CN106321707A - Two-degree-of-freedom ultralow-frequency vibration isolator - Google Patents
Two-degree-of-freedom ultralow-frequency vibration isolator Download PDFInfo
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- CN106321707A CN106321707A CN201610914596.5A CN201610914596A CN106321707A CN 106321707 A CN106321707 A CN 106321707A CN 201610914596 A CN201610914596 A CN 201610914596A CN 106321707 A CN106321707 A CN 106321707A
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F9/00—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium
- F16F9/02—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium using gas only or vacuum
- F16F9/04—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium using gas only or vacuum in a chamber with a flexible wall
- F16F9/05—Springs, vibration-dampers, shock-absorbers, or similarly-constructed movement-dampers using a fluid or the equivalent as damping medium using gas only or vacuum in a chamber with a flexible wall the flexible wall being of the rolling diaphragm type
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
- F16F15/0232—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means with at least one gas spring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/03—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using magnetic or electromagnetic means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
- F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
- F16F15/04—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means
- F16F15/06—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs
- F16F15/067—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using elastic means with metal springs using only wound springs
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F3/00—Spring units consisting of several springs, e.g. for obtaining a desired spring characteristic
- F16F3/02—Spring units consisting of several springs, e.g. for obtaining a desired spring characteristic with springs made of steel or of other material having low internal friction
- F16F3/04—Spring units consisting of several springs, e.g. for obtaining a desired spring characteristic with springs made of steel or of other material having low internal friction composed only of wound springs
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F6/00—Magnetic springs; Fluid magnetic springs, i.e. magnetic spring combined with a fluid
- F16F6/005—Magnetic springs; Fluid magnetic springs, i.e. magnetic spring combined with a fluid using permanent magnets only
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
- F16F2228/00—Functional characteristics, e.g. variability, frequency-dependence
- F16F2228/06—Stiffness
- F16F2228/066—Variable stiffness
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- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Aviation & Aerospace Engineering (AREA)
- Electromagnetism (AREA)
- Vibration Prevention Devices (AREA)
Abstract
The invention discloses a two-degree-of-freedom ultralow-frequency vibration isolator. The two-degree-of-freedom ultralow-frequency vibration isolator comprises a basic platform (10) and a load-bearing platform (30), and the basic platform (10) and the load-bearing platform (30) are connected through supporting rods. The two-degree-of-freedom ultralow-frequency vibration isolator is characterized in that the vibration isolator further comprises a positive-stiffness air spring (20) and a magnetic negative-stiffness mechanism (28) with adjustable negative stiffness, and the positive-stiffness air spring (20) and the magnetic negative-stiffness mechanism (28) form a parallel mechanism in the direction of the center axes of the basic platform and the load-bearing platform, so that the inherent frequency in the direction of the center axes of the basic platform and the load-bearing platform is decreased; and a stiffness-adjustable positive-stiffness leaf spring and a negative-stiffness inverted pendulum are arranged in the direction perpendicular to the center axes of the basic platform and the load-bearing platform and form a negative-stiffness parallel mechanism, so that the inherent frequency in the direction perpendicular to the center axes of the basic platform and the load-bearing platform is decreased. According to the vibration isolator, positive-stiffness and negative-stiffness parallel type passive structures are adopted both in the direction of the center axes of the basic platform and the load-bearing platform and in the direction perpendicular to the center axes of the basic platform and the load-bearing platform, and thus vibration of two degrees of freedom is achieved at the same time.
Description
Technical field
The invention belongs to ultraprecise vibration damping field, be specifically related to a kind of two-freedom ultralow frequency vibration isolator.
Background technology
Micro-isolating technique technology is widely used in the precision equipment to vibration sensing such as semiconductor machining and measuring instrument, with
Suppression is from ground and the disturbance of external drive.Along with improving constantly of ultraprecise equipment precision, the performance of vibrating isolation system is referred to
Mark requires the strictest.In big carrying Precision Machining field, positive negative rigidity mechanism parallel connection can be realized vibrating isolation system and hold greatly
There is while load power extremely low system frequency, thus improve the ultralow frequency vibration attenuation ability of this type of vibration isolator.
