CN106373830A - Capacitive radio-frequency micro-electromechanical system switch with signal lines and drive lines separated - Google Patents
Capacitive radio-frequency micro-electromechanical system switch with signal lines and drive lines separated Download PDFInfo
- Publication number
- CN106373830A CN106373830A CN201611041378.1A CN201611041378A CN106373830A CN 106373830 A CN106373830 A CN 106373830A CN 201611041378 A CN201611041378 A CN 201611041378A CN 106373830 A CN106373830 A CN 106373830A
- Authority
- CN
- China
- Prior art keywords
- drive electrode
- drives line
- holding wire
- switch
- radio frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
Landscapes
- Micromachines (AREA)
Abstract
The invention puts forward a capacitive radio-frequency micro-electromechanical system switch with signal lines and drive lines separated. The switch comprises a coplanar waveguide, anchor areas, crane leg beams, drive electrodes, a central polar plate, and drive lines. The anchor areas are disposed on ground lines of the coplanar waveguide. The crane leg beams are connected with the anchor areas at the two sides and the drive electrodes in the middle respectively. The drive electrodes are connected with the central polar plate through short straight beams. The drive electrodes consist of upper drive electrodes and lower drive electrodes. The drive lines are connected with the lower drive electrodes respectively. When a direct voltage is loaded on the drive lines, an electrostatic force is provided to pull the upper drive electrodes down so that the upper drive electrodes and the lower drive electrodes fit together to turn off the switch. By separating signal lines from the drive lines, the insertion loss is reduced under the condition of same driving voltage, and the performance of the switch is improved.
Description
Technical field
The present invention relates to radio-frequency (RF) switch technical field, particularly to a kind of holding wire and the detached condenser type radio frequency of drives line
Micro electro-mechanical system switch.
Background technology
RF mems switch rf mems is a kind of to control the micro- of radiofrequency signal break-make using moving machinery part
Type semiconductor device.It is mainly used in switching signal path and system switching state in RF communication system and Auto-Test System
Control.
Adopting mechanical switch or semiconductor switch traditional radio-frequency (RF) switch more.Mechanical switch radio-frequency performance is excellent, but body
Long-pending big, more heavy, and high cost, affect its large-scale application；Semiconductor switch power consumption is big, is lost when signal frequency is higher
Greatly, be not therefore suitable in radio frequency system.
Content of the invention
It is contemplated that at least solving one of above-mentioned technical problem.
For this reason, it is an object of the invention to proposing a kind of holding wire and drives line detached condenser type radio frequency MEMS
Switch, holding wire is separated by this switch with drives line, reduces insertion loss, improve out under conditions of same drive voltage
Close performance.
To achieve these goals, embodiment of the invention discloses that a kind of holding wire and the detached condenser type of drives line are penetrated
Frequency micro electro-mechanical system switch, comprising: co-planar waveguide, anchor area, He Tuiliang, drive electrode, center pad and drives line, wherein, institute
Shu Mao area is located on the ground wire of co-planar waveguide；Described He Tuiliang respectively with the anchor area of both sides and the described drive electrode phase of centre
Even；Described drive electrode is connected with described center pad by short straight beam, and described drive electrode includes drive electrode and lower drive
Moving electrode；Described drives line is connected with described lower drive electrode, when loading DC voltage in described drives line, provides electrostatic
Power, will be drop-down for described upper drive electrode, so that described upper drive electrode is fitted with described lower drive electrode, to open described in realizing
The shutoff closed.
In addition, holding wire according to the above embodiment of the present invention and drives line detached condenser type radio frequency MEMS are opened
Pass can also have as follows add technical characteristic:
In some instances, also include: air bridges, described drives line passes through described co-planar waveguide by described air bridges
Ground wire is connected with described lower drive electrode.
In some instances, described drive electrode is two, and wherein, two described upper drive electrodes are located at described central electrode
Plate both sides are simultaneously connected with described center pad by described short straight beam.
In some instances, described upper drive electrode is connected with described anchor area by described He Tuiliang.
In some instances, described upper drive electrode is provided with square release aperture.
In some instances, described lower drive electrode is between holding wire and the ground wire of described co-planar waveguide.
In some instances, the height of described air bridges is consistent with the electrode height of described switch.
In some instances, described upper drive electrode is identical with lower drive electrode shape, and described lower drive electrode is located at
Below upper drive electrode and position is completely overlapped, described upper drive electrode and described lower drive electrode exist pre- in vertical direction
If the air gap of distance.
