CN106001941A - Laser wire-drawing die perforating machine and linear frequency conversion control method thereof - Google Patents
Laser wire-drawing die perforating machine and linear frequency conversion control method thereof Download PDFInfo
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- CN106001941A CN106001941A CN201610289706.3A CN201610289706A CN106001941A CN 106001941 A CN106001941 A CN 106001941A CN 201610289706 A CN201610289706 A CN 201610289706A CN 106001941 A CN106001941 A CN 106001941A
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- laser
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/0823—Devices involving rotation of the workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
- Punching Or Piercing (AREA)
Abstract
The present invention relates to a laser wire-drawing die perforating machine and a linear frequency conversion control method thereof. The laser wire-drawing die perforating machine comprises a computer control system, an encoding and driving unit, a motion system, a laser device, a rotating system, a focused imaging system, a light beam transmission system and a die and further comprises a supporting platform. According to the laser wire-drawing die perforating machine and the linear frequency conversion control method thereof, the linear frequency conversion control method is adopted; uniform removing of materials is achieved in the laser perforating process; the machining precision is improved; excessive machining is avoided; and the hole shape quality is ensured.
Description
Technical field
The present invention relates to a kind of laser drawing mould puncher and linear method for controlling frequency conversion thereof, a kind of laser drawing mould puncher for high-precision laser punching and linear method for controlling frequency conversion thereof.
Background technology
The fast development of IC industry has also driven related industry, particularly upstream base industry is flourish, as integrated circuit, the critical material of large scale integrated circuit, along with integrated circuit and semiconductor device are to encapsulation multilead, high integration and miniaturization, the technical specification of bonding gold wire is more and more higher, high-purity, high temperature, silk material demand ultra-fine, overlength increase rapidly, therefore, are greatly increased the demand of leads of IC mould.Diamond and artificial single crystal's diamond are the preferable materials of leads of IC mould, usually diamond integrated circuit precise lead mould includes the several region of continuous print, initial hole is typically completed by laser processing technology, in order to obtain submicron order precision and mirror finish, typically will be through grinding and glossing.But the grinding of diamond and polishing are the most tired, pass and quality after Laser Processing decide and grind and the removal amount of polishing, affect quality and the working (machining) efficiency of mould.
The Laser Processing of diamond lead-in wire mould typically uses the laser beam of altofrequency, narrow spaces.Each pulse has higher energy density, but total energy is little.This makes the material of tiny area reliably can gasify within moment, stays next micro-hole on mould.In laser processing procedure, through the method frequently with digital control scanning, join together in substantial amounts of micro-hole, has the most just obtained the pass of three-dimensional.For integrated circuit precise lead mould, its pass generally comprise entrance, lubricate, compress, sizing, back taper and outlet area.
Traditional laser boring mode is contoured method, it be at present through frequently with laser boring method, its ultimate principle is as shown in Figure 1: laser beam focuses at die surface, workpiece rotates along Z axis with certain rotating speed, laser beam is radially scanned from mold center to edge, R is sweep radius, its biosynthesis locus is spiral of Archimedes, after layer of material is removed, laser focal declines Δ Z, sweep radius is kept to R-Δ R, another layer material of laser ablation, until the material of whole thickness H is by ablation.
The rotating speed of traditional laser boring model workpiece is constant, the frequency of laser output is constant, the linear velocity of point diminishes along with the reduction of sweep radius, the overlap in ablation hole becomes closeer, as shown in Figure 2, therefore laser beam is closer to the center in hole, the material removed is the most, and this will cause workpiece centre excessively to be removed, and in laser processing procedure, center ablation is more serious than edge, before numerical control program terminates, the center in hole can penetrate too early, and ablation cicatrix is serious, has a strong impact on crudy, therefore, accurate pass hardly results in.
