CN106392306B - A kind of optical-fiber laser processing light path system - Google Patents
A kind of optical-fiber laser processing light path system Download PDFInfo
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- CN106392306B CN106392306B CN201610948433.9A CN201610948433A CN106392306B CN 106392306 B CN106392306 B CN 106392306B CN 201610948433 A CN201610948433 A CN 201610948433A CN 106392306 B CN106392306 B CN 106392306B
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- speculum
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
- B23K26/048—Automatically focusing the laser beam by controlling the distance between laser head and workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
- Lasers (AREA)
- Laser Surgery Devices (AREA)
Abstract
The invention discloses a kind of optical-fiber lasers to process light path system, includes fiber laser device, horizontal optical path device, vertical light path device and laser process equipment successively along laser optical path；By the way that probe is arranged in horizontal optical path device, miniature webcam is set in laser process equipment, so that the real-time status of laser beam and sample is observed, by the way that the first speculum, the second speculum, third speculum, the 4th speculum and the 5th speculum are arranged in horizontal optical path device, so that the device in horizontal optical path device between each speculum is able to rationally be arranged, the structure of processing unit (plant) is more compact.
Description
Technical field
The present invention relates to field of laser processing, more particularly to a kind of optical-fiber laser processes light path system.
Background technology
With the promotion of laser processing technology and the expansion of application range, laser processing is more and more general in production activity
And and existing laser processing device can not observe the light path of laser in real time with processed sample, and laser processing device
Interior optical component is more, and position is fixed, and occupied space is big, laser head between article at a distance from adjust it is inconvenient.
Invention content
For this reason, it may be necessary to a kind of optical-fiber laser processing light path system is provided, it can not to solve current existing laser processing device
Laser and processed sample can not be adjusted at a distance between observation in real time, laser head and processing article and processing unit (plant) structure not
Compact problem.
To achieve the above object, a kind of optical-fiber laser processing light path system is inventor provided, along the optical path direction of laser
Include fiber laser device, horizontal optical path device, vertical light path device, laser process equipment and processing platform successively；
The fiber laser device includes pump light source, optical fiber, resonant cavity and laser amplifier, and the optical fiber is arranged in institute
It states in the light path between pump light source and the laser amplifier, and by the light inlet of laser directive horizontal optical path device；
The horizontal optical path device includes the first speculum, the second speculum, third speculum, the 4th speculum and the 5th
The light inlet in horizontal optical path device is arranged in speculum, the first speculum, and the setting of the second speculum is anti-in the first reflector laser
In the light path penetrated, third speculum is arranged in the light path that the second reflector laser reflects, and the setting of the 4th speculum is anti-in third
It penetrates in the light path of mirror laser reflection, the 5th reflection is arranged in the light path that the 4th reflector laser reflects, the second speculum and the
It is provided with 1/2 wave plate in light path between three speculums, is equipped with successively in the light path between third speculum and the 4th speculum
Glan polarizing film, spectroscope and electronic shutter, laser are divided into ordinary light and extraordinary ray, ordinary light court through the Glan polarizing film
To the spectroscope, the light path of extraordinary ray is equipped with laser terminator, and laser is divided into transmitted light beam and anti-through the spectroscope
Irradiating light beam, transmitted light beam are equipped with probe towards the electronic shutter, the light path of the reflected beams；4th speculum and the 5th reflection
Quarter wave plate is equipped between mirror, the 5th speculum is by laser reflection to the light inlet of vertical light path device；
The vertical light path device includes the 6th speculum and beam expanding lens, and the 6th speculum setting is filled in vertical light path
The light inlet set, the beam expanding lens are arranged on the laser optical path that the 6th speculum reflects, and the 6th speculum will swash
Light reflection to laser process equipment light inlet；
The light inlet of the laser process equipment be equipped with dichroscope, laser through the dichroscope be divided near infrared light and
The light path of visible light, near infrared light is equipped with telescopic laser head, and the light path of visible light is equipped with the 7th speculum, the 7th reflection
The light path of mirror reflection is equipped with miniature webcam；
It is different from the prior art, above-mentioned technical proposal has the following advantages that：By the way that probe and miniature webcam is arranged so that
The real-time status of laser beam and sample is observed, by the way that telescopic laser head will be arranged so that laser head can change with
The distance between article is processed convenient for article, by the way that the first speculum, the second reflection are arranged in horizontal optical path device
Mirror, third speculum, the 4th speculum and the 5th speculum so that it is reasonable that the device between each speculum is able to carry out
Setting, the structure of processing unit (plant) are more compact.
