CN106244985A - A kind of metallized film processing film-coating mechanism - Google Patents
A kind of metallized film processing film-coating mechanism Download PDFInfo
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- CN106244985A CN106244985A CN201610840616.9A CN201610840616A CN106244985A CN 106244985 A CN106244985 A CN 106244985A CN 201610840616 A CN201610840616 A CN 201610840616A CN 106244985 A CN106244985 A CN 106244985A
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- evaporation
- hinged
- portable plate
- evaporation boat
- boat
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The open a kind of metallized film processing film-coating mechanism of the present invention, the first evaporation coating device, the second evaporation coating device set gradually from front to back according to technological process；Film-coating mechanism includes the first evaporation coating device, including the first evaporation drum, the first evaporation boat；Described first evaporation boat is arranged on the lower section of described first evaporation drum；The open top region of described first evaporation boat is provided with the first portable plate assembly regulating described first evaporation boat openings of sizes；Second evaporation coating device, including the second evaporation drum, the second evaporation boat, screening arrangement；Second evaporation boat is arranged on the lower section of the second evaporation drum；The open top region of the second evaporation boat is provided with the second portable plate assembly of regulation the second evaporation boat openings of sizes；Width that the metal that screening arrangement evaporates in order to the opening part limited from the second evaporation boat falls on insulation film, region.The present invention has and is suitable for the processing of Multiple Type film, the adjustable advantage of coating film thickness.
Description
Technical field
The present invention relates to coater technical field, particularly relate to a kind of metallized film processing film-coating mechanism.
Background technology
Metallized film directly affects the service life of capacitor as the critical piece of capacitor, the quality of its quality.
At present, metallized film mainly by vacuum coating machining preparation, including insulation film intake mechanism, film-coating mechanism and
Plate the winding film mechanism after metal level.But, the vacuum coating equipment of prior art has the following disadvantages:
(2) existing vacuum coating equipment is after feeding unit feeds, if directly carrying out plated film by film-coating mechanism, and insulation film table
The temperature in face is relatively low, plated film poor stability.Solution is to improve the interface interaction on its surface by arranging preheating device.But
It is that preheating device is mostly fixed pattern, non-adjustable, causes preheating uneven.Prior art such as patent application
Although 201520245919.7 disclosed a kind of vacuum coating equipment provides the heater that can move along arc-shaped guide rail also
Heater adjustable angle is realized by metallic flexible hose, but, this structure is to utilize the physics of metallic flexible hose self
Character is curved, it has not been convenient to the realization being automatically adjusted；It addition, arc-shaped guide rail motion can drive heater motion to realize
Linear two-dimensional regulates, it is impossible to meeting the regulation of stereoscopic three-dimensional, it is difficult to realize the control of pre-calorific intensity, pre-thermal uniformity also needs to be carried
High.
(3) film-coating mechanism passes through evaporation boat motlten metal so that evaporation of metal, to the insulation film on evaporation drum surface, is formed
Metal level, it is achieved coating process.But, the distance between traditional film-coating mechanism its evaporation drum and evaporation boat mostly is definite value；And
And, the openings of sizes of evaporation boat is also fixing, according to the thickness t of the coat of metal on basement membrane0=w0/ (π ph2), it is known that, by adjusting
Distance between openings of sizes and evaporation drum and the evaporation boat of joint evaporation boat can control the thickness of the coat of metal.
Summary of the invention
The present invention is directed to the deficiencies in the prior art, it is provided that a kind of processing of Multiple Type film, coating film thickness of being suitable for is adjustable
Metallized film processing film-coating mechanism.
The present invention is by the techniques below means realization above-mentioned technical problem of solution: a kind of metallized film processing plated film
Mechanism, including the first evaporation coating device, the second evaporation coating device, described first evaporation coating device, the second evaporation coating
Device sets gradually from front to back according to technological process；Described film-coating mechanism includes the first evaporation coating device, including the first steaming
Plating drum, the first evaporation boat；Described first evaporation boat is arranged on the lower section of described first evaporation drum；The top of described first evaporation boat
Open area is provided with the first portable plate assembly regulating described first evaporation boat openings of sizes；Described second evaporation coating dress
Put, including the second evaporation drum, the second evaporation boat, screening arrangement；Described second evaporation boat is arranged under described second evaporation drum
Side；The open top region of described second evaporation boat is provided with the second portable plate group regulating described second evaporation boat openings of sizes
Part；The width that the metal that described screening arrangement evaporates in order to the opening part limited from described second evaporation boat falls on insulation film
Degree, region.