In some instances, described predeterminable range is 3.3 microns.
In some instances, described upper drive electrode and described lower drive electrode are metal polar plate.
Holding wire according to embodiments of the present invention and drives line detached condenser type radio frequency micro electro-mechanical system switch, have as
Lower advantage:
1st, holding wire is separated with drives line, reduce insertion loss under conditions of same drive voltage, improve out
Close performance, and be separately provided upper and lower drive electrode, driving voltage is carried on lower drive electrode by drives line, rather than and general
Logical condenser type rf mems switch equally DC voltage is added on holding wire realizes switching function, so can be by unidirectional current
Pressure is separated with radiofrequency signal, protects whole circuit；
2nd, this switch arranges air bridges on the ground wire of co-planar waveguide, to facilitate drives line to pass through, so that switch is integrally tied
Structure is compacter, is conducive to improving the miniaturization of switch；
3rd, the height design of air bridges is consistent with upper drive electrode, in the premise not improving switch processing technique complexity
Under increased its function, and make the processing compatibility of switch more preferably, the technological process of this invention and the technique of regular tap
Flow process is identical, can carry out flow on same silicon chip, therefore, simple to operate, does not increase extra cost.
The additional aspect of the present invention and advantage will be set forth in part in the description, and partly will become from the following description
Obtain substantially, or recognized by the practice of the present invention.
Brief description
The above-mentioned and/or additional aspect of the present invention and advantage will become from reference to the description to embodiment for the accompanying drawings below
Substantially and easy to understand, wherein:
Fig. 1 is holding wire according to embodiments of the present invention and drives line detached condenser type radio frequency micro electro-mechanical system switch
Structural representation.
Specific embodiment
Embodiments of the invention are described below in detail, the example of described embodiment is shown in the drawings, wherein from start to finish
The element that same or similar label represents same or similar element or has same or like function.Below with reference to attached
The embodiment of figure description is exemplary, is only used for explaining the present invention, and is not considered as limiting the invention.
In describing the invention it is to be understood that term " " center ", " longitudinal ", " horizontal ", " on ", D score,
The orientation of instruction such as "front", "rear", "left", "right", " vertical ", " level ", " top ", " bottom ", " interior ", " outward " or position relationship are
Based on orientation shown in the drawings or position relationship, it is for only for ease of the description present invention and simplifies description, rather than instruction or dark
Show the device of indication or element must have specific orientation, with specific azimuth configuration and operation, therefore it is not intended that right
The restriction of the present invention.Additionally, term " first ", " second " are only used for describing purpose, and it is not intended that instruction or hint are relative
Importance.
In describing the invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " should be interpreted broadly, for example, it may be being fixedly connected or being detachably connected, or is integrally connected；Can
To be to be mechanically connected or electrical connection；Can be to be joined directly together it is also possible to be indirectly connected to by intermediary, Ke Yishi
The connection of two element internals.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition
Concrete meaning in invention.
Below in conjunction with Description of Drawings holding wire according to embodiments of the present invention and drives line detached condenser type radio frequency microcomputer
Electric system switchs.
Fig. 1 is holding wire according to an embodiment of the invention and drives line detached condenser type radio frequency MEMS is opened
The structural representation closing.As shown in figure 1, this switch includes: co-planar waveguide (not shown), anchor area 7, crane lower limb beam 5, driving electricity
Pole (not shown), center pad 3 and drives line 4.
Wherein, anchor area 7 is located on the ground wire 9 of co-planar waveguide.
Crane lower limb beam 5 is connected with the anchor area 7 of both sides and the drive electrode of centre respectively.
Drive electrode is connected with center pad 3 by short straight beam, and drive electrode includes drive electrode 1 and lower drive electrode
2.
In one embodiment of the invention, drive electrode for example, two.Specifically, two upper drive electrodes 1 are located at
Center pad 3 both sides are simultaneously connected with center pad 3 by short straight beam, thus in the turn-on and turn-off state switching of switch, leading to
The capacitance variations crossing center pad 3 are controlled to the energy of radiofrequency signal.
Further, in one embodiment of the invention, upper drive electrode 1 for example passes through crane lower limb beam 5 and anchor area 7 phase
Even, thus reducing the driving voltage of switch, convenient use.
Further, in one embodiment of the invention, upper drive electrode 1 is for example provided with square release aperture, with
Improve sacrifice layer release efficiency.