Further, the fiber laser device is equipped with water cooling plant, and the water cooling plant includes delivery pump and liquid
Circulation line, the liquid circulation line are connect with pump light source.
By the way that water cooling plant is arranged, liquid circulation is carried out by liquid circulating pipe road direction pump light source so that pump light source
Temperature at work reduces, and protects the components from high temperature.
Further, the side of the laser process equipment is equipped with LED illumination lamp, and the light path of LED illumination lamp is equipped with the
Eight speculums.
By LED illumination lamp illumination light is provided to sample so that the sample in processing is illuminated, when being convenient for processing
Observation.
Further, the light path of the near infrared light of the laser process equipment is equipped with adjustable objective lens.
By the way that adjustable objective lens are arranged in the light path of the near infrared light of laser process equipment, convenient for being carried out pair to laser beam
It is burnt.
Description of the drawings
Fig. 1 is the structural schematic diagram that optical-fiber laser processes light path system in the embodiment of the present invention.
Reference sign：
101, fiber laser device；102, pump light source；103, optical fiber；
104, resonant cavity；105, laser amplifier；106, water cooling plant；
1061, liquid circulation line；1062, delivery pump；
201, horizontal optical path device；202, the first speculum；203, the second speculum；
204,1/2 wave plate；205, third speculum；206, Glan polarizing film；
207, laser terminator；208, spectroscope；209, it pops one's head in；210, electronic shutter；
211, the 4th speculum；212, quarter wave plate；213, the 5th speculum；
301, vertical optical path device；302, the 6th speculum；303, beam expanding lens；
401, laser processing device；402, dichroscope；403, adjustable objective lens；
404, telescopic laser head；405, miniature webcam；406, the 7th speculum；
407, LED illumination lamp；408, the 8th speculum.
Specific implementation mode
For the technology contents of technical solution, construction feature, the objects and the effects are described in detail, below in conjunction with specific reality
It applies example and attached drawing is coordinated to be explained in detail.
The structural schematic diagram of light path system, optical-fiber laser dress are processed referring to Fig. 1, Fig. 1 is the optical-fiber laser of the present embodiment
It sets and is equipped with pump light source 102, optical fiber 103, resonant cavity 104, laser amplifier 105 and water cooling plant 106, optical fiber 103 1 in 101
End connection pump light source 102, the other end connect resonant cavity 104, and the laser optical path in resonant cavity 104 is arranged in laser amplifier 105
On, the liquid circulation line 1061 of water cooling plant 106 connects pump light source 102 and delivery pump 1062；
Horizontal optical path device 201 is a body structure, is arranged in the side of fiber laser device 101, the first speculum
202 are arranged the light inlet in horizontal optical path device 201, the second speculum 203, third speculum 205,211 and of the 4th speculum
5th speculum 213 is successively set on along clockwise direction on four angles of 201 babinet of horizontal optical path device, and the second reflection
Mirror 203 is arranged in the light path of 202 laser reflection of the first speculum, and third speculum 205 is arranged in 203 laser of the second speculum
In the light path of reflection, the 4th speculum 211 is arranged in the light path of 205 laser reflection of third speculum, and the 5th speculum 213 is set
Set in the light path of 211 laser reflection of the 4th speculum, the setting of 1/2 wave plate the second speculum 203 and third speculum 205 it
Between light path on, Glan polarizing film 206, spectroscope 208 and electronic shutter 210 are successively set on third speculum 205 and the 4th
In light path between speculum 211, the light path of 206 laser reflection of Glan polarizing film is arranged in the middle part of babinet in laser terminator 207
On, probe 209 is arranged in the middle part of the babinet in the light path that spectroscope 208 reflects, and quarter wave plate 212 is arranged in 211 He of the 4th speculum
In the light path of 5th speculum 213 reflection；
Vertical light path device 301 is arranged at the top of horizontal optical path device 201, and the 6th speculum 302 is arranged in vertical light
The light inlet of road device 301, beam expanding lens 303 are arranged in the light path that the 6th speculum 302 reflects；
Laser processing device 401 is arranged in the side of vertical light path device 301, and the setting of dichroscope 402 is laser machining
Laser is divided into visible light and near infrared light by the light inlet of device 401, dichroscope 402, and telescopic laser head 404 is arranged two
