CN106435513A - Vacuum coating equipment for processing metallic films - Google Patents
Vacuum coating equipment for processing metallic films Download PDFInfo
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- CN106435513A CN106435513A CN201610840535.9A CN201610840535A CN106435513A CN 106435513 A CN106435513 A CN 106435513A CN 201610840535 A CN201610840535 A CN 201610840535A CN 106435513 A CN106435513 A CN 106435513A
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- Prior art keywords
- evaporation
- film
- hinged
- vacuum chamber
- coating
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/568—Transferring the substrates through a series of coating stations
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses vacuum coating equipment for processing metallic films. The vacuum coating equipment comprises a vacuum chamber, a feeding mechanism, a coating mechanism and a winding mechanism, wherein the feeding mechanism, the coating mechanism and the winding mechanism are arranged inside the vacuum chamber; the feeding mechanism comprises a first lifting mechanism and a feeding device; a preheating mechanism is arranged between the feeding mechanism and the coating mechanism; a first movable plate assembly adjusting an opening of a first evaporation boat is arranged in the opening area of the top of the first evaporation boat; a second movable plate assembly adjusting an opening of a second first evaporation boat is arranged in the opening area of the top of the second evaporation boat; film limiting devices are arranged between the feeding mechanism and the coating mechanism as well as between the coating mechanism and the winding mechanism; the winding mechanism comprises a fifth lifting mechanism and a winding device; and an extension end of the fifth lifting mechanism is matched with the winding device to drive the winding device to move up and down. The vacuum coating equipment has the advantages that the automation degree is high, supplementing and collecting are convenient and timely, preheating is uniform, the preheating degree can be adjusted, the processing requirements of the films of various models can be met and the coating thickness can be adjusted.
Description
Technical field
The present invention relates to coater technical field, more particularly, to a kind of metallized film processing vacuum coating equipment.
Background technology
Metallized film directly affects the service life of capacitor as the critical piece of capacitor, the quality of its quality.
At present, metallized film mainly by vacuum coating machine preparation, including insulation film intake mechanism, film-coating mechanism and
Plate the winding film mechanism after metal level.However, the vacuum coating equipment of prior art has the following disadvantages：
（1）Metal level such as aluminum due to plating easily aoxidizes, so whole process equipment is all carried out under vacuum, and conduct
The intake mechanism of feeding insulation film generally adopts feeding roller, and the amount of its winding insulation film is limited, when the insulation on feeding roller
At the end of the fast unwinding of thin film, need of roll change again or rewind thin film, as patent application publication
201320431310.X it is a kind of soft disclosed in super-high sheet resistance metalized film vacuum coating equipment, patent application 201310324470.9
All there are the problems referred to above around vaporation-type vacuum coating equipment.Vacuum coating equipment disclosed in patent application 200910303404.7 passes through to carry
Disk is loaded into thin film and coordinates connecting gear to realize the uninterrupted feeding of thin film, but is loaded into thin film with load plate and measures after all less it is impossible to expire
A large amount of production requirements of foot industry, all have much room for improvement in terms of the convenience, promptness of feed supplement.
（2）, after feeding unit feeding, if directly carrying out plated film by film-coating mechanism, insulation is thin for existing vacuum coating equipment
The temperature on film surface is relatively low, and plated film stability is poor.Solution is that the interface improving its surface by arranging preheating device is made
With.But, preheating device is mostly fixed pattern, non-adjustable, causes to preheat uneven.Prior art such as patent application
Although 201520245919.7 a kind of disclosed vacuum coating equipment provides the heater that can move along arc-shaped guide rail simultaneously
Heater adjustable angle is realized by metallic flexible hose, but, this structure is the physics using metallic flexible hose itself
Property is curved the realization it has not been convenient to automatically adjust；In addition, arc-shaped guide rail motion can drive heater motion can only realize
Linear two-dimensional is adjusted it is impossible to meet the regulation of stereoscopic three-dimensional it is difficult to realize the control of pre- calorific intensity, pre- thermal uniformity also needs to be carried
High.
（3）Film-coating mechanism passes through evaporation boat motlten metal so that evaporation of metal is to the insulation film being deposited with drum surface, is formed
Metal level, realizes coating process.But, the distance between its evaporation drum of traditional film-coating mechanism and evaporation boat mostly are definite value；And
And, the openings of sizes of evaporation boat is also fixing, according to the thickness t of the coat of metal on basement membrane0=w0/（πph2）It is known that, by adjusting
The distance between the openings of sizes of section evaporation boat and evaporation drum and evaporation boat can control the thickness of the coat of metal.
（4）Some metallized films are on the basis of aluminium film, then plate into one layer of enhancement layer again in zone line, by secondary
Plated film improves pressure performance and the self-healing performance of thin film, it is therefore desirable to corresponding plated film prepares two sets of evaporation boats, wherein, with
Need to arrange screening arrangement at the opening of the corresponding evaporation boat of enhancement layer, aluminum as a kind of in patent application 200810200949.0 thickeies gold
The vacuum evaporating coating machine of genusization capacitor membrane, patent application 201310324470.9 a kind of soft around vaporation-type vacuum coating
Machine, thickeies effect by screening arrangement feasible region.But, the screening arrangement of existing technology is also mostly fixed, in addition shields
Covering groove structure on device, shape immutable, leading to a setting can only process a kind of film of model, if enabling shielding dress
Put interchangeable, evaporation boat aperture area and itself spacing and evaporation drum between automatically adjustable, then can meet the life of Multiple Type film
Produce.
（5）The problem that coiler device exists is exactly the same with feeding unit, all has in terms of the convenience, promptness of rewinding
Wait to improve.
（6）Insulation film in transportation, if tension force uneven it is found that the phenomenon that floats, the normal biography of impact thin film
Defeated.
Content of the invention
The present invention is directed to the deficiencies in the prior art, provides a kind of high degree of automation, feed supplement/rewinding convenient, in time, in advance
Heat is uniform, pre- heat is adjustable, the processing that is suitable for Multiple Type film, coating film thickness is adjustable, the stable metallized film of transmission is processed
Use vacuum coating equipment.
The present invention realizes solving above-mentioned technical problem by following technological means：A kind of metallized film processing vacuum
Coater, including vacuum chamber and be arranged on intake mechanism in described vacuum chamber, preheating mechanism, film-coating mechanism, winding mechanism；
Described intake mechanism, preheating mechanism, film-coating mechanism, winding mechanism set gradually from front to back according to technological process；Feed described
Enter between mechanism and film-coating mechanism, between described film-coating mechanism and winding mechanism, be provided with film limiting device；Described thin film
Stopping means include thin film limit assembly and lower thin film limit assembly；Described upper thin film limit assembly is located at insulation film
Top, described lower thin film limit assembly is located at the lower section of thin film；Described upper thin film limit assembly, lower thin film limit assembly are transported in opposite directions
Employ spacing to carry out to thin film；
Described intake mechanism includes the first elevating mechanism, feeding unit；The telescopic end of described first elevating mechanism and described feeding
Device cooperation moves up and down in order to drive described feeding unit；Described winding mechanism includes the 5th elevating mechanism, coiler device；
The telescopic end of described 5th elevating mechanism and coiler device cooperation are in order to drive described coiler device to move up and down；
Described preheating mechanism is arranged on the inner roof wall of described vacuum chamber；Described preheating mechanism includes jointed gear unit, heating
Device, the first retractor device；Described jointed gear unit includes fix bar, drive link；Higher one end in position in described fix bar
It is arranged on the inner roof wall of described vacuum chamber by the second elevating mechanism, the relatively low one end in position and described biography in described fix bar
In lever, the higher one end in position is hinged, and in described drive link, the relatively low one end in position is provided with described heater；Described first
The fixing end of retractor device is hinged on described second elevating mechanism and the join domain of described fix bar, the described first flexible dress
The other end put is hinged with described drive link；
Described film-coating mechanism includes the first evaporation coating device, the second evaporation coating device；Described first evaporation coating device bag
Include the first evaporation drum, the first evaporation boat；Described first evaporation boat is arranged on the lower section of described first evaporation drum；Described first evaporation
The open top region of boat is provided with the first movable board component adjusting described first evaporation boat openings of sizes；
Described second evaporation coating device includes the second evaporation drum, the second evaporation boat, screening arrangement；Described second evaporation boat setting
Lower section in the described second evaporation drum；The open top region of described second evaporation boat is provided with described second evaporation boat of regulation and opens
Second movable board component of mouth size；Described screening arrangement is in order to limit the gold evaporating at the opening of described second evaporation boat
Belong to falling width on insulation film, region.
