CN106249551B - Utilize the optical component used in the canted exposure of long arc ultraviolet radiator and curing system - Google Patents
Utilize the optical component used in the canted exposure of long arc ultraviolet radiator and curing system Download PDFInfo
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- CN106249551B CN106249551B CN201610404027.6A CN201610404027A CN106249551B CN 106249551 B CN106249551 B CN 106249551B CN 201610404027 A CN201610404027 A CN 201610404027A CN 106249551 B CN106249551 B CN 106249551B
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- ultraviolet radiator
- long arc
- lamp housing
- arc ultraviolet
- optical
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2004—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the use of a particular light source, e.g. fluorescent lamps or deep UV light
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/2008—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by the reflectors, diffusers, light or heat filtering means or anti-reflective means used
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Optics & Photonics (AREA)
Abstract
The present invention provide it is a kind of using the optical component used in the canted exposure of long arc ultraviolet radiator and curing system, including：Lamp housing is more formed obliquely more upwards from both sides lower end to central portion so that has " ∧ " profile morphology on the whole；1st, 2 long arc ultraviolet radiator are respectively arranged in the inner space both sides of the lamp housing, according to the angle of inclination of the lamp housing, simultaneously radiation source are configured with being mutually inclined；1st, 2 optical filterings are located at below the described 1st, 2 long arc ultraviolet radiator so that form the angle parallel with the described 1st, 2 long arc ultraviolet radiator, and the light source for irradiating the described 1st, 2 long arc ultraviolet radiator penetrates；Described 1st, the end of 2 optical filterings carries out beveling processing, is configured and is docked with the state for mutually carrying out face contact.
Description
Technical field
The present invention relates to the use of long arc ultraviolet radiator canted exposure and curing system in the optical component that uses, in more detail
For, it is related to a kind of angle of inclination according to lamp housing, is mutually butted to what the optical filtering as optical component and optical filtering pressed from both sides
End carry out beveling processing, be configured the contact of carry out face, make the light of transmission loss and characteristic variations realize minimize so that
Can realize the accurate control of light utilizes the optical component used in the canted exposure of long arc ultraviolet radiator and curing system
Background technology
Modern times can be rated as image conversion, informationized society, and with the development of information processing system, developing can show largely
The large area display element of information.Moreover, recently as the requirement of consumer had been changed into not only occupancy installation space less but also can
The display element of large screen is provided, is developing the organic EL (electro that disclosure satisfy that and require as described above
Luminescent), the FPD such as LCD (liquid crystal display) and PDP (plasma display panel)
Device (flat panel display) product simultaneously carries out commercialization.
Large-area flat-plate display element as described above needs the large area that photomask is utilized to expose to form pattern
Electro-optical device, specifically, utilizing elliptical condenser mirror and fly lens based on point light source (short arc) extra-high-pressure mercury vapour lamp
(fly-eyelens) and collector lens (condenser lens) etc., to the front glass of panel display apparatus, by about 90% with
On the illumination irradiation ultraviolet light i lines of 365nm (particularly), implement exposure operation.
But previous exposure device as described above not only needs the fees of maintenance of high cost, moreover, because super-pressure mercury
Lamp (point light source) short life, needs a large amount of renewal costs, in addition, due to extra-high-pressure mercury vapour lamp costliness, is produced into reduction
There is limitation in present aspect.In addition, previous curing system is due to installing other cooling device, thus in exposure operation or hard
When being turned into industry, due to the high temperature dissipated from lamp, there are problems that the surface deformation of large-area flat-plate display device.
On the other hand, recently, in the exposure of the large-area flat-plate display device for the LCD or PDP etc. for substituting CRT or hard
When being turned into industry, develop and using the exposure device using long arc ultraviolet radiator, it is purple using the price long arc cheaper than point light source
Outside line lamp body shows the homogeneity of illumination, can reduce production cost and improve productivity.
