CN106321707B - A kind of two-freedom ultralow frequency vibration isolator - Google Patents
A kind of two-freedom ultralow frequency vibration isolator Download PDFInfo
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- CN106321707B CN106321707B CN201610914596.5A CN201610914596A CN106321707B CN 106321707 B CN106321707 B CN 106321707B CN 201610914596 A CN201610914596 A CN 201610914596A CN 106321707 B CN106321707 B CN 106321707B
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- 230000007246 mechanism Effects 0.000 claims abstract description 49
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- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F9/00—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium
- F16F9/02—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium using gas only or vacuum
- F16F9/04—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium using gas only or vacuum in a chamber with a flexible wall
- F16F9/05—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium using gas only or vacuum in a chamber with a flexible wall the flexible wall being of the rolling diaphragm type
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
- F16F15/0232—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means with at least one gas spring
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/03—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using magnetic or electromagnetic means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
- F16F15/06—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs
- F16F15/067—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs using only wound springs
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F3/00—Spring units consisting of several springs, e.g. for obtaining a desired spring characteristic
- F16F3/02—Spring units consisting of several springs, e.g. for obtaining a desired spring characteristic with springs made of steel or of other material having low internal friction
- F16F3/04—Spring units consisting of several springs, e.g. for obtaining a desired spring characteristic with springs made of steel or of other material having low internal friction composed only of wound springs
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F6/00—Magnetic springs; Fluid magnetic springs, i.e. magnetic spring combined with a fluid
- F16F6/005—Magnetic springs; Fluid magnetic springs, i.e. magnetic spring combined with a fluid using permanent magnets only
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2228/00—Functional characteristics, e.g. variability, frequency-dependence
- F16F2228/06—Stiffness
- F16F2228/066—Variable stiffness
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Abstract
The invention discloses a kind of two-freedom ultralow frequency vibration isolator, and it includes basic platform (10) and load platform (30), and basic platform (10) is connected with load platform (30) by support bar, it is characterised in that：Air spring (20) and negative stiffness adjustable magnetic negative rigidity mechanism (28) of the vibration isolator also including positive rigidity, it forms parallel institution along the central axial direction of basic platform and load platform, so as to reduce the intrinsic frequency of the direction；The inverted pendulum of the adjustable positive rigidity flat spring of rigidity and negative stiffness is provided with the central axis upright direction, positive and negative Stiffness mechanism is formed, so as to reduce the intrinsic frequency of the direction.Central axial direction and its vertical direction of the vibration isolator of the present invention along basic platform and load platform use positive and negative Stiffness formula passive structure, while realize two free degree vibration isolation.
Description
Technical field
The invention belongs to ultraprecise vibration damping field, and in particular to a kind of two-freedom ultralow frequency vibration isolator.
Background technology
Micro-vibration isolation technology is widely used in the precision equipment to vibration sensing such as semiconductor machining and measuring instrument, with
Suppress the disturbance from ground and external drive.With the continuous improvement of ultraprecise equipment precision, the performance of vibrating isolation system is referred to
Mark requires more and more strict.In carrying Precision Machining field greatly, positive negative rigidity mechanism achievable vibrating isolation system in parallel is held greatly
There is extremely low system frequency while carrying power, so as to improve the ultralow frequency vibration attenuation ability of such vibration isolator.
Traditional vibration insulating system typically uses cylindrically coiled spring, rubber mechanism or air spring Deng Zheng rigidity mechanism, but
The suppression of superlow frequency vibrating can not be realized.Negative rigidity mechanism has and positive rigidity mechanism phase due to unstable in its equilbrium position
Anti- stiffness characteristics, including mechanical negative stiffness and magnetic negative stiffness.Because negative rigidity mechanism has unstability, can not individually make
With, must be in parallel with positive rigidity mechanism, enable to vibrating isolation system that there is the characteristic of the low dynamic stiffness of high Static stiffness, and be effectively isolated super
Low-frequency vibration.
Air spring has the characteristics of Low rigidity and large bearing capacity, is widely used in carrying in accurate vibration isolation system greatly, by
Be inversely proportional in its rigidity with chamber volume, when design intrinsic frequency it is relatively low when, air spring chamber volume can be excessive and cause position
It is unstable to put control, cause its can not normal work, therefore air spring can not meet the requirement of superlow frequency vibration isolating.It is traditional every
The positive negative rigidity mechanism used in vibrating device can only provide the stiffness characteristics on a direction, realize the vibration isolation effect of single-degree-of-freedom
Fruit, when realizing multi-degree-of-freedom vibration isolation, then corresponding positive and negative Stiffness device will be set in each free degree, dress can be increased
The complexity put.