Preferably：A described contact includes head rod, the first roller, described first roller and described insulation film
Outermost layer be in rolling contact, the higher one end in described head rod position one end relatively low with position in described first baffle is even
Connect, described head rod position rolls cooperation compared with the one end at bottom with described first roller；State the second contact and include second even
Extension bar, the second roller, described second roller is in rolling contact with the outermost layer of metallized film；Described second connecting rod position is higher
One end be connected with relatively low one end in position in described second baffle, described second connecting rod position is compared with the one end and described the at bottom
Second wheel is rotatably assorted.
Preferably：Described intake mechanism also includes first close to induction mechanism, the first automatic conveying device；Described first connects
Near-induction mechanism includes first baffle, the first contact；In described first baffle the higher one end in position be rotatably assorted sheathed
On the fixed transverse rod of the first bracing frame upper end, the relatively low one end in position and described first contact middle position in described first baffle
Put higher one end to connect, in described first contact, the relatively low one end in position can with the insulation film in described feeding roller
Outer layer；The relatively described baffle plate setting of described first proximity switch is on the fixed transverse rod of described first bracing frame；Described
One automatic conveying device includes the first housing, the first scroll wheel；Described first elevating mechanism is arranged on described first housing, institute
State the bottom that the first scroll wheel is arranged on said first shell, described first scroll wheel passes through the second driving means and drives；Institute
State and in vacuum chamber, be provided with the second proximity switch, described second proximity switch is in order to monitor described intake mechanism in described vacuum chamber
In position, outside described vacuum chamber near described vacuum chamber upstream end at be provided with the 3rd proximity switch, the described 3rd connects
Nearly switch is in order to monitor described intake mechanism in the outdoor position of vacuum；It is provided with into room at the upstream end of described vacuum chamber
Door；
Described winding mechanism is also included with first automatic conveying device structure identical the second automatic conveying device, second close to sense
Answer mechanism；Described second includes second baffle, the second contact close to induction mechanism；One that in described second baffle, position is higher
End is set on the fixed transverse rod of the second bracing frame upper end with being rotatably assorted, the relatively low one end in position and institute in described second baffle
State one end that in the second contact, position is higher to connect, in described second contact, the relatively low one end in position can be with described take-up roll
In metallized film outermost layer contact；The relatively described second baffle of described 4th proximity switch is arranged on described second support
On the fixed transverse rod of frame；It is provided with the 5th proximity switch in described vacuum chamber, described 5th proximity switch is described in order to monitor
Position in described vacuum chamber for the winding mechanism, is provided with the 6th outside described vacuum chamber at the port of export of described vacuum chamber
Proximity switch, described 6th proximity switch is in order to monitor winding mechanism in the outdoor position of vacuum；It is provided with the described port of export
Go out room door.
Preferably：The lower section of described preheating mechanism is provided with belt conveyer, described belt conveyer will be from institute
The insulation film stating intake mechanism feeding transmits to described film-coating mechanism.
Preferably：Described first movable board component includes the first left portable plate, the first right portable plate, the first left flexible dress
Put, the first right retractor device；Relatively low one end in position and the one of the top of described first evaporation boat in described first left portable plate
Hold hinged, the higher one end position free end in its position；The fixing end of described first left retractor device and described first evaporation boat
Outer wall is hinged, and the telescopic end of described first left retractor device is hinged with the described first left portable plate；In described first right portable plate
The relatively low one end in position is hinged with the other end at the top of described first evaporation boat, and the higher one end in its position is free end, institute
The fixing end stating the first right retractor device is hinged with the outer wall of described first evaporation boat, the telescopic end of described first right retractor device
Hinged with the described first right portable plate；
Described second movable board component includes the second left portable plate, the second right portable plate, the second left retractor device, second right flexible
Device；In described second left portable plate, the relatively low one end in position is hinged with the one end at the top of described second evaporation boat, its position
Higher one end is free end；The fixing end of described second left retractor device is hinged with the outer wall of described second evaporation boat, described
The telescopic end of the second left retractor device is hinged with the described second left portable plate；Relatively low one end in position in described second right portable plate
Hinged with the other end at the top of described second evaporation boat, the higher one end in its position is free end, the described second right flexible dress
The fixing end put is hinged with the outer wall of described second evaporation boat, the telescopic end of described second right retractor device and described second right work
Dynamic plate is hinged；
Preferably：The lower section of described first evaporation coating device is provided with the 3rd elevating mechanism, described 3rd elevating mechanism in order to
Drive described first evaporation coating device elevating movement；The lower section of described second evaporation coating device is provided with the 4th elevator
Structure, described 4th elevating mechanism is in order to drive described second evaporation coating device elevating movement.
Preferably：Described screening arrangement includes link transmission shielding body, including fixed seat, barricade, the second flexible dress
Put；In described fixed seat, the relatively low one end in position is arranged in the inner bottom wall of described vacuum chamber by pedestal, in described fixed seat
The higher one end in position is hinged with one end of described barricade, and the other end of described barricade can be from the opening of described two evaporation boats
The one end at place extends to the other end；The telescopic end of described second retractor device is hinged with described barricade, its fixing end and fixation
Seat is hinged；Groove is provided with described barricade, the directed parallel of described groove is in insulation film transmission direction.
Preferably：Link transmission shielding body quantity is two, and is symmetricly set on the both sides of described second evaporation boat.
Preferably：Described upper thin film limit assembly includes elevating mechanism, upper limit plate, the fixation of described upper elevating mechanism
End is arranged on the inner roof wall of described vacuum chamber, and the telescopic end of described upper elevating mechanism is connected with described upper limit plate；Under described
Thin film limit assembly includes lower elevating mechanism, lower limiting board, and the fixing end of described lower elevating mechanism is arranged on described vacuum chamber
In inner bottom wall, the telescopic end of described lower elevating mechanism is connected with described lower limiting board.
Preferably：It is provided with rubber layer at the described bottom of upper limit plate, the top of lower limiting board.
It is an advantage of the current invention that：The present invention has high degree of automation, feed supplement/rewinding facilitates, timely, preheating is uniform,
Pre- heat is adjustable, be suitable for Multiple Type film processing, the adjustable advantage of coating film thickness.
