JP5695215B2 - Judgment method of processing means in ultra-precise composite processing apparatus and ultra-precise composite processing apparatus - Google Patents

Description

  The present invention relates to a method for determining a processing means in an ultra-precise composite machining apparatus and an ultra-precise composite machining apparatus. More specifically, the present invention relates to an ultra-precise composite processing apparatus for obtaining a fine workpiece by ultra-precise composite processing from a workpiece, and a method for determining processing means of the apparatus.

  In the general industrial field, machine tool processing for partially scraping off a material such as metal, wood or plastic to create a desired shape has been performed. For example, a desired product / part can be created by performing cutting such as turning, milling, and planing.

  When it is necessary to mass-produce complex products / parts, it is a general practice to manufacture a mold for molding by machining and manufacture various molded products using the mold. In particular, in recent years, electrical and electronic devices have been reduced in size and performance year by year, and naturally there has been a demand for reduction in size and performance of components and the like used therein. Accordingly, there is a need for a mold for molding various parts and products corresponding to such miniaturization and high performance, with accuracy corresponding to such miniaturization.

Japanese Patent Laid-Open No. 9-225947 JP 2001-79854 A

  However, when manufacturing a mold product corresponding to the recent miniaturization, it cannot be said that a sufficiently satisfactory response can be achieved simply by following conventional machining. For example, when cutting difficult-to-cut materials such as cemented carbide and hardened steel to obtain a die product, the tool life is short and not only causes an increase in manufacturing cost, but also requires a long processing time. It was. This becomes more remarkable as the mold product becomes smaller or finer. Therefore, in reality, it is necessary to change the shape of the molded product (that is, the shape of the mold or the target product shape).

  Although it is conceivable to suitably select the type of cutting tool, since the cutting is to be scraped off due to contact with the work material to the last, there is no change in the short tool life, A huge amount of time is required for processing. Although non-contact processing such as laser processing can be considered, laser processing is not suitable for high-precision processing because it is based on heat generation processing caused by the work material absorbing laser light (particularly surface roughness). It is generally considered that it cannot be used for fine products that require high accuracy and shape accuracy).

  Here, it is conceivable to use a plurality of processing means sequentially in the cutting process, but depending on the shape to be processed, there are cases where it is not effective just to carry out a predetermined processing order as prescribed. For example, depending on the machining shape and the machining location, it may be possible to reduce the overall machining time by directly using the subsequent processing means without implementing the initially determined processing means. However, it is troublesome to make such a determination with human intervention. It is conceivable to create machining data in advance. However, since there are elements that can depend on various machining shapes and machining locations, the processing data is similarly complicated, and the time required for data creation becomes long.

  The present invention has been made in view of the above circumstances. That is, an object of the present invention is to provide a method for determining a processing means in a processing apparatus suitable for manufacturing a small product (particularly a fine product having a fine structure portion) and to obtain processing data that can be used for such determination. It is to provide an ultra-precise combined machining apparatus including a system having the above-described system.

In order to solve the above problems, the present invention is a method for determining a processing means in an ultra-precise composite processing apparatus that manufactures a fine workpiece from a workpiece,
Ultra precision combined processing equipment
Electromagnetic wave processing means for roughing the workpiece (ie, electromagnetic wave processing device);
Precision machining means (i.e., precision machining devices) for performing precision machining on roughened workpieces; and for measuring the shape of the workpiece upon use of electromagnetic machining means and precision machining means Shape measuring means (ie, shape measuring device)
Comprising
In judging the processing means,
Information on the three-dimensional model of the fine workpiece;
Information on the removal volume removed from the workpiece during the production of fine workpieces; and “Data on removal processing time of electromagnetic machining means” and “Data on removal processing time of precision machining means”
The method of determining whether to use electromagnetic wave processing means or to use precision machining means is provided.

In a preferable aspect, the preprocessing of the determination of the processing means is performed using the three-dimensional CAD data on the final shape of the workpiece, and in such preprocessing,
Whether to create an offset surface that is offset by a specified amount from each surface of the final shape of the workpiece, and whether to implement electromagnetic wave processing means depending on whether the offset surface is located inside the outermost surface level of the workpiece Judge whether or not.

  When there is an offset surface located inside the outermost surface level of the workpiece, the area surrounded by the offset surface located inside the outermost surface and the outermost surface level is a “provisional electromagnetic wave processing part” It is preferable to extract as

  In addition, it is preferable to determine whether or not the electromagnetic wave processing unit should be implemented by comparing the shape of the obtained “provisional electromagnetic wave processing unit” with a processable shape database of the electromagnetic wave processing unit.

  Further, the volume of the obtained “provisional electromagnetic wave processing portion” is calculated, and the calculated processing time A required for the calculated volume based on the correlation data A between the removal volume and the removal processing time relating to the electromagnetic wave processing means. And calculating the required processing time B based on the correlation data B between the removal volume and the removal processing time relating to the precision machining means, and comparing the processing time A with the processing time B. It is preferable to determine whether or not to perform electromagnetic wave processing means. When comparing the processing time A and the processing time B, it is preferable to consider indirect time conditions such as setup time required for switching from the electromagnetic wave processing means to the precision machining means.

  In the processing means determination method according to the present invention, it is preferable to sequentially perform the above extraction and comparison. That is, (a) extraction of the provisional electromagnetic wave processable part, (b) comparison of the shape of the temporary electromagnetic wave processing part and the electromagnetic wave processable shape database, and (c) the processing time A and the processing time B These comparisons are preferably performed sequentially.

  Note that the electromagnetic wave processing means may be a laser processing means as far as the ultra-precise composite processing apparatus that is the object of the processing means judgment method. In the precision machining means, a cutting tool selected from the group consisting of a planar processing tool, a shaper processing tool, a fly cut processing tool, a diamond turning processing tool, and a micro milling processing tool may be replaceable.

  Furthermore, the ultra-precise combined machining apparatus further includes means (that is, a control device) for controlling the electromagnetic wave machining means or the precision machining means based on the information on the shape of the workpiece measured by the shape measuring means. It may be a thing.

  The fine part size of the fine workpiece is in the range of several tens of nm to several mm, that is, about 10 nm to about 15 mm or about 10 nm to about 3 mm (for example, about 10 nm to 500 μm or about 50 nm to 1 μm, or in some cases 1 nm to 1 μm) ). Examples of the fine processed product having such a fine part size include an optical lens mold or an optical lens.