A kind of permanent magnet low frequency based on negative rigidity principle that the patent publication No. of Tsing-Hua University's application is CN102506110B
Single-degree-of-freedom vibration isolating mechanism is in parallel with the negative stiffness system that sheet rubber forms by the positive stiffness system of magnetic, form single-degree-of-freedom low frequency every
Shake mechanism, it does not need extraneous source of the gas, has the prospect used in a vacuum；Simple in construction, cost is cheap, easy to process.This
Invention in contrast, make use of the principle of magnetic negative stiffness to form rigidity in parallel, it is possible to provide the low frequency vibration isolation on two-freedom.
The content of the invention
For the disadvantages described above or Improvement requirement of prior art, the invention provides a kind of two-freedom superlow frequency vibration isolating
Device, its object is to the central axial direction along basic platform and load platform and its vertical direction to use positive and negative Stiffness
Formula passive structure, the element of both direction is connected by the flexible hinge of a uncoupling, at the same realize two frees degree every
Shake.
To achieve these goals, the invention provides a kind of two-freedom ultralow frequency vibration isolator, it includes basic platform
And load platform, the basic platform are connected with outside platform, for the load platform with needing the equipment of vibration isolation to be connected, basis is flat
Platform is connected with load platform by support bar, it is characterised in that：
The vibration isolator also includes the air spring and the adjustable magnetic negative rigidity mechanism of negative stiffness of positive rigidity, and it is arranged on described
On the central axis of basic platform and load platform, upper end is connected with the load platform, and lower end is connected with the basic platform,
Wherein, the air spring is used to adjust different rigidity to adapt to different loads, the magnetic negative rigidity mechanism and the sky
Gas spring forms parallel institution, so as to drop the intrinsic frequency of the axis direction；And
The positive and negative Stiffness mechanism formed by the inverted pendulum of the adjustable positive rigidity flat spring of rigidity and negative stiffness, it is arranged
In the air spring and the outside of magnetic negative rigidity mechanism, upper end is connected with the load platform, lower end and the basic platform
Connection, so as to reduce the intrinsic frequency with the direction of the central axis upright, realizes two-freedom vibration isolation.
Further, the flat spring is two, respectively the first flat spring and the second flat spring, the first flat spring and the
Two flat springs are connected to form positive and negative Stiffness by the first flexible hinge and the second flexible hinge with the air spring respectively
Mechanism, so as to reduce the intrinsic frequency with the direction of the central axis upright.
Further, first flat spring and the second flat spring composition parallel institution in 90 ° in the horizontal direction.
Further, the air spring is made up of metallic cavity, diaphragm seal, bottom plate and air chamber, wherein, bottom plate is fixed on
On the basic platform, the outer metallic cavity of bottom plate and air spring is connected by diaphragm seal, to form air cavity.
Further, the air spring also includes air valve, and the air pressure size of gas and the air cavity are filled with for controlling
Volume size, so as to adjust the rigidity of air spring to adapt to no load.
Further, the magnetic negative stiffness unit includes three blocks of magnet, wherein, upper magnet is fixed on the load platform
On, lower magnet is fixed on the basic platform, and center magnet is arranged with upper and lower part magnet in attraction.
Further, apply flexible hinge on the center magnet, constrain the motion of other five direction frees degree, make it
It is only capable of doing translational motion in vertical direction.
Further, the flat spring is also consolidated including the first metal elastic, the second metal clips, stiffness tuning mechanism and shell fragment
Determine device, wherein, first metal clips and the second metal clips are arranged in shell fragment fixing device, and stiffness tuning mechanism uses
In the effective work bending length for changing first metal clips and the second metal clips by sliding up and down, so as to change
Effective work rigidity of first metal clips, the second metal clips, and then change the rigidity of flat spring sum.
Further, the inverted pendulum is inverted air spring.
In general, by the contemplated above technical scheme of the present invention compared with prior art, it can obtain down and show
Beneficial effect：
(1) a kind of two-freedom ultralow frequency vibration isolator of the invention, along the central axis side of basic platform and load platform
To and its vertical direction use positive and negative Stiffness formula passive structure, by the flexible hinge of a uncoupling by both direction
Element connection, while realize two free degree vibration isolation.