Further, support feeding unit because the present invention first elevating mechanism passes through the first bracing frame, be capable of feeding
Moving up and down of device, if the rotation precision of first driving means declines, can pass through the height to feeding unit for first elevating mechanism
Degree is adjusted, thus ensureing feeding roller its height, position consistency of feeding every time, it is to avoid unstable the showing of tension force thus leading to
As.
Further, first elevating mechanism of the present invention is preferably servo-cylinder or servo cylinder, by controller control.Enter
One step, because the bottom of the first scroll wheel is embedded in guide rail it is ensured that the first scroll wheel does not deviate by, realizes movement locus consistent
Technique effect.
Further, drive link is driven to swing by the stretching motion of the first retractor device, thus driving pendulum about heater
Dynamic.Meanwhile, coordinate the elevating movement of the second elevating mechanism, drive heater to move up and down so that 3 D stereo realized by heater
Motion, and enable the motion in same level, insulation film more uniformly preheated, and can by adjusting plus
The height of hot device realizes the control to the pre- calorific intensity of heater.
Further, first retractor device of the present invention, the second elevating mechanism also can be servo-cylinder or servo cylinder, lead to
Cross controller and control its work, realize automatization further.
Further, by the stretching motion of the first left retractor device, the first right retractor device, drive the first left portable plate,
The free end of the first right portable plate deviates from or move toward one another, thus controlling openings of sizes, reaches the technology effect adjusting plated film amount
Really.
Further, the 3rd elevating mechanism elevating movement drives the first evaporation boat close or away from the first evaporation drum, passes through
Adjusting the first evaporation boat and first and being deposited with bulging distance to be the technique effect realizing the regulation of plated film amount.
Further, drive barricade to rotate by the stretching motion of the second retractor device, when needing shielding, barricade is turned
Move to horizontal level.Now, the metal from the second evaporation boat can only be plated in the zone line of insulation film by groove, realizes
The technique effect that selectivity thickeies.
Further, link transmission shielding body quantity is two, and is symmetricly set on the both sides of the second evaporation boat.Different screens
Logical different width of tubesheet hole groove in shield plate.The present invention passes through to provide the groove width with different groove width, realizes thickening width
Alternative, is easy to the processing of different model thin film.
Further, when intake mechanism removes vacuum chamber preparation roll change, by arranging film clamp assembly to insulation film
Clamped so that insulation film can only unwind out from feeding roller, will not be by plated film winding from winding mechanism
Metallized film unwinds out, prevents thin film from inversely moving.
Further, when insulation film is in transmission, upper grip block, lower folder are controlled by upper elevating mechanism, lower elevating mechanism
Hold plate spacing, the spacing of vertical direction is carried out to thin film, prevent thin film because tension force is uneven in transmit process and produce is floating
Dynamic phenomenon is it is ensured that thin film smooth transport.
Further, it is provided with rubber layer at the top of the bottom of upper grip block, lower grip block.By the flexibility of rubber layer
Property, it is to avoid insulation film contacts generation cut print with grip block.
Brief description
Fig. 1 is the structural representation of the present invention.
Fig. 2 is intake mechanism structural representation under the 3rd proximity switch state in the present invention.
Fig. 3 is winding mechanism structural representation under the 6th proximity switch state in the present invention.
Fig. 4 is the structural representation of feeding unit in the present invention.
Fig. 5 is the structural representation of coiler device in the present invention.
Fig. 6 be the present invention in feeding roller in working order under structural representation.
Fig. 7 be the present invention in take-up roll in working order under structural representation.
Fig. 8 be the present invention in the first proximity switch not with first baffle relative status under structural representation.
Fig. 9 be under the first proximity switch and first baffle relative status in the present invention structural representation.
Figure 10 be the present invention in the second proximity switch not with second baffle relative status under structural representation.
Figure 11 be under the second proximity switch and second baffle relative status in the present invention structural representation.
Figure 12 is the structural representation of automatic conveying device in the present invention.
Figure 13 is the structural representation preheating mechanism in the present invention.
Figure 14 is the structural representation of the grip block in the present invention with rubber layer.
Figure 15 is the structural representation of the first evaporation coating device in the present invention.
Figure 16 is the structural representation of the second evaporation coating device in the present invention.
Specific embodiment
For further describing the present invention, with reference to embodiment, it is described further.
As shown in figure 1, the present invention discloses a kind of metallized film processing vacuum coating equipment, including vacuum chamber 401 and
It is arranged on intake mechanism in vacuum chamber 401, film-coating mechanism, winding mechanism.Intake mechanism, film-coating mechanism, winding mechanism according to
Technological process sets gradually from front to back.
As shown in figure 1, intake mechanism includes the first elevating mechanism 101, feeding unit.First elevating mechanism 101 flexible
End and feeding unit cooperation are in order to drive feeding unit to move up and down.
As shown in figure 1, vacuum chamber 401 include the chamber door 4011 of upstream end and the port of export go out room door 4012.
As shown in figure 1, feeding unit includes the first bracing frame, the first rotating cylinder 1022, feeding roller 1023.First rotation
Cylinder 1022 is rotatably assorted with the first bracing frame, and the first rotating cylinder 1022 can be around the central shaft rotation of itself.Some
Feeding roller 1023 is distributed on the first rotating cylinder 1022 and feeding roller 1023 energy around the central shaft of the first rotating cylinder 1022
Central shaft rotation around itself.
As shown in figure 4, as preferred scheme, the first rotating cylinder 1022 includes the first left plectane being oppositely arranged
10221st, the first right plectane 10222.Pass through first rotating shaft 10223 even between first left plectane 10221, the first right plectane 10222
Connect, the center that the first left plectane 10221 is exposed in one end of first rotating shaft 10223 is rotatably assorted with one end of the first bracing frame,
The center that the other end of one rotating shaft 10223 exposes the first right plectane 10222 is rotatably assorted with the other end of the first bracing frame.Feeding
The end of roller 1023 is rotatably assorted with corresponding plectane.
Above-mentioned each rotation connects all preferably passes through clutch shaft bearing（In figure is not drawn into）To realize.As first rotating shaft 10223
End pass through clutch shaft bearing end corresponding with the first bracing frame connection.The end of feeding roller 1023 pass through second bearing with right
The plectane answered connects.
The end that above-mentioned each rotation connects preferably also first rotating shaft 10223 passes through in the first bracing frame corresponding end
Through hole, the end of feeding roller 1023 passes through the upper through hole of corresponding plectane, and end can rotate realization in corresponding through hole.When
So, between the end of first rotating shaft 10223 and the first bracing frame, the rotating manner of the end of feeding roller 1023 and corresponding plectane
Can be realized using other existing technology.
As shown in figure 4, as preferred scheme, the other end of first rotating shaft 10223 exposes in the first right plectane 10222
The heart is connected with the input shaft of first driving means 1024, and the fixing end of first driving means 1024 is arranged on the another of the first bracing frame
One end.
As shown in figure 4, as preferred scheme：Intake mechanism also includes first close to induction mechanism.First close to sensing
Mechanism includes first baffle 1031, the first contact.In first baffle 1031, the higher one end in position is set in being rotatably assorted
On the fixed transverse rod 10213 of the first bracing frame upper end, the relatively low one end in position and the first contact middle position in first baffle 1031
Put higher one end to connect, in the first contact the relatively low one end in position can with exhausted in the feeding roller 1023 being in feeding state
The outermost layer contact of edge thin film 501.First proximity switch 1033 first baffle 1031 relatively is arranged on fixed transverse rod 10213.
