described in two groups
Liquid outlet be commonly connected to heat dissipation row water inlet, the cooling covering layer, water tank, water circulating pump and heat dissipation row passes through water delivery
Pipe is sequentially communicated composition cooling system.
Further, the inner cavity top of the vacuum film coating chamber is provided with the linear guide, is installed in the linear guide
There are target sliding block and auxiliary source sliding block, the bottom of the target sliding block to be fixedly installed target clamping bench, the target clamping bench
Bottom clamping is provided with target.
Further, the inner cavity top of the vacuum film coating chamber is provided with amplitude of oscillation adjustment mechanism, the amplitude of oscillation adjusts machine
Structure has mounting base, is respectively equipped with and can vertically stretch at the left and right both ends of the lower section of the mounting base in the horizontal direction
Adjusting apparatus, the lower section of the adjusting apparatus be equipped with translation adjusting device, the translation adjusting device have be symmetrical arranged
Two whippletrees, and the adjusting apparatus is rotatablely connected with corresponding whippletree, along level side in region between two whippletrees
To left and right both ends be respectively equipped with electric reel, roller shutter sliding rail is equipped between two electric reels, is pacified on the roller shutter sliding rail
Equipped with target sliding block and auxiliary source sliding block, the bottom of the target sliding block is fixedly installed target clamping bench, the target clamping bench
Bottom clamping be provided with target.
Further, the adjusting apparatus have the symmetrically arranged first vertical cross bar, the second vertical cross bar, described first
The upper end of vertical cross bar and the second vertical cross bar is slidably connected with mounting base, the first vertical cross bar and the second vertical cross bar
Lower end it is corresponding respectively with whippletree and be rotatablely connected, it is horizontal that connection is equipped between the described first vertical cross bar and the second vertical cross bar
Bar is equipped with electric adjusting device between connection cross bar and the mounting base.
Further, the roller shutter sliding rail has the rectangle movable block being arranged between two whippletrees, is moved in the rectangle
The left and right both ends of level of motion block are equipped with flexible roller shutter, and the flexible roller shutter is corresponding with adjacent electric reel respectively, described
Target sliding block and auxiliary source sliding block are arranged on rectangle movable block.
Further, the inner cavity top of the vacuum film coating chamber is provided with angle-adjusting mechanism, the angle adjusts machine
There are two the adjusting seat that can be moved back and forth in horizontal linear direction, being equipped in each adjusting seat can be structure tool with horizontal direction
The rotation seat of center axis thereof, the target sliding block, auxiliary source sliding block are separately positioned on rotation seat, the bottom of the target sliding block
Portion is fixedly installed target clamping bench, and the bottom clamping of the target clamping bench is provided with target.
Further, the angle-adjusting mechanism has a support device, support device tool there are two being oppositely arranged and
It can be fixed on the fixed block of the inner cavity top of vacuum film coating chamber, two horizontal sliding bars are arranged between the fixed block, and
Two horizontal sliding bars run through adjusting seat, are respectively equipped with adjusting screw on two fixed blocks, and the adjusting screw with it is adjacent
Adjusting seat is connected.
Further, the adjusting seat is equipped with the fine tuning sliding block that can linearly eject, and the rotation seat is pacified
On fine tuning sliding block.
Compared with prior art, the beneficial effects of the invention are as follows：Structure of the invention is reasonable, by main ion source, assist from
Component and target cooperate, and while gas-phase deposition coating, are constantly deposited with the ion beam bombardment with certain energy
Substance, since ion bombardment causes atom between deposition film and film-coating workpiece mutually to mix, interface atoms interpenetrate, and to melt be one
Body forms a transition zone to substantially improve the bond strength of film base；The present invention using the packaging type type of cooling to it is main from
Component and assisting ion source carry out water-cooled cooling, can be in time by main ion source and assisting ion source by the outer defeated method of interior heat
The heat that work generates takes vacuum film coating chamber out of, and reduce high temperature influences caused by service using life；Main ion source of the present invention,
Assisting ion source and the angle position of target are freely adjustable, when film-coating workpiece shape is larger, can by adjusting main ion source,
Assisting ion source and the angle position of target carry out plated film processing to the surface different location of film-coating workpiece；I.e. the present invention provides
A kind of can be automated by the double-ion beam metal coating of heat radiation protection lifting device service life and more size compatibility plated films sets
It is standby.