Summary of the invention
For solving the problems referred to above, the present invention provides a kind of laser drawing mould puncher and linear method for controlling frequency conversion thereof.Design of the present invention is as follows:
A kind of laser drawing mould puncher is provided, it is characterised in that: include computer control system, coding and driver element, motor system, laser instrument, rotary system, focusing image-forming system, beam delivery system, mould；Motor system includes X-axis translation stage, Y-axis translation stage, Z axis translation stage, rotary system includes turntable, centring tongs, driving motor, focusing image-forming system includes that amasthenic lens, CCD, display, coding and driver element include rotating and drives control unit, motor system control unit, measurement of coordinates unit, laser drive unit；Computer control system respectively with coding and driver element, focusing image-forming system connects, coding and driver element respectively with motor system, laser instrument, rotary system connects, rotate and drive control unit to connect rotary system, motor system control unit is connected motor system with measurement of coordinates unit, laser drive unit connecting laser, laser instrument connects focusing image-forming system through beam delivery system, turntable is arranged on the X-axis translation stage of motor system, mould is installed on a spinstand by centring tongs, corresponding installation Z axis translation stage above mould, amasthenic lens is arranged on Z axis translation stage, motor system also includes coordinates feedback system, coordinates feedback system is connected with measurement of coordinates unit.
A kind of laser drawing mould puncher as described above, it is characterised in that: also including support platform, motor system is arranged in support platform, and support platform uses marble support frame structure.
A kind of laser drawing mould puncher as described above, it is characterised in that: centring tongs 5 use self-centering clamp, and turntable uses high-precision high-speed turntable, and focusing image-forming system can use micro-focusing image-forming system.
A kind of laser drawing mould puncher as described above, it is characterised in that: the optical maser wavelength that laser instrument uses be 1.064 μm, 10.6 μm, 0.532 micron, 0.355 micron, 0.266 micron.
A kind of laser drawing mould puncher as described above, it is characterised in that: laser instrument uses solid state laser, gas laser or optical fiber laser.
A kind of laser drawing mould puncher as described above, it is characterised in that: coordinates feedback system uses grating scale, motor encoder.
The linear method for controlling frequency conversion of a kind of a kind of laser drawing mould puncher as described above is provided, it is characterised in that: comprise the following steps:
User is by required processing hole shape parameter input computer control system, computer control system calculates control parameter according to setup parameter and inputs to coding and driver element, and parameter includes processing hole shape parameter, laser power parameters, motor system parameter, rotary system parameter；Rotate and drive control unit to control to drive motor, platform is rotated rotate, when after invariablenes turning speed, laser drive unit controls laser works, including controlling laser output power and laser initial operating frequency, also including mould circle centre position laser work frequency, motor system control unit is moved by setting speed and acceleration according to computer control system order-driven X-axis translation stage simultaneously；Coordinates feedback systematic survey displacement in moving process, and displacement is encoded real-time Transmission to measurement of coordinates unit, position coordinates is carried out data process and is transferred to computer control system by measurement of coordinates unit, computer control system is according to the processing hole shape parameter inputted and laser power parameters, calculate frequency conversion data volume, control laser drive unit in real time and change laser frequency, control laser instrument to export according to motor system coordinate position relation frequency conversion in real time, conversion process follows X-axis translation stage kinematic parameter all the time, until a layer plane machines, the motion of X-axis translation stage returns initial point；After computer control system judges that X-axis translation stage returns initial point, instruction motor system control unit drives Z axis translation stage to decline one layer of processing thickness, repeat X-axis translation stage and move frequency conversion processing drill process, control the linear frequency conversion of laser beam, successively accumulate processing, make laser beam by archimedes curve track processing hole shape, eventually form set processing hole shape.
A kind of laser drawing mould puncher of present invention offer and linear method for controlling frequency conversion thereof, it has the beneficial effect that
Use linear method for controlling frequency conversion, laser drilling process achieves the uniform removal of material, improves machining accuracy, there is no overprocessing, it is ensured that hole form quality amount.Laser drawing mould puncher device structure is stable, easy to operate, precision is high, efficiency is high, safe and reliable, low in energy consumption, reduce user use cost.
