CN106289055B - Gauge in optical profile type - Google Patents

Abstract

In the inner peripheral surface or deep hole internal diameter for so that probe is entered measured object, observe for the light three-dimensional reflected by inner face to be taken into and the optical profile type of measurement accuracy in gauge, be able to carry out the measurement of higher precision.Having the optical fiber being built in pipe, configuration in the light chopper mechanism of the front end side of the optical fiber and the construction for the motor for driving light chopper mechanism rotation, there is the mechanism of the vibratory output of the rotation axle portion of measurement motor.By the shape data for calculating the inner peripheral surface for the checked property that the reflected light from checked property obtains by computer with the amendment of the displacement data of displacement measurement mechanism, the vibration or whirling vibration bring measurement error for eliminating the rotary shaft of motor, are able to carry out high-precision measurement.

Description

Gauge in optical profile type

Technical field

The present invention relates to enter probe in the inner peripheral surface or deep hole internal diameter of checked object object and to inner face or deep hole bottom Reflected light is three-dimensionally taken into and observes and be used for measure size and the optical profile type inner face of geometry precision by face ray Measuring device.

Background technique

Such as the cylinder of automobile engine complete the process size and the quality of geometry precision significantly contributes to vapour The power performance and fuel consumption efficiency of vehicle, but their inspection usually with used roundness measuring machine, surface roughness meter, The contact type measurement machine of the horizontal metroscope of linear scale etc. checks.But in recent years, for the purpose for not injuring measured object, There is the non-contact measurement machine of optical profile type.

There are undamaged means as non-contactly observation measured object inner face, diagnostic imaging technology (light imaging technique) is The technology being widely used in the scene of device for mechanical, medical treatment etc., such as in the manufacture scene of precision equipment etc., as depth The method of the inspection and diagnostic imaging of the inner part in hole is also irradiated using other than the common camera by endoscope is observed Light and the method for capturing reflected light with optical sensor, the state of uneven lustre being judged with computer and is automaticly inspected.

On the other hand, in the field of medical treatment, in the observation of the affected part of inside of human body, with research, utilization can be seen Examining X ray CT, nuclear magnetic resonance, the interference capability using light and the OCT image by endoscope of faultage image, (interference of light tomography is taken the photograph Shadow) etc. mode.

Being used as the near infrared light of light source in the field of medical treatment in the material of the deep hole inner peripheral surface of measured object is gold It is reflected in the case where belonging to class, in the case where there is resin involucra layer on metallic inside face, the semi-permeable resin of near infrared light, so It observes with the 3D shape of inner peripheral surface meanwhile, it is capable to carry out the measurement of the thickness and precision of epithelium resin or the pin hole in resin face simultaneously Observation.

The skill of observation or the measurement of inner peripheral surface is carried out using the inner peripheral surface irradiation light to mechanical device or machine components The representative construction of the observation device of art is such as shown in patent document 1 to 3.

In the optical profile type endoscope probe shown in patent document 1, motor shaft (5) shown in FIG. 1 in the publication Reflectance coating (14) are set on one end, by light to complete cycle direction rotary emission.But in this configuration, due to the electricity of motor (1) Line or wiring substrate (22), (23) block the light of rotary emission, so the radiation without 360 degree of complete cycles, generation cannot It is taken into the part of image data.

In addition, as shown in the 1st figure in the document, being located at soft in the inner diameter shape measurement sensor shown in patent document 2 The hollow motor (26) for managing the front end side of (29) rotates reflecting mirror (20) and ray.In addition, 4 strains shown in Fig. 4 The length dimension (diameter) for counting the direction XY of the internal diameter of (5) measurement measured object will by the indefinite amendment of optical measured value The geomery of inner peripheral surface correctly carries out picture and shows.

But the inner diameter shape geometry precision of usual measured object is required the high-precision of 0.05 μm (micron) left and right, But in this configuration, if hollow motor (26) high speed rotation, occurs more inner diameter shape measurement sensor in rotary shaft More than required precision vibration (Run Out) or non-reproduction vibration (Non Repeatable Run Out), so adopting With distortion or noise in the cross sectional shape data of the inner peripheral surface of the measured object of collection, true measured value cannot be obtained.

In addition, spirally scan light beam in pipe in shape inspection apparatus in the pipe documented by patent document 3, Non-contactly by the internal diameter of pipe and as three-dimensional shape data is taken into and is shown as shown in Figure 10 in the document.

But the mechanism for radiating Beam rotation is indicated in the publication, if the rotation motor high speed rotation of radiation beam, Vibration or non-reproduction vibration then occur in rotary shaft, is mixed in the cross sectional shape data of the inner peripheral surface of collected measured object Enter noise or be distorted in data, true measured value cannot be obtained.

Patent document 1: No. 4461216 bulletins of Japanese Patent Publication No.

Patent document 2: Japanese Patent Publication 4-55504 bulletin

Patent document 3: Japanese Unexamined Patent Publication 5-180627 bulletin

Summary of the invention

The present invention is made in view of above-mentioned previous situation, and project is point as shown below.That is, making measurement spy Head enters the inner peripheral surface of measured object or the inner circumferential of deep hole internal diameter or longer curved pipe and rotates to inner face or deep hole bottom surface The light three-dimensional of reflection is collected and carries out computer disposal and observe 3 d image data by ray, and carries out ruler Very little measurement and measurement geometry precision.In turn, a kind of rotation by removing from former data to inner peripheral surface rotary emission is provided The vibration of axis or rotating part or it is non-reproduce vibrate caused by image data distortion or vibration noise, be able to carry out it is correct and accurate Internal diameter and inner peripheral surface precision measure optical profile type in gauge.