Traditional vibration insulating system typically uses cylindrically coiled spring, rubber mechanism or air spring Deng Zheng rigidity mechanism, but
The suppression of superlow frequency vibrating cannot be realized.Negative rigidity mechanism is owing to having and positive rigidity mechanism phase in its equilbrium position instability
Anti-stiffness characteristics, including mechanical type negative stiffness and magnetic negative stiffness.Owing to negative rigidity mechanism has unstability, it is impossible to individually make
With, must be in parallel with positive rigidity mechanism, it is possible to make vibrating isolation system have the characteristic of the low dynamic stiffness of high Static stiffness, and be effectively isolated super
Low-frequency vibration.
Air spring has the feature of Low rigidity and large bearing capacity, is widely used in carrying greatly in accurate vibration isolation system, by
Being inversely proportional to chamber volume in its rigidity, when designing natural frequency and being relatively low, air spring chamber volume can be excessive and cause position
Putting control instability, cause it normally to work, therefore air spring can not meet the requirement of superlow frequency vibration isolating.Traditional every
The positive negative rigidity mechanism used in vibrating device can only provide the stiffness characteristics on a direction, it is achieved the vibration isolation effect of single-degree-of-freedom
Really, during multi-degree-of-freedom vibration isolation to be realized, the most each degree of freedom will arrange corresponding positive and negative Stiffness device, dress can be increased
The complexity put.
A kind of based on negative rigidity principle the permanent magnet low frequency that patent publication No. is CN102506110B of Tsing-Hua University's application
Single-degree-of-freedom vibration isolating mechanism is in parallel with the negative stiffness system that sheet rubber forms by positive for magnetic stiffness system, constitute single-degree-of-freedom low frequency every
Shaking mechanism, it need not extraneous source of the gas, has the prospect used in a vacuum；Simple in construction, with low cost, it is easy to processing.This
Invention in contrast, make use of the principle of magnetic negative stiffness to constitute rigidity in parallel, it is possible to provide the low frequency vibration isolation on two-freedom.
Summary of the invention
For disadvantages described above or the Improvement requirement of prior art, the invention provides a kind of two-freedom superlow frequency vibration isolating
Device, its object is to all use positive and negative Stiffness along basic platform and the central axial direction of load platform and vertical direction thereof
Formula passive structure, is connected the element of both direction by the flexible hinge of a uncoupling, realize simultaneously two degree of freedom every
Shake.
To achieve these goals, the invention provides a kind of two-freedom ultralow frequency vibration isolator, it includes basic platform
And load platform, described basic platform is connected with outside platform, and described load platform is connected with the equipment needing vibration isolation, and basis is flat
Platform is connected by support bar with load platform, it is characterised in that:
This vibration isolator also includes air spring and the negative stiffness adjustable magnetic negative rigidity mechanism of positive rigidity, and it is arranged on described
On the central axis of basic platform and load platform, upper end is connected with described load platform, and lower end is connected with described basic platform,
Wherein, described air spring for regulating different rigidity to adapt to different loads, described magnetic negative rigidity mechanism and described sky
Air spring forms parallel institution, thus drops the natural frequency of described axis direction；And
The positive and negative Stiffness mechanism formed by the inverted pendulum of the adjustable positive rigidity flat spring of rigidity and negative stiffness, it is arranged
In described air spring and the outside of magnetic negative rigidity mechanism, upper end is connected with described load platform, lower end and described basic platform
Connect, thus reduce the natural frequency in the direction with described central axis upright, it is achieved two-freedom vibration isolation.
Further, described flat spring is two, respectively first spring and the second flat spring, first spring and
Two flat springs are connected the positive and negative Stiffness of formation by the first flexible hinge and the second flexible hinge respectively with described air spring
Mechanism, thus reduce the natural frequency in the direction with described central axis upright.
Further, described first spring and the second flat spring composition the most in 90 ° parallel institution.
Further, described air spring is made up of metallic cavity, diaphragm seal, base plate and air chamber, and wherein, base plate is fixed on
On described basic platform, by diaphragm seal, base plate is connected with the outer metallic cavity of air spring, to form air cavity.
Further, described air spring also includes air valve, for controlling the air pressure size of insufflation gas and described air cavity
Volume size, thus regulate the rigidity of air spring to adapt to no load.
Further, described magnetic negative stiffness unit includes three blocks of Magnet, and wherein, upper magnet is fixed on described load platform
On, lower magnet is fixed on described basic platform, and center magnet and upper and lower part Magnet are that captivation is arranged.
