CN106158711A - 一种脱胶机自动下料装置 - Google Patents

一种脱胶机自动下料装置 Download PDF

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CN106158711A
CN106158711A CN201610765644.9A CN201610765644A CN106158711A CN 106158711 A CN106158711 A CN 106158711A CN 201610765644 A CN201610765644 A CN 201610765644A CN 106158711 A CN106158711 A CN 106158711A
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CN106158711B (zh
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张学强
靳立辉
杨明
崔振强
赵晓光
侯景洋
高翔
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TCL Zhonghuan Renewable Energy Technology Co Ltd
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Abstract

本发明提供了一种脱胶机自动下料装置，包括支撑架，所述支撑架上设置有横向线性模组，所述横向线性模组的滑块与纵向线性模组相连，所述纵向线性模组的滑块上连接有安装架，所述安装架上安装有机械手；所述支撑架下方设置有输送线A，所述输送线A处设置有传感器，所述输送线A一端设置有输送线B，所述输送线A另一端设置有输送线C；所述输送线B的外侧设置有料座AGV小车，所述输送线C的外侧设置有治具AGV小车。本发明所述的脱胶机自动下料装置结构设计合理，机械手可同时兼具料座和治具的抓取，无需更换工装，输送线可实现料座和治具的自动分离，实现物料自动搬运，可实现一人操作多台下料装置，有效提高了生产效率。

Description

一种脱胶机自动下料装置
技术领域
本发明属于半导体制造技术领域，尤其是涉及一种脱胶机自动下料装置。
背景技术
太阳能硅片脱胶工艺中的下料方式，目前都是采用人工完成线切料座(两种规格)、脱胶治具两种物料的下料，由于线切料座，脱胶治具重量较重，操作工的劳动强度很大，且工作效率不高，这就需要设计一种自动下料装置替代人工。
发明内容
有鉴于此，本发明旨在提出一种脱胶机自动下料装置，以解决料座和脱胶治具人工下料时劳动强度大及工作效率低的问题。
为达到上述目的，本发明的技术方案是这样实现的：
一种脱胶机自动下料装置，包括支撑架，所述支撑架上设置有横向线性模组，所述横向线性模组的滑块A与纵向线性模组相连，所述纵向线性模组的滑块B上连接有安装架，所述安装架上安装有机械手,所述滑块A可沿所述横向线性模组的滑槽横向滑动，所述滑块B可沿所述纵向线性模组的滑槽纵向滑动；
所述支撑架下方设置有输送线A，所述输送线A由电机A驱动，所述输送线A处设置有传感器，所述输送线A一端设置有输送线B，所述输送线B由电机B驱动，所述输送线A另一端设置有输送线C，所述输送线C由电机C驱动；
所述输送线B的外侧设置有料座AGV小车，所述料座AGV小车上端设置有料座输送装置，所述料座输送装置与输送线B对接，所述输送线C的外侧设置有治具AGV小车，所述治具AGV小车上端设置有治具输送装置，所述治具输送装置与所述输送线C对接。
进一步的，所述支撑架呈倒置的U形，所述支撑架架设在所述输送线A的上方。
进一步的，所述料座输送装置和治具输送装置均为滚筒输送。
相对于现有技术，本发明所述的脱胶机自动下料装置具有以下优势：结构设计合理，机械手可同时兼具料座和治具的抓取，无需更换工装，输送线可实现料座和治具的自动分离，实现物料自动搬运，可实现一人操作多台下料装置，有效提高了生产效率。
附图说明
构成本发明的一部分的附图用来提供对本发明的进一步理解，本发明的示意性实施例及其说明用于解释本发明，并不构成对本发明的不当限定。在附图中：
图1为本发明的结构示意图；
图2为机械手的结构示意图。
附图标记说明：
1-支撑架；2-横向线性模组；3-纵向线性模组；4-安装架；5-机械手；51-安装座；52-气缸；53-气缸连接座；54-连接块；55-光轴；56-衬套；57-衬套座；58-取料座；59-卡块；510-勾爪；6-输送线A；7-输送线B；8-料座AGV小车；9-料座输送装置；10-料座；11-输送线C；12-治具AGV小车；13-治具输送装置；14-治具；15-下料座。
具体实施方式
需要说明的是，在不冲突的情况下，本发明中的实施例及实施例中的特征可以相互组合。
在本发明的描述中，需要理解的是，术语“中心”、“纵向”、“横向”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系，仅是为了便于描述本发明和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本发明的限制。此外，术语“第一”、“第二”等仅用于描述目的，而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此，限定有“第一”、“第二”等的特征可以明示或者隐含地包括一个或者更多个该特征。在本发明的描述中，除非另有说明，“多个”的含义是两个或两个以上。
在本发明的描述中，需要说明的是，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”应做广义理解，例如，可以是固定连接，也可以是可拆卸连接，或一体地连接；可以是机械连接，也可以是电连接；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通。对于本领域的普通技术人员而言，可以通过具体情况理解上述术语在本发明中的具体含义。
下面将参考附图并结合实施例来详细说明本发明。
如图1所示，一种脱胶机自动下料装置，包括支撑架1，所述支撑架1上设置有横向线性模组2，所述横向线性模组2的滑块A与纵向线性模组3相连，所述纵向线性模组3的滑块B上连接有安装架4，所述安装架4上安装有机械手5,所述滑块A可沿所述横向线性模组2的滑槽横向滑动，所述滑块B可沿所述纵向线性模组3的滑槽纵向滑动；
所述支撑架1下方设置有输送线A6，所述输送线A6由电机A驱动，所述输送线A6处设置有传感器，传感器可判断物料类型，所述输送线A6一端设置有输送线B7，所述输送线B7由电机B驱动，所述输送线A6另一端设置有输送线C11，所述输送线C11由电机C驱动；
所述输送线B7的外侧设置有料座AGV小车8，所述料座AGV小车8上端设置有料座输送装置9，所述料座输送装置9与输送线B7对接，所述输送线C11的外侧设置有治具AGV小车12，所述治具AGV小车12上端设置有治具输送装置13，所述治具输送装置13与所述输送线C11对接，所述料座输送装置9和治具输送装置13均为滚筒输送；
进一步的，所述支撑架1呈倒置的U形，所述支撑架1架设在所述输送线A6的上方；
如图2所示，所述机械手5包括安装座51，所述安装座51的纵截面呈矩形，所述安装座51由四块铝合金板通过螺栓连接构成；
所述安装座51内部对称布置有两个尾端相对的气缸52，所述气缸52固定在气缸连接座53上，所述气缸52的活塞杆与连接块54一侧相连，所述连接块54另一侧与光轴55一端相连，所述光轴55另一端穿过设置在安装座51端部的衬套56后与位于安装座51外侧的取料座58固定连接，所述取料座58面向安装座51的侧面上设置有卡块59，所述取料座8背向安装座51的侧面上设置有勾爪510，气缸开合带动光轴55伸缩，光轴55既可带动取料座58上的卡块59取放料座，又可带动取料座58上的勾爪510勾取治具；
进一步的，所述光轴55包括对称设置在连接块54上的光轴A和光轴B，光轴55起导向支撑作用；
进一步的，所述衬套56为无油衬套，所述衬套56设置在衬套座57上；
进一步的，所述安装座51上设置有若干个安装孔和过线孔。
本实例的工作过程：当硅棒在脱胶机内完成脱胶工序后，将带硅棒的脱胶治具移至脱胶机的下料座并且准确定位，定位完成后给机械手信号，机械手进行抓取工作，机械手首先将料座抓取放置到传送线A处，控制器控制电机A和电机B运动，使得料座由传送线A转移至传送线B，传送线B可以暂存四个料座，当传送线B处堆积四个料座后，向MES系统发送信号，由MES系统控制料座AGV小车下料，使得料座AGV小车可以一次性将四个料座运走至清洗间；取料座动作完成后，由人工取出硅片，取硅片动作完成后，给机械手信号抓取脱胶治具放置到传送线A处，然后控制电机A和电机C动作，使得脱胶治具由传送线A转移至传送线C，传送线C检测到脱胶治具后，给MES系统发信号，MES系统控制治具AGV小车运行至指定位置等待脱胶治具下料，治具AGV小车存满两个治具后自动输送至需要的工位。
以上所述仅为本发明的较佳实施例而已，并不用以限制本发明，凡在本发明的精神和原则之内，所作的任何修改、等同替换、改进等，均应包含在本发明的保护范围之内。