Further, in one embodiment of the invention, lower drive electrode 2 is in holding wire 8 and the ground of co-planar waveguide
Between line 9.
Further, in one embodiment of the invention, upper drive electrode 1 is identical with lower drive electrode 2 shape, and under
Drive electrode 2 is located at upper drive electrode 1 lower section and position is completely overlapped, and upper drive electrode 1 and lower drive electrode 2 are in vertical direction
On there is the air gap of predeterminable range, thus producing electric capacity.More specifically, for example, 3.3 microns of predeterminable range.More have
Body ground, upper drive electrode 1 is for example metal polar plate with lower drive electrode 2.
Drives line 4 is connected with lower drive electrode 2, when loading DC voltage in drives line 4, provides electrostatic force, will be upper
Drive electrode 1 is drop-down, so that upper drive electrode 1 is fitted with lower drive electrode 2, to realize switch-off.Specifically, work as drive
On moving-wire 4 no DC voltage when, due to the reason of the air gap, capacitance very little, upper drive electrode 1 will not be drop-down, radio frequency believe
Number energy being coupled in center pad 3 seldom it is believed that now most radio-frequency (RF) energy can pass through co-planar waveguide,
Therefore, now switch in the conduction state.When loading DC voltage in drives line 4, due to electrostatic force, upper drive electrode
1 is drop-down, and until fitting with lower drive electrode 2, now due to there is not the air gap, capacitance increases sharply, and radiofrequency signal is exhausted
Major part is coupled in center pad 3, thus be transferred to the ground wire 9 of co-planar waveguide by crane lower limb beam 5, now switch is off
State, thus realizing the closure of switch and cut-offfing.
Further, in one embodiment of the invention, this switch for example also includes air bridges 6.Drives line 4 passes through sky
Air bridge 6 passes through the ground wire 9 of co-planar waveguide to be connected with lower drive electrode 2, so that device overall structure is compacter.
In one embodiment of the invention, for example, the height of air bridges 6 is consistent with the electrode height of switch, thus subtracting
The technological process of few switch, improves yield rate.
It should be noted that the said structure (as gold) for example all formed from metal that the switch of the embodiment of the present invention comprises,
Therefore, center pad and Top electrode are all electrically being connected with ground wire, and this is also the basis that signal controls.
To sum up, in an embodiment of the present invention, it is by DC voltage is loaded on drives line 4 to the control of switch, by
It is connected with drives line 4 in lower drive electrode 2, due to electrostatic force, upper drive electrode 1 will be drop-down, drive center pad 3 downwardly together
Motion, makes switching capacity increase sharply, radiofrequency signal is coupled to center pad 3, and then is transmitted to the ground wire 9 of co-planar waveguide
On, realize the shutoff of signal.And traditional condenser type rf mems switch does not have single drive electrode, only center pad, work
When making, DC voltage is carried on holding wire, now center pad is as drive electrode, drop-down due to electrostatic force, leads to
Cross capacitance variations to control radiofrequency signal.
Holding wire according to embodiments of the present invention and drives line detached condenser type radio frequency micro electro-mechanical system switch, have as
Lower advantage:
1st, holding wire is separated with drives line, reduce insertion loss under conditions of same drive voltage, improve out
Close performance, and be separately provided upper and lower drive electrode, driving voltage is carried on lower drive electrode by drives line, rather than and general
Logical condenser type rf mems switch equally DC voltage is added on holding wire realizes switching function, so can be by unidirectional current
Pressure is separated with radiofrequency signal, protects whole circuit；
2nd, this switch arranges air bridges on the ground wire of co-planar waveguide, to facilitate drives line to pass through, so that switch is integrally tied
Structure is compacter, is conducive to improving the miniaturization of switch；
3rd, the height design of air bridges is consistent with upper drive electrode, in the premise not improving switch processing technique complexity
Under increased its function, and make the processing compatibility of switch more preferably, the technological process of this invention and the technique of regular tap
Flow process is identical, can carry out flow on same silicon chip, therefore, simple to operate, does not increase extra cost.
In the description of this specification, reference term " embodiment ", " some embodiments ", " example ", " specifically show
The description of example " or " some examples " etc. means specific features, structure, material or the spy describing with reference to this embodiment or example
Point is contained at least one embodiment or the example of the present invention.In this manual, to the schematic representation of above-mentioned term not
Necessarily refer to identical embodiment or example.And, the specific features of description, structure, material or feature can be any
One or more embodiments or example in combine in an appropriate manner.