(2) a kind of two-freedom ultralow frequency vibration isolator of the invention, air spring and the magnetic negative rigidity mechanism shape of positive rigidity
Into parallel institution, so as to reduce the intrinsic frequency of vertical direction.
(3) a kind of two-freedom ultralow frequency vibration isolator of the invention, flat spring pass through flexible hinge and the air spring
Connection, the positive and negative Stiffness mechanism of horizontal direction is formed, so as to reduce the intrinsic frequency of horizontal direction.
(4) in technical scheme, using the form of positive and negative Stiffness, realize that high static rigidity-low dynamic is firm
The characteristic of degree, so as to realize the characteristic of the relatively low intrinsic frequency of system and high capacity.
Brief description of the drawings
Fig. 1 is a kind of structural representation of two-freedom ultralow frequency vibration isolator of the embodiment of the present invention；
Fig. 2 is a kind of structural blast schematic diagram of two-freedom ultralow frequency vibration isolator of the embodiment of the present invention；
Fig. 3 is the air spring schematic diagram being related in a kind of two-freedom ultralow frequency vibration isolator of the embodiment of the present invention；
Fig. 4 is the magnetic negative rigidity mechanism principle being related in a kind of two-freedom ultralow frequency vibration isolator of the embodiment of the present invention
Figure；
Fig. 5 be the embodiment of the present invention a kind of two-freedom ultralow frequency vibration isolator in the flat spring mechanism map that is related to and orthogonal
Schematic diagram is installed；
Fig. 6 is the inverted pendulum simplified pinciple figure being related in a kind of two-freedom ultralow frequency vibration isolator of the embodiment of the present invention；
Fig. 7 is the horizontal negative rigidity principle figure being related in a kind of two-freedom ultralow frequency vibration isolator of the embodiment of the present invention；
Fig. 8 is a kind of two-freedom ultralow frequency vibration isolator passive vibration isolation transport analogous diagram of the embodiment of the present invention.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples
The present invention is further elaborated.It should be appreciated that specific embodiment described herein is only to explain the present invention, not
For limiting the present invention.As long as in addition, technical characteristic involved in each embodiment of invention described below that
Conflict can is not formed between this to be mutually combined.
Fig. 1 is a kind of structural representation of two-freedom ultralow frequency vibration isolator of the embodiment of the present invention, and Fig. 2 is the present invention
A kind of structural blast schematic diagram of two-freedom ultralow frequency vibration isolator of embodiment.As shown in Figure 1, 2, two-freedom ultralow frequency
The structure composition of vibration isolator is：Basic platform 10 is connected downwards by bolt with outside platform, load support platform 30 upwards with
The equipment of vibration isolation is needed to connect；Three post uppers are connected by bolt with load platform, and lower end is connected with base；Stand upside down
Air spring 20 is centrally located, and top is connected with support platform, and bottom is connected with base；Two pack springs 211,212 one-tenth
90 ° of angle arrangements, upper end are connected with by flexible hinge 231,232 with air spring 20, and middle part is connected by foundary weight and support bar
Connect, bottom is connected with base；Flexible hinge 231,232 axially there is greater stiffness, can be considered rigid body, with it is axially vertical
Direction has less bending stiffness, to meet job requirement；Magnetic negative rigidity mechanism 24 is stretched out beam and is connected with load platform 30, its
External frame and support bar, basic platform 10 are connected；Two-way bolt 221,222,223 is used to connect load platform, forward direction connection
When load platform is fixed, be readily transported, during Opposite direction connection, platform fine motion job requirement can be met.
Fig. 3 is the air spring schematic diagram being related in a kind of two-freedom ultralow frequency vibration isolator of the embodiment of the present invention.Such as
Shown in Fig. 3, air spring is made up of metallic cavity 201, diaphragm seal 202, bottom plate 203 and air chamber 204.Air spring, which stands upside down, to be put
Put, chamber is circle, is led to and the structure of lower ending opening in, and the top of metallic cavity 201 passes through with load platform 30 during use
Flexible block is connected, and bottom is connected with diaphragm seal 202, and bottom plate 203 connects diaphragm seal 202 and is fixed on basic platform 10.Bottom plate
Passage is provided with 203, is connected with air supply system, gases at high pressure caused by air supply system enter chamber by stomata, and support is outer
Portion's load, while provide vertical direction positive rigidity.