Accompanying drawing explanation
Fig. 1 existing laser boring schematic diagram
Fig. 2 existing laser boring design sketch
Fig. 3 laser drawing mould puncher overall diagram
Fig. 4 laser drawing mould puncher side view
Fig. 5 laser drawing mould drilling system figure
Fig. 6 laser linear conversion procedure figure
Fig. 7 laser linear frequency conversion punching schematic diagram
Fig. 8 laser linear frequency conversion punching design sketch
Detailed description of the invention
Below in conjunction with drawings and the specific embodiments, the present invention is further elaborated.In figure:
1 computer control system, 2 codings and driver element, 3 motor systems, 31X axle translation stage, 32Y axle translation stage, 33Z axle translation stage, 4 laser instrument, 5 rotary systems, 51 turntables, 52 centring tongs, 53 driving motors, 6 focusing image-forming systems, 61 amasthenic lens, 62CCD, 63 display, 7 beam delivery system, 8 moulds, 9 support platforms, 21 rotations drive control unit, 22 motor system control units, 23 measurement of coordinates unit, 24 laser drive unit；621 laser beams, 622 processing hole shapes, 623 archimedes curve tracks, 311 coordinates feedback systems.
Embodiment 1
As shown in Figure 3, it is provided that a kind of laser drawing mould puncher, including computer control system 1, coding and driver element 2, motor system 3, laser instrument 4, rotary system 5, focusing image-forming system 6, beam delivery system 7, mould 8；Motor system 3 includes X-axis translation stage 31, Y-axis translation stage 32, Z axis translation stage 33, rotary system 5 includes turntable 51, centring tongs 52, drives motor 53, focusing image-forming system 6 includes that amasthenic lens 61, CCD62, display 63, coding and driver element 2 include rotating and drives control unit 21, motor system control unit 22, measurement of coordinates unit 23, laser drive unit 24；nullComputer control system 1 respectively with coding and driver element 2、Focusing image-forming system 6 connects，Coding and driver element 2 respectively with motor system 3、Laser instrument 4、Rotary system 5 connects，Rotate and drive control unit 21 to connect rotary system 5，Motor system control unit 22 is connected motor system 3 with measurement of coordinates unit 23，Laser drive unit 24 connecting laser 4，Laser instrument 4 connects focusing image-forming system 6 through beam delivery system 7，Turntable 51 is arranged on the X-axis translation stage 31 of motor system 3，Mould 8 is arranged on turntable 51 by centring tongs 52，Corresponding installation Z axis translation stage 33 above mould 8，Amasthenic lens 61 is arranged on Z axis translation stage 33，Motor system 3 includes coordinates feedback system 311，Coordinates feedback system 311 is connected with measurement of coordinates unit 23.
Embodiment 2
A kind of laser drawing mould puncher is provided, it is characterised in that: include computer control system 1, coding and driver element 2, motor system 3, laser instrument 4, rotary system 5, focusing image-forming system 6, beam delivery system 7, mould 8, support platform 9；Motor system 3 includes X-axis translation stage 31, Y-axis translation stage 32, Z axis translation stage 33, rotary system 5 includes turntable 51, centring tongs 52, drives motor 53, focusing image-forming system 6 includes that amasthenic lens 61, CCD62, display 63, coding and driver element 2 include rotating and drives control unit 21, motor system control unit 22, measurement of coordinates unit 23, laser drive unit 24；nullComputer control system 1 respectively with coding and driver element 2、Focusing image-forming system 6 connects，Coding and driver element 2 respectively with motor system 3、Laser instrument 4、Rotary system 5 connects，Rotate and drive control unit 21 to connect rotary system 5，Motor system control unit 22 is connected motor system 3 with measurement of coordinates unit 23，Laser drive unit 24 connecting laser 4，Laser instrument 4 connects focusing image-forming system 6 through beam delivery system 7，Turntable 51 is arranged on the X-axis translation stage 31 of motor system 3，Mould 8 is arranged on turntable 51 by centring tongs 52，Corresponding installation Z axis translation stage 33 above mould 8，Amasthenic lens 61 is arranged on Z axis translation stage 33，Motor system 3 includes coordinates feedback system 311，Coordinates feedback system 311 is connected with measurement of coordinates unit 23；Motor system 3 is arranged in support platform 9.
Thering is provided a kind of laser drawing mould puncher, support platform 9 uses marble support frame structure, makes structure more firm, reduces vibration, is beneficial to improve machining accuracy.