As shown in Fig. 4,6, as preferred scheme：First contact includes head rod 10321, the first roller
10322, the first roller 10322 is in rolling contact with the outermost layer of insulation film 501.Head rod 10321 position higher one
End is connected with relatively low one end in position in first baffle 1031, and bearing pin is passed through compared with the one end at bottom in head rod 10321 position（Figure
In do not mark）It is rotatably assorted with the first roller 10322.
As shown in Fig. 1,12, as preferred scheme：Intake mechanism also includes the first automatic conveying device, and first is automatically defeated
Device is sent to include the first housing 1041, the first scroll wheel 1042.First elevating mechanism 101 is arranged on the first housing 1041, the
One scroll wheel 1042 is arranged on the bottom of the first housing 1041, and the first scroll wheel 1042 is driven by the second driving means 1043.
It is provided with the second proximity switch 105 in vacuum chamber 401, the second proximity switch 105 is in order to monitor intake mechanism in vacuum chamber 401
In position, vacuum chamber 401 outside is provided with the 3rd proximity switch 106 at the upstream end of vacuum chamber 401, and the 3rd close to opening
Close 106 in order to monitor position outside vacuum chamber 401 for the intake mechanism.
As shown in figure 12, as preferred scheme：It is provided with the with the first automatic conveying device cooperation in vacuum chamber 401
One guide rail 107.The bottom of the first scroll wheel 1042 is embedded in the first guide rail 107.
As shown in figure 1, the first driving means 1024 of the present invention, the second driving means 1043 are driven by controller,
The interior or outdoor setting operating board 701 of vacuum chamber 401, arranges this controller in operating board 701.The first driving dress of the present invention
Put the 1024, second driving means 1043 and be preferably servo motor or servomotor.
As shown in Fig. 1,2,4,12, each feeding roller 1023 being wound with insulation film 501 is placed sequentially in first turn
On dynamic cylinder 1022, insulation film 501 feeding in the feeding roller 1023 nearest apart from film-coating mechanism is carried out coating film treatment, when
Insulation film 501 in this feeding roller 1023 close to unwinding complete when, first baffle 1031 rotate to the first proximity switch
1033 corresponding positions, the first proximity switch 1033 sends signal to controller, and controller drives 1043 turns of the second driving means
Dynamic, drive chamber door 4011 to open, control other elements in vacuum tank to quit work, the second driving means 1043 rotate drive the
One scroll wheel 1042 moves along the first guide rail 107 to the upstream end of vacuum chamber 401, and feeding unit is removed vacuum chamber 401.When
When the position of mobile extremely close 3rd proximity switch 106 of feeding unit, the 3rd proximity switch 106 sends signal to controller,
Controller controls the second driving means 1043 to stop operating, and simultaneously drives first driving means 1024 to rotate, first driving means
1024 rotate drive the first rotating cylinder 1022 rotates certain angle, and this angle is the angle between two neighboring feeding roller 1023
Degree.Requiring supplementation with is angle all same between the two neighboring feeding roller of the present embodiment 1023.Now, staff will be above-mentioned fast
Unwinding is completely insulated in the terminal of remaining insulation film 501 and the next feeding roller 1023 needing feeding in feeding roller 1023
The top of thin film 501 connects, then by operating the start button on operating board 701, drives the second driving means by controller
1043 rotate backward, and the second driving means 1043 rotate and drive the first scroll wheel 1042 along the first guide rail 107 to vacuum chamber 401
Upstream end move, when feeding unit mobile to when near the position of the second proximity switch 105, the second proximity switch 105
Go out signal to controller, controller controls the second driving means 1043 to stop operating, meanwhile, drive chamber door 4011 to close, control
In vacuum tank processed, other elements are started working.
In some embodiments, in above-mentioned other elements, the preferential work of vacuum treated vacuum pump is carried out to vacuum chamber 401
Make, after the vacuum in vacuum chamber 401 reaches set point, by the pressure transducer that is arranged in vacuum chamber 401 as true
Empty sensor sends signal to controller, drives other elements to work again by controller.When the vacuum in vacuum chamber 401 not
Reach set point, other elements quit work.
As shown in figure 1, further, since the present invention the first elevating mechanism 101 passes through the first bracing frame 108 supports feeding dress
Put, be capable of moving up and down of feeding unit, if the rotation precision of first driving means 1024 declines, can lift by first
Mechanism 101 is adjusted to the height of feeding unit, thus ensureing feeding roller 1023 its height, position consistency of feeding every time,
Avoid the unstable phenomenon of the tension force that thus leads to.
Further, first elevating mechanism 101 of the present invention is preferably servo-cylinder or servo cylinder, by controller control
System.Further, because the bottom of the first scroll wheel 1042 is embedded in guide rail it is ensured that the first scroll wheel 1042 does not deviate by, real
The consistent technique effect of existing movement locus.
As shown in figure 1, being provided with preheating mechanism between intake mechanism and film-coating mechanism, preheating mechanism is in order to feeding machine
The insulation film 501 of structure feeding is preheated.Preheating mechanism is preferably provided on the inner roof wall of vacuum chamber 401.
As shown in figure 13, preheating mechanism includes jointed gear unit, heater 202, the first retractor device 203.Connecting rod passes
Motivation structure includes fix bar 2011, drive link 2012.In fix bar 2011, the higher one end in position is arranged on the interior of vacuum chamber 401
On roof, in fix bar 2011, the relatively low one end in position is hinged with higher one end in position in drive link 2012, drive link 2012
Having heaters 202 is installed in the relatively low one end in middle position, and the periphery of heater 202 can also arrange reflector 204.
As shown in figure 13, further, in fix bar 2011, the higher one end in position is arranged on by the second elevating mechanism 205
On the inner roof wall of vacuum chamber 401.It is provided with connecting plate 206 between fix bar 2011 and the second elevating mechanism 205.
The fixing end of the first retractor device 203 is hinged on connecting plate 206, the telescopic end of the first retractor device 203 and biography
Lever 2012 is hinged.
Drive link 2012 is driven to swing by the stretching motion of the first retractor device 203, thus driving heater 202 about
Swing.Meanwhile, coordinate the elevating movement of the second elevating mechanism 205, drive heater 202 to move up and down so that heater 202 is real
The motion of existing 3 D stereo, and enable the motion in same level, insulation film 501 is more uniformly preheated,
And the control to the pre- calorific intensity of heater 202 can be realized by adjusting the height of heater 202.
Preferably, first retractor device 203 of the present invention, the second elevating mechanism 205 also can be servo-cylinder or servo
Cylinder, controls its work by controller, realizes automatization further.
As shown in figure 1, as preferred scheme：The lower section of preheating mechanism is provided with belt conveyer 207, belt passes
Device 207 is sent to transmit the insulation film 501 feeding from intake mechanism to film-coating mechanism.Because belt is transmitted as plane transmission,
Make insulation film 501 smooth conveying on belt, improve the uniformity of preheating further.
As shown in figure 1, film-coating mechanism includes the first evaporation coating device, including the first evaporation drum 3011, the first evaporation boat
3012.First evaporation boat 3012 is arranged on the lower section of the first evaporation drum 3011.The open top region of the first evaporation boat 3012 sets
It is equipped with the first movable board component controlling the first evaporation boat 3012 openings of sizes.