Assuming that the gas-dynamic process in metallic cavity is adiabatic process of perfect gas, according to equilibrium equation and stress
The rigidity expression formula that relation can release air chamber 204 is：
Wherein PatmIt is adiabatic coefficent for atmospheric pressure, its value is about 1.402, is air chamber net sectional area, is static balance
The quality loaded under state, it is static balance air chamber initial volume, is acceleration of gravity.As can be seen that single-chamber air from formula
The rigidity of spring is related to load quality, air chamber sectional area and chamber volume.It can be filled with then actually using by Air Valve Control
The air pressure size of gas and the volume size of air spring air chamber 204, come adjust different rigidity with adapt to different loads and
Service condition.
Fig. 4 is the magnetic negative rigidity mechanism principle being related in a kind of two-freedom ultralow frequency vibration isolator of the embodiment of the present invention
Figure.As shown in figure 4, magnetic negative rigidity mechanism 24 includes three blocks of magnet, wherein, upper magnet is fixed on the load platform, under
Portion's magnet is fixed on the basic platform, and center magnet is arranged with upper and lower part magnet in attraction.In center magnet is located at
During heart position, upper lower magnet is equal to its active force, and it is in poised state, but works as its off-center position up or down
When, upper lower magnet can compel away from equilbrium position to its active force, and when it deviates equilbrium position in the horizontal direction, on
Lower magnet can force a return to equilbrium position to its active force, so its in the vertical direction can provide negative stiffness, level side
Positive rigidity is provided upwards, according to calculation of magnetic force, compared with the negative rigidity mechanism based on magnetic repulsion, the negative stiffness machine based on magnetic pull
Structure can provide larger negative stiffness value.In order to make full use of this magnetic negative stiffness characteristic, it is necessary to which center magnet is only capable of in z directions
Translational motion is done, and the motion in other directions is restrained, and center magnet other are constrained by way of applying flexible hinge
The motion of five frees degree, it is set to be only capable of doing translational motion in z directions.
Magnetic force model is established according to line-charge model, releasing its magnetic negative stiffness expression formula is：
Wherein：
Uij=(- 1)ja′-(-1)ia (4)
Vkl=(- 1)lb′-(-1)kb (5)
Wpq=z+ (- 1)qc′-(-1)pc (6)
Wherein, a, b, c are the length, width and height of upper and lower part magnet, and a ', b ', the length, width and height that c ' is center magnet, J and J ' are magnetic
The magnetization intensity vector of iron.
Use six groups of magnetic negative rigidity mechanisms in the present invention, two adjacent groups magnet magnetization direction reversed arrangement, ignore each group it
Between influence each other, the rigidity that can obtain magnetic negative rigidity mechanism is：
Fig. 5 be the embodiment of the present invention a kind of two-freedom ultralow frequency vibration isolator in the flat spring mechanism map that is related to and orthogonal
Schematic diagram is installed.In Fig. 5 (a), metal clips 2111 and metal clips 2113 in parallel, the stiffness tuning by fixing device 2114
Device 2112 changes effective active length of metal clips 2111,2113 by sliding up and down, so as to change flat spring mechanism
Effective work rigidity.It is in 90 ° just to rigidity, two panels spring mechanism 211,212 in order to decoupling linear regulating system level
Mating is put, and shown in its operation principle such as Fig. 5 (b), its Derivation of Mathematical Model process is as follows：
Two panels spring mechanism 211,212 is equivalent to spring in Fig. 5 (b), and A points are the application point of power in figure, are considered general
Property, when the unit force F for having any direction (θ is arbitrary value) acts on A points, flat spring mechanism produces quiet in the direction of directed force F
Deform Δ x to B points.Unit force F is in spring k1And k2On it is discrete caused by Static Correction be respectively：
It is assumed that active force, caused quiet deformation is also very small, therefore ∠ CBD are approximately right angle, and total deflection Δ x is：
Rigidity k1And k2It is identical, it is k, then global stiffness of the mechanism on θ directions is represented by：
When using two flat spring parallel connections, its rigidity is twice of a flat spring rigidity, i.e.,：
K=2ks (12)
In accurate vibration isolation system, vibration amplitude generally in micron order, ensure that the correctness of above-mentioned hypothesis.In addition, by
In θ arbitrariness, therefore the rigidity of the mechanism in any direction is consistent, and is rigidity k.
