CN106392315B - A kind of femtosecond laser processing light path system - Google Patents
A kind of femtosecond laser processing light path system Download PDFInfo
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- CN106392315B CN106392315B CN201610948864.5A CN201610948864A CN106392315B CN 106392315 B CN106392315 B CN 106392315B CN 201610948864 A CN201610948864 A CN 201610948864A CN 106392315 B CN106392315 B CN 106392315B
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/073—Shaping the laser spot
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
- B23K26/703—Cooling arrangements
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Lasers (AREA)
- Laser Beam Processing (AREA)
- Laser Surgery Devices (AREA)
Abstract
The invention discloses a kind of femtosecond lasers to process light path system, includes femtosecond laser, horizontal optical path device, vertical light path device and laser process equipment successively along laser optical path；The spot diameter of laser is reduced by using femtosecond laser, by the way that probe is arranged in horizontal optical path device, miniature webcam is set in laser process equipment, so that the real-time status of laser beam and sample is observed, by the way that the first speculum, the second speculum, third speculum, the 4th speculum and the 5th speculum are arranged in horizontal optical path device, so that the device in horizontal optical path device between each speculum is able to rationally be arranged, the structure of processing unit (plant) is more compact.
Description
Technical field
The present invention relates to field of laser processing, more particularly to a kind of femtosecond laser processes light path system.
Background technology
With the promotion of laser processing technology and the expansion of application range, laser processing is more and more general in production activity
And and existing laser processing device spot diameter is big, can not to processing article carry out retrofit, precision is relatively low, can not be right
The light path of laser is observed in real time with processed sample, and the optical component in laser processing device is more, and position is fixed, and is occupied empty
Between it is big, be not easy to move, and existing laser processing cannot achieve machined parameters, process, laser parameter in process
Digital Control, simple planar graph can only be processed mostly, processing efficiency is low.
Invention content
For this reason, it may be necessary to a kind of femtosecond laser processing light path system be provided, to solve current existing laser processing device hot spot
Diameter is big, precision is low, observation in real time can not be carried out to light path and processed sample and the setting of processing unit (plant) component is dumb and not tight
The problem of gathering.
To achieve the above object, a kind of femtosecond laser processing light path system is inventor provided, along the optical path direction of laser
Include femtosecond laser, horizontal optical path device, vertical light path device and laser process equipment successively；
The femtosecond laser includes pump light source, resonant cavity, oscillator and laser amplifier, the laser amplifier
It is arranged in the light path of pump light source, the resonant cavity and oscillator are successively set on the pump light source and the laser amplifier
In light path between device, and by the light inlet of laser directive horizontal optical path device；
The horizontal optical path device includes the first speculum, the second speculum, third speculum, the 4th speculum and the 5th
The light inlet in horizontal optical path device is arranged in speculum, the first speculum, and the setting of the second speculum is anti-in the first reflector laser
In the light path penetrated, third speculum is arranged in the light path that the second reflector laser reflects, and the setting of the 4th speculum is anti-in third
It penetrates in the light path of mirror laser reflection, the 5th reflection is arranged in the light path that the 4th reflector laser reflects, the second speculum and the
It is provided with 1/2 wave plate in light path between three speculums, is equipped with successively in the light path between third speculum and the 4th speculum
Glan polarizing film, spectroscope and electronic shutter, laser are divided into ordinary light and extraordinary ray, ordinary light court through the Glan polarizing film
To the spectroscope, the light path of extraordinary ray is equipped with laser terminator, and laser is divided into transmitted light beam and anti-through the spectroscope
Irradiating light beam, transmitted light beam are equipped with probe towards the electronic shutter, the light path of the reflected beams；4th speculum and the 5th reflection
Quarter wave plate is equipped between mirror, the 5th speculum is by laser reflection to the light inlet of vertical light path device；
The vertical light path device includes the 6th speculum and beam expanding lens, and the 6th speculum setting is filled in vertical light path
The light inlet set, the beam expanding lens are arranged on the laser optical path that the 6th speculum reflects, and the 6th speculum will swash
Light reflection to laser process equipment light inlet；
The light inlet of the laser process equipment be equipped with dichroscope, laser through the dichroscope be divided near infrared light and
The light path of visible light, near infrared light is equipped with laser head, and the light path of visible light is equipped with the 7th speculum, the reflection of the 7th speculum
Light path be equipped with miniature webcam；
It is different from the prior art, above-mentioned technical proposal has the following advantages that：By using femtosecond laser, light is reduced
Spot diameter, pass through be arranged probe and miniature webcam so that the real-time status of laser beam and sample is observed, by
The first speculum of setting, the second speculum, third speculum, the 4th speculum and the 5th speculum, make in horizontal optical path device
The device obtained between each speculum is able to flexibly be arranged, and the structure of processing unit (plant) is more compact.