Preferably: described first portable plate assembly includes the first left portable plate, the first right portable plate, the first left flexible dress
Put, the first right retractor device；The one of the top of one end that in described first left portable plate, position is relatively low and described first evaporation boat
Hold hinged, position, one end free end that its position is higher；The fixing end of described first left retractor device and described first evaporation boat
Outer wall is hinged, and the telescopic end of described first left retractor device is hinged with described first left portable plate；
One end that in described first right portable plate, position is relatively low is hinged with the other end at the top of described first evaporation boat, its position
Higher one end is free end, and the fixing end of described first right retractor device is hinged with the outer wall of described first evaporation boat, described
The telescopic end of the first right retractor device is hinged with described first right portable plate.
Preferably: the lower section of described first evaporation coating device is provided with the 3rd elevating mechanism, described 3rd elevating mechanism
In order to drive described first evaporation coating device elevating movement.
Preferably: described second portable plate assembly includes the second left portable plate, the second right portable plate, the second left flexible dress
Put, the second right retractor device；The one of the top of one end that in described second left portable plate, position is relatively low and described second evaporation boat
Holding hinged, higher one end, its position is free end；The fixing end of described second left retractor device and described second evaporation boat
Outer wall is hinged, and the telescopic end of described second left retractor device is hinged with described second left portable plate；
One end that in described second right portable plate, position is relatively low is hinged with the other end at the top of described second evaporation boat, its position
Higher one end is free end, and the fixing end of described second right retractor device is hinged with the outer wall of described second evaporation boat, described
The telescopic end of the second right retractor device is hinged with described second right portable plate.
Preferably: described screening arrangement includes link transmission shielding body, including fixing seat, barricade, the second flexible dress
Put；One end that in described fixing seat, position is relatively low is arranged on the interior diapire of described vacuum chamber by pedestal, in described fixing seat
Higher one end, position is hinged with one end of described barricade, and the other end of described barricade can be from the opening of described two evaporation boats
The one end at place extends to the other end；The telescopic end of described second retractor device is hinged with described barricade, and its fixing end is with fixing
Seat is hinged；Being provided with groove on described barricade, the directed parallel of described groove transmits direction in insulation film.
Preferably: link transmission shielding body quantity is two, and be symmetricly set on the both sides of described second evaporation boat.
Preferably: the lower section of described second evaporation coating device is provided with the 4th elevating mechanism, described 4th elevating mechanism
In order to drive described second evaporation coating device elevating movement.
It is an advantage of the current invention that: the present invention has and is suitable for the processing of Multiple Type film, the adjustable advantage of coating film thickness.
Further, by the first left retractor device, the stretching motion of the first right retractor device, drive the first left portable plate,
The free end of the first right portable plate deviates from or move toward one another, thus controls openings of sizes, reaches to regulate the technology effect of plated film amount
Really.
Further, the 3rd elevating mechanism elevating movement drives the first evaporation boat close or away from the first evaporation drum, passes through
The distance regulating the first evaporation boat and the first evaporation drum is to realize the technique effect of plated film amount regulation.
Further, drive barricade to rotate by the stretching motion of the second retractor device, when needing shielding, barricade is turned
Move to horizontal level.Now, the metal from the second evaporation boat can only be plated in the zone line of insulation film by groove, it is achieved
The technique effect that selectivity thickeies.
Further, link transmission shielding body quantity is two, and is symmetricly set on the both sides of the second evaporation boat.Different screens
Logical different width of tubesheet hole groove in shield plate.The present invention has the groove width of different groove width by offer, it is achieved thicken width
Alternative, it is simple to the processing of different model thin film.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present invention.
Fig. 2 is the structural representation of the first evaporation coating device in the present invention.
Fig. 3 is the structural representation of the second evaporation coating device in the present invention.
Detailed description of the invention
For further describing the present invention, below in conjunction with embodiment, it is described further.
As it is shown in figure 1, film-coating mechanism includes the first evaporation coating device, including first evaporation drum the 3011, first evaporation boat
3012.First evaporation boat 3012 is arranged on the lower section of the first evaporation drum 3011.The open top region of the first evaporation boat 3012 sets
It is equipped with the first portable plate assembly controlling the first evaporation boat 3012 openings of sizes.