Description of the drawings
In order to illustrate the technical solution of the embodiments of the present invention more clearly, will be described below to embodiment required
Attached drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for ability
For the those of ordinary skill of domain, without creative efforts, it can also be obtained according to these attached drawings other attached
Figure.
Fig. 1 is structural schematic diagram in the embodiment of the present invention one；
Fig. 2 is internal structure schematic diagram in the embodiment of the present invention one；
Fig. 3 is water cooling plant structural schematic diagram in the embodiment of the present invention one；
Fig. 4 is the structural schematic diagram of amplitude of oscillation adjustment mechanism in the embodiment of the present invention two；
Fig. 5 is the close-up schematic view at A in Fig. 4；
Fig. 6 is the structural schematic diagram of angle-adjusting mechanism in the embodiment of the present invention three.
In attached drawing, parts list represented by the reference numerals are as follows：
1. equipment rack, 2. vacuum film coating chambers, 3. vacuum plants, 4. sealing door body, 5. air inlets, 6. sputtering deposit platforms,
7. film-coating workpiece, 8. hinged seats, 9. main ion sources, 10. the linear guides, 11. target sliding blocks, 12. auxiliary source sliding blocks, 13. targets dress
Folder platform, 14. targets, 15. assisting ion sources, 16. cooling covering layer, 17. water cooling plants, 171. water tanks, 172. water circulating pumps,
173. heat dissipation rows, 174. water-supply-pipes, 18. observation windows, 19. valves, 20. amplitude of oscillation adjustment mechanisms, 201. mounting bases, 202. adjustment
Device, 2021. first vertical cross bars, 2022. second vertical cross bars, 2023. connection cross bars, 2024. electric adjusting devices, 203.
Translation adjusting device, 2031. whippletrees, 2032. electric reels, 2033. roller shutter sliding rails, 20331. rectangle movable blocks, 20332. is soft
Property roller shutter, 21. angle-adjusting mechanisms, 211. adjusting seats, 2111. fine tuning sliding blocks, 212. rotation seats, 213. support devices, 2131.
Fixed block, 2132. horizontal sliding bars, 2133. adjusting screws.
Specific implementation mode
In conjunction with the accompanying drawings, the present invention is further explained in detail.These attached drawings are simplified schematic diagram, only with
Illustration illustrates the basic structure of the present invention, therefore it only shows the composition relevant to the invention.
The preferred embodiment of the present invention one, as shown in Figures 1 to 3, the present invention provide a kind of technical solution：A kind of double-ion beam
The top of metal coating automation equipment, including equipment rack 1, equipment rack 1 is provided with vacuum film coating chamber 2, vacuum film coating chamber 2
Front side wall be provided with observation window 18, in order to observe the work in vacuum film coating chamber 2 fact, the interior bottom of chamber of equipment rack 1
Portion is provided with vacuum plant 3, and vacuum plant 3 is connected with vacuum film coating chamber 2, and the right side wall of vacuum film coating chamber 2 is provided with sealing
Door body 4, the left side wall bottom of vacuum film coating chamber 2 are provided with air inlet 5, the communicating pipe of vacuum plant 3 and vacuum film coating chamber 2 and into
Valve 19 is both provided on gas port 5, control air-flow disengaging changes the air pressure situation in vacuum film coating chamber 2, vacuum film coating chamber 2
Sputtering deposit platform 6 is provided at intracavity bottom center, the top of sputtering deposit platform 6 is provided with film-coating workpiece 7, vacuum film coating chamber 2
Inner cavity left side wall in the middle part of be provided with hinged seat 8, the right side of hinged seat 8 is hingedly provided with main ion source 9, vacuum film coating chamber 2
Inner cavity top is provided with the linear guide 10, and the bottom of the linear guide 10 is connected with target sliding block 11 and auxiliary source sliding block 12, target
Material sliding block 11 is located at the left side of auxiliary source sliding block 12, and the bottom of target sliding block 11 is fixedly installed target clamping bench 13, target clamping
The bottom clamping of platform 13 is provided with target 14, and the bottom of auxiliary source sliding block 12 is installed with assisting ion source 15,9 He of main ion source
