CN106298721B - 一种键合金丝及其制备方法 - Google Patents
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 title claims abstract description 92
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- 238000007670 refining Methods 0.000 claims abstract description 37
- 238000000137 annealing Methods 0.000 claims abstract description 19
- 229910052737 gold Inorganic materials 0.000 claims abstract description 19
- 239000010931 gold Substances 0.000 claims abstract description 19
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims abstract description 18
- 238000000034 method Methods 0.000 claims abstract description 14
- 239000000203 mixture Substances 0.000 claims abstract description 14
- 229910052761 rare earth metal Inorganic materials 0.000 claims abstract description 12
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- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims abstract description 9
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims abstract description 9
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 238000005272 metallurgy Methods 0.000 claims description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 3
- 239000012459 cleaning agent Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims description 3
- 229910003460 diamond Inorganic materials 0.000 claims description 3
- 239000010432 diamond Substances 0.000 claims description 3
- 230000005674 electromagnetic induction Effects 0.000 claims description 3
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- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
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- H01L24/42—Wire connectors; Manufacturing methods related thereto
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Abstract
本发明公开了一种键合金丝及其制备方法,其中,键合金丝的成分为(质量百分数)金99.99%以上,银0.0010‑0.0020%,铁0.0001‑0.0010%,铅0.0005‑0.0015%,镁0.0001‑0.0010%,铜0.00010‑0.0020%,硅0‑0.0010%,稀土元素0.0003‑0.0008%,制备方法主要包括一次精炼、二次精炼、连铸、拉丝、清洗、退火、绕线、包装,在优化成分的基础上,进一步添加了稀土元素,同时,结合工艺参数的优化,提高了超细键合金丝的强度,如延伸率和断裂负荷,大幅度缩短热影响区的长度,有效降低弧度,提高键合金丝的使用寿命,拓宽键合金丝的使用范围。