To in the light path of the near infrared light of Look mirror 402, the light path between dichroscope 402 and laser head 404 is arranged in adjustable objective lens 403
On, the 7th speculum 406 is arranged in the light path of 402 visible light of dichroscope, and miniature webcam 405 is arranged in the 7th speculum
In the light path of 406 reflections, LED illumination lamp 407 is arranged on the side wall of laser processing device 401, and the setting of the 8th speculum 408 exists
In the light path of LED illumination lamp 407；
According to above structure, when specific operation, the pump light source in fiber laser device sends out pump light, and pump light exists
Population inversion is carried out in optical fiber and forms high power density, is subsequently entered resonant cavity and is converted to laser, laser amplifier will swash
The energy and power of light are projected to the light inlet of horizontal optical path device after improving, water cooling plant is connected by liquid circulation line and pumped
Pu light source and delivery pump carry out cooling processing, and the first speculum for being located at horizontal optical path device reflects laser refraction to second
On mirror, the laser of the second speculum reflection exposes to third reflection after 1/2 wave plate adjusts the ratio of polarization state and polarization state
The laser of mirror, the reflection of third speculum is divided into ordinary light and extraordinary ray by Glan polarizing film, and ordinary light exposes to spectroscope,
Extraordinary ray exposes on laser terminator, and laser terminator switchs pump light source, and spectroscope is by laser transmitted light beam and reflection
Whether light beam, transmitted light beam continue to transmit towards electronic shutter, electronic shutter control transmitted light beam, and the reflected beams expose to spy
Head, probe receive the imaging of laser beam, and transmitted light beam exposes to the 4th speculum by electronic shutter, the reflection of the 4th speculum
Transmitted light beam exposes to the 5th speculum, the 5th speculum after quarter wave plate adjusts the ratio of polarization state and polarization state again
The transmitted light beam of reflection is exported to the light inlet of vertical light path device, and the entering light in vertical light path device is arranged in the 6th speculum
Mouthful, the laser reflected through the 6th speculum is injected in beam expanding lens, and beam expanding lens exports after amplifying laser beam spot sizes to laser processing
The light inlet of equipment, the light inlet of laser process equipment are equipped with dichroscope, dichroscope by laser beam be divided near infrared light and
Visible light, near infrared light through adjustable objective lens take it is defocused enter telescopic laser head, the adjustment of telescopic laser head between article away from
It sets from and by laser beam projects and article is processed on processing platform, LED illumination lamp is anti-to sample stage by the 8th speculum
Shot-light light is convenient for observing in real time (in certain embodiments, fluorescent lamp can be selected in headlamp).
It should be noted that herein, relational terms such as first and second and the like are used merely to a reality
Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation
In any actual relationship or order or sequence.Moreover, the terms "include", "comprise" or its any other variant are intended to
Non-exclusive inclusion, so that process, method, article or terminal device including a series of elements include not only those
Element, but also include other elements that are not explicitly listed, or further include for this process, method, article or end
The intrinsic element of end equipment.In the absence of more restrictions, being limited by sentence " including ... " or " including ... "
Element, it is not excluded that there is also other elements in process, method, article or the terminal device including the element.This
Outside, herein, " being more than ", " being less than ", " being more than " etc. are interpreted as not including this number；" more than ", " following ", " within " etc. understandings
It includes this number to be.
Although the various embodiments described above are described, once a person skilled in the art knows basic wounds
The property made concept, then additional changes and modifications can be made to these embodiments, so example the above is only the implementation of the present invention,
It is not intended to limit the scope of patent protection of the present invention, it is every to utilize equivalent structure made by description of the invention and accompanying drawing content
Or equivalent process transformation, it is applied directly or indirectly in other relevant technical fields, the patent for being similarly included in the present invention
Within protection domain.