As the technical solution for being used to solve the above problems, interferometric optical method optical interferometry, spectral interference method are being used Deng) in the optical profile type of the observation and the measurement that carry out checked object object in gauge, have: optical fiber is built in pipe；At least 1 light chopper mechanism is configured in the front end side of optical fiber；Motor rotates one or both of optical fiber and light chopper mechanism Driving；And displacement detecting mechanism, measure the vibratory output of the rotation axle portion of motor.With this configuration, with vibration detection mechanism Displacement data amendment is calculated out of, checked property is obtained by the reflected light that optical fiber imports checked object object with computer The shape data of circumferential surface.

According to the present invention, by the vibration of the rotary shaft of the motor of rotary emission light or non-reproduction vibration to the original being collected into The distortion of image data bring image or vibration remove, and are able to carry out the correct and three dimensional viewing of accurate inner peripheral surface and interior Measurement under the high-precision of diameter and inner peripheral surface.

Detailed description of the invention

Fig. 1 is the figure of gauge in the optical profile type of the 1st embodiment for the present invention.

Fig. 2 is the inner diameter shape perspective view of the measured object of gauge in the optical profile type.

Fig. 3 is the surface roughness explanatory diagram of gauge in the optical profile type.

Fig. 4 is the geometric accuracy explanatory diagram of gauge in the optical profile type.

Fig. 5 is the probe portion structure chart of gauge in the optical profile type.

Fig. 6 is the probe portion sectional view of gauge in the optical profile type.

Fig. 7 is the scanning range explanatory diagram of gauge in the optical profile type.

Fig. 8 is the surface roughness modification method explanatory diagram of gauge in the optical profile type.

Fig. 9 is the roundness modification method explanatory diagram of gauge in the optical profile type.

Figure 10 is the angle spacing modification method explanatory diagram of gauge in the optical profile type.

Figure 11 is the hydrodynamic bearing sectional view of gauge in the optical profile type.

Figure 12 is the probe portion sectional view of gauge in the optical profile type of the 2nd embodiment for the present invention.

Figure 13 is the 3-D scanning method explanatory diagram of gauge in the optical profile type.

Figure 14 is the scanning angle explanatory diagram of gauge in the optical profile type.

Figure 15 is the scanning angle explanatory diagram of gauge in the optical profile type.

Figure 16 is the 3-D scanning range specification figure of gauge in the optical profile type.

Figure 17 is the probe portion sectional view of gauge in the optical profile type of the 3rd embodiment for the present invention.

Figure 18 is the 3-D scanning range specification figure of gauge in the optical profile type.

Figure 19 is the sectional view of gauge in the optical profile type of the 1st embodiment for the present invention.

Figure 20 is the sectional view of gauge in the optical profile type.

Specific embodiment

Planar survey in the optical profile type of observation and the measurement for carrying out checked object object using interferometric optical method of present embodiment 1st feature of device is that have: optical fiber is built in pipe；At least one light chopper mechanism is configured in the front end side of optical fiber； Motor makes one or both of optical fiber and light chopper mechanism rotation driving；And displacement detecting mechanism, measure the rotation of motor The vibratory output of axle portion.

With this configuration, since the displacement data for being able to use vibration detection mechanism will be along with the vibration of rotating part Measurement error amendment, so being able to carry out the observation and measurement under high-precision.

As the 2nd feature, make rotation of the displacement detecting mechanism for measuring the vibratory output of the rotation axle portion of motor to motor is placed in The outer peripheral surface of shaft is at least configured with 1 vibration detecting sensor.

With this configuration, the data that the vibratory output of rotation axle portion is collected by vibration detecting sensor are able to carry out waveform The amendment of data is able to carry out the precision measure of correct and accurate internal diameter and inner peripheral surface.

As the 3rd feature, obtained based on being calculated by computer by the reflected light from checked object object that optical fiber obtains To checked property the shape data of inner peripheral surface and the displacement data of displacement detecting mechanism be modified.

According to this structure, from original waveform data remove by rotation axle portion vibration or shake occur image distortion or Vibration, is able to carry out the precision measure of more accurate and accurate internal diameter and inner peripheral surface.

As the 4th feature, the reference figure data of the inner circumferential of displacement detecting mechanism detection pipe and in the rotation of rotary shaft The difference of the measurement data of obtained pipe inner peripheral surface or outer peripheral surface is as vibratory output.

With this configuration, the shape data that can be removed from the Wave data being collected into the inner peripheral surface of checked property is brought Image distortion or vibration, carry out the precision measure of correct and accurate internal diameter and inner peripheral surface.

As the 5th feature, the bearing for supporting the rotary shaft of motor is made of the hydrodynamic bearing with dynamic pressure groove.

According to this structure, since the vibratory output of the rotary shaft of motor, particularly non-reproduction vibration are reduced, the vibration of rotary shaft Distortion or vibration to shape data bring image are reduced, so the precision for being able to carry out more accurate internal diameter and inner peripheral surface is surveyed Amount.

As the 6th feature, make the rotation axle portion hollow shape of motor；Light chopper mechanism is configured to and rotary shaft Portion rotates integrally；Optical fiber use by with rotation axle portion relative rotation freely in a manner of insert rotation drive shaft hollow hole in Construction.

According to this structure, due to being the front end side in the optical fiber being built in pipe and being near light chopper mechanism The form of rotary driving source is configured, so the vibratory output of rotary shaft is especially that non-reproduction vibration is reduced, the vibration of rotary shaft is to shape The distortion and vibration of shape data bring image are reduced, so being able to carry out the precision measure of more accurate internal diameter and inner peripheral surface.