The present invention also provides an ultra-precise combined machining apparatus. Such an ultra-precise composite processing apparatus is an ultra-precise composite processing apparatus that manufactures a fine workpiece from a workpiece,
Electromagnetic wave processing means for roughing the workpiece;
Precision machining means for performing precision machining on the rough-cut workpiece; and shape measuring means for measuring the shape of the workpiece when using the electromagnetic wave machining means and the precision machining means. In addition, the ultra-precise combined machining apparatus further comprises a system including a storage unit storing processing data used for the ultra-precise combined machining apparatus,
The processing data includes information on the three-dimensional model of the fine workpiece; information on the removal volume removed from the workpiece during the production of the fine workpiece; and data on the removal processing time of the electromagnetic wave processing means and the precision machining means Based on data relating to the removal processing time, the processing data is used to determine whether to use electromagnetic wave processing means or to use precision machining means.

  In a preferred aspect, the machining data is obtained by using the three-dimensional CAD data of the final shape of the workpiece, and the offset surface offset by a specified amount from each surface of the final shape is inside the outermost surface level of the workpiece. The processing data is used to determine whether or not to implement the electromagnetic wave processing means depending on whether or not it is located at the position.

  In another preferable aspect, when the offset data located inside the outermost surface level of the workpiece exists, the machining data is calculated by the offset surface located inside the workpiece and the outermost surface level of the workpiece. The enclosed area is used as a temporary electromagnetic wave processing unit, and the shape in the temporary electromagnetic wave processing unit is compared with the processable shape database of the electromagnetic wave processing unit to determine whether to implement the electromagnetic wave processing unit. It is data.

  In still another preferred aspect, the processing data calculates a temporary volume of the electromagnetic wave processing portion, and the calculated volume is based on the correlation data A between the removal volume related to the electromagnetic wave processing means and the removal processing time. The machining time A is calculated, the machining time B based on the correlation data B between the removal volume and the removal machining time relating to the precision machining means is calculated, and the machining time A and the machining time B are compared to calculate the electromagnetic wave. It is processing data for determining whether or not to implement the processing means.

  First, regarding the effects of ultra-precise combined machining equipment that uses the judgment method of machining means, even when machining from difficult-to-cut materials such as cemented carbide materials and hardened steel, in a short time and with high precision conditions. A fine structure can be obtained.

  Specifically, roughing of the workpiece is performed by non-contact electromagnetic machining as primary processing (particularly, most of the material to be processed by such roughing is removed), and thereafter, with a cutting tool that can be replaced as appropriate. Since precision machining is performed as secondary machining, the tool life is extended and machining time is greatly reduced. For example, as compared with a conventional method such as the case of manufacturing a fine structure from a difficult-to-cut material using all cutting tools as in the prior art, the present invention can reduce the manufacturing time by about 50 to 80%. In addition, surface roughness accuracy and shape accuracy are reduced due to precision machining with a tool that can be replaced as appropriate along with on-machine measurement while greatly reducing machining time by roughing by electromagnetic wave machining. High precision specifications can be achieved. Accordingly, it is possible to suitably reduce the size and size of the mold product without changing the originally intended shape of the molded product (that is, the shape of the product and the target product shape). It can respond suitably to miniaturization and miniaturization of devices and various parts used in them. This means that a desired small and fine product can be designed without the manufacturing process itself becoming an “impediment”, which leads to the design and development of a further high-performance small electric / electronic device.

  In the method for determining a processing means of the present invention (and an ultra-precise combined processing apparatus having a storage unit storing processing data that can be determined), the processing shape and processing The “electromagnetic wave processing means” and the “precision machining means” can be used properly according to the location, and the processing time can be effectively shortened. In other words, it is possible to directly carry out the subsequent precision machining as appropriate according to the actual machining shape and machining location while using the electromagnetic machining means as the previous stage and using the precision machining means as the subsequent stage. The total machining time can be effectively shortened. This means that the time required from the workpiece to the target shape is reduced as a whole.

  In the first place, the use of processing means is not based on human judgment, and it can be said that efficient processing can be realized from this viewpoint. That is, according to the present invention, it is possible to omit or shorten the human judgment time and the human work time at the time of actual machining operation or creation of machining data.

FIG. 1 is a perspective view schematically showing a configuration of an ultra-precise combined machining apparatus. FIG. 2 is a schematic diagram for explaining the characteristics of the ultra-precise composite machining. FIG. 3 is a schematic diagram and an electron micrograph for explaining the fine part size of the fine structure. FIG. 4 is a schematic diagram for explaining the arithmetic average roughness Ra. FIG. 5 is a perspective view schematically showing a mode of precision machining means / precision machining. FIG. 6 is a perspective view schematically showing a shaper processing tool / shaper processing mode. FIG. 7 is a perspective view schematically showing a fly-cut processing tool / fly-cut processing mode. FIG. 8 is a perspective view schematically showing an embodiment of a diamond turning processing tool / diamond turning processing. FIG. 9 is a perspective view schematically showing a mode of the micro milling tool / micro milling process. FIG. 10 is a perspective view schematically showing a mode of vibration cutting. FIG. 11A is a perspective view schematically showing an aspect of the shape measuring means, and FIG. 11B is a view showing an aspect for constructing correction processing data. FIG. 12 is a perspective view schematically showing an aspect of a calculation means configured by a computer. FIG. 13A is a perspective view schematically showing an aspect for measuring the shape and position of the tool edge, and FIG. 13B schematically shows an aspect in which the shape measuring means is movably provided in the vertical direction. FIG. FIG. 14 schematically shows a mode in which “the operation of at least one axis of the table on which the workpiece is placed” and “the operation of at least one axis of the precision machining means and / or the electromagnetic wave processing means” are synchronously controlled. It is a perspective view. FIG. 15 is a perspective view schematically showing an aspect in which the angle of the laser incident light with respect to the workpiece can be adjusted. FIG. 16 is a diagram showing a mode in which the workpiece is movable along the axis in the rotation direction, the horizontal direction, and / or the vertical direction (in the illustrated mode, the maximum six-axis movable mode). FIG. 17 is a perspective view schematically showing a mode in which the vertical surface of the workpiece is processed by adjusting the laser irradiation and / or the orientation of the workpiece in accordance with the spread angle and the focusing angle of the laser irradiation. is there. FIG. 18 is a perspective view and a top view schematically showing an aspect in which “rough cutting process by electromagnetic wave machining” and “precision machining” are performed in parallel. FIG. 19 is a flow showing the target range of the present invention. FIG. 20 is a diagram conceptually showing “removed volume removed from the workpiece during the manufacture of a fine workpiece” and “three-dimensional shape model of the fine workpiece”. FIG. 21 is a diagram conceptually showing “data relating to the removal processing time of the electromagnetic wave machining means” and “data relating to the removal machining time of the precision machining means” (FIG. 21A: using the electromagnetic wave machining means). Correlation data A between “removal processing volume” and “removal processing time”, FIG. 21B: “removal processing volume” and “removal processing time” when using precision machining means Correlation data B, FIG. 21 (c): Correlation data between “volume of removal processing” and “removal processing time” in consideration of additional time conditions such as setup time. FIG. 22 is a diagram schematically showing an aspect of creating an offset surface. FIG. 23 is a diagram showing a mode before offset and a mode of an offset surface (FIG. 23A: a mode in which a part of the offset surface is located inside the outermost surface of the workpiece, FIG. 23 (b) A mode in which all offset surfaces are located inside the outermost surface of the workpiece, FIG. 23 (c): All offset surfaces are located outside the outermost surface of the workpiece. Embodiment). FIG. 24 is a graph showing the relationship between the offset amount and the machining time. FIG. 25 sequentially carries out “judgment through offset processing (provisional extraction of electromagnetic wave processing part)”, “judgment of whether electromagnetic wave machining is possible or not” and “judgment of whether electromagnetic wave machining is more than necessary” It is a flow when doing. FIGS. 26A and 26B are schematic diagrams for explaining “spot diameter” and “corner R”. It is the figure which showed typically the structure of the system used for the ultraprecision composite processing apparatus of this invention. FIG. 28 is a perspective view schematically showing a grinding tool / grinding mode. FIG. 29 is an explanatory diagram relating to a mold manufactured in the example (FIG. 29 (a): Case A, FIG. 29 (b): Case B).