Further, described center magnet applies flexible hinge, retrains the motion of other five direction degree of freedom so that it is
It is only capable of doing translational motion at vertical direction.
Further, described flat spring also includes that the first metal elastic, the second metal clips, stiffness tuning mechanism and shell fragment are solid
Determining device, wherein, described first metal clips and the second metal clips are arranged in shell fragment fixing device, and stiffness tuning mechanism uses
In by sliding up and down the bending length that effectively works changing described first metal clips and the second metal clips, thus change
First metal clips, the rigidity that effectively works of the second metal clips, and then change the rigidity of flat spring sum.
Further, described inverted pendulum is inverted air spring.
In general, by the contemplated above technical scheme of the present invention compared with prior art, it is possible to show under acquirement
Benefit effect:
(1) a kind of two-freedom ultralow frequency vibration isolator of the present invention, along basic platform and the central axis side of load platform
To and vertical direction all use positive and negative Stiffness formula passive structure, by the flexible hinge of a uncoupling by both direction
Element connect, realize two degree of freedom vibration isolation simultaneously.
(2) a kind of two-freedom ultralow frequency vibration isolator of the present invention, the air spring of positive rigidity and magnetic negative rigidity mechanism shape
Become parallel institution, thus reduce the natural frequency of vertical direction.
(3) a kind of two-freedom ultralow frequency vibration isolator of the present invention, flat spring is by flexible hinge and described air spring
Connect, form the positive and negative Stiffness mechanism of horizontal direction, thus reduce the natural frequency of horizontal direction.
(4) in technical scheme, the form of positive and negative Stiffness is used, it is achieved high static rigidity-low the most firm
The characteristic of degree, thus the relatively low natural frequency of the system that realizes and the characteristic of high capacity.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of two-freedom ultralow frequency vibration isolator of the embodiment of the present invention；
Fig. 2 is the structural blast schematic diagram of a kind of two-freedom ultralow frequency vibration isolator of the embodiment of the present invention；
Fig. 3 is the air spring schematic diagram related in a kind of two-freedom ultralow frequency vibration isolator of the embodiment of the present invention；
Fig. 4 is the magnetic negative rigidity mechanism principle related in a kind of two-freedom ultralow frequency vibration isolator of the embodiment of the present invention
Figure；
Fig. 5 is the flat spring mechanism map related in a kind of two-freedom ultralow frequency vibration isolator of the embodiment of the present invention and orthogonal
Schematic diagram is installed；
Fig. 6 is the inverted pendulum simplified pinciple figure related in a kind of two-freedom ultralow frequency vibration isolator of the embodiment of the present invention；
Fig. 7 is the horizontal negative rigidity principle figure related in a kind of two-freedom ultralow frequency vibration isolator of the embodiment of the present invention；
Fig. 8 is a kind of two-freedom ultralow frequency vibration isolator passive vibration isolation transport analogous diagram of the embodiment of the present invention.
Detailed description of the invention
In order to make the purpose of the present invention, technical scheme and advantage clearer, below in conjunction with drawings and Examples, right
The present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, not
For limiting the present invention.As long as additionally, technical characteristic involved in each embodiment of invention described below that
The conflict of not constituting between this just can be mutually combined.
Fig. 1 is the structural representation of a kind of two-freedom ultralow frequency vibration isolator of the embodiment of the present invention, and Fig. 2 is that the present invention is real
Execute the structural blast schematic diagram of a kind of two-freedom ultralow frequency vibration isolator of example.As shown in Figure 1, 2, two-freedom superlow frequency vibration isolating
The structure of device consists of: basic platform 10 is connected with outside platform downwards by bolt, load support platform 30 upwards with needs
The equipment of vibration isolation connects；Three post uppers are connected with load platform by bolt, and lower end is connected with base；The air stood upside down
Spring 20 is centrally located, and top is connected with support platform, and bottom is connected with base；Two pack spring 211,212 folders in 90 °
Angle is arranged, upper end is connected with air spring 20 with by flexible hinge 231,232, and middle part is connected with support bar by foundary weight, under
Portion is connected with base；Flexible hinge 231,232 axially has greater stiffness, can be considered rigid body, with axially vertical direction
There is less bending stiffness, to meet job requirement；Magnetic negative rigidity mechanism 24 is stretched out beam and is connected with load platform 30, outside it
Framework and support bar, basic platform 10 is connected；Two-way bolt 221,222,223 is used for connecting load platform, will when forward connects
Load platform is fixed, it is simple to transport, during Opposite direction connection, can meet platform fine motion job requirement.