As the 7th feature, motor has the 1st motor and configuration in the 2nd motor of the rear side of the 1st motor；Become as optical path It changes planes structure, has by the 1st light chopper mechanism of the 1st motor action and by the 2nd light chopper mechanism of the 2nd motor action. Also, optical fiber non-rotatably configured by the rear side in the 2nd motor via setting tool fixation optical fiber in pipe and with The rotation optical fiber that the rotation axle portion of 1st motor or the 2nd motor rotates integrally is constituted.Also, the rotation of the 1st motor and the 2nd motor Shaft is in hollow shape respectively.Also, rotate rotary shaft of at least part insert in the 1st motor of the front end side of optical fiber In the hollow hole in portion, and at least part of rear side is fixed in the hollow hole of the rotation axle portion of the 2nd motor.Also, the 1st Light chopper mechanism is configured to rotate integrally with the rotation axle portion of the 1st motor in the front end side of the 2nd light chopper mechanism；The 2 light chopper mechanisms equipment is in the front end of rotation optical fiber.

According to this structure, due to electricity in the range of dimensionally ray is scanned there is no the 1st and the 2nd motor Line is able to carry out the high-precision measurement for not having missing in collecting data so shade does not occur in light.

As the 8th feature, it rotate the 1st light chopper mechanism in structure shown in the 7th feature can anti- Penetrate mirror or prism.

According to this structure, reflection efficiency is higher, can reduce optical loss and carry out high-precision precision measure.

As the 9th feature, there is the 2nd light chopper mechanism in structure shown in the 7th feature in front end and incline The prism of oblique general plane.

According to this structure, the light-gathering of light is higher, can reduce optical loss and carry out high-precision precision measure.

As the 10th feature, make the rotation axle portion hollow shape of motor；In the hollow hole of rotary shaft, relative to the rotation Shaft relative rotation inserts optical fiber freely.Also, motor has the hollow sliding axle portion extended rearward；Having will Slide linear motion actuator of the axle portion as output shaft.Also, optical fiber is fixed in the hollow hole of sliding axle portion.In the structure In making, while the output shaft push-pull optical fiber of linear motion actuator, make near light chopper mechanism, motor and front end side Optical fiber slides in the axial direction.

According to this structure, it by the movement of motor and linear motion motor dimensionally ray, can dimensionally receive Collect shape data, since the electric wire of the 1st and linear motion motor being not present in the range of ray scans, so in light Shade does not occur in line, is able to carry out the high-precision measurement for not having missing in collecting data.

Then, referring to attached drawing, the preferred embodiment of the present invention will be described.

[embodiment 1]

1st embodiment of gauge in optical profile type for the present invention is illustrated.

Fig. 1~Figure 10 indicates the embodiment of gauge in optical profile type for the present invention.

Fig. 1 is gauge in the optical profile type of the 1st embodiment for the present invention.Bracket is fixed on pedestal 80 81, sliding block 82 is moved up and down by sliding block with motor 83 and probe 28 together.Measured object 61 is arranged on pedestal 80, is visited First 28,58 in and out of measured object 61 shown in Fig. 2 deep hole 61a.The light in probe 28,59 is injected into pipe 6, then Across measuring machine main body 85 interconnecting piece 84 and into inject interfere analysis unit 88, parsed by computer 89, on monitor 90 show Diagram picture.

Gauge has the function of multiple such as 8 kinds in the optical profile type, they are as described below.

(A) carries out the function and burr, scar etc. of the display of the 3D shape of the inner face of deep hole 61a shown in Fig. 2 Visual examination function

(B) in the case where the inner peripheral surface to deep hole 61a implements the surface epithelium 61b of resin etc., the leather film thickness It measures and pin hole is bad and undesirable audit function occurs for protrusion

(C) surface finish measurement function shown in Fig. 3

Diameter measurement function shown in (1) of (D) Fig. 4

Roundness shown in (2) of (E) Fig. 4 measures function

The roundness measurement data of (2) of Fig. 4 is continuously carried out data collection in the longitudinal direction, dimensionally shown by (F) Cylindricity measurement function obtained from showing

The height of concave convex of inner peripheral surface shown in (3) of (G) Fig. 4 measures function

Angle distance measurement function shown in (4) of (H) Fig. 4

Fig. 5 is the structure chart of the probe portion 28 of gauge in the optical profile type of the 1st embodiment for the present invention.? In the inside of pipe 6, has and front end side and rear side are connected and fixed to the optical fiber 1 on optical fiber setting tool 4, in its front end side It is provided integrally with the collector lens 24 such as sphere lens, is had substantially coaxially near the front end of fixed optical fiber 1 Motor 12 with hollow rotating shaft 10.

Relative rotation penetrates through freely in hollow rotating shaft 10 fixes optical fiber 1, in the extension of hollow rotating shaft 10 Onto the retainer portion 10a of front end side, for example it is made of reflecting mirror or prism being installed with by front end side than collector lens 24 1st light chopper mechanism 3 and make its rotation.

The light 26,27 that sends, have passed through collector lens 24 from the rear of fixed optical fiber 1 is assigned to angle from shaft centre line It spends and makes its reflection, irradiated across transmittance section 21 into the deep hole 61a of measured object 61.At this point, light 26,27 is as shown in Figure 7 It is radiated to 360 degree of complete cycle ranges.D1 is the outer diameter of light projector component 21 in figure, and light 26,27 is into figure half shown in D2 The range of diameter 2mm~10mm (millimeter) is radiated, and can collect its reflected light.

Further, since axis of the sliding block shown in FIG. 1 with motor 83 by probe 28 in deep hole 61a moves up, on one side by light Line 26 rotary emission slides in the axial direction on one side, thus can to deep hole 61a shown in Fig. 2 whole ray and collect three Tie up the shape data of shape.

In the 1st embodiment shown in Fig. 5, the movement in the axial direction of light 26 be by be not built in probe 28 in and It is to be located at the sliding of outside shown in FIG. 1 to be carried out with motor 83, so the mobile straight ahead precision of sliding block 82 is configured to 0.1 μm (micron) high-precision below.