Although an embodiment of the present invention has been shown and described, it will be understood by those skilled in the art that: not
Multiple changes, modification, replacement and modification can be carried out to these embodiments in the case of the principle of the disengaging present invention and objective, this
The scope of invention by claim and its is equal to limit.
Claims (10)
1. a kind of holding wire and drives line detached condenser type radio frequency micro electro-mechanical system switch are it is characterised in that include: coplanar ripple
Lead, anchor area, He Tuiliang, drive electrode, center pad and drives line, wherein,
Described anchor area is located on the ground wire of co-planar waveguide；
Described He Tuiliang is connected with the anchor area of both sides and the described drive electrode of centre respectively；
Described drive electrode is connected with described center pad by short straight beam, and described drive electrode includes drive electrode and lower drive
Moving electrode；
Described drives line is connected with described lower drive electrode, when loading DC voltage in described drives line, provides electrostatic force, with
Will be drop-down for described upper drive electrode, so that described upper drive electrode is fitted with described lower drive electrode, to realize described switch
Turn off.
2. holding wire according to claim 1 and drives line detached condenser type radio frequency micro electro-mechanical system switch, its feature
It is, also include:
Air bridges, described drives line passes through the ground wire of described co-planar waveguide and described lower drive electrode phase by described air bridges
Even.
3. holding wire according to claim 1 and drives line detached condenser type radio frequency micro electro-mechanical system switch, its feature
It is, described drive electrode is two, wherein, two described upper drive electrodes are located at described center pad both sides and by described
Short straight beam is connected with described center pad.
4. holding wire according to claim 3 and drives line detached condenser type radio frequency micro electro-mechanical system switch, its feature
It is, described upper drive electrode is connected with described anchor area by described He Tuiliang.
5. holding wire according to claim 1 and drives line detached condenser type radio frequency micro electro-mechanical system switch, its feature
It is, described upper drive electrode is provided with square release aperture.
6. holding wire according to claim 1 and drives line detached condenser type radio frequency micro electro-mechanical system switch, its feature
It is, described lower drive electrode is between holding wire and the ground wire of described co-planar waveguide.
7. holding wire according to claim 2 and drives line detached condenser type radio frequency micro electro-mechanical system switch, its feature
It is, the height of described air bridges is consistent with the electrode height of described switch.
8. the holding wire according to any one of claim 1-7 and drives line detached condenser type radio frequency MEMS are opened
Close it is characterised in that described upper drive electrode is identical with lower drive electrode shape, and described lower drive electrode is located at upper driving electricity
Below pole and position is completely overlapped, there is predeterminable range in described upper drive electrode and described lower drive electrode in vertical direction
The air gap.
9. holding wire according to claim 8 and drives line detached condenser type radio frequency micro electro-mechanical system switch, its feature
It is, described predeterminable range is 3.3 microns.
10. holding wire according to claim 8 and drives line detached condenser type radio frequency micro electro-mechanical system switch, its feature
It is, described upper drive electrode and described lower drive electrode are metal polar plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611041378.1A CN106373830A (en) | 2016-11-21 | 2016-11-21 | Capacitive radio-frequency micro-electromechanical system switch with signal lines and drive lines separated |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611041378.1A CN106373830A (en) | 2016-11-21 | 2016-11-21 | Capacitive radio-frequency micro-electromechanical system switch with signal lines and drive lines separated |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106373830A true CN106373830A (en) | 2017-02-01 |
Family
ID=57892171