Description
技术领域
本发明涉及键合金丝的加工技术领域,特别涉及一种键合金丝及其制备方法。
背景技术
键合丝是半导体中的重要配件,常作为微电子封装用内引线,是集成电路和半导体部件的重要基础材料,实际生产过程中,键合金丝主要分为JC2、JC3、JE1和JE2几个类型,它们具有不同的化学成分、电气性能以及力学性能等。近年来,随着市场的多元化和技术的进步革新,尤其是应用领域对产品质量要求的不断严格,使得以往生产的键合金丝在电气性能和力学性能方面逐渐无法满足市场需求和技术进步要求;另外,随着半导体原件的进一步小型化和集成化,键合金丝的直径细化、强度提高成为了新的要求;此外,短热影响区、低弧度也是技术发展的必然方向。
在工业生产过程中,成分优化和工艺调整是实现键合金丝超细化、高强度、短热影响区、低弧度的主要技术手段。
发明内容
本发明所要解决的技术问题,是克服以上现有技术中存在的不足,以及根据技术发展方向而前瞻性地推动技术进步,提供一种键合金丝及其制备方法。
为解决上述技术问题,本发明所采用的技术方案为:一种键合金丝,其特征在于,键合金丝的成分为(质量百分比):金99.99%以上,银0.0010-0.0020%,铁0.0001-0.0010%,铅0.0005-0.0015%,镁0.0001-0.0010%,铜0.00010-0.0020%,硅0-0.0010%,稀土元素0.0030-0.0080%。
进一步的,上述键合金丝的直径为18-38微米,电阻为0.30-1.09欧姆,线长2.0mm的键合金丝的熔断电流为0.45-0.88安培,线长4.0mm的键合金丝的熔断电流为0.35-0.76安培,线长6.0mm的键合金丝的熔断电流为0.33-0.66安培,热影响区为16-75微米,低弧能力为80-85微米。
进一步的,上述键合金丝,在直径分别为18微米、20微米、23微米、25微米、30微米以及38微米时,键合金丝的重量分别为4.35-5.45 mg/m、5.50-6.70 mg/m、7.35-8.75 mg/m、8.75-10.25 mg/m、12.75-14.75mg/m、20.75-23.10mg/m,延伸率分别为5.0-6.0%、6.5-8.0%、8.4-9.0%、9.5-10.0%、10.8-8.0%、11.0-12.0%,断裂负荷分别为8-10 cN、9-11 cN、10-13 cN、12-15 cN、17-20 cN、25-30 cN。
本发明还提供一种制备上述权利要求中所述键合金丝的方法,其特征在于采用以下工艺步骤:1)一次精炼,将块状金原料投入到高频电磁感应炉中进行一次精炼,得到一次精炼金熔体;2)二次精炼,将一次精炼金熔体和中间合金同时加入连铸炉,并在1180℃的超高温下进行二次精炼,得到成分和温度均匀的二次精炼金熔体,其中,上述中间合金,可根据需要选择添加不同成分的中间合金,也可以根据需要不加;3)连铸,采用连铸设备,对二次精炼金熔体进行连续铸造,得到直径为8.0mm的棒坯;4)拉丝,采用拉丝机和钻石拉伸模对棒坯依次进行粗拉—中拉—细拉—终拉,得到所需直径的键合金丝;5)清洗,采用超声波清洗技术,以无水乙醇为清洗剂,对键合金丝进行清洗;6)退火,对清洗后的键合金丝进行退火处理,以释放键合金丝在拉丝过程中产生的应力;7)绕线;8)成品检测,采用专用显微镜,检测产品的表面质量,确保表面光洁、无损伤、无指印;9)包装,将键合金丝放入包装盒内,抽真空,充入氮气保护性气体,完成包装并密封处理。
进一步地,上述键合金丝的制备方法中,一次精炼过程中采用氩气保护性气体,精炼温度1000-1200℃,精炼时间30-80分钟。
进一步地,上述键合金丝的制备方法中,二次精炼过程中采用氩气保护性气体,精炼时间30-90分钟,充分利用炉体本身的涡流,配合专用机械自动搅拌装置对熔体进行搅拌,搅拌10-15次,然后静置25-30分钟。
进一步地,上述键合金丝的制备方法中,所述的连续铸造的速度为10-15cm/分钟。
进一步地,上述键合金丝的制备方法中,所述的拉丝过程中,其中,粗拉时目标直径为800-1000微米,粗拉速度为10-15m/分钟,中拉时目标直径为300-500微米,中拉速度为100-120m/分钟,细拉时目标直径为80-150微米,细拉速度为250-350m/分钟,终拉时拉至键合金丝的最终直径,误差在1微米内,终拉速度为400-550m/分钟。