  Hereinafter, the present invention will be described in more detail with reference to the drawings.

[Ultra-precision compound processing equipment]
First, the basic configuration of the ultra-precise combined machining apparatus that is the base of the present invention will be described. It should be noted that the various elements shown in the drawings are merely schematically shown for the purpose of understanding the present invention, and the dimensional ratio, appearance, and the like may be different from the actual ones.

The ultra-precise combined machining apparatus is an apparatus for producing a fine workpiece from a workpiece. As schematically shown in FIG. 1, the ultra-precise combined machining apparatus 100 includes:
Electromagnetic wave processing means 10 for roughing a workpiece;
Precision machining means 30 for carrying out precision machining on the rough-cut workpiece; and shape measuring means 50 for measuring the shape of the workpiece when the electromagnetic wave machining means 10 and the precision machining means 30 are used.
It has.

  The ultra-precise combined machining apparatus uses an electromagnetic wave processing means 10 for roughing and a workpiece after rough cutting as “a cutting tool suitable for fine machining (particularly suitable for fine machining of a rough-cut workpiece. A cutting tool) ”, and a shape measuring means 50 for measuring the shape of the workpiece during the machining (see FIG. 2). See also).

  In this specification, the term “ultra-precision composite processing” means that a fine structure (for example, a fine portion dimension La or Lb as shown in FIG. 3 is several tens of nanometers to several millimeters by processing with “electromagnetic wave” and “precision machine”. A range of about 10 nm to about 15 mm or about 10 nm to about 3 mm, for example, a range of several tens of nanometers to several tens of micrometers such as 10 nm to 500 μm or about 50 nm to 1 μm, or 1 nm to 1 μm in some cases) It is used in view of the aspect of obtaining. Accordingly, the term “ultra-precision” as used herein substantially means a mode in which the fine part dimension La or Lb is precisely processed to the details as in the range of several tens of nanometers to several millimeters as described above. In addition, “composite” substantially refers to a mode in which two types of processing of “electromagnetic wave processing” and “precision machining” are combined.

  In this way, the ultra-precise combined machining apparatus 100 has a fine part size in the range of several tens of nanometers to several millimeters, that is, about 10 nm to about 15 mm or about 10 nm to about 3 mm (for example, about 10 nm to 500 μm or about 50 nm to 1 μm). It is particularly suitable for the production of fine structures in the range of 10 nm to several tens of μm, or in some cases 1 nm to 1 μm. The fine structure may have a complicated polyhedral shape or curved shape. Examples of microstructures (that is, those that can be manufactured with the apparatus of the present invention) include workpieces made of metal materials such as cemented carbide, hardened steel, non-ferrous (such as Bs, Cu and / or Al), and pre-hardened steel. In this case, an optical lens mold (for example, a microlens array mold), a glass lens mold, a precision injection mold, a precision metal working mold, and the like can be given. In addition, a product formed from such a mold can be directly manufactured, and an optical lens (for example, a microarray lens), a water repellent plate, a mirror, a precision part, etc. can be manufactured (in such a case, the work material is plastic, It can be made of metal materials such as aluminum and steel, materials such as silicon, glass, minerals and polycrystalline diamond). As described above, the ultra-precise composite processing apparatus can perform ultra-precise composite processing on an inorganic (glass, metal, etc.) or organic (polymer, etc.) material without any limitation in terms of the material of the workpiece.

  The electromagnetic wave processing means 10 of the ultra-precise combined machining apparatus 100 is for roughing a workpiece. Here, “rough cutting” means that a portion to be removed of the workpiece is roughly removed. In particular, the present invention substantially removes 70 volume% to 95 volume%, preferably 80 volume% to 95 volume%, more preferably 90 volume% to 95 volume% of the portion to be removed of the workpiece. I mean.

  The “electromagnetic wave processing means” is means for heating and removing a workpiece using waves or light having a frequency of 10 kHz to 500 kHz. Such “electromagnetic wave processing means” is preferably laser processing means. Therefore, it is preferable that the ultra-precise composite processing apparatus 100 includes a laser oscillator capable of irradiating a workpiece with a laser. When the electromagnetic wave processing means 10 is a laser processing means, the type of laser used is preferably a solid laser, a fiber laser, a gas laser, or the like.

  The precision machining means 30 of the ultra-precise composite machining apparatus 100 is for precision machining of the workpiece rough-cut by the electromagnetic wave machining means 10. “Precision processing” as used herein substantially refers to processing for obtaining a desired fine structure by cutting a rough-cut workpiece on the order of nm (for example, about 10 nm to 5000 nm or about 50 nm to 1000 nm). It means to. Particularly preferably, a fine structure having a surface roughness Ra of several nanometers to several hundred nanometers (for example, about 2 nm to 200 nm) is obtained by such “precision machining”. Incidentally, the “surface roughness Ra” here is an arithmetic mean roughness, and is a roughness curve as shown in FIG. 4 (in the present invention, “cross-sectional profile of the surface of a fine structure”). ) From the reference line L in the direction of the average line, and the average value obtained by summing the absolute values of deviations from the average line to the measurement curve in this extracted part is substantially meant. Yes. Further, from the viewpoint of another surface roughness, an embodiment in which a fine structure having Rz of 100 nm or less (that is, Rz = 0 to 100 nm) is obtained is also included.