Embodiment 3
Thering is provided a kind of laser drawing mould puncher, centring tongs 52 can use self-centering clamp, rotary mold fixture 52 to have self-centering function, it is possible to is automatically aligned with rotating the heart in the mould center of circle according to mould cylindrical, to heart precision less than 10 microns.Turntable uses high-precision high-speed turntable, and turntable bearing can be mechanical ball bearing, air-bearing, oil pressure bearing, rotary speed 1-3000 rev/min of turntable, and circular runout is less than 1 micron.
Embodiment 4
Thering is provided a kind of laser drawing mould puncher, focusing image-forming system can use micro-focusing image-forming system.Micro imaging system is made up of optical amplifier and CCD amplification, and wherein optical amplifier object lens are laser focusing lens simultaneously, focal length of lens 10mm-200mm, laser focusing focus 5 microns--and 20 microns.Micro-focusing image-forming system enlargement ratio 10--1000 times.
Embodiment 5
Thering is provided a kind of laser drawing mould puncher, coordinates feedback system 311 uses grating scale, motor encoder, measurement of coordinates unit 23 to use single-chip microcomputer, CPLD, FPGA processor etc..
Embodiment 6
Thering is provided a kind of laser drawing mould puncher, laser instrument 4 uses solid state laser, gas laser, optical fiber laser etc..Use optical maser wavelength includes: 10.6 microns, 1.064 μm, 0.532 micron, 0.355 micron, 0.266 micron etc..Laser instrument uses Q-regulating technique, and adjusting Q mode is acousto-optic Q modulation or electric-optically Q-switched, output laser pulse width 5-200ns, output frequency 10Hz-100KHz, and laser instrument may be used without mode-locked laser, psec or the output of femtosecond pulsewidth.
The laser drawing mould puncher of the present invention have employed the laser frequency removal technology of advanced person, in laser drilling process, it is achieved that the uniform removal of material, and its operation principle is as follows:
From figure it is known that on workpiece, the linear velocity of certain point is represented by:
The linear velocity of workpiece is relevant with the shape in material ablation district, and its relation can represent with following formula:
V=f × Δ (2)
Wherein Δ is the distance of 2 adjacent ablation points, and f is laser repetition rate, if f is definite value, the increase with v is increased by Δ, reduces along with the reduction of v.
General Laser Processing laser frequency f is definite value, or along with Z-direction is layered frequency conversion, is all not fee from and removes uneven problem.And we use the laser frequency technology of advanced person, namely laser frequency is along with the movement of workpiece X-direction, linear change, thus the distance, delta realizing 2 adjacent ablation points is constant, the purpose uniformly removed can be reached, be especially more suitable in the shape processing of high-precision hole.
The laser drawing mould puncher of the present invention, its linear method for controlling frequency conversion comprises the following steps:
User is by required processing hole shape parameter input computer control system 1, computer control system calculates control parameter according to setup parameter and inputs to coding and driver element 2, and parameter includes processing hole shape parameter, laser power parameters, motor system parameter, rotary system parameter；Rotate and drive control unit 21 to control to drive motor 53, platform 51 is rotated rotate, when after invariablenes turning speed, laser drive unit 24 controls laser instrument 4 and works, including controlling laser output power and laser initial operating frequency, also including mould 8 circle centre position laser work frequency, motor system control unit 22 is moved by setting speed and acceleration according to computer control system order-driven X-axis translation stage 31 simultaneously；In moving process, coordinates feedback system 311 measures displacement, and displacement is encoded real-time Transmission to measurement of coordinates unit 23, position coordinates is carried out data process and is transferred to computer control system 1 by measurement of coordinates unit 23, computer control system 1 is according to the processing hole shape parameter inputted and laser power parameters, calculate frequency conversion data volume, the instant laser drive unit 24 that controls changes laser frequency, control laser instrument 4 to export according to motor system 3 coordinate position relation frequency conversion in real time, conversion process follows X-axis translation stage kinematic parameter all the time, until a layer plane machines, the motion of X-axis translation stage returns initial point；After computer control system 1 judges that X-axis translation stage returns initial point, instruction motor system control unit 22 drives Z axis translation stage 33 to decline one layer of processing thickness, repeat X-axis translation stage and move frequency conversion processing drill process, control the linear frequency conversion of laser beam 621, successively accumulate processing, make laser beam process hole shape by archimedes curve track 623, eventually form set processing hole shape.