As shown in figure 15, as preferred scheme：It is right that first movable board component includes the first left portable plate 30131, first
Portable plate 30132, the first left retractor device 30133, the first right retractor device 30134.In first left portable plate 30131, position is relatively
Low one end is hinged with the one end at the top of the first evaporation boat 3012, and the higher one end in its position is free end.First is left flexible
The fixing end of device 30133 is hinged with the outer wall of the first evaporation boat 3012, the telescopic end and first of the first left retractor device 30133
Left portable plate 30131 is hinged.
In first right portable plate 30132, the relatively low one end in position is hinged with the other end at the top of the first evaporation boat 3012,
The higher one end in its position is free end, the outer wall hinge of the fixing end of the first right retractor device 30134 and the first evaporation boat 3012
Connect, the telescopic end of the first right retractor device 30134 is hinged with the first right portable plate 30132.
By the stretching motion of the first left retractor device 30133, the first right retractor device 30134, drive the first left activity
Plate 30131, the free end of the first right portable plate 30132 deviate from or move toward one another, thus controlling openings of sizes, reach regulation plating
The technique effect of film amount.
As shown in figure 1, further：The lower section of the first evaporation coating device is provided with the 3rd elevating mechanism 3014, the 3rd liter
Descending mechanism 3014 is in order to drive the first evaporation coating device lifting.The first evaporation coating device and the 3rd elevating mechanism 3014 it
Between be provided with the second bracing frame（In figure does not mark）.
3rd elevating mechanism 3014 elevating movement drive the first evaporation boat 3012 is close or is deposited with drum 3011 away from first,
It is to realize the technique effect of plated film amount regulation by adjusting the first evaporation boat 3012 and the first distance being deposited with drum 3011.
Preferably, the first of the present invention the left retractor device 30133, the first right retractor device 30134, the 3rd elevating mechanism
3014 also can be servo-cylinder or servo cylinder, control its work by controller, thus realizing automatization further.
As shown in figure 1, film-coating mechanism also includes the second evaporation coating device, including the second evaporation drum 3021, second evaporation
Boat 3022.Second evaporation boat 3022 is arranged on the lower section of the second evaporation drum 3021.The open top region of the second evaporation boat 3022
It is provided with the second movable board component controlling the second evaporation boat 3022 openings of sizes.
As shown in figure 16, the second movable board component includes the second left portable plate 30231, the second right portable plate 30232, second
Left retractor device, the second right retractor device.The relatively low one end in position and the second evaporation boat 3022 in second left portable plate 30231
The one end at top is hinged, and the higher one end in its position is free end.The fixing end of the second left retractor device and the second evaporation boat
3022 outer wall is hinged, and the telescopic end of the second left retractor device is hinged with the second left portable plate 30231.
In second right portable plate 30232, the relatively low one end in position is hinged with the other end at the top of the second evaporation boat 3022,
The higher one end position free end in its position, the fixing end of the second right retractor device is hinged with the outer wall of the second evaporation boat 3022, the
The telescopic end of two right retractor devices is hinged with the second right portable plate 30232.
The effect of the effect of the second movable board component and operation principle and the second activity board component and operation principle phase
With the present embodiment here is not repeated.
As shown in figure 16 it is preferable that the second evaporation coating device also includes screening arrangement 3024, screening arrangement 3024 in order to
Limit width, the region that the metal melting evaporating at the opening of the second evaporation boat 3022 falls on insulation film 501.Shielding
Device 3024 includes link transmission shielding body, including fixed seat 30241, barricade 30242, the second retractor device 30243.Gu
In reservation 30241, the relatively low one end in position is arranged in the inner bottom wall of vacuum chamber 401 by pedestal 30244, in fixed seat 30241
The higher one end in position is hinged with one end of barricade 30242, and the other end of barricade 30242 can be at the opening of two evaporation boats
One end extend to the other end.The fixing end of the second retractor device 30243 is hinged with fixed seat 30241, the second retractor device
30243 telescopic end is hinged with barricade 30242.Groove is provided with barricade 30242, the directed parallel of groove is in insulation
Thin film 501 transmission direction.Preferably, groove is located at the zone line of barricade 30242, certainly also can be in barricade 30242
Both sides.
Drive barricade 30242 to rotate by the stretching motion of the second retractor device 30243, when needing shielding, will shield
Plate 30242 turns to horizontal level.Now, the metal from the second evaporation boat 3022 can only be plated in insulation film by groove
501 zone line, realizes the technique effect of selectivity thickening.
As preferred scheme：Link transmission shielding body quantity is two, and is symmetricly set on the second evaporation boat 3022
Both sides.Logical different width of tubesheet hole groove on different barricades 30242.The present invention passes through to provide the groove width with different groove width
Degree, realizes thickening the alternative of width, is easy to the processing of different model thin film.
As shown in figure 1, as preferred scheme：The lower section of the second evaporation coating device is provided with the 4th elevating mechanism
3025, the 4th elevating mechanism 3025 is in order to drive the second evaporation coating device elevating movement.4th elevating mechanism 3025 is to second
The effect of evaporation coating device is identical to the effect of the first evaporation coating device with the 3rd elevating mechanism 3025.
The second left retractor device of the present invention, the second right retractor device, the second retractor device 30243, the 4th elevating mechanism
3025 can also be servo-cylinder or servo cylinder, control its work by controller, thus realizing automatization further.?
In some embodiments, first evaporation boat of the present invention, the outer wall of the second evaporation boat can also arrange thermal insulation layer.So, then first,
Second left retractor device and first, second right retractor device are arranged on the outer wall of thermal insulation layer.Thermal insulation layer can be aluminium sheet with
And it is arranged on the heat insulation foam between aluminium sheet, evaporation boat or polyurethane resin coat.
As shown in figure 1, between intake mechanism and film-coating mechanism, being provided with thin film between film-coating mechanism and winding mechanism
Clamping device.Film clamping device of film includes film clamp assembly and lower film clamp assembly.Upper film clamp assembly is located at
The top of thin film, lower film clamp assembly is located at the lower section of thin film.Upper film clamp assembly, lower film clamp assembly move toward one another
In order to clamp thin film.
The film clamping device of film effect that the present embodiment is directed between intake mechanism and film-coating mechanism is introduced, film-coating mechanism
Film clamping device of film between film clamping device of film effect and winding mechanism between and intake mechanism and film-coating mechanism acts on such as
Go out a rut.
The effect of this device is to coordinate intake mechanism, when intake mechanism removes vacuum chamber 401 preparation roll change, by setting
Put film clamp assembly and insulation film 501 clamped so that insulation film 501 can only unwind out from feeding roller 1023,
From winding mechanism, the metallized film 801 of plated film winding will not be unwind out, prevent thin film from inversely moving.
And the effect of the film clamping device of film between film-coating mechanism and winding mechanism is cooperation winding mechanism, work as winding mechanism
When removing vacuum chamber 401 and preparing roll change, metallized film 801 is clamped so that metal by arranging film clamp assembly
Change thin film 801 to unwind out from take-up roll, from intake mechanism, non-plated film insulation film 501 will not be unwind out, prevent
Thin film inversely moves.