Claims (3)

1.一种脱胶机自动下料装置，其特征在于：包括支撑架(1)，所述支撑架(1)上设置有横向线性模组(2)，所述横向线性模组(2)的滑块A与纵向线性模组(3)相连，所述纵向线性模组(3)的滑块B上连接有安装架(4)，所述安装架(4)上安装有机械手(5),所述滑块A可沿所述横向线性模组(2)的滑槽横向滑动，所述滑块B可沿所述纵向线性模组(3)的滑槽纵向滑动；
所述支撑架(1)下方设置有输送线A(6)，所述输送线A(6)由电机A驱动，所述输送线A(6)处设置有传感器，所述输送线A(6)一端设置有输送线B(7)，所述输送线B(7)由电机B驱动，所述输送线A(6)另一端设置有输送线C(11)，所述输送线C(11)由电机C驱动；
所述输送线B(7)的外侧设置有料座AGV小车(8)，所述料座AGV小车(8)上端设置有料座输送装置(9)，所述料座输送装置(9)与输送线B(7)对接，所述输送线C(11)的外侧设置有治具AGV小车(12)，所述治具AGV小车(12)上端设置有治具输送装置(13)，所述治具输送装置(13)与所述输送线C(11)对接。
2.根据权利要求1所述的脱胶机自动下料装置，其特征在于：所述支撑架(1)呈倒置的U形，所述支撑架(1)架设在所述输送线A(6)的上方。
3.根据权利要求1或2所述的脱胶机自动下料装置，其特征在于：所述料座输送装置(9)和治具输送装置(13)均为滚筒输送。
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CN106995140A (zh) * 2017-05-05 2017-08-01 天津中环半导体股份有限公司 一种用于粘接晶棒的全自动粘棒机组
CN107140313A (zh) * 2017-07-05 2017-09-08 中冶华天工程技术有限公司 一种氧化镁喷枪自动存放与更换装置及使用方法
CN111403322A (zh) * 2020-04-24 2020-07-10 江苏芯梦半导体设备有限公司 晶圆片剥离装置
CN116705916A (zh) * 2023-08-07 2023-09-05 无锡安鑫卓越智能科技有限公司 一种光伏组件修复装置

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