Fig. 3 is the air spring schematic diagram related in a kind of two-freedom ultralow frequency vibration isolator of the embodiment of the present invention.As
Shown in Fig. 3, air spring is made up of metallic cavity 201, diaphragm seal 202, base plate 203 and air chamber 204.Air spring stands upside down and puts
Putting, chamber is circular, leads to and the structure of lower ending opening in employing, and during use, metallic cavity 201 top is passed through with load platform 30
Flexible block connects, and bottom is connected with diaphragm seal 202, and base plate 203 connects diaphragm seal 202 and is fixed on basic platform 10.Base plate
Having passage on 203, be connected with air supply system, the gases at high pressure that air supply system produces enter chamber by pore, outside support
Portion's load, provides the positive rigidity of vertical direction simultaneously.
Assume the adiabatic process that gas-dynamic process is ideal gas in metallic cavity, according to equilibrium equation and stress
Relation can release the rigidity expression formula of air cavity 204:
Wherein PatmFor atmospheric pressure, for adiabatic coefficent, its value is about 1.402, for air chamber net sectional area, for static balance
The quality of load under state, for static balance air chamber initial volume, for acceleration of gravity.It can be seen that single-chamber air from formula
The rigidity of spring is relevant to load quality, air chamber sectional area and chamber volume.Can be filled with by Air Valve Control in the most actually used
The air pressure size of gas and the volume size of air spring air cavity 204, regulate different rigidity with adapt to different loads and
Service condition.
Fig. 4 is the magnetic negative rigidity mechanism principle related in a kind of two-freedom ultralow frequency vibration isolator of the embodiment of the present invention
Figure.As shown in Figure 4, magnetic negative rigidity mechanism 28 includes three blocks of Magnet, and wherein, upper magnet is fixed on described load platform, under
Portion's Magnet is fixed on described basic platform, and center magnet and upper and lower part Magnet are that captivation is arranged.In center magnet is positioned at
During heart position, upper lower magnet is equal to its active force, and it is in poised state, but works as its off-center position up or down
Time, its active force can be compeled away from equilbrium position by upper lower magnet, and when it deviates equilbrium position in the horizontal direction, on
Lower magnet can force a return to equilbrium position to its active force, so its in the vertical direction is provided that negative stiffness, level side
Positive rigidity is upwards provided, according to calculation of magnetic force, compared with negative rigidity mechanism based on magnetic repulsion, negative stiffness machine based on magnetic pull
Structure is provided that bigger negative stiffness value.In order to make full use of this magnetic negative stiffness characteristic, center magnet is needed to be only capable of in z direction
Do translational motion, and the motion in other directions is restrained, by the way of applying flexible hinge, retrain other of center magnet
The motion of five degree of freedom so that it is be only capable of doing translational motion in z direction.
Setting up magnetic force model according to line-charge model, releasing its magnetic negative stiffness expression formula is:
Wherein:
Uij=(-1)ja′-(-1)ia (4)
Vkl=(-1)lb′-(-1)kb (5)
Wpq=z+ (-1)qc′-(-1)pc (6)
Wherein, a, b, c are the length, width and height of upper and lower part Magnet, the length, width and height that a ', b ', c ' are center magnet, and J and J ' is magnetic
The magnetization intensity vector of ferrum.