Assisting ion source 15 is that the ion gun apparatus of irradiation ion beam is provided by extraneous supply unit and mass flow adjuster
The outer wall in ion beam needed for plated film, main ion source 9 and assisting ion source 15 is both provided with cooling covering layer 16, vacuum film coating chamber 2
Top right side is provided with water cooling plant 17, and cooling covering layer 16 is connected with water cooling plant 17, and water cooling plant 17 includes water tank
171, the side wall of water circulating pump 172, heat dissipation row 173 and water-supply-pipe 174, cooling covering layer 16 has for the logical vessel of cooling liquid stream,
The side wall of cooling covering layer 16 is provided with the inlet 161 being connected with vessel and liquid outlet 162, the feed liquor of two groups of cooling covering layer 16
Mouth 161 is commonly connected to the water outlet of water tank 171, and the liquid outlet 162 of two groups of cooling covering layer 16 is commonly connected to heat dissipation row 173
Water inlet, cooling covering layer 16, water tank 171, water circulating pump 172 and heat dissipation row 173 are sequentially communicated composition by water-supply-pipe 174
Cooling system is cooperated by cooling covering layer 16 and water cooling plant 17, main ion source 9 and assisting ion source 15 can be carried out and
When cool, the side wall of vacuum film coating chamber 2 is provided with the sealing through-hole to come in and go out for water-supply-pipe 174 so that cooling 16 energy of covering layer
It is enough to be connected with outer water cooling device 17.
One of preferred embodiment one has particular application as：The present apparatus is a kind of double-ion beam metal coating automation equipment,
In use, target 14 is clamped on target clamping bench 13, film-coating workpiece 7 is fixed on sputtering deposit platform 6, hermatic door is shut
Body 4 makes the inner cavity of vacuum film coating chamber 2 form confined space, the inner cavity of vacuum film coating chamber 2 is evacuated by vacuum plant 3
State, starts main ion source 9 and assisting ion source 15, and main ion source 9 and assisting ion source 15 are the ion for irradiating ion beam
Gun apparatus provides ion beam needed for plated film, main ion source 9 is to target 14 by extraneous supply unit and mass flow adjuster
It carries out bombardment and forms sputtering particle, the ion beam generated using assisting ion source 15, to being installed on rotational workpieces platform film-coating workpiece 7
On workpiece surface carry out ion beam bombardment in situ, form codeposition, obtain the atomic layer of workpiece surface fresh material, work as vacuum
When the inner chamber gas partial pressure of coating chamber 2 fluctuates, the flow of oxygen is controlled by adjusting air inlet 5, ensures that partial pressure of oxygen is stablized,
Also the film deposited is bombarded, can be improved in situ thin using the ion beam of the transmitting of assisting ion source 15 very low energy simultaneously
The mechanical properties such as adhesiveness, the internal stress of film and electrical characteristics.
Cooperated by cooling covering layer 16 and water cooling plant 17, main ion source 9 and assisting ion source 15 can be carried out and
When cool.
When if it is needing for facet coatings, when the appearance and size of film-coating workpiece 7 is larger, it can be adjusted by hinged seat 8
The direction in main ion source 9 is saved, and then changes the incident direction for the ion beam that main ion source 9 generates, by target sliding block 11 and directly
Line guide rail 10 matches, and can adjust the left and right position of target 14 so that the ion beam that main ion source 9 generates can be as much as possible
Impact is matched by auxiliary source sliding block 12 with the linear guide 10 on target 14, can adjust the left and right position in assisting ion source 15,
Change the ion beam that assisting ion source 15 generates and strike the position on film-coating workpiece 7, so in use, need to only adjust it is main from
One or more groups of angles or position in component 9, target 14 and assisting ion source 15, you can change plating film location, without anti-
Film-coating workpiece 7 is picked and placeed again, to influence the coating quality of film-coating workpiece 7, is achieved in more size film-coating workpieces 7 and is compatible with plated film.