进一步地,上述键合金丝的制备方法中,所述的退火采用惰性气体保护气氛,退火温度为400-450℃,退火处理时间为1.0-2.5s,退火张力为2.0-2.5cN。
进一步地,上述键合金丝的制备方法中,所述的绕线采用专用绕线机,将键合金丝绕制在直径3-5cm的线轴上,绕线速度为60-80m/分钟,线间距为5mm,分卷长度为100-800m。
本发明提供的键合金丝,在优化成分的基础上,进一步添加了稀土元素,同时,结合工艺参数的优化,提高了超细键合金丝的强度,如延伸率和断裂负荷,同时,大幅度缩短了热影响区的长度,有效降低了弧度。
具体实施方式
下面结合具体实施例对本发明作进一步详细的说明。
实施例1
键合金丝的成分为(质量百分比):金99.9974%,银0.0010%,铁0.0001%,铅0.0005%,镁0.0001%,铜0.00010%,稀土元素0.0080%。制备工艺步骤为:1)一次精炼,将块状金原料投入到高频电磁感应炉中进行一次精炼,精炼过程中采用氩气保护性气体,精炼温度1200℃,精炼时间80分钟,得到一次精炼金熔体;2)二次精炼,将一次精炼金熔体和中间合金同时加入连铸炉,并在1180℃的超高温下进行二次精炼,精炼过程中采用氩气保护性气体,精炼时间90分钟,充分利用炉体本身的涡流,配合专用机械自动搅拌装置对熔体进行搅拌,搅拌15次,然后静置30分钟,得到成分和温度均匀的二次精炼金熔体,其中,上述中间合金中包含稀土元素Eu和银;3)连铸,采用连铸设备,对二次精炼金熔体进行连续铸造,连续铸造的速度为10cm/分钟,得到直径为8.0mm的棒坯;4)拉丝,采用拉丝机和钻石拉伸模对棒坯依次进行粗拉—中拉—细拉—终拉,得到不同直径的键合金丝,其中,粗拉时目标直径为800微米,粗拉速度为10m/分钟,中拉时目标直径为400微米,中拉速度为100m/分钟,细拉时目标直径为100微米,细拉速度为250m/分钟,终拉时目标直径为20微米,误差在1微米内,终拉速度为400m/分钟;5)清洗,采用超声波清洗技术,以无水乙醇为清洗剂,对拉丝后的键合金丝进行清洗;6)退火,对清洗后的键合金丝进行退火处理,以释放键合金丝在拉丝过程中产生的应力,退火采用氩气作为保护气体,退火温度为450℃,退火处理时间为2.0s,退火张力为2.0cN;7)绕线,采用专用绕线机,将键合金丝绕制在直径5cm的线轴上,绕线速度为60m/分钟,线间距为5mm,分卷长度为400m;8)成品检测,采用专用显微镜,检测产品的表面质量,确保表面光洁、无损伤、无指印;9)包装,将键合金丝放入包装盒内,抽真空,充入氮气保护性气体,完成包装并密封处理。
实施例2
一种键合金丝,键合金丝的成分为(质量百分比):金99.9930%,银0.0020%,铁0.0010%,铅0.0015%,镁0.0010%,铜0.00020%,硅0.0010%,稀土元素0.0003%。
制备方法参照实施例1。
实施例3
一种键合金丝,键合金丝的成分为(质量百分比):金99.9935%以上,银0.0015%,铁0.00050%,铅0.0010%,镁0.0005%,铜0.0020%,硅0.0005%,稀土元素0.0005%。
制备方法参照实施例1。
实施例4
一种键合金丝,键合金丝的成分为(质量百分比):金99.9965%,银0.0013%,铁0.0004%,铅0.0007%,镁0.0003%,铜0.0002%,硅0.0002%,稀土元素0.0004%。
制备方法参照实施例1。
将实施例1~4最终得到的键合金丝的性能参数与常规键合金丝的性能参数比较列于表1。
表1 直径20微米的键合金丝性能参数比较
由上可知,本技术方案制成的键合金丝的性能优于常规的键合金丝。
以上所述的仅是本发明的一个实施方式,对于本领域的普通技术人员来说,在不脱离本发明创造构思的前提下,还可以做出若干变形和改进,这些都属于本发明的保护范围。
Claims (10)
1.一种键合金丝,其特征在于,键合金丝的成分的质量百分比为:金99.9930%,银0.0020%,铁0.0010%,铅0.0015%,镁0.0010%,铜0.00020%,硅0.0010%,稀土元素0.0003%;或者金99.9935%以上,银0.0015%,铁0.00050%,铅0.0010%,镁0.0005%,铜0.0020%,硅0.0005%,稀土元素0.0005%;或者金99.9965%,银0.0013%,铁0.0004%,铅0.0007%,镁0.0003%,铜0.0002%,硅0.0002%,稀土元素0.0004%。