The long arc ultraviolet radiator does not need to fly lens and collector lens and various speculums (spherical mirror, plane mirror),
Can lamp be used with the price cheaper than short-arc lamp (short arc lamp), in addition, due to not using the composition product, because
And have the advantages that production cost can be reduced, improve productivity.Moreover, the short-arc lamp applied in previous exposure device
Service life is generally 500~1000 hours, but the long arc ultraviolet radiator used in the present invention, can use 800~2000 hours left sides
The right side, thus with the effect that can save renewal cost.
On the other hand, for this long arc ultraviolet radiator, when one long arc ultraviolet radiator of utilization is to one face base of large area
When the panel display apparatus product of accurate (more than 1500mm) is exposed operation, with the front glass size of panel display apparatus
(size) increase, the length of ultraviolet radiator should also lengthen, and the length of ultraviolet radiator can be made to more than 1500mm (3000mm water
It is flat), but upper difficulty is made, moreover, the problem of disposition (transport and replace) there are ultraviolet radiator is difficult, in addition, with ultraviolet
The lengthening of the length of line lamp, easily bend problem, improve illumination homogeneity in terms of exist it is more difficult the problem of.
Therefore, in order to which the panel display apparatus product to large area is exposed operation, long arc ultraviolet radiator along length
Direction configuration is more than two, and compared with installing the situation of 1 exposure device, can apply has illumination homogeneity
(Uniformity) and the optical component of specific region wavelength, for large area product to be exposed and hardened.
But when two long arc ultraviolet radiator are configured along its length as described above, each long arc ultraviolet radiator exists
The problem of intensity of light source of its both side ends declines than central portion, therefore, if two long arc ultraviolet radiator along its length
, then since the intensity of light source of the lap of two long arc ultraviolet radiator is weak, there is the shortcomings that can not embodying uniform illumination in configuration.
【Existing technical literature】
【Document】
Document 1:Register utility model bulletin the 20-0245077th (exposure device)
Document 2:Publication bulletin No. 2001-0055188 (exposure machine illumination optics device)
Document 3:Registered patent bulletin the 10-0360450th (the mask permutations device of vertical-type exposure device)
Document 4:Publication bulletin the 10-2005-0061231st (is filled using the digit explosure of telecentric imaging optical system
It puts)
Document 5:Publication bulletin the 10-2006-0122505th (exposure device)
Invention content
Technical problems to be solved by the inivention
Accordingly, it is intended to solve the problems, such as it is as described above the purpose of the present invention is to provide a kind of using long arc ultraviolet radiator
The optical component used in canted exposure and curing system, according to the angle of inclination of lamp housing, to the optical filtering as optical component
The end being mutually butted of mirror and optical filtering folder carries out beveling processing, is configured the contact of realization face, can make the damage of the light of transmission
It loses and characteristic variations is realized and minimized so that realize the accurate control of light.
The technical solution solved the problems, such as
Be intended to reach the purpose it is a feature of the present invention that including：Lamp housing, from both sides lower end more to central portion
It is formed obliquely more upwards so that there is " ∧ " profile morphology on the whole；1st, 2 long arc ultraviolet radiator, are respectively arranged in institute
The inner space both sides of lamp housing are stated, according to the angle of inclination of the lamp housing, simultaneously radiation source are configured with being mutually inclined；1st,
2 optical filterings are located at below the described 1st, 2 long arc ultraviolet radiator so that form parallel with the described 1st, 2 long arc ultraviolet radiator
Angle, and the light source for irradiating the described 1st, 2 long arc ultraviolet radiator penetrates；Described 1st, the end of 2 optical filterings chamfer and adds
Work is configured and is docked with the state for mutually carrying out face contact.
It is preferred that the described 1st, 2 optical filterings are installed on can be drawn out to the be externally inserted into the 1st, 2 filters inside the lamp housing
Light microscopic presss from both sides；Described 1st, the end of 2 optical filterings folder carries out beveling processing, is configured and is docked with the state for mutually carrying out face contact.