The preferred embodiment of the present invention two as shown in Figures 4 and 5, amplitude of oscillation tune is replaced with by the linear guide 10 in embodiment one
Complete machine structure 20 is provided with amplitude of oscillation adjustment mechanism 20 in the inner cavity top of vacuum film coating chamber 2, and the amplitude of oscillation adjustment mechanism 20 has peace
Seat 201 is filled, the adjustment that can vertically stretch is respectively equipped at the left and right both ends of the lower section of mounting base 201 in the horizontal direction
Device 202 is equipped with translation adjusting device 203 in the lower section of adjusting apparatus 202, and the translation adjusting device 203, which has, symmetrically to be set
Two whippletrees 2031 set, and adjusting apparatus 202 is rotatablely connected with corresponding whippletree 2031, the area between two whippletrees 2031
Left and right both ends in domain in the horizontal direction are respectively equipped with electric reel 2032, and roller shutter is equipped between two electric reels 2032
Sliding rail 2033, the roller shutter sliding rail 2033 has the rectangle movable block 20331 being arranged between two whippletrees 2031, in the square
The left and right both ends of level of shape movable block 20331 are equipped with flexible roller shutter 20332, and flexible roller shutter 20332 respectively with it is adjacent electronic
Spool 2032 is corresponding, and the target sliding block 11 and auxiliary source sliding block 12 are arranged on rectangle movable block 20331, the target sliding block
11 bottom is fixedly installed target clamping bench 13, and the bottom clamping of the target clamping bench 13 is provided with target 14.
The adjusting apparatus 202 has the symmetrically arranged first vertical cross bar 2021, a second vertical cross bar 2022, and described the
The upper end of one vertical cross bar 2021 and the second vertical cross bar 2022 is slidably connected with mounting base 201, the first vertical cross bar
2021 is corresponding respectively with the lower end of the second vertical cross bar 2022 and whippletree 2031 and be rotatablely connected, in the first vertical cross bar 2021 and
It is equipped with connection cross bar 2023 between second vertical cross bar 2022, electricity is equipped between the connection cross bar 2023 and mounting base 201
Dynamic regulating device 2024.
Embodiment two is adjusting target sliding block 11 and when auxiliary source sliding block 12, both sides electric adjusting device 2024 it is flexible
So that corresponding adjusting apparatus 202 has change in displacement in the vertical direction, as long as theoretically adjusting apparatus 202 is in vertical direction
On shift length it is enough, translation adjusting device 203 is whole significantly to be swung, right low left high or with left lower than right, together
When electric reel 2032 driving, can be with the position of synchronous adjustment target sliding block 11 and auxiliary source sliding block 12, this kind of structure is especially suitable
For having the case where large area circular arc in special-shaped machined surface, the quality of processing can be obviously improved.
The linear guide 10 in embodiment one is replaced with angle adjustment by the preferred embodiment of the present invention three as shown in Figure 6
Mechanism 21 is provided with angle-adjusting mechanism 21 in the inner cavity top of vacuum film coating chamber 2, and there are two the tools of the angle-adjusting mechanism 21
The adjusting seat 211 that can be moved back and forth in horizontal linear direction, be equipped in each adjusting seat 211 can be by horizontal direction centered on
The rotation seat 212 of axis rotation, the adjusting seat 211 is equipped with the fine tuning sliding block 2111 that can linearly eject, and turns
Dynamic seat 212 is mounted on fine tuning sliding block 2111, and the target sliding block 11, auxiliary source sliding block 12 are separately positioned on rotation seat 212, institute
The bottom for stating target sliding block 11 is fixedly installed target clamping bench 13, and the bottom clamping of the target clamping bench 13 is provided with target
14。
The angle-adjusting mechanism 21 has support device 213, and there are two be oppositely arranged and can the tool of the support device 213
It is fixed on the fixed block 2131 of the inner cavity top of vacuum film coating chamber 2, two horizontal sliding bars are arranged between fixed block 2131
2132, and two horizontal sliding bars 2132 run through adjusting seat 211, and adjusting screw 2133 is respectively equipped on two fixed blocks 2131,
And adjusting screw 2133 is connected with adjacent adjusting seat 211.