As in figure 2 it is shown, as preferred scheme: the first portable plate assembly includes first left portable plate the 30131, first right work
Dynamic plate 30132, first left retractor device the 30133, first right retractor device 30134.In first left portable plate 30131, position is relatively low
One end hinged with the one end at the top of the first evaporation boat 3012, higher one end, its position is free end.First left flexible dress
Put 30133 fixing end and the outer wall of the first evaporation boat 3012 hinged, the telescopic end of the first left retractor device 30133 and first left
Portable plate 30131 is hinged.
One end that in first right portable plate 30132, position is relatively low is hinged with the other end at the top of the first evaporation boat 3012,
Higher one end, its position is free end, the fixing end of the first right retractor device 30134 and the outer wall hinge of the first evaporation boat 3012
Connecing, telescopic end and the first right portable plate 30132 of the first right retractor device 30134 are hinged.
By the stretching motion of first left retractor device the 30133, first right retractor device 30134, drive the first left activity
The free end of plate the 30131, first right portable plate 30132 deviates from or move toward one another, thus controls openings of sizes, reaches regulation plating
The technique effect of film amount.
As it is shown in figure 1, further: the lower section of the first evaporation coating device is provided with the 3rd elevating mechanism 3014, the 3rd liter
Descending mechanism 3014 is in order to drive the first evaporation coating device lifting.The first evaporation coating device and the 3rd elevating mechanism 3014 it
Between be provided with the second bracing frame (not marking in figure).
3rd elevating mechanism 3014 elevating movement drives the first evaporation boat 3012 close or is deposited with drum 3011 away from first,
It is to realize the technique effect of plated film amount regulation by regulating the distance of the first evaporation boat 3012 and the first evaporation drum 3011.
Preferably, the first of the present invention left retractor device the 30133, first right retractor device the 30134, the 3rd elevating mechanism
3014 also can be servo-cylinder or servo cylinder, controls its work by controller, thus realizes automatization further.
As it is shown in figure 1, film-coating mechanism also includes the second evaporation coating device, evaporate including the second evaporation drum 3021, second
Boat 3022.Second evaporation boat 3022 is arranged on the lower section of the second evaporation drum 3021.The open top region of the second evaporation boat 3022
It is provided with the second portable plate assembly controlling the second evaporation boat 3022 openings of sizes.
As it is shown on figure 3, the second portable plate assembly includes second left portable plate the 30231, second right portable plate 30232, second
Left retractor device, the second right retractor device.One end that in second left portable plate 30231, position is relatively low and the second evaporation boat 3022
The one end at top is hinged, and higher one end, its position is free end.The fixing end of the second left retractor device and the second evaporation boat
The outer wall of 3022 is hinged, and the telescopic end of the second left retractor device and the second left portable plate 30231 are hinged.
One end that in second right portable plate 30232, position is relatively low is hinged with the other end at the top of the second evaporation boat 3022,
Position, one end free end that its position is higher, the fixing end of the second right retractor device and the outer wall of the second evaporation boat 3022 are hinged, the
The telescopic end of two right retractor devices and the second right portable plate 30232 are hinged.
The effect of the effect of the second portable plate assembly and operation principle and the second portable plate assembly and operation principle phase
With, the present embodiment is not repeated at this.
As shown in Figure 3, it is preferable that the second evaporation coating device also includes screening arrangement 3024, screening arrangement 3024 in order to
Limit the metal melting evaporated from the opening part of the second evaporation boat 3022 to fall the width on insulation film 501, region.Shielding
Device 3024 includes link transmission shielding body, including fixing seat 30241, barricade the 30242, second retractor device 30243.Gu
One end that in reservation 30241, position is relatively low is arranged on the interior diapire of vacuum chamber 401 by pedestal 30244, in fixing seat 30241
Higher one end, position is hinged with one end of barricade 30242, and the other end of barricade 30242 can be from the opening part of two evaporation boats
One end extend to the other end.The fixing end of the second retractor device 30243 is hinged with fixing seat 30241, the second retractor device
The telescopic end of 30243 is hinged with barricade 30242.Being provided with groove on barricade 30242, the directed parallel of groove is in insulation
Thin film 501 transmits direction.Preferably, groove is positioned at the zone line of barricade 30242, the most also can be at barricade 30242
Both sides.