  In the precision machining means 30, it is preferable that a cutting tool selected from the group consisting of a planar processing tool, a shaper processing tool, a fly-cut processing tool, a diamond turning processing tool, and a micro milling processing tool is replaceable ( (See FIG. 5). That is, the tools for these processes are performed so that at least one process selected from the group consisting of a planar process, a shaper process, a fly-cut process, a diamond turning process, and a micro milling process can be performed, preferably at least two processes. It is provided in the precision machining means 30 so as to be removable.

  Particularly preferably, a cutting tool selected from the group consisting of a shaper processing tool, a fly cutting processing tool, a diamond turning processing tool, and a micro milling processing tool is replaceable.

  As shown in FIG. 5, the precision machining means 30 is composed of a slide base 31, a vertical axis movable motor 32, a processing head 33, and the like that are slidable in the horizontal direction, a planar processing tool, a shaper processing tool, A fly-cut processing tool, a diamond turning processing tool, a micro milling processing tool, and the like are provided on the processing head 33 in a freely replaceable manner. As such a replacement mechanism, various processing tools may be attached to a processing head, a feed mechanism, a table, a main shaft, or the like by screwing or fitting, or various processing tools previously attached to the processing head or the like are processed. You may selectively move and move to a possible state.

Various processing tools of the precision machining means 30 will be described in detail.
Planar processing tool : a cutting tool for carrying out so-called “planar processing” (planing). In other words, the planar processing tool is a cutting tool for cutting a workpiece to create a flat surface. Typically, by using a bead as a planar processing tool, it is possible to carry out planing by moving the table on which the workpiece is mounted in the horizontal direction and intermittently feeding the cutting tool in a direction perpendicular to the moving direction of the table. .
Shaper processing tool : a cutting tool for performing so-called “shape processing” (shaping / shaping). That is, the shaper processing tool 34 is a cutting tool for mainly cutting non-planar portions (for example, grooves) by cutting a workpiece (see FIG. 6). Typically, a tool is used as a shaper processing tool, and the table with the workpiece is intermittently fed in a direction perpendicular to the movement of the cutting tool, while the reciprocating tool is brought into contact with the workpiece.・ Shaping can be performed.
Fly cutting tool : a cutting tool for performing so-called “flying”. Typically, a rotary tool is used as the fly-cut processing tool 35, and the workpiece is cut by sending it to the workpiece (particularly the workpiece whose position is fixed) while rotating it (see FIG. 7). Incidentally, although the term “fly cutting” is substantially synonymous with “flying”, it also includes a machining mode that uses only one cutting edge on the premise of precision machining in the present invention. doing.
Diamond turning tool : A cutting tool for carrying out so-called “SPDT (Single Point Diamond Turning)” or “ultra-precision turning”. Typically, the workpiece 81 is rotationally moved, and the workpiece 81 is brought into contact with the diamond tool 36 to process the workpiece into a rotational center shape (see FIG. 8).
Micro milling tool : A cutting tool for carrying out milling such as “micro-milling”. Typically, a small-diameter rotary tool (for example, a diamond rotary tool) is used as the micro milling tool 37, and the blade tip shape is transferred or various shapes are formed by contacting the workpiece while rotating it (see FIG. 5). 9).

  In the ultra-precise combined machining apparatus 100, the precision machining means 30 may further function as a vibration cutting means. That is, the above-described cutting tool can be subjected to vibration. For example, the cutting tool is coupled to a drive piezoelectric element or the like. In the vibration cutting, effects such as “the cutting resistance is reduced” / “the component cutting edge does not adhere” / “the strain due to heat can be suppressed” are exhibited. As the vibration cutting, “ultrasonic elliptical vibration cutting” is particularly preferable, and the cutting edge of the cutting tool is subjected to elliptical vibration (see FIG. 10), thereby greatly reducing cutting resistance, suppressing burrs and chatter vibration, and chip thickness. Can be effectively reduced.

  The ultra-precise combined machining apparatus 100 includes a shape measuring unit 50. The shape measuring unit 50 is a unit for measuring the shape of the workpiece on the machine when the electromagnetic wave processing unit 10 and the precision machining unit 30 are used. “Shape measurement” as used herein substantially means that the shape and / or position of a workpiece is measured at least one time before, during, and after machining.

  Examples of the shape measuring means include “imaging means” and “detector using laser light”. Examples of “imaging means” include CCD cameras, infrared cameras, near-infrared cameras, mid-infrared cameras, and X-ray cameras. Examples of “detectors using laser light” include laser microscopes. (Laser microscope), a laser interferometer, etc. In addition, a measurement method using a white interferometry method can be used. “Measuring means by contact” is also preferably used, and the shape measuring means may be a measuring instrument using a probe (three-dimensional measuring instrument) or the like (for example, scanning such as a scanning tunnel microscope or an atomic force microscope). Type probe microscope).

  As shown in FIGS. 11A and 1, the shape measuring means 50 preferably has a combination of an “imaging means 52” and a “detector 54 using laser light”. In such a case, the position of the workpiece is confirmed by the imaging means 52, and then the shape of the workpiece (particularly the shape of the portion to be processed) is confirmed by the "detector 54 using laser light". Is preferred.

  Information such as the shape and / or position of the workpiece measured by the shape measuring means 50 is fed back to the electromagnetic wave machining means 10 and the precision machining means 30 for performing desired electromagnetic wave machining and / or precision machining. Used. Therefore, the ultra-precise combined machining apparatus includes means for controlling the electromagnetic wave machining means or the precision machining means based on the information on the shape of the workpiece measured by the shape measurement means (for example, “calculation means” described later). Have. For example, when performing electromagnetic wave machining and / or precision machining, the shape and / or position of the workpiece is measured in real time by the shape measuring means 50, and the measured data is used in the machining means. For example, based on “data measured by the shape measuring means” and “data of the machining path of the electromagnetic wave processing means and / or precision machining means obtained from the model of the fine workpiece”, the correction processing data is constructed, Based on the correction processing data, electromagnetic wave processing and / or precision machining is performed (see FIG. 11B). It is preferable that the ultra-precise combined machining apparatus 100 has a calculation means for constructing such correction machining data.