According to the knowledge of the mechanics of materials, the adjustable rigidity flat spring 211,212 of the free square-section in one end is fixed in one end
Bending stiffness is represented by:
ks=3EI/L (13)
Wherein, E is the modulus of elasticity of flat spring material, and I is bending resistant section the moment of inertia, and L is the effective bending length of flat spring.
From rigidity formula, rigidity size is inversely proportional with effective bending length, can be changed by adjusting effective bending length of flat spring
Become its rigidity size, so as to realize the horizontal regulation to rigidity.
Fig. 6 is the inverted pendulum simplified pinciple figure being related in a kind of two-freedom ultralow frequency vibration isolator of the embodiment of the present invention.
As shown in fig. 6, inverted pendulum negative stiffness is that negative stiffness characteristics are realized using Euler column spring principle, it is negative firm that it is usually used in horizontal direction
Vibration isolation unit is spent, the expression formula of its rigidity can be obtained according to the Analysis of materials mechanics under micro-disturbance：
K=12EI/l3-mg/l (14)
From formula (14), its rigidity expression formula is made up of positive rigidity and negative stiffness, only when load quality exceedes necessarily
During numerical value, the inverted pendulum just has negative stiffness characteristics, otherwise it is positive rigidity mechanism, in actual applications, can pass through conjunction
The selection swing rod parameter and load quality of reason realize level to extremely low intrinsic frequency, but due to the limitation of itself, generally hold
Power is carried all without very greatly, limits its scope of application.When perturbation action is when in load, load can deviate original unstable shape
State, horizontal direction displacement x is produced, now need application reaction force its is kept balance, its expression formula is：
According to the definition of rigidity, the level of inverted pendulum is to the expression formula of rigidity：
Due to being micro-disturbance, simplify the expression formula that its rigidity can be drawn after processing：
K=-mg/l (17)
From expression formula as can be seen that negative stiffness characteristics are presented in the inverted pendulum of the constraint all the time, need in actual use
Use, and can be realized by changing different handstand pendulum lengths and load quality different size of negative firm with positive Stiffness
Spend characteristic.
Fig. 7 is the horizontal negative rigidity principle figure being related in a kind of two-freedom ultralow frequency vibration isolator of the embodiment of the present invention.
As shown in fig. 7, inverted air spring can be equivalent to handstand swinging mechanism, the positive rigidity and level of vertical direction can be provided simultaneously
The negative stiffness in direction.
The global stiffness of vibration isolator horizontal direction is in the present invention：
The global stiffness of vertical direction is：
Compared with traditional driven member, passive vibration isolation element upright direction of the present invention is that air spring is born with magnetic
Rigidity mechanism is in parallel, and horizontal direction is that flat spring mechanism is in parallel with handstand swinging mechanism, and its rigidity value is far below traditional driven member,
The intrinsic frequency of system can be substantially reduced.
Fig. 8 is a kind of two-freedom ultralow frequency vibration isolator passive vibration isolation transport analogous diagram of the embodiment of the present invention.From figure
Middle solid line can be seen that the intrinsic frequency of common traditional vibration isolator is higher, and the amplitude of formant is larger.When using structure of the present invention
Afterwards, from dotted line as can be seen that its transport has part decay at low-frequency resonance peak, while substantially moved forward with intrinsic frequency,
It can be seen that the present invention can be improved the vibration isolation capability of passive vibration isolation device.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, all any modification, equivalent and improvement made within the spirit and principles of the invention etc., all should be included
Within protection scope of the present invention.
Claims (9)
1. a kind of two-freedom ultralow frequency vibration isolator, it includes basic platform (10) and load platform (30), the basic platform
(10) it is connected with outside platform, for the load platform (30) with needing the equipment of vibration isolation to be connected, basic platform (10) is flat with load
Platform (30) is connected by support bar, it is characterised in that：
Air spring (20) and negative stiffness adjustable magnetic negative rigidity mechanism (24) of the vibration isolator also including positive rigidity, it is arranged on
On the central axis of the basic platform and load platform, upper end is connected with the load platform (30), lower end and the basis
Platform (10) connects, wherein, the air spring is used to adjust different rigidity to adapt to different loads, the magnetic negative stiffness
Mechanism forms parallel institution with the air spring, so as to drop the intrinsic frequency of the axis direction；And
The positive and negative Stiffness mechanism formed by the inverted pendulum of the adjustable positive rigidity flat spring of rigidity and negative stiffness, it is arranged in institute
The outside of air spring and magnetic negative rigidity mechanism is stated, upper end is connected with the load platform (30), lower end and the basic platform
(10) connect, so as to reduce the intrinsic frequency with the direction of the central axis upright, realize two-freedom vibration isolation.