2.根据权利要求1所述的键合金丝,其特征在于,键合金丝的直径为18-38微米,电阻为0.30-1.09欧姆,线长2.0mm的键合金丝的熔断电流为0.45-0.88安培,线长4.0mm的键合金丝的熔断电流为0.35-0.76安培,线长6.0mm的键合金丝的熔断电流为0.33-0.66安培,热影响区为16-75微米,低弧能力为80-85微米。
3.根据权利要求1所述的键合金丝,其特征在于,直径为18微米、20微米、23微米、25微米、30微米以及38微米的键合金丝的重量分别为4.35-5.45 mg/m、5.50-6.70 mg/m、7.35-8.75 mg/m、8.75-10.25 mg/m、12.75-14.75mg/m、20.75-23.10mg/m,延伸率分别为5.0-6.0%、6.5-8.0%、8.4-9.0%、9.5-10.0%、10.8-8.0%、11.0-12.0%,断裂负荷分别为8-10 cN、9-11 cN、10-13 cN、12-15 cN、17-20 cN、25-30 cN。
4.一种如权利要求1-3任一项所述的键合金丝的制备方法,其特征在于采用以下工艺步骤:
1)一次精炼,将块状金原料投入到高频电磁感应炉中进行一次精炼,得到一次精炼金熔体;
2)二次精炼,将一次精炼金熔体和中间合金同时加入连铸炉,并在1180℃的超高温下进行二次精炼,得到成分和温度均匀的二次精炼金熔体,其中,上述中间合金,可根据需要选择添加不同成分的中间合金,也可以根据需要不加;
3)连铸,采用连铸设备,对二次精炼金熔体进行连续铸造,得到直径为8.0mm的棒坯;
4)拉丝,采用拉丝机和钻石拉伸模对棒坯依次进行粗拉—中拉—细拉—终拉,得到所需直径的键合金丝;
5)清洗,采用超声波清洗技术,以无水乙醇为清洗剂,对键合金丝进行清洗;
6)退火,对清洗后的键合金丝进行退火处理,以释放键合金丝在拉丝过程中产生的应力;
7)绕线;
8)成品检测,采用专用显微镜,检测产品的表面质量,确保表面光洁、无损伤、无指印;
9)包装,将键合金丝放入包装盒内,抽真空,充入氮气保护性气体,完成包装并密封处理。
5.根据权利要求4所述的键合金丝的制备方法,其特征在于,所述的一次精炼,在精炼过程中采用氩气保护性气体,精炼温度1000-1200℃,精炼时间30-80分钟。
6.根据权利要求4所述的键合金丝的制备方法,其特征在于,所述的二次精炼,在精炼过程中采用氩气保护性气体,精炼时间30-90分钟,充分利用炉体本身的涡流,配合专用机械自动搅拌装置对熔体进行搅拌,搅拌10-15次,然后静置25-30分钟。
7.根据权利要求4所述的键合金丝的制备方法,其特征在于,所述的连续铸造的速度为10-15cm/分钟。
8.根据权利要求4所述的键合金丝的制备方法,其特征在于,所述的拉丝,其中,粗拉目标直径为800-1000微米,粗拉速度为10-15m/分钟,中拉目标直径为300-500微米,中拉速度为100-120m/分钟,细拉目标直径为80-150微米,细拉速度为250-350m/分钟,终拉拉至键合金丝的最终直径,误差在1微米内,终拉速度为400-550m/分钟。
9.根据权利要求4所述的键合金丝的制备方法,其特征在于,所述的退火采用惰性气体保护气氛,退火温度为400-450℃,退火处理时间为1.0-2.5s,退火张力为2.0-2.5cN。
10.根据权利要求4所述的键合金丝的制备方法,其特征在于,所述的绕线采用专用绕线机,将键合金丝绕制在直径3-5cm的线轴上,绕线速度为60-80m/分钟,线间距为5mm,分卷长度为100-800m。
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Denomination of invention: Gold bonding wire and preparation method thereof Effective date of registration: 20190416 Granted publication date: 20170728 Pledgee: Guangzhou Caold financing Company limited by guarantee Pledgor: Guangzhou JB Electronic Technology Co., Ltd. Registration number: 2019440000157 |