For embodiment three when adjusting target sliding block 11 and auxiliary source sliding block 12, target sliding block 11 and auxiliary source sliding block 12 are in level side
Upward spacing can adjust, while the two can rotate, it is contemplated that improve the angle that rotation is adjusted, keep away remaining workpiece
It allows, it is also considered that the complexity for reducing cost and industry control regulating system, being equipped with directly in adjusting seat 211 can be linearly
The fine tuning sliding block 2111 of ejection, it is more easy in this way in control, it can substantially play the role of universal head and play, embodiment
Three are more suitable for irregular work surface.
It is enlightenment with above-mentioned desirable embodiment according to the present invention, through the above description, relevant staff is complete
Various changes and amendments can be carried out without departing from the scope of the technological thought of the present invention' entirely.The technology of this invention
Property range is not limited to the contents of the specification, it is necessary to determine its technical scope according to right.
Claims (9)
1. a kind of double-ion beam metal coating automation equipment, including equipment rack（1）, the equipment rack（1）Top set
It is equipped with vacuum film coating chamber（2）, the equipment rack（1）Intracavity bottom be provided with vacuum plant（3）, the vacuum plant（3）
With vacuum film coating chamber（2）It is connected, the vacuum film coating chamber（2）Right side wall be provided with sealing door body（4）, the vacuum coating
Room（2）Left side wall bottom be provided with air inlet（5）, the vacuum film coating chamber（2）Intracavity bottom center at be provided with sputtering
Deposition station（6）, the sputtering deposit platform（6）Top be provided with film-coating workpiece（7）, it is characterised in that：The vacuum film coating chamber
（2）Inner cavity left side wall in the middle part of be provided with main ion source（9）, in the main ion source（9）With vacuum film coating chamber（2）Between be equipped with
Hinged seat（8）, in the vacuum film coating chamber（2）Inner cavity top be respectively equipped with target sliding block（11）, auxiliary source sliding block（12）, described
Target sliding block（11）It is always positioned at auxiliary source sliding block（12）Left side, and the target sliding block（11）, auxiliary source sliding block（12）It can edge
Same level rectilinear direction moves back and forth back and forth, in the target sliding block（11）It is equipped with target（14）, in the auxiliary source sliding block
（12）Bottom be installed with assisting ion source（15）, the main ion source（9）With assisting ion source（15）Outer wall be all provided with
It is equipped with cooling covering layer（16）, in the vacuum film coating chamber（2）On be additionally provided with water cooling plant（17）, the cooling covering layer（16）With
Water cooling plant（17）It is connected.
2. a kind of double-ion beam metal coating automation equipment according to claim 1, it is characterised in that：The water cooling dress
It sets（17）It include water tank（171）, water circulating pump（172）, heat dissipation row（173）And water-supply-pipe（174）, the cooling covering layer
（16）Side wall have for the logical vessel of cooling liquid stream, the cooling covering layer（16）Side wall be provided with and be connected with the vessel
Inlet（161）And liquid outlet（162）, cooling covering layer described in two groups（16）Inlet（161）It is commonly connected to water tank
（171）Water outlet, cooling covering layer described in two groups（16）Liquid outlet（162）It is commonly connected to heat dissipation row（173）Water inlet,
The cooling covering layer（16）, water tank（171）, water circulating pump（172）It is arranged with heat dissipation（173）Pass through water-supply-pipe（174）Connect successively
It is logical to constitute cooling system.
3. a kind of double-ion beam metal coating automation equipment according to claim 1, it is characterised in that：In the vacuum
Coating chamber（2）Inner cavity top be provided with the linear guide（10）, the linear guide（10）On target sliding block is installed（11）With
Auxiliary source sliding block（12）, the target sliding block（11）Bottom be fixedly installed target clamping bench（13）, the target clamping bench
（13）Bottom clamping be provided with target（14）.