The present invention uses six groups of magnetic negative rigidity mechanism, two adjacent groups magnet magnetization direction reversed arrangement, ignore each group it
Between influence each other, the rigidity of available magnetic negative rigidity mechanism is:
Fig. 5 is the flat spring mechanism map related in a kind of two-freedom ultralow frequency vibration isolator of the embodiment of the present invention and orthogonal
Schematic diagram is installed.In Fig. 5 (a), metal clips 2111 is in parallel by fixing device 2114 with metal clips 2113, and stiffness tuning fills
Put 2112 by sliding up and down the effective active length changing metal clips 2111,2113, thus change flat spring mechanism
Effectively work rigidity.In order to decoupling linear regulation system level is to rigidity, two panels spring mechanism 211,212 is in 90 ° orthogonal
Configuration, as shown in Figure 5 b, its Derivation of Mathematical Model process is as follows for its operation principle:
Two panels spring mechanism 211,212 is equivalent to spring in Fig. 5 (b), and in figure, A point is the application point of power, it is considered to general,
When the unit force F having any direction (θ is arbitrary value) acts on A point, flat spring mechanism produces quiet deformation in the direction of directed force F
Δ x to B point.Unit force F is at spring k1And k2On the Static Correction of discrete generation be respectively as follows:
Assuming that active force, the quiet deformation of generation is the least, and therefore ∠ CBD is approximately right angle, and total deflection Δ x is:
Rigidity k1And k2Identical, be k, then mechanism's global stiffness on θ direction is represented by:
When using two flat spring parallel connections, its rigidity is the twice of a flat spring rigidity, it may be assumed that
K=2ks (12)
In accurate vibration isolation system, vibration amplitude is generally at micron order, it is ensured that the correctness of above-mentioned hypothesis.It addition, by
In the arbitrariness of θ, therefore this mechanism rigidity in any direction all keeps consistent, for rigidity k.
According to the knowledge of the mechanics of materials, the adjustable rigidity flat spring 211,212 of free square-section, one end is fixed in one end
Bending stiffness is represented by:
ks=3EI/L (13)
Wherein, E is the elastic modelling quantity of flat spring material, and I is bending resistant section the moment of inertia, and L is the effective bending length of flat spring.
From rigidity formula, rigidity size is inversely proportional to effective bending length, can be changed by effective bending length of tab spring
Become its rigidity size, thus realize the level regulation to rigidity.
Fig. 6 is the inverted pendulum simplified pinciple figure related in a kind of two-freedom ultralow frequency vibration isolator of the embodiment of the present invention.
As shown in Figure 6, inverted pendulum negative stiffness is to utilize Euler column spring principle to realize negative stiffness characteristics, and it is negative just that it is usually used in horizontal direction
Degree vibration isolation unit, can obtain the expression formula of its rigidity according to the Analysis of materials mechanics under micro-disturbance:
K=12EI/l3-mg/l (14)
From formula (14), its rigidity expression formula is made up of positive rigidity and negative stiffness, only exceedes certain when load quality
During numerical value, this inverted pendulum just has negative stiffness characteristics, otherwise it is positive rigidity mechanism, in actual applications, and can be by closing
Select fork parameter and the load quality of reason realize level to extremely low natural frequency, but due to the restriction of self, generally hold
Load power, all without very big, limits its scope of application.When perturbation action is in load, load can deviate original unstable shape
State, produces horizontal direction displacement x, now needs to apply counteracting force and makes it keep balance, and its expression formula is:
According to the definition of rigidity, the level of inverted pendulum to the expression formula of rigidity is:
Owing to being micro-disturbance, the expression formula of its rigidity after carrying out simplification process, can be drawn:
K=-mg/l (17)
From expression formula it can be seen that the inverted pendulum of this constraint presents negative stiffness characteristics all the time, need in actual use
Use with positive Stiffness, and can realize different size of negative firm by changing different inverted pendulum length and load quality
Degree characteristic.
Fig. 7 is the horizontal negative rigidity principle figure related in a kind of two-freedom ultralow frequency vibration isolator of the embodiment of the present invention.
As it is shown in fig. 7, inverted air spring can be equivalent to inverted pendulum mechanism, positive rigidity and the level of vertical direction can be provided simultaneously
The negative stiffness in direction.
In the present invention, the global stiffness of vibration isolator horizontal direction is:
The global stiffness of vertical direction is:
Compared with tradition driven member, passive vibration isolation element upright direction of the present invention is that air spring is born with magnetic
Rigidity mechanism is in parallel, and horizontal direction is that flat spring mechanism is in parallel with inverted pendulum mechanism, and its rigidity value is far below tradition driven member,
The natural frequency of system can be substantially reduced.
Fig. 8 is a kind of two-freedom ultralow frequency vibration isolator passive vibration isolation transport analogous diagram of the embodiment of the present invention.From figure
Middle solid line can be seen that the natural frequency of common tradition vibration isolator is higher, and the amplitude of formant is bigger.When using present configuration
After, from dotted line it can be seen that its transport has part to decay at low-frequency resonance peak, the most substantially move forward with natural frequency,
The visible present invention can make the vibration isolation capability of passive vibration isolation device be improved.