The effect of invention
The present invention is highly made to the angle of inclination of higher lamp housing according to central portion for the homogeneity of illumination, right
The end being mutually butted that optical filtering and optical filtering as the optical component for being installed on the lamp housing press from both sides carries out beveling and adds, and makes
Its end must be configured and realize mutual face contact, so as to which the loss of the light of transmission and characteristic variations be made to realize and minimize that there is energy
Enough realize the function and effect of the accurate control of light.Moreover, to the part that both sides are connected, in addition to optical component, when to utensil portion
When part also applies identical structure, cut-out light leakage can be efficiently applied to and install structure additional.
Description of the drawings
Fig. 1 is to illustrate the preferred embodiment of the present invention to utilize the canted exposure of long arc ultraviolet radiator and the entirety of curing system
The figure of composition.
Fig. 2 is the optical component used in the device for intercept Fig. 1 and the figure illustrated.
Fig. 3 is the stereogram of Fig. 2.
Fig. 4 is the figure for the mated condition for illustrating previous optical component.
Symbol description
10:Lamp housing 20,22:1st, 2 long arc ultraviolet radiator
30,32:1st, 2 optical filterings 40,42:1st, 2 optical filterings press from both sides
30a,32a,40a,42a:End
Specific embodiment
With reference to the accompanying drawings, illustrate the embodiment of the present invention.In aftermentioned detailed description, in order to realize the technology
Subject has prompted the representative embodiment of the present invention.Moreover, the other embodiments that can be prompted as the present invention, at this
Alternate description in the composition of invention.
The present invention is not the exposure device for being mounted with long arc ultraviolet radiator using one, but along the length side of ultraviolet radiator
It is more than two to installation, perform exposure operation, then, compared with installing 1 exposure device, illumination can be further improved by having
The advantages of homogeneity.
That is, when using a long arc ultraviolet radiator, to the panel display apparatus of one face benchmark (more than 1500mm) of large area
When product is exposed operation, with the increase of the front glass size (size) of panel display apparatus, the length of ultraviolet radiator
Also it should lengthen, the length of ultraviolet radiator can be made to more than 1500mm (3000mm is horizontal), but make upper difficulty, moreover, in the presence of
The problem of disposition (transport and replacement) of ultraviolet radiator is difficult, in addition, with the lengthening of ultraviolet radiator length, easily bends
Problem, in terms of improving illumination homogeneity exist it is more difficult the problem of, therefore, as representative of the present invention, two exposure device edges
The length direction of ultraviolet radiator is configured and uses, as described above so as to solve the problems, such as.
At this point, make to be located at slightly higher place along the center portion of the lamp housing of the length direction arranged in series of long arc ultraviolet radiator,
Specifically, on the basis of the left/right side lower end by the lamp housing during face, lamp housing is made to be located at about 30 ° hereinafter, being capable of body
The exposure using long arc ultraviolet radiator that the illumination homogeneity for the part being overlapped when connecting between lamp housing improves can now filled
It puts.
Particularly the present invention will embody the light used in a kind of canted exposure using long arc ultraviolet radiator and curing system
Department of the Chinese Academy of Sciences's part, for the homogeneity of the illumination of long arc ultraviolet radiator diverging, to being installed in the optical filtering as optical component of lamp housing
The end of mirror and optical filtering folder carries out beveling processing, is configured and is filtered the optical filtering and optical filtering folder with opposite opposite side
Face contact is realized when light microscopic and optical filtering folder docking, and the loss of light and characteristic variations can be made to realize and minimize, realize the essence of light
Close control.
Below according to a preferred embodiment of the present invention will be described in detail, the present invention is not limited to embodiment.
{ embodiment 1 }
Attached drawing Fig. 1 is canted exposure using long arc ultraviolet radiator and the curing system for illustrating the preferred embodiment of the present invention
The figure of overall structure, Fig. 2 are the optical component used in the device for intercept Fig. 1 and the figure illustrated, and Fig. 3 is the stereogram of Fig. 2.