Using the laser drawing mould puncher of the present invention, the control method of its processing hole shape 622 comprises the following steps:
After system boot, initializing, computer control system 1 control motor system 3 coordinate zero, output control command gives coding and driver element 2, controls motor system 3 and returns for machining state；Manual installation mould 8 is on self-centering chuck 52；Mold thickness and height parameter input computer control system, computer software automatically calculates adjustment startup Z axis translation stage 33 and moves, adjusts focusing image-forming system 6 and move on mould 8, imaging clearly machined surface, the focal plane of blur-free imaging Laser Processing simultaneously；Start turntable 51 work to rotate, according to the axis of rotation of display 63 display, control to adjust X mobile station 31 and Y mobile station 32 so that laser spot and axis of rotation overlap；Input Laser Processing hole shape parameter, computer control system starts processor, laser instrument 4 starts, laser beam 621 focuses in processing hole shape 622 by amasthenic lens 61, turntable driven mold 8 rotates, X-axis translation stage 31 moves simultaneously so that laser is processed by archimedes curve track 623, completes the removal of plane；After processing when one layer, Z axis screen moving stage 33 moves down, and laser starts to process next layer, successively accumulates processing, eventually forms set processing hole shape.
The laser drawing mould puncher of the present invention and drilling method thereof, machinable workpiece material includes: diamond, diamond, polycrystalline material, pottery, glass, sapphire, ruby, metal etc..
A kind of laser drawing mould puncher of present invention offer and linear method for controlling frequency conversion thereof, it has the beneficial effect that the linear method for controlling frequency conversion of employing, achieves the uniform removal of material, improve machining accuracy in laser drilling process, there is no overprocessing, it is ensured that hole form quality amount.Laser drawing mould puncher device structure is stable, easy to operate, precision is high, efficiency is high, safe and reliable, low in energy consumption, reduce user use cost.
Along with the development of manufacturing improves, the requirement to laser boring is more and more higher, has all arrived the micron even requirement of nano-precision in the control of hole shape, the circularity in hole, the fineness of inwall.The most traditional processing technique increasingly cannot meet requirement.We are by the improvement to device structure, improve precision, and the use of distinctive linear laser processing method, have reached the level that traditional handicraft cannot realize.In micropore field, we achieve micron-sized micropore, and inwall fineness reaches nanometer level.In middle macropore field, in the case of the most ground, our Direct Laser in industry achieves processing inwall frosted the sense even processing effect of minute surface sense, causes the extensive concern of industry.
The above; being only the present invention preferably detailed description of the invention, but protection scope of the present invention is not limited thereto, any those familiar with the art is in the technical scope that the invention discloses; the change that can readily occur in or replacement, all should contain within protection scope of the present invention.
Claims (7)
1. a laser drawing mould puncher, it is characterised in that: include computer control system 1, coding and driver element 2, motion
System 3, laser instrument 4, rotary system 5, focusing image-forming system 6, beam delivery system 7, mould 8；Motor system 3 includes
X-axis translation stage 31, Y-axis translation stage 32, Z axis translation stage 33, rotary system 5 include turntable 51, centring tongs 52,
Driving motor 53, focusing image-forming system 6 includes that amasthenic lens 61, CCD62, display 63, coding and driver element 2 wrap
Include rotation and drive control unit 21, motor system control unit 22, measurement of coordinates unit 23, laser drive unit 24；Calculate
Machine control system 1 is connected with coding and driver element 2, focusing image-forming system 6 respectively, coding and driver element 2 respectively with fortune
Dynamic system 3, laser instrument 4, rotary system 5 connect, and rotate and drive control unit 21 to connect rotary system 5, motor system control
Unit 22 processed is connected motor system 3, laser drive unit 24 connecting laser 4, laser instrument 4 warp with measurement of coordinates unit 23
Crossing beam delivery system 7 and connect focusing image-forming system 6, turntable 51 is arranged on the X-axis translation stage 31 of motor system 3,
Mould 8 is arranged on turntable 51 by centring tongs 52, corresponding installation Z axis translation stage 33, amasthenic lens above mould 8
61 are arranged on Z axis translation stage 33, and motor system 3 also includes coordinates feedback system 311, coordinates feedback system 311 and coordinate
Measuring unit 23 connects.