As it will be easily appreciated by one skilled in the art that and the foregoing is only presently preferred embodiments of the present invention, not in order to
Limit the present invention, all any amendment, equivalent and improvement etc. made within the spirit and principles in the present invention, all should comprise
Within protection scope of the present invention.
Claims (9)
1. a two-freedom ultralow frequency vibration isolator, it includes basic platform (10) and load platform (30), described basic platform
(10) being connected with outside platform, described load platform (30) is connected with the equipment needing vibration isolation, and basic platform (10) is flat with load
Platform (30) is connected by support bar, it is characterised in that:
This vibration isolator also includes air spring (20) and the negative stiffness adjustable magnetic negative rigidity mechanism (28) of positive rigidity, and it is arranged on
On the central axis of described basic platform and load platform, upper end is connected with described load platform (30), lower end and described basis
Platform (10) connects, wherein, described air spring for regulating different rigidity to adapt to different loads, described magnetic negative stiffness
Mechanism forms parallel institution with described air spring, thus drops the natural frequency of described axis direction；And
The positive and negative Stiffness mechanism formed by the inverted pendulum of the adjustable positive rigidity flat spring of rigidity and negative stiffness, it is arranged in institute
Stating air spring and the outside of magnetic negative rigidity mechanism, upper end is connected with described load platform (30), lower end and described basic platform
(10) connect, thus reduce the natural frequency in the direction with described central axis upright, it is achieved two-freedom vibration isolation.
A kind of two-freedom ultralow frequency vibration isolator the most according to claim 1, it is characterised in that: described flat spring is two
Individual, respectively first spring (21a) and the second flat spring (21b), first spring (21a) and the second flat spring (21b) point
The first flexible hinge (23a) and the second flexible hinge (23b) the positive and negative Stiffness of formation Tong Guo be connected with described air spring
Mechanism, thus reduce the natural frequency in the direction with described central axis upright.
A kind of two-freedom ultralow frequency vibration isolator the most according to claim 2, it is characterised in that: described first spring
(21a) He the second flat spring (21b) composition the most in 90 ° parallel institution.
4. according to a kind of two-freedom ultralow frequency vibration isolator according to any one of claim 1-3, it is characterised in that: described sky
Air spring (20) is made up of metallic cavity (201), diaphragm seal (202), base plate (203) and air chamber (204), wherein, and base plate (203)
Being fixed on described basic platform (10), described base plate (203) is connected, with shape by diaphragm seal (202) with metallic cavity (201)
Become air cavity (204).
5. according to a kind of two-freedom ultralow frequency vibration isolator according to any one of claim 1-4, it is characterised in that: described sky
Air spring (20) also includes air valve, for controlling air pressure size and the volume size of described air cavity (204) of insufflation gas, thus
The rigidity of regulation air spring is to adapt to no load.
6. according to a kind of two-freedom ultralow frequency vibration isolator according to any one of claim 1-5, it is characterised in that: described magnetic
Negative stiffness unit (28) includes three blocks of Magnet, and wherein, upper magnet is fixed on described load platform (30), and lower magnet is fixed
On described basic platform (10), center magnet and upper and lower part Magnet are that captivation is arranged.
A kind of two-freedom ultralow frequency vibration isolator the most according to claim 6, it is characterised in that: execute on described center magnet
Add flexible hinge, retrain the motion of other five direction degree of freedom so that it is be only capable of doing translational motion at vertical direction.
8. according to a kind of two-freedom ultralow frequency vibration isolator according to any one of claim 1-6, it is characterised in that: described
Spring also includes that the first metal clips (2111), the second metal clips (2113), stiffness tuning mechanism (2112) and shell fragment are fixed
Device (2114), wherein, described first metal clips (2111) and the second metal clips (2113) are arranged on shell fragment fixing device
(2114), on, stiffness tuning mechanism (2112) is for changing described first metal clips (2111) and second by sliding up and down
The bending length that effectively works of metal clips (2113), thus change the first metal clips (2111), the second metal clips
(2113) the rigidity that effectively works, and then change flat spring (21a) and the rigidity of (21b).
9. according to a kind of two-freedom ultralow frequency vibration isolator according to any one of claim 1-6, it is characterised in that: described fall
Vertical pendulum is inverted air spring (20).
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