  For example, as shown in FIG. 12, the control means such as the arithmetic means may be configured by a computer 90, and for example, is configured by a computer including at least a CPU and a primary storage unit or a secondary storage unit. It is preferable. The difference between “the data of the machining path of the electromagnetic wave processing means and / or the precision machining means obtained from the model of the fine workpiece” compared with “the data measured by the shape measuring means” in the storage unit of the computer. By calculating, it is possible to obtain correction processing data (for example, by measuring the shape of the workpiece during or after processing, the material / deformation (error) relationship is accumulated as a database. Thereby, the correction processing database may be automatically constructed). In the calculation means, the machining path (especially the path for complex machining) of the electromagnetic wave machining means and / or precision machining means can be automatically generated by numerical calculation from the model of the fine workpiece and the shape of the workpiece. It may be a thing.

  Note that the shape measuring means 50 may measure not only the shape and / or position of the workpiece but also the shape and / or position of the tool cutting edge 30a (see, for example, FIG. 13A). Even in such a case, the measured data / information is fed back to the electromagnetic wave machining means 10 and the precision machining means 30 and used for performing desired electromagnetic wave machining and / or precision machining. For on-machine measurement, as shown in FIG. 13B, the shape measuring means 50 may be provided so as to be movable in the vertical direction.

  The ultra-precision combined machining apparatus 100 can be realized in various modes. Particularly preferred embodiments are illustrated.

(Coaxial control mode)
In such an aspect, the ultra-precise combined machining apparatus is configured to synchronously control the operation of at least one axis of the table on which the workpiece is placed and the operation of at least one axis of the precision machining means and / or the electromagnetic wave machining means. It further has a control part. That is, as shown in FIG. 14, the movement of at least one direction of the table 85 on which the workpiece is placed is controlled, and the movement of the precision machining means 30 and / or the electromagnetic wave machining means 10 in at least one direction. It further has a control part which can control. Such a control unit may be included in the calculation means described above, and may be configured by, for example, a computer 90 (see FIG. 12). By having such a control unit in the ultra-precision combined machining apparatus, the machining time can be further shortened.

(Movable aspect regarding laser processing)
In this aspect, as shown in FIG. 15, the table 85 and / or the laser processing means 15 on which the workpiece 80 is placed are movable, and the laser incident light 15a of the laser processing means 15 with respect to the workpiece 80 is obtained. The angle can be adjusted. Thereby, the microfabrication thing of arbitrary shapes can be manufactured more suitably. In order to move the table 85 on which the workpiece 80 is placed, various movable mechanisms (for example, so that the workpiece 80 can move in, for example, the rotation direction, the horizontal direction, and / or the vertical direction) (see FIG. 16). , A movable mechanism using a cam mechanism or the like. The table may be movable so as to tilt. Similarly, in order to move the laser processing means 15, it is preferable that various moving mechanisms are provided so that the laser head or the like can move, for example, in the rotational direction, the horizontal direction and / or the vertical direction. Incidentally, when the laser irradiation and / or the orientation of the workpiece is adjusted in accordance with the laser irradiation spread angle α ′ and the focusing angle α, the vertical surface 80a of the workpiece 80 (or a surface close to the vertical surface or a taper angle). (Small surface) can be processed (see FIG. 17).

(Aspects of multiple types of laser processing means)
In this embodiment, the laser processing means includes a plurality of laser oscillators having different laser wavelengths. That is, the ultra-precise combined machining apparatus is provided with a plurality of laser apparatuses, and an optimum laser wavelength can be selected according to the material of the workpiece. This increases the degree of freedom of the material of the workpiece. For example, when a microlens array mold is manufactured as a fine workpiece, a laser device that generates a laser having a wavelength of 500 nm to 1100 nm and a laser device that generates a laser having a wavelength of 200 nm to 400 nm are provided. Is preferred. When a microlens array is directly manufactured from a workpiece such as glass or plastic as a fine workpiece, a laser device having a wavelength of 300 nm to 1100 nm and a pulse width of several tens of ps to several hundreds of fs is mounted. It may be.

(Mode of parallel implementation)
“Rough cutting by electromagnetic wave machining means” and “precision machining by precision machining” may be performed substantially in parallel. That is, the roughing process by electromagnetic wave machining and the precision machining may be performed substantially simultaneously. More specifically, as shown in FIG. 18, rough cutting by electromagnetic wave machining is performed on a part A of the workpiece 80 and other part B of the workpiece 80 that has already been rough-cut. Precision machining may be performed (as shown, for example, the workpiece may be processed simultaneously by rotating the mounting table 85).

[Judging method of processing means of the present invention]
The present invention relates to a method for determining processing means suitable for the ultra-precise composite processing apparatus 100 as described above. Specifically, it is determined whether to use the electromagnetic wave processing means or the precision machining means according to the actual processing shape and processing location. A range which is an object of the present invention is shown in FIG. As can be seen from FIG. 19, the determination of the processing method of the present invention is performed prior to the manufacture of the fine workpiece.

  Details will be described in detail. In the method of the present invention, information on a three-dimensional shape model of a fine workpiece, information on a removal volume removed from a workpiece during the production of the fine workpiece, and “data on removal processing time of the electromagnetic wave processing means” and “precision Based on the data on the removal processing time of the machining means, etc., it is determined whether to use the electromagnetic wave machining means or the precision machining means.

  “Information on a three-dimensional shape model of a fine workpiece” is information on a product shape to be obtained by processing using an ultra-precise combined machining apparatus, and information on a target shape. That is, it is information on the final shape obtained by removing from the workpiece as shown in FIG.

  “Information on the removal volume removed from the workpiece during the production of the fine workpiece” is information on the volume of the workpiece removed by the processing of the ultra-precise combined machining apparatus. That is, as shown in FIG. 20, it is information on the volume of the workpiece to be partially removed when the “product shape (final shape)” is obtained from the “workpiece”.

  “Data relating to the removal processing time of the electromagnetic wave processing means” is correlation data relating to the removal processing time of the electromagnetic wave processing means. For example, it may be correlation data A between “volume of removal processing” and “removal processing time” when using the electromagnetic wave processing means (see FIG. 21A). Similarly, “data relating to removal machining time of precision machining means” is correlation data relating to removal machining time of precision machining means. For example, it may be correlation data B between “volume of removal processing” and “removal processing time” when using precision machining means (see FIG. 21B).