As shown in Figure 1 to Figure 3, the front glass of exposure device of the invention as the panel display apparatus to large area
(200) device of exposure process is performed, in order to improve the homogeneity of illumination, two the 1st, 2 long arc ultraviolet radiator (20,22) are existed
Arrangement installation is formed respectively along its length for lamp housing (10) both sides.
That is, two the 1st, 2 long arc ultraviolet radiator (20,22) can be installed on left and right the two of lamp housing (10) by the present invention
Side performs the exposure operation of the panel display apparatus (more than a face benchmark 1500mm) of large area.
The exposure device (100) includes lamp housing (10), the 1st, 2 long arc ultraviolet radiator (20,22), the 1st, 2 optical filterings
(30,32), the 1st, 2 optical filtering components (40,42) and transfer shaft (50) are formed.
The lamp housing (10) forms the shape of the exposure device (100), and the 1st, 2 length can be installed by being formed in inside
Arc ultraviolet radiator (20,22), the 1st, 2 optical filterings (30,32), the 1st, 2 optical filterings folder (40,42) space (12).
It is preferred that the lamp housing (10) makes central portion (10c) positioned at slightly higher place so that " ∧ " profile morphology is formed on the whole,
Specifically, when on the basis of left/right side (10a, 10b) lower end of the lamp housing (10) during face, the lamp housing (10)
Central portion (10c) formed higher so that for 30 ° hereinafter, this is to make the 1st, 2 long arc ultraviolet radiator (10,12)
Between the illumination homogeneity of part that is overlapped due to series connection improve.
That is, it is more configured described in composition with tilting (R) to central portion (10c) is more upward from left and right side (10a, 10b) lower end
Lamp housing (10), the 1st, the 2 long arc ultraviolet radiator so as to be installed respectively in the inner space of the lamp housing (10) (12) both sides
(10,12) are also not serially connected configuration, but can only be mutually inclined ground according to inclination (R) angle of the lamp housing (10)
Configuration, thereby, it is possible to eliminate because occur when the 1st, 2 long arc ultraviolet radiator (10,12) are also serially connected configuration the 1st, 2 long arcs
Caused by distance difference between ultraviolet radiator (10,12) illumination inhomogeneity (that is, between the 1st, 2 long arc ultraviolet radiator,
Corresponding to its distance difference, light source is with respect to the problem of weakening).
In the upper end of the lamp housing (10), the transfer shaft (50) of at least more than one is installed.The transfer shaft (50)
Performance make the lamp housing (10) to the left/effect of right direction movement, with this action, can reduce and deposit between lamp housing (10)
Differences of illumination intensities, in addition, can overcome the problems, such as illumination homogeneity than point light source decline.At this point, the transfer shaft (50)
It forms in detail and applies common transmission device, for example, using the common driving being made of motor, gear, belt etc.
Device.
It is preferred that the described 1st, 2 long arc ultraviolet radiator (20,22) are by can cover glass before (cover) panel display apparatus
The number installation of glass (hereinafter referred to as " front glass ") (200), according to the number of the described 1st, 2 long arc ultraviolet radiator (20,22),
Lamp housing (10) and the 1st, 2 optical filterings (30,32) etc. are also installed by same number.
Described 1st, 2 long arc ultraviolet radiator (20,22) are installed on the inner space (12) of the lamp housing (10), at this point,
The shape that described 1st, 2 long arc ultraviolet radiator (20,22) have by the lamp housing (10), that is, by under left and right side
The structure of lamp housing (10) that end is more formed obliquely more upwards to center, when the inner space for being installed on the lamp housing (10)
(12) when, the described 1st, 2 long arc ultraviolet radiator (20,22) are also not serially connected configuration, but according to the lamp housing (10)
Inclination (R) angle be configured with being mutually inclined, because between the 1st, 2 long arc ultraviolet radiator (20,22) when can eliminate arranged in series
One property of uneven illumination caused by distance difference.