4. a kind of double-ion beam metal coating automation equipment according to claim 1, it is characterised in that：In the vacuum
Coating chamber（2）Inner cavity top be provided with amplitude of oscillation adjustment mechanism（20）, the amplitude of oscillation adjustment mechanism（20）With mounting base
（201）, in the mounting base（201）Lower section left and right both ends in the horizontal direction be respectively equipped with and can vertically stretch
Adjusting apparatus（202）, in the adjusting apparatus（202）Lower section be equipped with translation adjusting device（203）, the translation adjusting device
（203）With symmetrically arranged two whippletrees（2031）, and the adjusting apparatus（202）With corresponding whippletree（2031）Rotation
Connection, in two whippletrees（2031）Between left and right both ends in region in the horizontal direction be respectively equipped with electric reel（2032）,
Two electric reels（2032）Between be equipped with roller shutter sliding rail（2033）, the roller shutter sliding rail（2033）On target sliding block is installed
（11）With auxiliary source sliding block（12）, the target sliding block（11）Bottom be fixedly installed target clamping bench（13）, the target dress
Press from both sides platform（13）Bottom clamping be provided with target（14）.
5. a kind of double-ion beam metal coating automation equipment according to claim 4, it is characterised in that：The adjustment dress
It sets（202）With the symmetrically arranged first vertical cross bar（2021）, the second vertical cross bar（2022）, the first vertical cross bar
（2021）With the second vertical cross bar（2022）Upper end and mounting base（201）It is slidably connected, the first vertical cross bar
（2021）With the second vertical cross bar（2022）Lower end and whippletree（2031）Corresponding respectively and rotation connection, it is vertical described first
Cross bar（2021）With the second vertical cross bar（2022）Between be equipped with connection cross bar（2023）, in the connection cross bar（2023）With peace
Fill seat（201）Between be equipped with electric adjusting device（2024）.
6. a kind of double-ion beam metal coating automation equipment according to claim 4, it is characterised in that：The roller shutter is slided
Rail（2033）With setting in two whippletrees（2031）Between rectangle movable block（20331）, in the rectangle movable block
（20331）The left and right both ends of level be equipped with flexible roller shutter（20332）, and the flexible roller shutter（20332）Respectively with adjacent electricity
Dynamic spool（2032）It is corresponding, the target sliding block（11）With auxiliary source sliding block（12）It is arranged in rectangle movable block（20331）On.
7. a kind of double-ion beam metal coating automation equipment according to claim 1, it is characterised in that：In the vacuum
Coating chamber（2）Inner cavity top be provided with angle-adjusting mechanism（21）, the angle-adjusting mechanism（21）There are two can be along water for tool
The adjusting seat that flat line direction moves back and forth（211）, in each adjusting seat（211）On be equipped with can centered on horizontal direction axis
The rotation seat of line rotation（212）, the target sliding block（11）, auxiliary source sliding block（12）It is separately positioned on rotation seat（212）On, it is described
Target sliding block（11）Bottom be fixedly installed target clamping bench（13）, the target clamping bench（13）Bottom clamping be provided with
Target（14）.
8. a kind of double-ion beam metal coating automation equipment according to claim 7, it is characterised in that：The angle tune
Complete machine structure（21）With support device（213）, the support device（213）There are two be oppositely arranged and can be fixed on Vacuum Deposition tool
Film room（2）Inner cavity top fixed block（2131）, in the fixed block（2131）Between be arranged with two horizontal sliding bars
（2132）, and two horizontal sliding bars（2132）Through adjusting seat（211）, in two fixed blocks（2131）On be respectively equipped with adjusting silk
Thick stick（2133）, and the adjusting screw（2133）With adjacent adjusting seat（211）It is connected.
9. a kind of double-ion beam metal coating automation equipment according to claim 7, it is characterised in that：The adjusting seat
（211）It is equipped with the fine tuning sliding block that can linearly eject（2111）, and the rotation seat（212）Mounted on fine tuning sliding block
（2111）On.
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| CN108531872A CN108531872A (en) | 2018-09-14 |
| CN108531872B true CN108531872B (en) | 2018-11-06 |
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| CN1075341A (en) * | 1992-02-13 | 1993-08-18 | 核工业西南物理研究院 | Vertical metal industrial ion implantation machine of strong current |
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|---|---|
| CN108531872A (en) | 2018-09-14 |
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