  The present invention is characterized by determining whether to use the electromagnetic wave processing means or the precision machining means using the information and data as described above. Such a determination is preferably made through the use of three-dimensional CAD data. In other words, it is preferable to perform an offset process as a pre-process for manufacturing a fine workpiece using the three-dimensional CAD data of the final shape of the workpiece.

  For example, as shown in FIG. 22, an offset surface that is offset by a specified amount from each surface of the final shape of the workpiece is created, and the offset surface is located on the inner side of the outermost surface level of the workpiece (the workpiece It is preferable to determine whether or not the electromagnetic wave processing means should be used depending on whether or not it is located in the outermost surface). In other words, an offset surface with a specified amount Δd offset is given to the shape surface of the final product, and the portion that can be processed by electromagnetic waves is extracted depending on whether or not the offset surface protrudes from the “outermost surface of the workpiece” To do. The term “offset” as used herein refers to a process of shifting the surface by a certain amount in computer processing (particularly three-dimensional CAD). For example, the surface of the final shape of the workpiece is moved in the normal direction of the surface. This means a different processing mode. From the viewpoint of actual processing operations, the offset surface is obtained by selecting a surface on the model using, for example, the CAD software NX manufactured by SIMENS, and executing the offset surface command installed in the CAD software. Can be obtained. In addition, the term “located inside the outermost surface level of the workpiece” used in the present specification means an aspect positioned on the region side of the workpiece relative to the surface level of the workpiece before the removal processing. In short, it means an aspect that exists in a region corresponding to the inside of the workpiece, not the outer region around the workpiece (see FIG. 22B).

  As the form of the offset surface to be obtained, there are three types as shown in FIGS. In FIG. 23A, a part of the offset surface is located inside the outermost surface level of the workpiece, but the other part is located outside the outermost surface level of the workpiece. In such a case, an area located inside the outermost surface level of the workpiece is judged as an "area capable of electromagnetic wave machining", whereas an area located outside the outermost surface level of the workpiece is judged as "electromagnetic wave impossible" It is determined that the area is More specifically, a region surrounded by “an offset surface positioned on the inner side of the outermost surface of the workpiece” and “the outermost surface level of the workpiece” is provisionally referred to as an “electromagnetic wave processable region”. On the other hand, the area surrounded by the “offset surface located outside the outermost surface of the workpiece” and the “uppermost surface level of the workpiece” is determined as the “area where electromagnetic wave machining is impossible”. Next, as shown in FIG. 23B, all of the offset surfaces are located inside the outermost surface level of the workpiece. In such a case, it is tentatively determined that all areas are “areas where electromagnetic waves can be processed”. In FIG. 23C, all of the offset surfaces are located outside the outermost surface level of the workpiece. In such a case, all the regions are determined as “regions where electromagnetic wave processing is impossible”.

  It can be considered that the determination as described above determines whether or not the portion can be subjected to electromagnetic wave processing according to “the thickness of the workpiece to be removed”, that is, the removed volume, through the offset process. Further, since the offset amount Δd itself can be related to the electromagnetic wave processing conditions used, in view of that point, the electromagnetic wave processing means according to the “thickness / amount of workpiece to be removed” in view of the electromagnetic wave processing conditions. It can be said that it is determined whether or not to use (see FIG. 24).

  In addition to the determination through the offset processing as described above, it is preferable to perform “determination as to whether or not the shape can be processed by electromagnetic waves” and / or “determination as to whether or not the shape is necessary for electromagnetic wave processing” (see FIG. 25). . In other words, further judgment is added to the “region where electromagnetic waves can be processed” tentatively extracted through the offset processing.

  In “determination of whether or not the shape can be processed by electromagnetic waves”, it is preferable to make a determination based on a processable shape database relating to electromagnetic wave processing means. That is, it is preferable to determine whether or not to implement the electromagnetic wave processing means by comparing the shape of the obtained “provisional electromagnetic wave processing portion” with a processable shape database. For example, as shown in FIG. 26, it is determined whether or not to implement the electromagnetic wave processing means by comparing with a processable shape database in consideration of so-called “spot diameter”, “corner R” and the like. Although the spot diameter corresponds to the laser beam diameter in the workpiece, a workpiece area larger than the spot diameter is judged as “electromagnetic wave processable”, while a workpiece area smaller than the spot diameter is determined. It is determined that “electromagnetic wave processing is impossible” (see FIG. 26A). As for the corner R, as shown in FIG. 26 (b), for a shape region that is excessively removed when irradiated with electromagnetic waves (for example, laser light irradiation), such as a tapered workpiece region. It is judged that “electromagnetic wave processing is impossible”.

  Next, in the “determination of whether or not the electromagnetic wave processing required amount is exceeded”, it is preferable to make a determination based on data relating to the removal processing time of the electromagnetic wave processing means / precision machining means. In other words, the volume of the extracted “provisional electromagnetic wave processing portion” is calculated, and the calculated processing time for the calculated volume is determined based on “correlation data A between the removal volume and the removal processing time relating to the electromagnetic wave processing means”. A ”is calculated (see FIG. 21A), and“ required processing time B based on correlation data B between the removal volume and the removal processing time relating to the precision machining means ”is calculated (FIG. 21 (b)), it is preferable to compare the processing time A and the processing time B to determine whether or not to implement the electromagnetic wave processing means. In particular, in such a determination, as shown in FIG. 21C, additional time conditions such as setup time required for switching from the electromagnetic wave machining means to the precision machining means are also taken into consideration. In other words, in the graph shown in FIG. 21C, if the “volume of the“ provisional electromagnetic wave processing portion ”” is larger than Vx, the electromagnetic wave processing can achieve a total time reduction, but is smaller than Vx. If the precision machining is directly performed without performing the electromagnetic wave machining, the time can be shortened. This is because the ultra-precise combined machining apparatus employs two means of “electromagnetic wave machining means for rough machining” and “precision machining means for precision machining”. Therefore, the optimum machining can be performed in consideration of the switching operation of the means.

The processing method determination method of the present invention includes the above-described “determination based on offset processing (extraction of temporary electromagnetic wave processing portion)”, “determination of whether or not the electromagnetic wave can be processed” and “more than electromagnetic wave processing necessary amount” It is preferable to perform “determination of whether or not” sequentially. That is, it is preferable to perform the following (a) to (c) sequentially to determine whether to use the electromagnetic wave processing means or to use the precision machining means (see FIG. 25).
(A) An offset process is performed, and it is determined whether or not there is a part that can be processed by electromagnetic waves, depending on whether or not the offset surface protrudes beyond the “outermost surface of the workpiece” (extraction of temporary electromagnetic wave processing parts) ).
(B) By comparing the shape of the provisional electromagnetic processing portion with the “processable shape database of electromagnetic wave processing means”, it is determined whether or not the electromagnetic wave processing can be performed. That is, it is determined whether or not the electromagnetic wave processing means should be used from the viewpoint of “shape”.
(C) The processing time A of the electromagnetic wave processing means and the processing time B of the precision machining means are compared based on the setup time accompanying the switching of the means, and it is determined whether or not the removal volume is to be electromagnetic wave processed. That is, it is determined whether or not the electromagnetic wave processing means should be used from the viewpoint of “required processing time based on the removal volume considering setup time and the like”.