Barricade 30242 is driven to rotate by the stretching motion of the second retractor device 30243, when needing shielding, will shielding
Plate 30242 turns to horizontal level.Now, the metal from the second evaporation boat 3022 can only be plated in insulation film by groove
The zone line of 501, it is achieved the technique effect that selectivity thickeies.
As preferred scheme: link transmission shielding body quantity is two, and it is symmetricly set on the second evaporation boat 3022
Both sides.Logical different width of tubesheet hole groove on different barricades 30242.The present invention has the groove width of different groove width by offer
Degree, it is achieved thicken the alternative of width, it is simple to the processing of different model thin film.
As it is shown in figure 1, as preferred scheme: the lower section of the second evaporation coating device is provided with the 4th elevating mechanism
3025, the 4th elevating mechanism 3025 is in order to drive the second evaporation coating device elevating movement.4th elevating mechanism 3025 is to second
The effect of evaporation coating device is identical to the effect of the first evaporation coating device with the 3rd elevating mechanism 3025.
The second left retractor device of the present invention, the second right retractor device, the second retractor device the 30243, the 4th elevating mechanism
3025 can also be servo-cylinder or servo cylinder, controls its work by controller, thus realizes automatization further.?
In some embodiment, first evaporation boat of the present invention, the second evaporation boat outer wall on thermal insulation layer can also be set.So, then first,
Second left retractor device and first, second right retractor device are arranged on the outer wall of thermal insulation layer.Thermal insulation layer can be aluminium sheet with
And it is arranged on the heat insulation foam between aluminium sheet, evaporation boat or polyurethane resin coat.
Preferably, each elevating mechanism of the present invention, retractor device are connected with controller respectively.By above-mentioned automatization
Control, it is achieved insulation film 501 quick, efficiently fill into, preheat, plated film, winding, saved the operating time, saved workman
Work load.
Certainly, the present invention can also be realized by non-automated.Such as, clear glass is used to manufacture vacuum chamber or very
Observation window is installed on empty room or watch-dog is installed on vacuum chamber, by practical situation in the direct observation ward of staff, logical
Cross the working condition of operating board Non-follow control all parts.
These are only the preferred embodiment of the invention, not in order to limit the invention, all in the present invention
Any amendment, equivalent and the improvement etc. made within the spirit created and principle, should be included in the guarantor of the invention
Within the scope of protecting.
Claims (7)
1. a metallized film processing film-coating mechanism, including the first evaporation coating device, the second evaporation coating device, described
First evaporation coating device, the second evaporation coating device set gradually from front to back according to technological process；It is characterized in that: described
Film-coating mechanism includes the first evaporation coating device, including the first evaporation drum, the first evaporation boat；Described first evaporation boat is arranged on institute
State the lower section of the first evaporation drum；It is big that the open top region of described first evaporation boat is provided with the described first evaporation boat opening of regulation
The first little portable plate assembly；Described second evaporation coating device, including the second evaporation drum, the second evaporation boat, screening arrangement；Institute
State the second evaporation boat and be arranged on the lower section of described second evaporation drum；The open top region of described second evaporation boat is provided with regulation
Second portable plate assembly of described second evaporation boat openings of sizes；Described screening arrangement is in order to limit from described second evaporation boat
The metal that opening part evaporates falls the width on insulation film, region.
A kind of metallized film processing film-coating mechanism the most according to claim 1, it is characterised in that: described first is movable
Board component includes the first left portable plate, the first right portable plate, the first left retractor device, the first right retractor device；Described first is left
One end that in portable plate, position is relatively low is hinged with the one end at the top of described first evaporation boat, position, one end freedom that its position is higher
End；The fixing end of described first left retractor device is hinged with the outer wall of described first evaporation boat, described first left retractor device
Telescopic end is hinged with described first left portable plate；
One end that in described first right portable plate, position is relatively low is hinged with the other end at the top of described first evaporation boat, its position
Higher one end is free end, and the fixing end of described first right retractor device is hinged with the outer wall of described first evaporation boat, described
The telescopic end of the first right retractor device is hinged with described first right portable plate.
A kind of metallized film processing film-coating mechanism the most according to claim 1, it is characterised in that: described first evaporation
The lower section of coating apparatus is provided with the 3rd elevating mechanism, and described 3rd elevating mechanism is in order to drive described first evaporation coating device
Elevating movement.