Described 1st, 2 optical filterings (30,32), which are installed on, can draw the inside for being externally inserted in the lamp housing (10) sky
Between (12) the 1st, 2 optical filterings folder (40,42), with make the described 1st, 2 optical filterings folder (40,42) draw from the lamp housing (10)
The action for going out and introducing, below the 1st, 2 long arc ultraviolet radiator (20,22) being installed on inside the lamp housing (10),
Penetrate the light source dissipated from the described 1st, 2 long arc ultraviolet radiator (20,22).At this point, the described 1st, 2 optical filterings (30,32) are matched
It puts to form the angle parallel with the angle of inclination of the described 1st, 2 long arc ultraviolet radiator (20,22).
Described 1st, 2 optical filterings (30,32) are form differently along the length direction of the 1st, 2 long arc ultraviolet radiator (20,22)
Transmitance, preferably make the 1st, 2 long arc ultraviolet radiator (20,22) irradiate light source transmitance, with optical filtering center portion it is low, more
The mode that transmitance is more improved to both-side ends part is coated and makes optical filtering, to only have ultraviolet range wavelength can
To penetrate, this, which can make to realize because of differences of illumination intensities caused by the length of the 1st, 2 long arc ultraviolet radiator (20,22), minimizes, and improves
Whole illumination homogeneity.
That is, from the light source that the described 1st, 2 long arc ultraviolet radiator (20,22) are irradiated since center is most strong, it is more weaker to both sides,
Therefore, the transmitance of optical filtering is adjusted if as discussed above, then can embody uniform illumination.
Described 1st, 2 optical filterings (30,32) and described 1st, 2 optical filterings folder (40,42) are also according to the lamp housing (10)
Inclination (R) angle of lamp housing (10) being more formed obliquely more upwards to center from both sides lower end having, is mutually inclined ground
Configuration is formed, and penetrates the light source that the 1st, 2 long arc ultraviolet radiator (20,22) are irradiated.
Particularly the present invention can be with as shown in Fig. 2, the institute being mutually butted to inclination (R) angle according to lamp housing (10)
State the 1st, 2 optical filterings folder (40,42) and described 1st, 2 optical filterings (30,32) each ends (30a, 32a, 40a, 42a) carry out it is oblique
It cuts processing to form, is being mutually butted the described 1st, 2 optical filterings (30,32) and the 1st, the 2 optical filtering component (40,42) as a result,
End (30a, 32a, 40a, 42a) when, be not line contact, but form face contact, can realize light loss and characteristic become
The minimum of change realizes the accurate control of light.
That is, as conventional art not to the end of the 1st, 2 optical filterings (30,32) and the 1st, 2 optical filtering components (40,42)
In a state that portion (30a, 32a, 40a, 42a) carries out beveling processing, when being mutually butted the 1st, 2 optical filterings (30,32) as shown in Figure 4
And the 1st, 2 the end of optical filtering component (40,42) (when (30a, 32a, 40a, 42a), form the contact of line morphology, thus
1st, during the light source of 2 long arc ultraviolet radiator (20,22) diverging is through the 1st, 2 optical filterings (30,32), through the described 1st, 2
The light source of end (30a, 32a) being mutually butted of optical filtering (30,32), the wavelength meeting light leakage not being appropriately controlled to system
Product can not realize the accurate control of light, exist can induce product it is bad the problem of.
In contrast, the present invention is to the phase of the described 1st, 2 optical filterings (30,32) and described 1st 2 optical filterings folder (40,42)
The end (30a, 32a, 40a, 42a) mutually docked carries out beveling processing, when the described 1st, 2 optical filterings (30,32) and described the
1st, when 2 optical filtering components (40,42) are mutually butted, and non-thread contact, but realize face contact, so as to through the described 1st, 2 filters
The light source of end (30a, 32a) being mutually butted of light microscopic (30,32) can realize suitable control, it is thus possible to realize the essence of light
Close control can prevent the bad in possible trouble of product.