  Incidentally, in order to further enhance the versatility of the machining determination method of the present invention, for example, in the above (c), it is preferable to use correlation data prepared for each material of the workpiece. In other words, it is preferable to have a database of the relationship between the removal processing volume and processing time for each processing means for each material of the work material, so that even when the material of the work material is changed, this is suitable It becomes possible to do.

[Ultraprecision combined machining apparatus of the present invention]
Next, the ultraprecision combined machining apparatus of the present invention will be described. The ultra-precise combined machining apparatus according to the present invention is
Electromagnetic wave processing means for roughing the workpiece;
Precision machining means for performing precision machining on the rough-cut workpiece; and shape measuring means for measuring the shape of the workpiece when using the electromagnetic wave machining means and the precision machining means. . Since these “electromagnetic wave processing means”, “precision machining means” and “shape measuring means” have been described above, description thereof will be omitted to avoid duplication.

  In particular, the ultra-precise combined machining apparatus of the present invention is characterized in that it further includes a system including a storage unit that stores machining data used in the ultra-precise combined machining apparatus. Data for processing included in such a system includes information on a three-dimensional shape model of a fine workpiece, information on a removal volume removed from a workpiece during the production of the fine workpiece, data on a removal processing time of the electromagnetic wave processing means, and Based on the data related to the removal processing time of the precision machining means, the processing data is used to determine whether to use the electromagnetic machining means or the precision machining means.

  As shown in FIG. 27, the system 300 in the ultra-precise combined machining apparatus of the present invention is composed of a primary storage unit and a secondary storage unit such as a ROM (Read Only Memory) and a RAM (Random Access Memory). A storage unit 310, a CPU (Central Processing Unit) 320, an input device 330, a display device 340, an output device 350, and the like are provided, and these units are connected to each other via a bus 360.

  The input device 330 includes a pointing device such as a keyboard, a mouse, or a touch panel for inputting various instruction signals, and the various instruction signals that are input are transmitted to the CPU 320. The ROM stores various programs executed by the CPU 320 (various programs for performing ultra-precise combined machining). The RAM expands and stores the various programs read from the ROM so as to be executable, and temporarily stores various data temporarily generated when the programs are executed. The CPU 320 performs overall control of the system 300 by executing various programs stored in the ROM. In particular, in the CPU 320, various programs (for example, programs used for driving "electromagnetic wave machining means", "precision machining means", "shape measuring means", etc.) for executing ultra-precision combined machining stored in the ROM. Can be processed. The display device 340 includes a display device (not shown) such as an LCD (Liquid Crystal Display) or a CRT (Cathode Ray Tube), and displays various display information transmitted from the CPU 320.

  In the system 300 according to the present invention, a storage unit 310 such as a ROM and / or a RAM stores “information on a three-dimensional model of a fine workpiece; information on a removed volume removed from a workpiece when the fine workpiece is manufactured; "Processing data for determining whether to use electromagnetic wave processing means or to use precision machining means based on data on removal processing time of processing means and data on removal processing time of precision machining means" is stored. . When the system 300 is executed, the processing data is used by the CPU to execute the ultra-precise combined machining apparatus program, thereby implementing the ultra-precise combined machining apparatus 100 (specifically, electromagnetic wave processing means). Or whether to use precision machining means is performed.

  The storage unit 310 in the system 300 stores processing data that can perform the above-described “determination of the processing method of the present invention”. In other words, “information on a three-dimensional shape model of a fine workpiece; information on a removal volume removed from a workpiece during the production of the fine workpiece; and data on removal time of the electromagnetic wave processing means and removal processing of the precision machining means Processing data (see FIGS. 19 to 25) for determining whether to use the electromagnetic wave processing means or the precision machining means based on the time data is stored.

Since the processing data is processing data used in the above-described “judgment of the processing method of the present invention”, it may have the following characteristics.
● Using the 3D CAD data of the final shape of the workpiece, the offset surface offset by a specified amount from each surface of the final shape is inside the outermost surface level of the workpiece (within the outermost surface of the workpiece) Data for processing for determining whether or not to implement the electromagnetic wave processing means depending on whether or not it is positioned at (see FIG. 22, FIG. 24 and FIG. 25).
● When there is an offset surface located inside the outermost surface level of the workpiece, the area surrounded by the offset surface located on the inner side and the outermost surface level is defined as a provisional electromagnetic wave processing section, and such provisional The processing data for determining whether or not to implement the electromagnetic wave processing means by comparing the shape in the electromagnetic wave processing unit with the processable shape database of the electromagnetic wave processing means (see FIGS. 23, 24 and 25).
-Calculate the temporary volume of the electromagnetic wave processing part, calculate the processing time A based on the correlation data A between the removal volume and the removal processing time for the electromagnetic wave processing means for the calculated volume, and precision machining means The processing time B based on the correlation data B between the removal volume and the removal processing time is calculated, and the processing time A is compared with the processing time B to determine whether or not to implement the electromagnetic wave processing means. Data for processing (see FIG. 21 and FIG. 25).
Data for machining that additionally considers the setup time required for switching from electromagnetic wave machining means to precision machining means when comparing machining time A and machining time B (see FIGS. 21 and 25).
(A) Extraction of the above-mentioned provisional electromagnetic wave processable part, (b) Comparison of the shape of the temporary electromagnetic wave processing part and the processable shape database, and (c) Processing time A and processing time B Processing data for sequentially comparing (see FIG. 25).