As shown in figure 1, as preferred scheme：Upper film clamp assembly includes elevating mechanism 4011, upper grip block
4012, the fixing end of upper elevating mechanism 4011 is arranged on the inner roof wall of vacuum chamber 401, the telescopic end of upper elevating mechanism 4011 with
Upper grip block 4012 connects.Lower film clamp assembly includes lower elevating mechanism 4013, lower grip block 4014, lower elevating mechanism 4013
Fixing end be arranged in the inner bottom wall of vacuum chamber 401, the telescopic end of lower elevating mechanism 4013 is connected with lower grip block 4014.
Due to upper elevating mechanism 4011, lower elevating mechanism 4013 setting so that film clamping device of film has following work(again
Effect：When insulation film 501 is in transmission, by upper elevating mechanism 4011, lower elevating mechanism 4013 control upper grip block 4012, under
Grip block 4014 spacing, carries out the spacing of vertical direction to insulation film 501, prevent insulation film 501 in transmit process by
And the floating phenomenon that produce uneven in tension force is it is ensured that insulation film 501 smooth transport.
As shown in figure 14, preferably：It is provided with rubber at the bottom of upper grip block 4012, the top of lower grip block 4014
Layer 4015.Flexible nature by rubber layer 4015, it is to avoid insulation film 501 contacts generation cut print with grip block.
The upper elevating mechanism 4011 of the present invention, lower elevating mechanism 4013 can be also servo-cylinder or servo cylinder, pass through
Controller controls its work, thus realizing automatization further.
Preferably：The chamber door 4011 of the present invention, go out room door 4012 be automatic seal door, can be specifically unidirectional
Door, bidirectional gate, shutter door, rolling screen door, one kind of folding door, or the automatic seal door of other prior arts.As patent application
201220092640.6 a kind of automatic lifting sealing disclosed in disclosed two way seal door, patent application 201521020622.7
Door, automatic lifting airtight door device, patent application 201420166265.4 disclosure disclosed in patent application 200820193008.4
Intelligent transport car double-sealed door.
The intake mechanism of the present invention is similar with winding mechanism structure, and winding mechanism includes the 5th elevating mechanism, coiler device.
The telescopic end of the 5th elevating mechanism and coiler device cooperation are in order to drive coiler device to move up and down.
Coiler device includes the second bracing frame, the second rotating cylinder, take-up roll.Second rotating cylinder is turned with the second bracing frame
Dynamic cooperation, and the second rotating cylinder can be around the central shaft rotation of itself.Some take-up rolls are around in the second rotating cylinder
Heart axle is distributed on the second rotating cylinder, and take-up roll can be around the central shaft rotation of itself.
As preferred scheme, the second rotating cylinder includes the second left plectane, the second right plectane being oppositely arranged.Second is left
Pass through the second rotating shaft between plectane, the second right plectane to connect, the center and second of the second left plectane is exposed in one end of the second rotating shaft
One end of bracing frame is rotatably assorted, and the other end of the second rotating shaft exposes the center of the second right plectane and the other end of the second bracing frame
It is rotatably assorted.The end of take-up roll is rotatably assorted with corresponding plectane.
Above-mentioned each rotation connects all preferably to be realized by second bearing.Second bearing is passed through in end as the second rotating shaft
End corresponding with the second bracing frame connects.The end of take-up roll is connected with corresponding plectane by second bearing.
The end of above-mentioned each rotation connection preferably also the second rotating shaft passes through the through hole in the second bracing frame corresponding end,
The end of take-up roll passes through the upper through hole of corresponding plectane, and end can rotate realization in corresponding through hole.Certainly, the second rotating shaft
End and the second bracing frame between, the end of take-up roll also can adopt other existing technology with the rotating manner of corresponding plectane
To realize.
As preferred scheme, the other end of the second rotating shaft exposes the center of the second right plectane and the defeated of the 3rd driving means
Enter axle to connect, the fixing end of the 3rd driving means is arranged on the other end of the second bracing frame.
As shown in Figure 1,5, preferably：The power resources of thin film transmission of the present invention are in the 4th driving driving take-up roll to rotate
Device 5012 and belt conveyer 207.
5th elevating mechanism, the 3rd driving means, four-drive device 5012 also can be servo-cylinder or servo cylinder,
And by controller control.
As shown in figure 5, as preferred scheme：Winding mechanism also includes second close to induction mechanism.Second close to sensing
Mechanism includes second baffle, the second contact.In second baffle, the higher one end in position is set in the second support with being rotatably assorted
On the fixed transverse rod of frame upper end, in second baffle, the relatively low one end in position is connected with higher one end in position in the second contact,
In second contact, the relatively low one end in position can be connect with the outermost layer of the metallized film 801 in the take-up roll being in reeling condition
Touch.4th proximity switch 5011 second baffle relatively is arranged on fixed transverse rod.
As shown in Figure 4,5, the present invention provides a kind of first bracing frame, the structure of the second bracing frame, all includes fixed transverse rod
10213rd, left branching rod 10211, right pole 10212.Wherein, left branching rod 10211 includes one end of corresponding bracing frame, right pole
10212 other ends including corresponding bracing frame.Certainly, the present invention first bracing frame, the structure of the second bracing frame are not limited only to
This kind of structure, the bracing frame that any prior art provides or the bracing frame of the present invention that can reach obtaining through prior art enlightenment are made
Bracing frame all should be within the scope of the present invention.
As shown in fig. 7, as preferred scheme：Second contact includes the second connecting rod, the second roller, the second roller with
The outermost layer of metallized film 801 is in rolling contact.The higher one end in second connecting rod position is relatively low with position in second baffle
One end connects, and the second connecting rod position is passed through the second bearing pin compared with the one end at bottom and is connected with the second roller rotation.
As shown in Figure 1,3, as preferred scheme：Winding mechanism also includes and the first automatic conveying device structure identical
Second automatic conveying device.It is provided with the 5th proximity switch 901 in vacuum chamber 401, the 5th proximity switch 901 is in order to monitor volume
Around position in vacuum chamber 401 for the mechanism, it is close that vacuum chamber 401 outside is provided with the 6th at the port of export of vacuum chamber 401
Switch 1001, the 6th proximity switch 1001 is in order to monitor position outside vacuum chamber 401 for the winding mechanism.
As preferred scheme：It is provided with the second guide rail with the second automatic conveying device cooperation in vacuum chamber 401.
As illustrated in figs. 8-11, winding mechanism and the difference of intake mechanism are：（1）Intake mechanism is to solve the problems, such as feed supplement,
Winding mechanism is to solve discharging problem, but principle is similar to.（2）The first proximity switch 1033 in intake mechanism is to work as feeding roller
Insulation film 501 in 1023 close to unwinding complete when, first baffle 1031 rotates to corresponding with the first proximity switch 1033
Position；And the in winding mechanism the 4th is when the metallized film 801 in take-up roll is wound to certain thickness close to opening 5011,
Second baffle rotate to the corresponding position of the 4th proximity switch 5011.
Vacuum chamber 401 many places of the present invention are provided with jockey pulley, deflector roll, are easy to the conduction of thin film and the control of tension force,
It is additionally provided with chill roll 1301 between film-coating mechanism, winding mechanism, improve the cooling effect after plated film further.
The proximity switch of the present invention is a kind of position or displacement transducer.In some embodiments：The present invention each
Wheel prepares the limited block preventing it from doing relative motion on respective axle.Limited block is symmetricly set on wheel both sides and interference fit is sheathed
Periphery in respective shaft；Or it is located at respective shaft periphery and be bolted its position.Certainly, the limited block of the present invention also can
Realized using other prior arts.