Claims (1)
1. a kind of utilize the optical component used in the canted exposure of long arc ultraviolet radiator and curing system, which is characterized in that packet
It includes：
Lamp housing (10) from left and right side (10a, 10b) lower end more to central portion (10c) is more upward is formed, is made with tilting (R)
Obtain has " ∧ " profile morphology on the whole；
1st, 2 long arc ultraviolet radiator (20,22) are respectively arranged in inner space (12) both sides of the lamp housing (10), root
According to inclination (R) angle of the lamp housing (10), simultaneously radiation source is configured with being mutually inclined；
1st, 2 optical filterings (30,32), be located at the described 1st, 2 long arc ultraviolet radiator (20,22) below so that form with it is described
The parallel angle in the angles of inclination of 1st, 2 long arc ultraviolet radiator (20,22), and make the described 1st, 2 long arc ultraviolet radiator (20,22)
The light source of irradiation penetrates；
Described 1st, the end (30a, 32a) of 2 optical filterings (30,32) carries out beveling processing, is configured mutually to carry out face contact
State docking；
Described 1st, 2 optical filterings (30,32), which are installed on, to be drawn out to the be externally inserted into the 1st, 2 inside the lamp housing (10)
Optical filtering presss from both sides (40,42)；
Described 1st, the end (40a, 42a) of 2 optical filterings folder (40,42) carries out beveling processing, is configured and is connect with the mutually face of progress
Tactile state docking.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020150081728A KR101585966B1 (en) | 2015-06-10 | 2015-06-10 | Long Arc UV Lamp |
| KR10-2015-0081728 | 2015-06-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106249551A CN106249551A (en) | 2016-12-21 |
| CN106249551B true CN106249551B (en) | 2018-07-06 |
Family
ID=55173549
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610404027.6A Active CN106249551B (en) | 2015-06-10 | 2016-06-08 | Utilize the optical component used in the canted exposure of long arc ultraviolet radiator and curing system |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR101585966B1 (en) |
| CN (1) | CN106249551B (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101303538A (en) * | 2007-05-11 | 2008-11-12 | 哈利盛东芝照明株式会社 | Exposure apparatus |
| KR20090124008A (en) * | 2008-05-29 | 2009-12-03 | 유니램 주식회사 | Exposure apparatus using long arc uv lamp |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR200245077Y1 (en) | 1997-12-29 | 2001-12-01 | 이중구 | Exposure device |
| KR100360450B1 (en) | 1999-12-09 | 2002-11-13 | 주식회사 엘지이아이 | Vertical facing type exposure apparatus |
| KR20010055188A (en) | 1999-12-09 | 2001-07-04 | 구자홍 | Optics apparatus of exposure |
| JP2002246282A (en) * | 2001-02-14 | 2002-08-30 | Canon Inc | Shutter, light source and aligner |
| KR20050061231A (en) | 2003-12-18 | 2005-06-22 | 삼성에스디아이 주식회사 | Digital exposure apparatus using telecentric optical system |
| KR20060122505A (en) | 2005-05-27 | 2006-11-30 | 엘지전자 주식회사 | Exposer apparatus |
| JP5026688B2 (en) * | 2005-10-20 | 2012-09-12 | 日本電信電話株式会社 | Optical module and optical module array |
-
2015
- 2015-06-10 KR KR1020150081728A patent/KR101585966B1/en active IP Right Grant
-
2016
- 2016-06-08 CN CN201610404027.6A patent/CN106249551B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101303538A (en) * | 2007-05-11 | 2008-11-12 | 哈利盛东芝照明株式会社 | Exposure apparatus |
| KR20090124008A (en) * | 2008-05-29 | 2009-12-03 | 유니램 주식회사 | Exposure apparatus using long arc uv lamp |
Also Published As
| Publication number | Publication date |
|---|---|
| KR101585966B1 (en) | 2016-01-15 |
| CN106249551A (en) | 2016-12-21 |
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