Motor 12 is by motor box 8, bearing 9a, 9b, motor coil 7, the rotor magnet 11 being fixed on hollow rotating shaft 10 It constitutes, is rotated by being supplied electric power from electric wire 23.It is supplied electric power from the 1st motor driver circuit 86 to motor 12, in monitor The 3-D image for being parsed by computer 89 and being made is shown on 90.

In Fig. 5 and Fig. 6, the outer peripheral surface of the hollow rotating shaft 10 of two vibration detecting sensor 22a, 22b detection rotations Vibratory output and vibration angle direction.The electrostatic electricity that vibration detecting sensor detection is occurred by the vibration of hollow rotating shaft 10 The perhaps variation of reflected light is transformed to displacement, and is taken into as data.

Hereinafter, the 8 kinds of measurement methods and its movement that have to gauge in the optical profile type of the invention having been described above Successively illustrate.

The display of (A) 3D shape and the appearance inspection method of scar etc.

The reflected light of deep hole 61a from measured object 61 shown in FIG. 1 is taken into interference of light analysis unit 88, passes through meter Calculation machine 89 calculates, and shows image same as shape shown in Fig. 2, but since sliding block motor 83 makes probe 28 in axial direction on one side Upper sliding is dimensionally taken into reflected light on one side, so 3-D image can be shown on monitor 90.In the present invention, Neng Gouguan Examine the perspective view of the inner peripheral surface by previous CCD camera or the unavailable high-resolution distinctness of ultrasound sensors mode Picture.

Furthermore, it is possible in addition the reference data of no burr, the measured object of scar is placed in memory in advance, pass through Bad order product are detected compared with the surface state for the measured object 61 being taken into.

(B) then, in the case where the inner peripheral surface to deep hole 61a implements the surface epithelium coating of resin etc., surface The measurement of the thickness of layer 61b and pin hole is bad or protrusion occur it is bad due near infrared light or the semi-permeable resin of laser, so Obtain include epithelium high-resolution 3-D image, can check overlay film thickness.

(C) surface roughness measuring method can be as shown in Figure 8, and collecting sampling length range, (such as 100 μm (micro- Rice)) the original waveform data dotted line waveform of upside (in figure) on surface of 61 inner peripheral surface of measured object collect vibration at the same time The periphery of hollow rotating shaft 10 is vibrated the shaft vibration wave figurate number being taken by dynamic testing agency (sensor 22a, 22b in Fig. 5) According to the waveform of downside (in figure), (upside in figure of data after the amendment after obtaining subtracting shaft vibration data from original waveform data Fine line waveform).The amplitude of the maximum value of data and minimum value is true maximum surface roughness value after the amendment.Pass through this Sample obtains and corrects the periphery vibration data of hollow rotating shaft 10, can be accurately proceed the measurement of surface roughness.

(D) diameter measuring method is as described below.It in the waveform that the periphery of Fig. 9 is represented by dashed line is calculated by computer 89 The reflected light of the light released from the 1st light chopper mechanism 3 to complete cycle and the shape of the inner peripheral surface of measured object 61 found out Original waveform, subtract shown in the heavy line waveform of the inner circumferential in figure from vibration detection mechanism (be in Fig. 5 sensor 22a, Shaft vibration displacement amount data 22b) obtained obtain data after correcting shown in the fine line of the figure outside diameter, are repaired according to this The internal diameter that data can be needed after just.

(E) about roundness measurement method, fine line shown in the figure outside diameter described above is data after amendment, is led to It crosses calculating and finds out corresponding inscribed circle and circumscribed circle, the semidiameter of the two circles can be defined as roundness.

The measurement method of (F) about cylindricity, sliding motor 83 make probe 28 with sliding block 82 together with linearity precision 0.1 μm of (micron) high-precision slide below, can will in the longitudinal direction continuously data collection roundness measurement data and The inscribe cylinder of the 3-D image of obtained cylinder and the semidiameter of external cylinder are defined as cylindricity.

(G) measurement such as the depth of the dynamic pressure groove processed in hydrodynamic bearing inner peripheral surface corresponds to the bumps of inner peripheral surface The measurement of height, but the measurement method is identical as the measurement method of surface roughness described above.

When the 1st motor 12 rotates the 1st light chopper mechanism 3 the 1st horse occurs for (H) about angle measurement method for distance Rotation speed up to 12 is irregular (referred to as bounce or wow and flutter), so the angle for needing to solve true angle, θ shown in Fig. 10 exists The project that measured deviation occurs in the range of maximum θ pmax to minimum θ pmin can be by the measurement weight as its countermeasure Multiple enough numbers, are equalized with computer and summarize true value.

In Fig. 5, the vibration of the outer peripheral surface of the hollow rotating shaft 10 of rotation is usually occurred with 1 μm (micron) Zuo You, vibration The dynamic periodic vibration (Repeatable Run Out) that can be separated into every rotation 1 week 1 time and frequency it is indefinite, from low frequency to height The non-reproduction vibration (Non-Repeatable Run Out) that frequency occurs in wide area.

Although having the mode and type of some designs in the 1st bearing 9a, for example, by using ball bearing type, More non-reproduction vibration is vibrated in the rolling that ball occurs.In addition, on the other hand, sintered metal bearing is used in the 1st bearing In the case where mode, occur more to occur to curl up the non-reproduction vibration of the vibration bring vibrated or from contact surface because of vibration Problem.

In the present embodiment, as shown in figure 11, indicate that on the inner peripheral surface of bearing processing sets up dynamic pressure generation trough 9c's is dynamic Last item holds 9a.Hydrodynamic bearing 9a is to assign pumping forces, rotation with lubricating fluid of the dynamic pressure generation trough 9c to oil etc. while rotating Axis floats and is accurately proceed the bearing of non-contact rotation.