As shown in figure 12, as preferred scheme：Each scroll wheel includes drivewheel, some driven pulleys, and drivewheel is by right
The driving means answered drive, specifically：Directly driven by driving means or setting dress between driving means and drivewheel
Carry the gear-box 1044 of gear, the pinion rotation in driving means rotation driven gear case, then rotated by gear driven drivewheel,
And driven pulley is driven by drivewheel.Installing rack 1045 is provided with housing, the fixing end of driving means is arranged on installing rack.
The type of drive of the automatic conveying device of the present invention is also not necessarily limited to the structure that this embodiment refers to, or the two-wheeled of prior art
Driving, four-wheel drive or other existing type of drive.
Preferably, each elevating mechanism of the present invention, retractor device, driving means, proximity switch are connected with controller respectively
Connect.By above-mentioned Automated condtrol, realize insulation film 501 quick, efficiently fill into, preheat, plated film, winding, save
Operating time, save the work load of workman.
Certainly, the present invention can also be realized by non-automated.Such as, using clear glass manufacture vacuum chamber 401 or
Observation window is installed on vacuum chamber 401 or watch-dog is installed on vacuum chamber 401, directly observed by staff indoor real
Border situation, by the working condition of operating board 701 Non-follow control all parts.
These are only the preferred embodiment of the invention, not in order to limit the invention, all in the present invention
Any modification, equivalent and improvement made within the spirit created and principle etc., should be included in the guarantor of the invention
Within the scope of shield.
Claims (10)
1. a kind of metallized film processing vacuum coating equipment, including vacuum chamber and be arranged on the feeding machine in described vacuum chamber
Structure, preheating mechanism, film-coating mechanism, winding mechanism；Described intake mechanism, preheating mechanism, film-coating mechanism, winding mechanism are according to technique
Flow process sets gradually from front to back；It is characterized in that：
Between described intake mechanism and film-coating mechanism, between described film-coating mechanism and winding mechanism, it is provided with the spacing dress of thin film
Put；Described film limiting device includes thin film limit assembly and lower thin film limit assembly；Described upper thin film limit assembly position
In the top of insulation film, described lower thin film limit assembly is located at the lower section of thin film；Described upper thin film limit assembly, lower thin film limit
Hyte part move toward one another is spacing in order to carry out to thin film；
Described intake mechanism includes the first elevating mechanism, feeding unit；The telescopic end of described first elevating mechanism and described feeding
Device cooperation moves up and down in order to drive described feeding unit；Described winding mechanism includes the 5th elevating mechanism, coiler device；Institute
State the telescopic end of the 5th elevating mechanism and coiler device coordinates in order to drive described coiler device to move up and down；
Described preheating mechanism is arranged on the inner roof wall of described vacuum chamber；Described preheating mechanism includes jointed gear unit, heating
Device, the first retractor device；Described jointed gear unit includes fix bar, drive link；Higher one end in position in described fix bar
It is arranged on the inner roof wall of described vacuum chamber by the second elevating mechanism, the relatively low one end in position and described biography in described fix bar
In lever, the higher one end in position is hinged, and in described drive link, the relatively low one end in position is provided with described heater；Described first
The fixing end of retractor device is hinged on described second elevating mechanism and the join domain of described fix bar, the described first flexible dress
The other end put is hinged with described drive link；
Described film-coating mechanism includes the first evaporation coating device, the second evaporation coating device；Described first evaporation coating device bag
Include the first evaporation drum, the first evaporation boat；Described first evaporation boat is arranged on the lower section of described first evaporation drum；Described first evaporation
The open top region of boat is provided with the first movable board component adjusting described first evaporation boat openings of sizes；
Described second evaporation coating device includes the second evaporation drum, the second evaporation boat, screening arrangement；Described second evaporation boat setting
Lower section in the described second evaporation drum；The open top region of described second evaporation boat is provided with described second evaporation boat of regulation and opens
Second movable board component of mouth size；Described screening arrangement is in order to limit the gold evaporating at the opening of described second evaporation boat
Belong to falling width on insulation film, region.
2. a kind of metallized film processing vacuum coating equipment according to claim 1 it is characterised in that：A described contact
Part includes head rod, the first roller, and described first roller is in rolling contact with the outermost layer of described insulation film, and described first
The higher one end in connecting rod position is connected with relatively low one end in position in described first baffle, and described head rod position is the bottom of compared with
One end with described first roller roll cooperation；State the second contact and include the second connecting rod, the second roller, described second roller
It is in rolling contact with the outermost layer of metallized film；The higher one end in described second connecting rod position and position in described second baffle
Relatively low one end connects, and described second connecting rod position is rotatably assorted with described second roller compared with the one end at bottom.
3. a kind of metallized film processing vacuum coating equipment according to claim 1 it is characterised in that：
Described intake mechanism also includes first close to induction mechanism, the first automatic conveying device；Described first close to induction mechanism
Including first baffle, the first contact；In described first baffle, the higher one end in position is set in the first support with being rotatably assorted
On the fixed transverse rod of frame upper end, in the relatively low one end in position and described first contact in described first baffle, position is higher one
End connects, and in described first contact, the relatively low one end in position can be contacted with the outermost layer of the insulation film in described feeding roller；
The relatively described baffle plate setting of described first proximity switch is on the fixed transverse rod of described first bracing frame；Described first automatic transport
Device includes the first housing, the first scroll wheel；Described first elevating mechanism is arranged on described first housing, described first rolling
Wheel is arranged on the bottom of said first shell, and described first scroll wheel passes through the second driving means and drives；In described vacuum chamber
Be provided with the second proximity switch, described second proximity switch in order to monitor position in described vacuum chamber for the described intake mechanism,
Outside described vacuum chamber near described vacuum chamber upstream end at be provided with the 3rd proximity switch, described 3rd proximity switch in order to
Monitor described intake mechanism in the outdoor position of vacuum；It is provided with chamber door at the upstream end of described vacuum chamber；
Described winding mechanism is also included with first automatic conveying device structure identical the second automatic conveying device, second close to sense
Answer mechanism；Described second includes second baffle, the second contact close to induction mechanism；One that in described second baffle, position is higher
End is set on the fixed transverse rod of the second bracing frame upper end with being rotatably assorted, the relatively low one end in position and institute in described second baffle
State one end that in the second contact, position is higher to connect, in described second contact, the relatively low one end in position can be with described take-up roll
In metallized film outermost layer contact；The relatively described second baffle of described 4th proximity switch is arranged on described second support
On the fixed transverse rod of frame；It is provided with the 5th proximity switch in described vacuum chamber, described 5th proximity switch is described in order to monitor
Position in described vacuum chamber for the winding mechanism, is provided with the 6th outside described vacuum chamber at the port of export of described vacuum chamber
Proximity switch, described 6th proximity switch is in order to monitor winding mechanism in the outdoor position of vacuum；It is provided with the described port of export
Go out room door.
4. a kind of metallized film processing vacuum coating equipment according to claim 1 it is characterised in that：In described preheating
The lower section of mechanism is provided with belt conveyer, described belt conveyer by the insulation film feeding from described intake mechanism to
Described film-coating mechanism transmission.