Further, the femtosecond laser is equipped with water cooling plant, and the water cooling plant includes delivery pump and liquid
Circulation line, the liquid circulation line are connect with pump light source.
By the way that water cooling plant is arranged, liquid circulation is carried out by liquid circulating pipe road direction pump light source so that pump light source
Temperature at work reduces, and protects the components from high temperature.
Further, the side of the laser process equipment is equipped with LED illumination lamp, and the light path of LED illumination lamp is equipped with the
Eight speculums.
By LED illumination lamp illumination light is provided to sample so that the sample in processing is illuminated, when being convenient for processing
Observation.
Further, the light path of the near infrared light of the laser process equipment is equipped with adjustable objective lens.
By the way that adjustable objective lens are arranged in the light path of the near infrared light of laser process equipment, convenient for being carried out pair to laser beam
It is burnt.
Description of the drawings
Fig. 1 is the structural schematic diagram that femtosecond laser processes light path system in the embodiment of the present invention；
Reference sign：
101, femtosecond laser；102, pump light source；103, resonant cavity；
104, oscillator；105, laser amplifier；106, water cooling plant；
1061, liquid circulation line；1062, delivery pump；
201, horizontal optical path device；202, the first speculum；203, the second speculum；
204,1/2 wave plate；205, third speculum；206, Glan polarizing film；
207, laser terminator；208, spectroscope；209, it pops one's head in；210, electronic shutter；
211, the 4th speculum；212, quarter wave plate；213, the 5th speculum；
301, vertical optical path device；302, the 6th speculum；303, beam expanding lens；
401, laser processing device；402, dichroscope；403, adjustable objective lens；
404, laser head；405, miniature webcam；406, the 7th speculum；
407, LED illumination lamp；408, the 8th speculum.
Specific implementation mode
For the technology contents of technical solution, construction feature, the objects and the effects are described in detail, below in conjunction with specific reality
It applies example and attached drawing is coordinated to be explained in detail.
Referring to Fig. 1, Fig. 1 is the structural schematic diagram of the femtosecond laser processing device of the present embodiment, femtosecond laser 101
Interior to be equipped with pump light source 102, laser amplifier 105 is arranged in the light path of pump light source 102, resonant cavity 103 and oscillator 104
It is successively set in the light path between pump light source 102 and laser amplifier 105, the liquid circulation line of water cooling plant 106
1061 connection pump light sources 102 and delivery pump 1062；
Horizontal optical path device 201 is a quadrangle body structure, is arranged in the side of femtosecond laser 101, first
The light inlet in horizontal optical path device 201, the second speculum 203, third speculum 205, the 4th speculum is arranged in speculum 202
211 and the 5th speculum 213 be successively set on along clockwise direction on four angles of 201 babinet of horizontal optical path device, and
Two-mirror 203 is arranged in the light path of 202 laser reflection of the first speculum, and third speculum 205 is arranged in the second speculum
In the light path of 203 laser reflections, the 4th speculum 211 is arranged in the light path of 205 laser reflection of third speculum, the 5th reflection
Mirror 213 is arranged in the light path of 211 laser reflection of the 4th speculum, and the setting of 1/2 wave plate is reflected in the second speculum 203 with third
In light path between mirror 205, Glan polarizing film 206, spectroscope 208 and electronic shutter 210 are successively set on third speculum 205
In light path between the 4th speculum 211,206 laser reflection of Glan polarizing film is arranged in the middle part of babinet in laser terminator 207
Light path on, probe 209 is arranged in the middle part of the babinet in the light path that spectroscope 208 reflects, and the setting of quarter wave plate 212 is in the 4th reflection
On mirror 211 and the light path of the 5th speculum 213 reflection；
Vertical light path device 301 is arranged at the top of horizontal optical path device 201, and the 6th speculum 302 is arranged in vertical light
The light inlet of road device 301, beam expanding lens 303 are arranged in the light path that the 6th speculum 302 reflects；
Laser processing device 401 is arranged in the side of vertical light path device 301, and the setting of dichroscope 402 is laser machining
Laser is divided into visible light and near infrared light by the light inlet of device 401, dichroscope 402, and laser head 404 is arranged in dichroscope
In the light path of 402 near infrared light, the light path between dichroscope 402 and laser head 404 is equipped with adjustable objective lens 403, adjustable
Object lens 403 are arranged in the light path between dichroscope 402 and laser head 404, and the 7th speculum 406 is arranged in dichroscope
In the light path of 402 visible lights, miniature webcam 405 is arranged in the light path that the 7th speculum 406 reflects, and LED illumination lamp 407 is set
It sets on the side wall of laser processing device 401, the 8th speculum 408 is arranged in the light path of LED illumination lamp 407.