Therefore, the rolling vibration or the such vibration of sintered metal bearing that not previous ball bearing has are curled up or are wiped It touches, so non-reproduction vibration is few.By the effect, Fig. 8 and initial data shown in Fig. 9 are subtracted shaft vibration data and It is that smooth waveform is precisely corrected by shaft vibration data, so measurement accuracy becomes more in modified situation It is high.

In Fig. 5 and Fig. 6, the displacement detecting mechanism for measuring the vibratory output of the rotation axle portion of the 1st motor examines multiple vibrations Survey sensor 22a, 22b to the outer peripheral surface for being placed in the 1st hollow rotating shaft, but the displacement detecting mechanism in addition to this there is also.

For example, other displacement detecting mechanisms of the vibratory output of the rotation axle portion of the 1st motor 12 of measurement are able to detect the interior of pipe 6 The difference of the measurement data of the reference figure data stored in advance the and pipe inner peripheral surface obtained in the rotation of the 1st motor in week is made For vibratory output.In the case, in Fig. 9 the heavy line data of inner circumferential be according to the reference figure data of pipe inner peripheral surface with the The data for the vibratory output that the difference of measurement data obtained in 1 motor rotation is found out.With this configuration and detection method, also can From the Wave data of collection remove the image that the shape data of the inner peripheral surface of checked property is assigned distortion and vibration, it is correct and Critically carry out the precision measure of internal diameter and inner peripheral surface.In addition, pipe 6 is made of glass or transparent resin, it is as needed and right Inner peripheral surface implements the metal coating of the translucency of several nano thickness, can more reliably detect the collection wave from inner peripheral surface The profile of shape.

Figure 19 and Figure 20 is the sectional view of gauge in the optical profile type of the 1st embodiment for the present invention.From the 1st Inner peripheral surface 21a and transparent component periphery of the light that light chopper mechanism 3 (reflecting mirror of rotation) releases from transparent component 21 Face 21b and measured object 61 radiate reflected light, these reflected lights are returned via the 1st light chopper mechanism to fixed optical fiber 1 It returns.

At this point, the shape for 360 degree of complete cycles being taken into from some of transparent component inner peripheral surface 21a or transparent component outer peripheral surface 21b Shape data are equivalent to 3 vibratory output of the 1st light chopper mechanism, Neng Goucong shown in the double shape data of Fig. 9, inner circumferential side The shape data bring image by the measurement to the inner peripheral surface of checked property is removed or corrected in the Wave data being collected into Distortion and vibration.

In Figure 19 and Figure 20, in the inside of measured object, the position deviation of the probe 28 including transparent component 21, but such as The 1st light chopper mechanism of fruit, can there is no problem at which kind of in the shape data for being taken into complete cycle while rotating The measurement of ground progress inner diameter shape.

In addition, the diameter of pipe 6 is about 2mm (millimeter) left and right, penetrates into its internal fixation optical fiber 1 and be bent freely Glass fibre is the glass fibre of 0.1mm~0.4mm (millimeter) left and right using diameter.

1st light chopper mechanism 3 shown in FIG. 1 by with smooth reflecting surface reflecting mirror or prism constitute, in order to mention High reflectance wears into its surface roughness and flatness and the same above precision of common optical element.

1st hollow rotating shaft 10 shown in FIG. 1 is made of metal or ceramics, passes through the drawing by mold of molten metal Processing or the extrusion process by mold of the ceramics before firing be configured to it is hollow, by attrition process method etc. after cure process Finishing.

In Fig. 1, the diameter in the hole of the 1st hollow rotating shaft 10 is 0.2mm~0.5mm (millimeter), compared to the diameter of optical fiber 1 Sufficiently become larger, so the fixation optical fiber 1 fixed by setting tool 4 will not be contacted with the 1st hollow rotating shaft 10, even if gently connecing Touching also hardly happens abrasion powder.In addition, also without spin friction cogging the problem of.

[embodiment 2]

Figure 12~Figure 16 indicates the embodiment 2 of gauge in optical profile type for the present invention.

Figure 12 is the sectional view of gauge in the optical profile type of the 2nd embodiment for the present invention.From probe 59 End side guides the fixation optical fiber 31 of light to be inserted through in the hole of sufficiently long pipe 36 to rear end side forward, is consolidated by optical fiber It is fixed to determine tool 34.

Rotation optical fiber 32 is rotatably freely equipped in the front end side of fixed optical fiber 31.In the front end of rotation optical fiber 32 On, it is rotated independently and is installed with freely by structures such as the reflecting mirrors of roughly planar with rotation optical fiber 32 by the 1st motor 42 At the 1st light chopper mechanism 33a, 33b, and be configured to by rotation by light to complete cycle direction radiate.

In addition, being installed with the light optically focused that will transmit through fixed optical fiber 1 and arrive in the front end of rotation optical fiber 32, revolving on one side Turn to assign angle slightly to preceding extreme direction on one side and towards the 2nd light chopper machine of the 1st light chopper mechanism 33a, 33b radiation Structure 50.

The slight distance that rotation optical fiber 32 and fixed optical fiber 31 separate 5 μm (micron) left and right is opposed, including rotation Barn door 35, optical fiber setting tool 34 and constitute rotating optical connector 52, rotate energy between optical fiber 32 and fixed optical fiber 31 Higher transmitance is enough maintained, is optically connected with almost without loss.

1st motor 42 fixed motor coil 37, the 1st bearing 39b, 39a in motor box 38, are installed with rotor magnet 41 The 1st hollow rotating shaft 40 rotation.Voltage is applied from electric wire 23 for motor coil 37, is installed on the 1st hollow rotating shaft 40 The 1st light chopper mechanism 33.

2nd motor 49 and the 1st motor 42 are same, the 2nd bearing 48a, 48b are installed in motor box 38, by the 2nd rotary shaft 43 rotatably freely support.In Figure 12, the 2nd rotary shaft 43 be gently pressed into be opened in can vibrating member 44 approximate centre In the 44a of hole, but can between vibrating member 44 and the 2nd rotary shaft 43 by can the spring of vibrating member 44 generate stable friction Power.