A kind of laser drawing mould puncher the most according to claim 1, it is characterised in that: also include support platform 9, kinetic system
System 3 is arranged in support platform 9, and support platform 9 uses marble support frame structure.
A kind of laser drawing mould puncher the most according to claim 1, it is characterised in that: centring tongs 52 use self-centering card
Tool, turntable uses high-precision high-speed turntable, and focusing image-forming system can use micro-focusing image-forming system.
A kind of laser drawing mould puncher the most according to claim 1, it is characterised in that: the optical maser wavelength that laser instrument 4 uses is
1.064 μm, 10.6 μm, 0.532 micron, 0.355 micron, 0.266 micron.
A kind of laser drawing mould puncher the most according to claim 1, it is characterised in that: laser instrument 4 use solid state laser,
Gas laser or optical fiber laser.
A kind of laser drawing mould puncher the most according to claim 1, it is characterised in that: coordinates feedback system 311 uses grating
Chi, motor encoder.
7. the linear method for controlling frequency conversion of a laser drawing mould puncher, it is characterised in that: specifically include following steps: user is by institute
The processing hole shape parameter input computer control system 1 needed, it is defeated that computer control system calculates control parameter according to setup parameter
Entering to coding and driver element 2, parameter includes processing hole shape parameter, laser power parameters, motor system parameter, rotary system
Parameter；Rotate and drive control unit 21 to control to drive motor 53, platform 51 is rotated and rotates, when, after invariablenes turning speed, laser drives
Moving cell 24 controls laser instrument 4 and works, and including controlling laser output power and laser initial operating frequency, also includes mould 8
Circle centre position laser work frequency, motor system control unit 22 is according to computer control system order-driven X-axis translation stage simultaneously
31 are moved by setting speed and acceleration；In moving process, coordinates feedback system 311 measures displacement, and by real-time for displacement coding
Being transferred to measurement of coordinates unit 23, position coordinates is carried out data process and is transferred to computer control system 1 by measurement of coordinates unit 23,
Computer control system 1, according to the processing hole shape parameter inputted and laser power parameters, calculates frequency conversion data volume, controls in real time to swash
Optical drive unit 24 changes laser frequency, controls laser instrument 4 and exports according to motor system 3 coordinate position relation frequency conversion in real time, becomes
Frequently process follows X-axis translation stage kinematic parameter all the time, until a layer plane machines, the motion of X-axis translation stage returns initial point；
After computer control system 1 judges that X-axis translation stage returns initial point, instruction motor system control unit 22 drives Z axis translation stage
33 decline one layer processing thickness, repeat X-axis translation stage move frequency conversion processing drill process, control the linear frequency conversion of laser beam 621,
Successively accumulate processing, make laser beam process hole shape by archimedes curve track 623, eventually form set processing hole shape.
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| CN115476058A (en) * | 2022-09-23 | 2022-12-16 | 南通海林汽车橡塑制品有限公司 | Drilling processing equipment for automobile rubber and plastic products |
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| CN111250878A (en) * | 2020-03-30 | 2020-06-09 | 杨建峰 | Four-axis laser cutting and punching machine for machining wire-drawing die and punching method |
| CN111250878B (en) * | 2020-03-30 | 2022-04-12 | 杨建峰 | Four-axis laser cutting and punching machine for machining wire-drawing die and punching method |
| CN115476058A (en) * | 2022-09-23 | 2022-12-16 | 南通海林汽车橡塑制品有限公司 | Drilling processing equipment for automobile rubber and plastic products |
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Effective date of registration: 20211022 Address after: 101399 Room 101, unit 1, building 7, yard 4, renheyuan Second Street, Renhe Town, Shunyi District, Beijing Patentee after: Liandong Renhe (Beijing) Technology Co.,Ltd. Address before: Room 601, unit 7, 13th floor, Dongli Second District, chaoxinjiayuan, Chaoyang District, Beijing 100018 Patentee before: Zhang Yufeng |