A kind of metallized film processing film-coating mechanism the most according to claim 1, it is characterised in that: described second is movable
Board component includes the second left portable plate, the second right portable plate, the second left retractor device, the second right retractor device；Described second is left
One end that in portable plate, position is relatively low is hinged with the one end at the top of described second evaporation boat, and higher one end, its position is freely
End；The fixing end of described second left retractor device is hinged with the outer wall of described second evaporation boat, described second left retractor device
Telescopic end is hinged with described second left portable plate；
One end that in described second right portable plate, position is relatively low is hinged with the other end at the top of described second evaporation boat, its position
Higher one end is free end, and the fixing end of described second right retractor device is hinged with the outer wall of described second evaporation boat, described
The telescopic end of the second right retractor device is hinged with described second right portable plate.
A kind of metallized film processing film-coating mechanism the most according to claim 4, it is characterised in that: described screening arrangement
Including link transmission shielding body, including fixing seat, barricade, the second retractor device；One that in described fixing seat, position is relatively low
End is arranged on the interior diapire of described vacuum chamber by pedestal, one end that in described fixing seat, position is higher and described barricade
One end is hinged, and the other end of described barricade can extend to the other end from one end of the opening part of described two evaporation boats；Described
The telescopic end of two retractor devices is hinged with described barricade, and its fixing end is hinged with fixing seat；It is provided with logical on described barricade
Groove, the directed parallel of described groove transmits direction in insulation film.
6. according to a kind of metallized film processing film-coating mechanism described in claim 4 or 5, it is characterised in that: link transmission
Shielding body quantity is two, and is symmetricly set on the both sides of described second evaporation boat.
A kind of metallized film processing film-coating mechanism the most according to claim 1, it is characterised in that: described second evaporation
The lower section of coating apparatus is provided with the 4th elevating mechanism, and described 4th elevating mechanism is in order to drive described second evaporation coating device
Elevating movement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610840616.9A CN106244985B (en) | 2016-09-22 | 2016-09-22 | Film-coating mechanism is used in a kind of processing of metallized film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610840616.9A CN106244985B (en) | 2016-09-22 | 2016-09-22 | Film-coating mechanism is used in a kind of processing of metallized film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106244985A true CN106244985A (en) | 2016-12-21 |
| CN106244985B CN106244985B (en) | 2019-01-11 |
Family
ID=57600077
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610840616.9A Expired - Fee Related CN106244985B (en) | 2016-09-22 | 2016-09-22 | Film-coating mechanism is used in a kind of processing of metallized film |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106244985B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107385395A (en) * | 2017-06-15 | 2017-11-24 | 嘉兴敏胜汽车零部件有限公司 | A kind of composite film coating device |
| CN113930719A (en) * | 2021-09-18 | 2022-01-14 | 铜陵市超越电子有限公司 | Vacuum coating machine for processing metallized film of capacitor |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51106640A (en) * | 1975-03-17 | 1976-09-21 | Matsushita Electric Ind Co Ltd | IONPUREETEINGUSOCHI |
| JPH03264668A (en) * | 1990-03-13 | 1991-11-25 | Canon Inc | Vacuum deposition device |
| CN202898522U (en) * | 2012-10-25 | 2013-04-24 | 上海宏昊企业发展有限公司 | Height adjustable evaporation tank system |
| CN104944793A (en) * | 2015-06-30 | 2015-09-30 | 中山市格兰特实业有限公司 | Magnetron sputtering glass coating device with adjustable sputtering range |
-
2016
- 2016-09-22 CN CN201610840616.9A patent/CN106244985B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51106640A (en) * | 1975-03-17 | 1976-09-21 | Matsushita Electric Ind Co Ltd | IONPUREETEINGUSOCHI |
| JPH03264668A (en) * | 1990-03-13 | 1991-11-25 | Canon Inc | Vacuum deposition device |
| CN202898522U (en) * | 2012-10-25 | 2013-04-24 | 上海宏昊企业发展有限公司 | Height adjustable evaporation tank system |
| CN104944793A (en) * | 2015-06-30 | 2015-09-30 | 中山市格兰特实业有限公司 | Magnetron sputtering glass coating device with adjustable sputtering range |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107385395A (en) * | 2017-06-15 | 2017-11-24 | 嘉兴敏胜汽车零部件有限公司 | A kind of composite film coating device |
| CN113930719A (en) * | 2021-09-18 | 2022-01-14 | 铜陵市超越电子有限公司 | Vacuum coating machine for processing metallized film of capacitor |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106244985B (en) | 2019-01-11 |
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