Electric strain gauge element or piezoelectric element 45 can be being pasted on the periphery of vibrating member 44, be formed with electricity on these elements Pole 46.Their own electrode is applied voltage by 47 wiring of electric wire shown in Figure 12.Can vibrating member 44 relative to the 2nd axis The rotation for holding 48a, 48b is prevented from, and also simply plays the function of rotation stopping by electric wire 47 sometimes.

In Figure 12, near by the periphery of beamy 1st light chopper mechanism 33, light is installed on pipe 36 The transmittance section 51 that can be penetrated.The surface of inner peripheral surface or periphery for transmittance section 51 is implemented for reducing table as needed Face reflection, the coating of transmitance for improving light etc..

The 1st motor 42 of Figure 12 is supplied electric power from the 1st motor driver circuit 86 of Fig. 1 and carries out rotation driving, 2nd motor 49 is applied voltage from the 2nd motor driver circuit 87 and is driven in rotation.

1st light chopper mechanism 33 is made of the reflecting mirror or prism that can be rotated, and reflection efficiency is higher, can reduce light It learns loss and carries out high-precision precision measure.

2nd light chopper mechanism 50 by front end there is the prism of inclined general plane to constitute, the light-gathering of light compared with Height can reduce optical loss and carry out high-precision precision measure.

Then, about the light imaging probe of the 3-D scanning type of above-mentioned Figure 12~Figure 16, its characteristic is explained in detail Function and effect.

In Fig. 1, is passed through from the light of the near-infrared of the light source luminescent in measuring machine main body 85 or laser etc. and be built in pipe It advances among fixation optical fiber 31 in 36.

It in Figure 12, is supplied electric power from electric wire 23, if the 1st motor 42 and the 2nd motor 49 are with about 1800~20,000 rpm's The same rotational speed of range rotates, then the light being guided passes through rotating optical connector 52 and rotation optical fiber 32, by from the 2nd optical path Mapping device 50a release is reflected by the general plane portion of the 1st light chopper mechanism 33a and direction is changed into certain angle The direction angle of θ 1 (in Figure 12 be) carries out rotary emission, and radial extent at this time is the umbrella of angle, θ 1 as shown in Figure 14 Range.

The light of near infrared ray etc. further passs through light transparent member 51, by the light reflected from measured object 61 with it is above-mentioned Light transparent member 51 is upward through to negative side in identical optical path1st light chopper mechanism 33a2nd light chopper mechanism 50aRotate optical fiber 32Rotating optical connector 52Fixed optical fiber 31 is directed to interference of light analysis unit 88.

Then, the revolving speed about the 1st motor 42 and the 2nd motor 49, such as it is fixed as the revolving speed of the 1st motor 42 3600rpm, it rotates the revolving speed of the 2nd motor 49 with being fixed as 3570rpm, is switched in this way to two motor rotary speeds Assign the rotation status of some difference.In this state, as shown in figure 13, rotation angular phase tapers to the change of the 1st optical path It changes planes the position of structure 33 and the 2nd light chopper mechanism 50b, when forming the phase difference of 180 degree, light is by the 1st optical path that rotates The travel line of mapping device 33b reflection, light changes certain angle, becomes 2 θ in figure.The radial extent of the light of the moment Become inclined range as shown in Figure 15.

The rotatable phase angle is offsetted and the 2nd horse due to rotation middle during the 1st motor 42 was in 1 minute 3600 circle of rotation Difference up to 49 revolving speed is 30 circles, so 360 degree of rotational phase difference occurred at 2 seconds.

Vibration detecting sensor 53a detects the periphery vibration of the 1st hollow rotating shaft, same as the embodiment 1 of Fig. 5, to receipts The original waveform data that collects is corrected.Alternatively, other displacement detectings of the vibratory output of the rotation axle portion of the 1st motor 42 of measurement The reference figure data that in advance store of the mechanism by the inner circumferential of detection pipe 6 and the pipe inner circumferential obtained in the rotation of the 1st motor The difference of the measurement data in face is carried out as vibratory output.

Then, the rotational phase difference of the 1st light chopper mechanism 33 and the 2nd light chopper mechanism 50 is gently enclosed for every 2 seconds 1 Ground persistently occurs.By the action, the radiation direction of light continuously changes in the range of 1~θ of θ 2, the radial extent of light It is dimensionally irradiated repeatedly in the range of θ 1+ θ 2 as shown in Figure 16, since signal wire or electricity being not present in scanning range Line 23,47, so the distinct 3 d image data that can not lacked.

[embodiment 3]

Figure 17~Figure 18 indicates the 3rd embodiment of gauge in optical profile type for the present invention.

Figure 17 is the sectional view of gauge in the optical profile type of embodiment for the present invention.In the front end of probe 59 The fixation optical fiber 1 that light is transmitted between side (direction side of light transparent member 21) and rear side is built in pipe 36, and in fixation The front end side of optical fiber 1 has such as the collector lens 24 constituted by sphere lens.

There is the 1st light chopper mechanism by there is the rotating mirror etc. at inclination angle to constitute in the front end side of collector lens 24 33, by applying voltage from electric wire 23, rotated by the 1st motor 12.

The slidable motor box 8 that sliding guidance part 20 of 1st motor 12 on the inner peripheral surface for being fixed on pipe 6 supports Inside is packed into motor coil 7, has the 1st hollow rotating shaft 10 supported by bearing 9a, 9b.

The fixed rotor magnet 11 on the 1st hollow rotating shaft 10, and the 1st light chopper mechanism is integrally installed 33。

In the rear side of sledge motor case 8, integrally provided with the 2nd axis 57 of sliding, the furthermore sliding on approximate centre axis 2nd axis 57 is hollow shaft, penetrates through and is adhesively fixed in the hole and fixes optical fiber 1.