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611041378.1A Pending CN106373830A (en) | 2016-11-21 | 2016-11-21 | Capacitive radio-frequency micro-electromechanical system switch with signal lines and drive lines separated |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106373830A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113381139A (en) * | 2021-04-20 | 2021-09-10 | 中北大学南通智能光机电研究院 | K ~ D band wide band radio frequency MEMS switch |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050248423A1 (en) * | 2004-03-12 | 2005-11-10 | The Regents Of The University Of California | High isolation tunable MEMS capacitive switch |
| CN1971797A (en) * | 2005-11-21 | 2007-05-30 | 三星电子株式会社 | RF mems switch and the method for producing the same |
| CN101763987A (en) * | 2009-12-30 | 2010-06-30 | 中国电子科技集团公司第十三研究所 | RF MEMES switch and manufacture method thereof |
| CN103811834A (en) * | 2014-02-17 | 2014-05-21 | 东南大学 | Micro-mechanical cantilever beam type pi type continuous reconfigurable microwave band-pass filter |
| CN103943417A (en) * | 2014-04-09 | 2014-07-23 | 苏州锟恩电子科技有限公司 | Capacitive RF MEMS switch |
| CN104037027A (en) * | 2014-06-26 | 2014-09-10 | 电子科技大学 | MEMS capacitive switch |
| CN105788971A (en) * | 2016-03-16 | 2016-07-20 | 上海交通大学 | Silicon substrate based compact MEMS capacitive radio-frequency switch and production method |
-
2016
- 2016-11-21 CN CN201611041378.1A patent/CN106373830A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050248423A1 (en) * | 2004-03-12 | 2005-11-10 | The Regents Of The University Of California | High isolation tunable MEMS capacitive switch |
| CN1971797A (en) * | 2005-11-21 | 2007-05-30 | 三星电子株式会社 | RF mems switch and the method for producing the same |
| CN101763987A (en) * | 2009-12-30 | 2010-06-30 | 中国电子科技集团公司第十三研究所 | RF MEMES switch and manufacture method thereof |
| CN103811834A (en) * | 2014-02-17 | 2014-05-21 | 东南大学 | Micro-mechanical cantilever beam type pi type continuous reconfigurable microwave band-pass filter |
| CN103943417A (en) * | 2014-04-09 | 2014-07-23 | 苏州锟恩电子科技有限公司 | Capacitive RF MEMS switch |
| CN104037027A (en) * | 2014-06-26 | 2014-09-10 | 电子科技大学 | MEMS capacitive switch |
| CN105788971A (en) * | 2016-03-16 | 2016-07-20 | 上海交通大学 | Silicon substrate based compact MEMS capacitive radio-frequency switch and production method |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113381139A (en) * | 2021-04-20 | 2021-09-10 | 中北大学南通智能光机电研究院 | K ~ D band wide band radio frequency MEMS switch |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107086541B (en) | Bidirectional breaking hybrid circuit breaker and breaking method thereof | |
| CN105024369B (en) | A kind of current diverting device and method suitable for hybrid dc circuit breaker | |
| CN106602183A (en) | Anti-adhesion RF MEMS switch | |
| CN103444068B (en) | There is the modularity multiple convertor of the power semiconductor switch of energy reverse-conducting | |
| CN105917569A (en) | Method for operating an inverter with reactive power capability having a polarity reverser, and inverter with reactive power capability having a polarity reverser | |
| CN110137634A (en) | A kind of K-type hilted broadsword four-throw RF MEMS Switches | |
| CN105058366B (en) | Four-degree-of freedom piezoelectric micro-clamp | |
| CN106373830A (en) | Capacitive radio-frequency micro-electromechanical system switch with signal lines and drive lines separated | |
| CN103715870B (en) | Voltage adjuster and resonant gate driver thereof | |
| CN105229910A (en) | Power inverter | |
| CN208315475U (en) | A kind of RF MEMS Switches based on no relief hole top electrode structure | |
| CN105655160B (en) | A kind of dual-power transfer switch with double breaking points moving contact structure | |
| CN109494978A (en) | Integrated circuit of power supply switching circuit and power supply switching controller | |
| CN108648964A (en) | A kind of RF MEMS Switches based on no release aperture upper electrode arrangement | |
| CN108712070B (en) | Based on ZCS PWM bi-directional DC-DC CUK converter, transformation system and method | |
| CN201577079U (en) | Two terminal full solid-state switch using wireless radio frequency identification technology | |
| CN102931032B (en) | Low-voltage AC/DC control and protection electrical appliance | |
| CN112447440A (en) | Medium-voltage zero-crossing control module | |
| CN106088836A (en) | A kind of electromagnetic lock drive circuit and electromagnetic lock | |
| CN116706854A (en) | Circuit breaker with bidirectional breaking limiting short-circuit current | |
| CN101651065A (en) | Bistable state bridge-type micro-electromechanical switch structure with floating gate electrode | |
| CN206639741U (en) | A kind of vacuum circuit breaker speed-sensitive switch | |
| CN208819796U (en) | A kind of cabinet type high speed machine switch | |
| CN208157332U (en) | A kind of integrated electrode structure and switch and dc circuit breaker based on the structure | |
| CN108206643A (en) | Power cell and the Technics of Power Electronic Conversion device using the power cell |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20170201 |