CN106119802B - 一种原子团簇束流的针对有机体的纳米加工方法与设备 - Google Patents
一种原子团簇束流的针对有机体的纳米加工方法与设备 Download PDFInfo
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- CN106119802B CN106119802B CN201610622687.1A CN201610622687A CN106119802B CN 106119802 B CN106119802 B CN 106119802B CN 201610622687 A CN201610622687 A CN 201610622687A CN 106119802 B CN106119802 B CN 106119802B
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/48—Ion implantation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/221—Ion beam deposition
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Abstract
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Priority Applications (1)
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CN201610622687.1A CN106119802B (zh) | 2016-08-01 | 2016-08-01 | 一种原子团簇束流的针对有机体的纳米加工方法与设备 |
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CN201610622687.1A CN106119802B (zh) | 2016-08-01 | 2016-08-01 | 一种原子团簇束流的针对有机体的纳米加工方法与设备 |
Publications (2)
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CN106119802A CN106119802A (zh) | 2016-11-16 |
CN106119802B true CN106119802B (zh) | 2018-12-18 |
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CN201610622687.1A Active CN106119802B (zh) | 2016-08-01 | 2016-08-01 | 一种原子团簇束流的针对有机体的纳米加工方法与设备 |
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Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN111705303B (zh) * | 2020-06-23 | 2021-08-27 | 南京大学 | 一种差分的空气动力学设计在气体团簇束流源应用与装置 |
CN111721599B (zh) * | 2020-06-23 | 2021-08-27 | 南京大学 | 一种原子级材料束流在真空中变温液体包覆收集方法与装置 |
CN113144760B (zh) * | 2021-02-02 | 2022-07-01 | 浙江工业大学 | 一种便于对中的团簇束流过滤器及其应用 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101983914A (zh) * | 2010-10-21 | 2011-03-09 | 南京大学 | 制备微观数密度或尺寸梯度金属纳米粒子点阵的方法 |
CN103816569A (zh) * | 2014-02-28 | 2014-05-28 | 宋凤麒 | 一种气相Ag纳米颗粒处理的植入体医用材料的方法 |
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2016
- 2016-08-01 CN CN201610622687.1A patent/CN106119802B/zh active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101983914A (zh) * | 2010-10-21 | 2011-03-09 | 南京大学 | 制备微观数密度或尺寸梯度金属纳米粒子点阵的方法 |
CN103816569A (zh) * | 2014-02-28 | 2014-05-28 | 宋凤麒 | 一种气相Ag纳米颗粒处理的植入体医用材料的方法 |
Non-Patent Citations (2)
Title |
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团簇离子束纳米加工技术研究进展;张早娣等;《中国表面工程》;20141231;第27卷(第6期);28-43 * |
颗粒尺寸和数密度可独立调控的Pb纳米颗粒薄膜的气相制备;贺龙兵等;《功能材料与器件学报》;20080229;第14卷(第1期);175-178 * |
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