Linear motion motor 62 is equipped with the sliding bearing of bearing the 2nd axis 57 of sliding in the motor box 68 being located in pipe 36 58a, 58b, on the periphery for sliding the 2nd axis 57, paste gently be pressed into it is substantially polygonal it is columnar can vibrating member 54 center Kong Zhong, can be on at least outer peripheral surface of vibrating member 54 with the piezoelectric element 55 of pattern electrode 56.

If applying voltage from electric wire 47 to pattern electrode 56, piezoelectric element 55 starts to vibrate, and making can the production of vibrating member 54 Raw wavy or wavy triangle traveling wave, sliding the 2nd axis 57 as a result, keeps linear motion motor 62, fixed optical fiber 1, optically focused saturating Mirror 24, the 1st light chopper mechanism 33 are sliding in the axial direction in the range of such as 5~30mm (millimeter) as shown in Ls in figure It is dynamic.

In Figure 17, the length for being built in the fixation optical fiber 1 in pipe 36 is at least Ls millimeters (mm) longer than the length of pipe 36 More than, it is bent into pipe 36, is received and kept with excess length.Therefore, it in Figure 17, is acted in linear motion motor 62 and makes to slide In the case where dynamic 2nd axis 57 and the 1st motor 12 mobile to front end side in pipe 36, the movement for pushing and pulling fixed optical fiber 1 can be It is swimmingly slided under sufficiently small power.

Then, about gauge in the optical profile type of above-mentioned Figure 17~Figure 18, its characteristic effect is explained in detail Effect.

In Figure 17, if be powered to electric wire 23, the motor coil 7 of the 1st motor 12 generates rotating excitation field, to rotor magnetic Iron 11 assign rotary force, the 1st hollow rotating shaft 11 by the 1st light chopper mechanism 33 the rpm of such as 1800rpm~10,000 range In rotated with certain speed.

1st light chopper mechanism 33 indicates 33a by its rotation position, and the light of the position of 180 degree will be rotated from its angle Road mapping device is expressed as 33b.

It is guide-lighting that such as near infrared light or laser rays to shine from the measuring machine main body 85 of Fig. 1 is fixed optical fiber 1, from poly- Optical lens 24 discharges forwards, then radiates from the 1st light chopper mechanism 33 to approximate right angle direction, from the anti-of measured object 61 It penetrates light and again passes by fixed optical fiber 1 and return to measuring machine main body 85, apparatus main body 85 can show image.

Here, the probe 28 of Fig. 1 corresponds to probe 59 in Figure 17.In addition, the pipe 6 of Fig. 1 corresponds to pipe 36 in Figure 17.

In Figure 17, if be powered via electric wire 47 to pattern electrode 56, piezoelectric element 55 generates traveling wave, right Slide power of the 2nd axis 57 application towards front end Slideslip.Also, the 2nd axis 57 of sliding starts the 1st motor 12, the 1st light chopper Integrally forward end side is mobile for mechanism 33, fixed optical fiber 1, collector lens 24, and light is shown in the approximate right angle into figure or θ 1 Direction radiated with 360 complete cycles, simultaneously as can slide in the axial direction, so by three-dimensionally putting as shown in Figure 18 It penetrates, carries out the collection and storage of three-dimensional image data by measuring machine main body 85 in Fig. 1.

In Figure 17 and Figure 18, if sliding the distance of Ls in the mobile figure of the 2nd axis 57, side senser 64c is moved to admittedly Determine side senser 64a to approach, generates the signal for indicating the completion of sliding action, the voltage applied from electric wire 23 to pattern electrode 56 It is stopped.Alternatively, applying method changes, the 2nd axis 57 of sliding starts mobile to opposite direction.

Vibration detecting sensor 63a detects the periphery vibration of the 1st hollow rotating shaft, same as the embodiment 1 of Fig. 5, to receipts The original waveform data that collects is corrected.Alternatively, other displacement detectings of the vibratory output of the rotation axle portion of the 1st motor 12 of measurement The reference figure data of the inner circumferential of mechanism detection pipe 6 stored in advance and the pipe inner peripheral surface obtained in the rotation of the 1st motor The difference of measurement data is as vibratory output.

In addition, collector lens 24 uses sphere lens, but also identical using coniform collector lens.

As one of the observation of this 3-D scanning inner face and requirement performance of check device, it is improved spatial resolution, but In being used to the main reason for reaching spatial resolution, there is that the rotation speed of motor 12 is irregular, vibration of the 1st hollow rotating shaft 10 Dynamic and non-reproduction vibration precision, the precision of the 1st optical path changing element 33, surface accuracy of collector lens 24 etc..

Wherein, disturbance degree it is biggish be motor 12 rotation speed it is irregular, but the is built-in in the front end of probe 59 The method of motor 12 for example can steadily realize the spatial resolution of 1 μm (micron) higher three-dimensional below.In addition, logical The sliding action in the axial direction of linear motion actuator 22 is crossed, light can be radiated in the axial direction with a certain range, can be obtained To the observation image of high-resolution three-dimensional.

As described above, gauge is equipped with the vibration for detecting the rotation axle portion of motor in optical profile type of the invention The mechanism of amount.Also, it is examined as obtained from will be calculated as computer from the reflected light that checked property is obtained by optical fiber The displacement data of the shape data displacement sensor of the inner peripheral surface of object is corrected, and the rotation of the motor of scanning ray can be eliminated The vibration or whirling vibration of axis are given the inner circumferential face shape data bring measurement error of collected measured object and are carried out high-precision The measurement of degree.