5. a kind of metallized film processing vacuum coating equipment according to claim 1 it is characterised in that：Described first lives
Dynamic board component includes the first left portable plate, the first right portable plate, the first left retractor device, the first right retractor device；Described first
In left portable plate, the relatively low one end in position is hinged with the one end at the top of described first evaporation boat, and the higher one end position in its position is certainly
By holding；The fixing end of described first left retractor device is hinged with the outer wall of described first evaporation boat, described first left retractor device
Telescopic end hinged with the described first left portable plate；The relatively low one end in position and described first evaporation in described first right portable plate
The other end at the top of boat is hinged, and the higher one end in its position is free end, the fixing end of described first right retractor device and institute
The outer wall stating the first evaporation boat is hinged, and the telescopic end of described first right retractor device is hinged with the described first right portable plate；
Described second movable board component includes the second left portable plate, the second right portable plate, the second left retractor device, second right flexible
Device；In described second left portable plate, the relatively low one end in position is hinged with the one end at the top of described second evaporation boat, its position
Higher one end is free end；The fixing end of described second left retractor device is hinged with the outer wall of described second evaporation boat, described
The telescopic end of the second left retractor device is hinged with the described second left portable plate；Relatively low one end in position in described second right portable plate
Hinged with the other end at the top of described second evaporation boat, the higher one end in its position is free end, the described second right flexible dress
The fixing end put is hinged with the outer wall of described second evaporation boat, the telescopic end of described second right retractor device and described second right work
Dynamic plate is hinged.
6. a kind of metallized film processing vacuum coating equipment according to claim 1 it is characterised in that：Described first steaming
The lower section sending out coating apparatus is provided with the 3rd elevating mechanism, and described 3rd elevating mechanism is in order to drive described first evaporation coating dress
Put elevating movement；The lower section of described second evaporation coating device is provided with the 4th elevating mechanism, described 4th elevating mechanism in order to
Drive described second evaporation coating device elevating movement.
7. a kind of metallized film processing vacuum coating equipment according to claim 1 it is characterised in that：Described shielding dress
Put including link transmission shielding body, including fixed seat, barricade, the second retractor device；In described fixed seat, position is relatively low
One end is arranged in the inner bottom wall of described vacuum chamber by pedestal, the higher one end in position and described barricade in described fixed seat
One end hinged, the other end of described barricade can extend to the other end in the one end at the opening of described two evaporation boats；Described
The telescopic end of the second retractor device is hinged with described barricade, and its fixing end is hinged with fixed seat；It is provided with described barricade
Groove, the directed parallel of described groove is in insulation film transmission direction.
8. a kind of metallized film processing vacuum coating equipment according to claim 7 it is characterised in that：Link transmission screen
Cover mechanism's quantity and be two, and be symmetricly set on the both sides of described second evaporation boat.
9. a kind of metallized film processing vacuum coating equipment according to claim 1 it is characterised in that：Described upper thin film
Limit assembly includes elevating mechanism, upper limit plate, and the fixing end of described upper elevating mechanism is arranged on the interior top of described vacuum chamber
On wall, the telescopic end of described upper elevating mechanism is connected with described upper limit plate；Described lower thin film limit assembly includes lower elevator
Structure, lower limiting board, the fixing end of described lower elevating mechanism is arranged in the inner bottom wall of described vacuum chamber, described lower elevating mechanism
Telescopic end is connected with described lower limiting board.
10. a kind of metallized film processing vacuum coating equipment according to claim 9 it is characterised in that：On described
The bottom of limiting plate, the top of lower limiting board are provided with rubber layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610840535.9A CN106435513B (en) | 2016-09-22 | 2016-09-22 | Vacuum coating equipment is used in a kind of processing of metallized film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610840535.9A CN106435513B (en) | 2016-09-22 | 2016-09-22 | Vacuum coating equipment is used in a kind of processing of metallized film |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106435513A true CN106435513A (en) | 2017-02-22 |
| CN106435513B CN106435513B (en) | 2019-02-01 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201610840535.9A Expired - Fee Related CN106435513B (en) | 2016-09-22 | 2016-09-22 | Vacuum coating equipment is used in a kind of processing of metallized film |
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| CN (1) | CN106435513B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112368813A (en) * | 2018-06-14 | 2021-02-12 | 应用材料公司 | Vaporizer for depositing material on substrate, method of forming vaporizer, and vaporization apparatus for depositing material on flexible substrate |
| CN112366081A (en) * | 2020-09-24 | 2021-02-12 | 铜陵市超越电子有限公司 | Inclined plane type metallized film and preparation device and processing method thereof |
| CN113930719A (en) * | 2021-09-18 | 2022-01-14 | 铜陵市超越电子有限公司 | Vacuum coating machine for processing metallized film of capacitor |
| CN115747711A (en) * | 2022-11-18 | 2023-03-07 | 江门市兆业科技有限公司 | Metallized film coating machine capable of avoiding sudden temperature drop |
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| JPH10140351A (en) * | 1996-11-05 | 1998-05-26 | Kobe Steel Ltd | Inline type vacuum film forming device |
| WO1998052075A1 (en) * | 1997-05-16 | 1998-11-19 | Hoya Kabushiki Kaisha | Mechanism for imparting water repellency to both sides simultaneously |
| CN101768726A (en) * | 2008-12-30 | 2010-07-07 | 深圳市鹏桑普太阳能股份有限公司 | Continuous winding magnetic control sputtering vacuum coating device |
| CN201857424U (en) * | 2010-11-05 | 2011-06-08 | 北京星汉特种印刷有限公司 | Novel vacuum coating machine |
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- 2016-09-22 CN CN201610840535.9A patent/CN106435513B/en not_active Expired - Fee Related
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH10140351A (en) * | 1996-11-05 | 1998-05-26 | Kobe Steel Ltd | Inline type vacuum film forming device |
| WO1998052075A1 (en) * | 1997-05-16 | 1998-11-19 | Hoya Kabushiki Kaisha | Mechanism for imparting water repellency to both sides simultaneously |
| CN101768726A (en) * | 2008-12-30 | 2010-07-07 | 深圳市鹏桑普太阳能股份有限公司 | Continuous winding magnetic control sputtering vacuum coating device |
| CN201857424U (en) * | 2010-11-05 | 2011-06-08 | 北京星汉特种印刷有限公司 | Novel vacuum coating machine |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112368813A (en) * | 2018-06-14 | 2021-02-12 | 应用材料公司 | Vaporizer for depositing material on substrate, method of forming vaporizer, and vaporization apparatus for depositing material on flexible substrate |
| CN112366081A (en) * | 2020-09-24 | 2021-02-12 | 铜陵市超越电子有限公司 | Inclined plane type metallized film and preparation device and processing method thereof |
| CN112366081B (en) * | 2020-09-24 | 2022-05-27 | 铜陵市超越电子有限公司 | Inclined-plane type metallized film and preparation device and processing method thereof |
| CN113930719A (en) * | 2021-09-18 | 2022-01-14 | 铜陵市超越电子有限公司 | Vacuum coating machine for processing metallized film of capacitor |
| CN115747711A (en) * | 2022-11-18 | 2023-03-07 | 江门市兆业科技有限公司 | Metallized film coating machine capable of avoiding sudden temperature drop |
| CN115747711B (en) * | 2022-11-18 | 2024-03-29 | 江门市兆业科技有限公司 | Metallized film coating machine capable of avoiding abrupt temperature change |
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| Publication number | Publication date |
|---|---|
| CN106435513B (en) | 2019-02-01 |
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