A kind of 2. two-freedom ultralow frequency vibration isolator according to claim 1, it is characterised in that：The flat spring is two
Individual, respectively the first flat spring (211) and the second flat spring (212), the first flat spring (211) and the second flat spring (212) divide
It is not connected to form positive and negative Stiffness with the air spring by the first flexible hinge (231) and the second flexible hinge (232)
Mechanism, so as to reduce the intrinsic frequency with the direction of the central axis upright.
A kind of 3. two-freedom ultralow frequency vibration isolator according to claim 2, it is characterised in that：First flat spring
And the second flat spring (212) composition parallel institution in 90 ° in the horizontal direction (211).
A kind of 4. two-freedom ultralow frequency vibration isolator according to any one of claim 1-3, it is characterised in that：The sky
Gas spring (20) is made up of metallic cavity (201), diaphragm seal (202), bottom plate (203) and air chamber (204), wherein, bottom plate (203)
It is fixed on the basic platform (10), the bottom plate (203) is connected with metallic cavity (201) by diaphragm seal (202), with shape
Into air cavity (204).
A kind of 5. two-freedom ultralow frequency vibration isolator according to claim 4, it is characterised in that：The air spring (20)
Also include air valve, the air pressure size of gas and the volume size of the air chamber (204) are filled with for controlling, so as to adjust air bullet
The rigidity of spring is to adapt to no load.
A kind of 6. two-freedom ultralow frequency vibration isolator according to any one of claim 1-3, it is characterised in that：The magnetic
Negative rigidity mechanism (24) includes three blocks of magnet, wherein, upper magnet is fixed on the load platform (30), and lower magnet is fixed
On the basic platform (10), center magnet is arranged with upper and lower part magnet in attraction.
A kind of 7. two-freedom ultralow frequency vibration isolator according to claim 6, it is characterised in that：Applied on the center magnet
Add flexible hinge, constrain the motion of other five direction frees degree, make it be only capable of doing translational motion in vertical direction.
A kind of 8. two-freedom ultralow frequency vibration isolator according to any one of claim 1-3, it is characterised in that：Described
Spring is also fixed including the first metal clips (2111), the second metal clips (2113), stiffness tuning mechanism (2112) and shell fragment
Device (2114), wherein, first metal clips (2111) is arranged on shell fragment fixing device with the second metal clips (2113)
(2114) on, stiffness tuning mechanism (2112) is used to change first metal clips (2111) and second by sliding up and down
Effective work bending length of metal clips (2113), so as to change the first metal clips (2111), the second metal clips
(2113) effective work rigidity, and then change the rigidity of flat spring (211) and (212).
A kind of 9. two-freedom ultralow frequency vibration isolator according to any one of claim 1-3, it is characterised in that：It is described fall
Vertical pendulum is inverted air spring (20).
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| CN108953448B (en) * | 2018-08-10 | 2024-03-26 | 浙江理工大学 | Permanent magnet bistable vibration isolator |
| CN109139793B (en) * | 2018-10-09 | 2020-02-11 | 东北大学 | Nonlinear vibration absorber with multistable rigidity |
| CN109707786B (en) * | 2019-01-17 | 2020-04-28 | 上海大学 | Electromagnetic type positive and negative rigidity parallel low-frequency vibration isolation device |
| CN110107645B (en) * | 2019-06-06 | 2020-09-29 | 重庆理工大学 | Vibration damper for handheld agricultural machinery engine |
| CN114278699B (en) * | 2021-11-16 | 2024-03-05 | 中国石油大学(华东) | Two-dimensional plane negative stiffness device |
| CN114508561B (en) * | 2022-01-19 | 2022-11-11 | 华中科技大学 | Micro-vibration active compensation system for ultra-precision equipment |
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| GB0506990D0 (en) * | 2005-04-06 | 2005-05-11 | Bae Systems Plc | Vibration isolation |
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