According to above structure, when specific operation, the pump light source in Femtosecond Laser Amplification System forms sharp through resonant cavity
Light converts output waveform, and outgoing laser beam through oscillator, and laser amplifier is projected to after improving the energy of laser and power
The light inlet of horizontal optical path device, water cooling plant connects pump light source by liquid circulation line and delivery pump carries out at cooling
Reason, is located at the first speculum of horizontal optical path device by laser refraction to the second speculum, the laser of the second speculum reflection
Third speculum, the laser warp of third speculum reflection are exposed to after 1/2 wave plate adjusts the ratio of polarization state and polarization state
It crosses Glan polarizing film and is divided into ordinary light and extraordinary ray, ordinary light exposes to spectroscope, and extraordinary ray exposes to laser terminator
On, laser terminator switchs pump light source, and spectroscope is by laser transmitted light beam and the reflected beams, and transmitted light beam is towards electronic fast
Whether door, electronic shutter control transmitted light beam continue to transmit, and the reflected beams expose to probe, and probe receives the imaging of laser beam,
Transmitted light beam exposes to the 4th speculum by electronic shutter, and the transmitted light beam of the 4th speculum reflection passes through quarter wave plate again
The 5th speculum is exposed to after the ratio of adjustment polarization state and polarization state, the transmitted light beam of the 5th speculum reflection is exported to vertical
The light inlet in vertical light path device is arranged in the light inlet of light path device, the 6th speculum, the laser reflected through the 6th speculum
It injects in beam expanding lens, beam expanding lens exports after amplifying laser beam spot sizes to the light inlet of laser process equipment, laser process equipment
Light inlet be equipped with dichroscope, laser beam is divided near infrared light and visible light by dichroscope, and near infrared light is through adjustable objective lens
Take it is defocused enter laser head, laser beam projects are set and are processed LED illumination lamp by the to article on processing platform by laser head
Eight speculums are convenient for observing in real time (in certain embodiments, fluorescent lamp can be selected in headlamp) to sample stage sky light.
It should be noted that herein, relational terms such as first and second and the like are used merely to a reality
Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation
In any actual relationship or order or sequence.Moreover, the terms "include", "comprise" or its any other variant are intended to
Non-exclusive inclusion, so that process, method, article or terminal device including a series of elements include not only those
Element, but also include other elements that are not explicitly listed, or further include for this process, method, article or end
The intrinsic element of end equipment.In the absence of more restrictions, being limited by sentence " including ... " or " including ... "
Element, it is not excluded that there is also other elements in process, method, article or the terminal device including the element.This
Outside, herein, " being more than ", " being less than ", " being more than " etc. are interpreted as not including this number；" more than ", " following ", " within " etc. understandings
It includes this number to be.
Although the various embodiments described above are described, once a person skilled in the art knows basic wounds
The property made concept, then additional changes and modifications can be made to these embodiments, so example the above is only the implementation of the present invention,
It is not intended to limit the scope of patent protection of the present invention, it is every to utilize equivalent structure made by description of the invention and accompanying drawing content
Or equivalent process transformation, it is applied directly or indirectly in other relevant technical fields, the patent for being similarly included in the present invention
Within protection domain.