Industrial availability

The optical profile type inner diameter measuring device of observation and the measurement of checked object object is carried out using interferometric optical method of the invention It can also apply to industrial diagnostic device and carry out high-precision measurement, and the three-dimensional of bottom for for example carrying out deep hole is seen It examines.In addition, expecting the utilization of diagnosis from the change in size to the fine lesion at medical scene or the treatment of the numerical value of.

Description of symbols

1,31 fixed optical fiber

32 rotation optical fibers

3, the 1st light chopper mechanism (reflecting mirror) of 33a, 33b

34 optical fiber setting tools

35 shields

6,36 pipe

7,37 motor coil

8,38,68 motor box

The 1st bearing of 9a, 9b, 39a, 39b

9c dynamic pressure generation trough

10,40 the 1st hollow rotating shaft

10a retainer portion

11,41 rotor magnet

12,42 the 1st motor

20 sliding guidance parts

21,51 light transparent member

21a transparent component inner peripheral surface

21b transparent component outer peripheral surface

22a, 22b, 53a, 63a vibration detecting sensor

23,47 electric wire

24 collector lenses

25,55 scanning range

26 light

28,59 probe

43 the 2nd rotary shafts

It 44,54 can vibrating member

The hole 44a

45,55 electric strain gauge element

46,56 pattern electrode

The 2nd bearing of 48a, 48b, 58a, 58b

49 the 2nd motors

50, the 2nd light chopper mechanism of 50a, 50b (prism etc.)

52 rotating optical connectors (light rotor リ connector)

57 the 2nd axis of sliding

61 measured objects

61a deep hole

61b superficial layer

62 linear motion motors

64a, 64b, 64c Z axis position sensor

70a, 70b pipe inner peripheral surface reflected light

71a, 71b pipe outer peripheral surface reflected light

72a, 72b, 72C measured object reflected light

80 pedestals

81 brackets

82 sliding blocks

83 sliding block motors

84 interconnecting pieces

85 measuring machine main bodys

86 the 1st motor driver circuits

87 the 2nd motor driver circuits

88 interference of light analysis units

89 computers

90 monitors

Claims (8)

1. gauge in a kind of optical profile type carries out the observation and measurement of checked object object, feature using interferometric optical method It is, gauge has in the optical profile type:

Optical fiber is built in pipe；

Light chopper mechanism is configured in the front end side of above-mentioned optical fiber；

Motor makes one or both of above-mentioned optical fiber and above-mentioned light chopper mechanism rotation driving；And

Displacement detecting mechanism measures the vibratory output of the rotation axle portion of said motor,

Said motor includes the 2nd motor of the 1st motor and configuration in the rear side of above-mentioned 1st motor；

Above-mentioned light chopper mechanism includes by the 1st light chopper mechanism of above-mentioned 1st motor action and by above-mentioned 2nd motor 2nd light chopper mechanism of movement；

Above-mentioned optical fiber via setting tool in the rear side of above-mentioned 2nd motor in a manner of not revolvable by being configured in above-mentioned pipe Fixation optical fiber and the rotation optical fiber structure that is rotated integrally with the above-mentioned rotation axle portion of above-mentioned 1st motor or above-mentioned 2nd motor At；

The above-mentioned rotation shaft portion of above-mentioned 1st motor and above-mentioned 2nd motor is not in hollow shape；

At least part of the front end side of above-mentioned rotation optical fiber is inserted in the hollow hole of the rotation axle portion of above-mentioned 1st motor, And at least part of rear side is fixed in the hollow hole of the rotation axle portion of above-mentioned 2nd motor；

Above-mentioned 1st light chopper mechanism is configured to and above-mentioned 1st motor in the front end side of above-mentioned 2nd light chopper mechanism Rotation axle portion rotates integrally；

Above-mentioned 2nd light chopper mechanism equipment is in the front end of above-mentioned rotation optical fiber.

2. gauge in optical profile type as described in claim 1, which is characterized in that

Above-mentioned displacement detecting mechanism is configured at least one detection sensor to the outer peripheral surface for being placed in above-mentioned rotation axle portion.

3. gauge in optical profile type as claimed in claim 1 or 2, which is characterized in that

The position of the shape data of inner peripheral surface based on checked property obtained from being calculated as computer and above-mentioned displacement detecting mechanism Shifting amount data are modified to what is obtained by above-mentioned optical fiber from the reflected light of checked object object.

4. gauge in optical profile type as claimed in claim 1 or 2, which is characterized in that

The reference figure data that above-mentioned displacement detecting mechanism detects the inner circumferential of above-mentioned pipe are obtained in the rotation of above-mentioned rotation axle portion The difference of the measurement data of the above-mentioned pipe inner peripheral surface or outer peripheral surface that arrive is as above-mentioned vibratory output.

5. gauge in optical profile type as claimed in claim 1 or 2, which is characterized in that

The bearing for supporting above-mentioned rotation axle portion is the hydrodynamic bearing with dynamic pressure groove.

6. gauge in optical profile type as described in claim 1, which is characterized in that

Above-mentioned 1st light chopper mechanism is the reflecting mirror or prism that can be rotated.

7. gauge in optical profile type as described in claim 1, which is characterized in that

Above-mentioned 2nd light chopper mechanism is the prism for having inclined general plane in front end.

8. gauge in optical profile type as claimed in claim 1 or 2, which is characterized in that

Above-mentioned 1st motor has the hollow sliding axle portion extended rearward；

Have using above-mentioned sliding axle portion as the linear motion actuator of output shaft；

Above-mentioned fixed optical fiber is fixed in the hollow hole of above-mentioned sliding axle portion；

While the above-mentioned output shaft of above-mentioned linear motion actuator pushes and pulls above-mentioned fixed optical fiber, become the 1st above-mentioned optical path The above-mentioned fixed optical fiber near structure, above-mentioned 1st motor and front end side of changing planes is slided in the axial direction.