Claims (4)
1. a kind of optical-fiber laser processes light path system, the optical path direction along laser includes fiber laser device, horizontal optical path successively
Device, vertical light path device, laser process equipment and processing platform；
The fiber laser device includes pump light source, optical fiber, resonant cavity and laser amplifier, described in optical fiber one end connection
Pump light source, the other end connect the resonant cavity, and the laser amplifier is arranged on the laser optical path of the resonant cavity, described
Laser amplifier is by the light inlet of laser directive horizontal optical path device；
The horizontal optical path device includes the first speculum, the second speculum, third speculum, the 4th speculum and the 5th reflection
Mirror, the first speculum be arranged the light inlet in horizontal optical path device, and the second speculum is arranged to be reflected in the first reflector laser
In light path, third speculum is arranged in the light path that the second reflector laser reflects, and the 4th speculum is arranged in third speculum
In the light path of laser reflection, the 5th speculum is arranged in the light path that the 4th reflector laser reflects, the second speculum and third
It is provided with 1/2 wave plate in light path between speculum, lattice are equipped with successively in the light path between third speculum and the 4th speculum
Blue polarizing film, spectroscope and electronic shutter, laser are divided into ordinary light and extraordinary ray, ordinary light direction through the Glan polarizing film
The light path of the spectroscope, extraordinary ray is equipped with laser terminator, and laser is divided into transmitted light beam and reflection through the spectroscope
Light beam, transmitted light beam are equipped with probe, the 4th speculum and the 5th speculum towards the electronic shutter, the light path of the reflected beams
Between be equipped with quarter wave plate, the 5th speculum is by laser reflection to the light inlet of vertical light path device；
The vertical light path device includes the 6th speculum and beam expanding lens, and the 6th speculum is arranged in vertical light path device
Light inlet, the beam expanding lens are arranged on the laser optical path that the 6th speculum reflects, and the 6th speculum is anti-by laser
It is incident upon the light inlet of laser process equipment；
The light inlet of the laser process equipment is equipped with dichroscope, and laser is divided near infrared light and visual through the dichroscope
The light path of light, near infrared light is equipped with telescopic laser head, and the light path of visible light is equipped with the 7th speculum, and the 7th speculum swashs
The light path of light reflection is equipped with miniature webcam.
2. optical-fiber laser according to claim 1 processes light path system, which is characterized in that set on the fiber laser device
It includes delivery pump and liquid circulation line to have water cooling plant, the water cooling plant, and the liquid circulation line connects with pump light source
It connects.
3. optical-fiber laser according to claim 1 processes light path system, which is characterized in that the side of the laser process equipment
Face is equipped with LED illumination lamp, and the light path of LED illumination lamp is equipped with the 8th speculum.
4. optical-fiber laser according to claim 1 processes light path system, which is characterized in that the laser process equipment it is close
The light path of infrared light is equipped with adjustable objective lens.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610948433.9A CN106392306B (en) | 2016-11-02 | 2016-11-02 | A kind of optical-fiber laser processing light path system |
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| CN201610948433.9A CN106392306B (en) | 2016-11-02 | 2016-11-02 | A kind of optical-fiber laser processing light path system |
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| CN106392306A CN106392306A (en) | 2017-02-15 |
| CN106392306B true CN106392306B (en) | 2018-07-24 |
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| CN113843509B (en) * | 2021-09-13 | 2024-06-04 | 武汉先同科技有限公司 | Integrated handheld laser marking machine |
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| CN102581478A (en) * | 2012-01-20 | 2012-07-18 | 哈尔滨工业大学 | Device and method for ultrafast picosecond pulse laser machining of super-hydrophobicity micro-structure surface |
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| CN105552702A (en) * | 2016-02-21 | 2016-05-04 | 中国科学院光电研究院 | Laser amplification device with real-time light beam monitoring function |
| CN105643110A (en) * | 2014-11-14 | 2016-06-08 | 大族激光科技产业集团股份有限公司 | Precise laser cutting system |
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| JP5431831B2 (en) * | 2009-08-21 | 2014-03-05 | 株式会社ディスコ | Laser processing equipment |
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| US4574180A (en) * | 1984-06-19 | 1986-03-04 | Westinghouse Electric Corp. | Beam alignment system for laser welding system |
| CN1316771A (en) * | 2001-02-27 | 2001-10-10 | 吉林大学 | Reflection interference type longitudinal electric field detector for electro-optical organic material |
| CN102495534A (en) * | 2011-12-12 | 2012-06-13 | 中国科学院上海光学精密机械研究所 | Galvanometer type laser direct writing photoetching machine |
| CN102581478A (en) * | 2012-01-20 | 2012-07-18 | 哈尔滨工业大学 | Device and method for ultrafast picosecond pulse laser machining of super-hydrophobicity micro-structure surface |
| CN103240524A (en) * | 2013-05-23 | 2013-08-14 | 广东工业大学 | Time and focus dividing device and method based on scanning galvanometer |
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