Claims (4)
1. a kind of femtosecond laser processes light path system, the optical path direction along laser includes femtosecond laser, horizontal optical path successively
Device, vertical light path device and laser process equipment；
The femtosecond laser includes pump light source, resonant cavity, oscillator and laser amplifier, the laser amplifier setting
In the light path of pump light source, the resonant cavity and oscillator be successively set on the pump light source and the laser amplifier it
Between light path on, and by the light inlet of laser directive horizontal optical path device；
The horizontal optical path device includes the first speculum, the second speculum, third speculum, the 4th speculum, the 5th reflection
Mirror, the first speculum be arranged the light inlet in horizontal optical path device, and the second speculum is arranged to be reflected in the first reflector laser
In light path, third speculum is arranged in the light path that the second reflector laser reflects, and the 4th speculum is arranged in third speculum
In the light path of laser reflection, the 5th speculum is arranged in the light path that the 4th reflector laser reflects, the second speculum and third
It is provided with 1/2 wave plate in light path between speculum, lattice are equipped with successively in the light path between third speculum and the 4th speculum
Blue polarizing film, spectroscope and electronic shutter, laser are divided into ordinary light and extraordinary ray, ordinary light direction through the Glan polarizing film
The light path of the spectroscope, extraordinary ray is equipped with laser terminator, and laser is divided into transmitted light beam and reflection through the spectroscope
Light beam, transmitted light beam are equipped with probe, the 4th speculum and the 5th speculum towards the electronic shutter, the light path of the reflected beams
Between be equipped with quarter wave plate, the 5th speculum is by laser reflection to the light inlet of vertical light path device；
The vertical light path device includes the 6th speculum and beam expanding lens, and the 6th speculum is arranged in vertical light path device
Light inlet, the beam expanding lens are arranged on the laser optical path that the 6th speculum reflects, and the 6th speculum is anti-by laser
It is incident upon the light inlet of laser process equipment；
The light inlet of the laser process equipment is equipped with dichroscope, and laser is divided near infrared light and visual through the dichroscope
The light path of light, near infrared light is equipped with laser head, and the light path of visible light is equipped with the 7th speculum, the reflection of the 7th reflector laser
Light path be equipped with miniature webcam.
2. femtosecond laser according to claim 1 processes light path system, which is characterized in that set on the femtosecond laser
It includes delivery pump and liquid circulation line to have water cooling plant, the water cooling plant, and the liquid circulation line connects with pump light source
It connects.
3. femtosecond laser according to claim 1 processes light path system, which is characterized in that the side of the laser process equipment
Face is equipped with LED illumination lamp, and the light path of LED illumination lamp is equipped with the 8th speculum.
4. femtosecond laser according to claim 1 processes light path system, which is characterized in that the laser process equipment it is close
The light path of infrared light is equipped with adjustable objective lens.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201610948864.5A CN106392315B (en) | 2016-11-02 | 2016-11-02 | A kind of femtosecond laser processing light path system |
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| CN201610948864.5A CN106392315B (en) | 2016-11-02 | 2016-11-02 | A kind of femtosecond laser processing light path system |
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| CN106392315A CN106392315A (en) | 2017-02-15 |
| CN106392315B true CN106392315B (en) | 2018-07-24 |
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| CN105552702A (en) * | 2016-02-21 | 2016-05-04 | 中国科学院光电研究院 | Laser amplification device with real-time light beam monitoring function |
| CN105643110A (en) * | 2014-11-14 | 2016-06-08 | 大族激光科技产业集团股份有限公司 | Precise laser cutting system |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP5431831B2 (en) * | 2009-08-21 | 2014-03-05 | 株式会社ディスコ | Laser processing equipment |
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2016
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|---|---|---|---|---|
| US4574180A (en) * | 1984-06-19 | 1986-03-04 | Westinghouse Electric Corp. | Beam alignment system for laser welding system |
| CN1316771A (en) * | 2001-02-27 | 2001-10-10 | 吉林大学 | Reflection interference type longitudinal electric field detector for electro-optical organic material |
| CN102495534A (en) * | 2011-12-12 | 2012-06-13 | 中国科学院上海光学精密机械研究所 | Galvanometer type laser direct writing photoetching machine |
| CN102581478A (en) * | 2012-01-20 | 2012-07-18 | 哈尔滨工业大学 | Device and method for ultrafast picosecond pulse laser machining of super-hydrophobicity micro-structure surface |
| CN103240524A (en) * | 2013-05-23 | 2013-08-14 | 广东工业大学 | Time and focus dividing device and method based on scanning galvanometer |
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| CN106392315A (en) | 2017-02-15 |
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