  In the present invention, the storage unit for storing “processing data” is not particularly limited to a ROM / RAM incorporated in a computer, but is a removable disk (for example, an optical disk such as a CD-ROM). May be. In other words, “information on a three-dimensional shape model of a fine workpiece; information on a removal volume removed from a workpiece during the production of the fine workpiece; and data on removal time of the electromagnetic wave processing means and removal processing of the precision machining means “Processing data for determining whether to use electromagnetic wave processing means or precision machining means based on time data” may be stored in the removable disk. In such a case, the processing data stored in the removable disk can be read by a removable disk drive (RDD) or the like and stored in a ROM and / or RAM in the system. Further, the storage unit storing “processing data” may be stored in another similar computer device. In other words, “information on a three-dimensional shape model of a fine workpiece; information on a removal volume removed from a workpiece during the production of the fine workpiece; and data on removal time of the electromagnetic wave processing means and removal processing of the precision machining means “Processing data for determining whether to use electromagnetic machining means or precision machining means based on time-related data” is a computer apparatus different from that used directly in ultra-precise composite machining apparatus. It may be stored in a ROM or the like. In such a case, processing data transmitted from another computer apparatus via a communication circuit such as a LAN or a removable disk is received or read by the system of the present invention, whereby the ROM in the system and / or It can be used by being stored in a RAM or the like.

It should be noted that the present invention as described above includes the following aspects:
1st aspect : It is the method of judging a processing device in the ultraprecision compound processing apparatus which manufactures a fine workpiece from a workpiece,
Ultra precision combined processing equipment
Electromagnetic wave processing device for roughing workpieces;
A precision machining device for carrying out precision machining on a rough-cut workpiece; and a shape measuring device for measuring the shape of the workpiece in the use of an electromagnetic machining device and a precision machining device. ,
In judging the processing device,
Information on the three-dimensional model of the fine workpiece;
Using an electromagnetic wave processing device based on information on the removal volume removed from the workpiece during the manufacture of the fine workpiece; and data on the removal time of the electromagnetic machining device and data on the removal time of the precision machining device, or A method comprising determining whether to use a precision machining device.
Second aspect : In the first aspect, preprocessing of the processing device is performed using the three-dimensional CAD data of the final shape of the workpiece, and in such preprocessing,
Create an offset surface offset by a specified amount from each surface of the final shape of the workpiece,
It is determined whether or not to implement an electromagnetic wave processing device depending on whether or not the offset surface is located inside the outermost surface level of the workpiece.
A method characterized by that.
Third aspect : In the second aspect, when there is an offset surface located on the inner side of the outermost surface level of the workpiece, the offset surface located on the inner side is surrounded by the outermost surface level of the workpiece. A method characterized in that the region is a temporary electromagnetic wave processing section.
Fourth aspect : In the third aspect described above, the shape of the provisional electromagnetic wave machining unit is compared with the machinable shape database of the electromagnetic wave machining device, thereby determining whether to implement the electromagnetic wave machining device. And how to.
5th aspect : In said 3rd aspect or 4th aspect, the volume of the provisional electromagnetic wave processing part is calculated, and the calculated volume is based on the correlation data A between the removal volume related to the electromagnetic wave processing device and the removal processing time. By calculating the machining time A and calculating the machining time B based on the correlation data B between the removal volume and the removal machining time for the precision machining device, and comparing the machining time A and the machining time B, Determine whether to implement electromagnetic wave processing device,
A method characterized by that.
Sixth aspect : The method according to the fifth aspect, wherein in the comparison between the processing time A and the processing time B, the setup time required for switching from the electromagnetic wave processing device to the precision machining device is additionally taken into account. .
Seventh aspect : In the fifth aspect subordinate to the fourth aspect, (a) extraction of the provisional electromagnetic wave processable part, (b) comparison of the shape of the temporary electromagnetic wave processing part and the processable shape database, And (c) A method of sequentially comparing the processing time A and the processing time B.
Eighth aspect : In any one of the first to seventh aspects, the ultra-precise combined machining apparatus performs an electromagnetic wave machining device or a precision machining device based on information on a shape of the workpiece measured by the shape measurement device. A method further comprising a control device for controlling.
Ninth aspect : In any one of the first to eighth aspects, the precision machining device is selected from the group consisting of a planar processing tool, a shaper processing tool, a fly cut processing tool, a diamond turning processing tool, and a micro milling processing tool. A method characterized in that the tool to be cut is freely replaceable.
Tenth aspect : The method according to any one of the first to ninth aspects, wherein the electromagnetic wave processing device is a laser processing device.
Eleventh aspect : The method according to any one of the first to tenth aspects, wherein the fine part size of the fine workpiece is in the range of 10 nm to 15 mm.
Twelfth aspect : The method according to the eleventh aspect, wherein the fine workpiece is an optical lens mold or an optical lens.
Thirteenth aspect : An ultra-precise combined machining apparatus for producing a fine workpiece from a workpiece,
Electromagnetic wave processing device for roughing workpieces;
A precision machining device for carrying out precision machining on a rough-cut workpiece; and a shape measuring device for measuring the shape of the workpiece in the use of an electromagnetic machining device and a precision machining device. ,
The ultra-precise composite machining apparatus further comprises a system having a storage unit storing processing data used for the ultra-precise composite machining apparatus,
Processing data includes information on a three-dimensional shape model of a fine workpiece; information on a removal volume removed from a workpiece during manufacture of the fine workpiece; and data on a removal processing time of an electromagnetic wave processing device and precision machining device An ultra-precise combined machining apparatus characterized in that it is machining data for determining whether to use an electromagnetic wave machining device or a precision machining device based on data relating to removal machining time.
Fourteenth aspect : In the thirteenth aspect described above, the processing data is the outermost surface of the workpiece using an offset surface offset by a specified amount from each surface of the final shape using the three-dimensional CAD data of the final shape of the workpiece. An ultra-precise combined machining apparatus characterized in that it is machining data for determining whether to implement an electromagnetic wave machining device based on whether or not it is located inside a level.
Fifteenth aspect : In the fourteenth aspect described above, the processing data is surrounded by the offset surface located on the inner side and the outermost surface level when there is an offset surface located on the inner side of the outermost surface level of the workpiece. The region is a provisional electromagnetic wave processing unit, and the shape of the temporary electromagnetic wave processing unit is compared with the electromagnetic wave processing device processable shape database to determine whether to implement the electromagnetic wave processing device. A featured ultra-precise combined machining device.
Sixteenth aspect : In the fourteenth aspect, the processing data is calculated by calculating the volume of the provisional electromagnetic wave processing unit, and for the calculated volume, the correlation data A between the removal volume relating to the electromagnetic wave processing device and the removal processing time. By calculating the processing time A based on the calculated processing time B based on the correlation data B between the removal volume and the removal processing time for the precision machining device, and comparing the processing time A and the processing time B. An ultra-precise combined machining apparatus characterized in that it is machining data for determining whether to implement an electromagnetic wave machining device.

  Although the embodiments of the present invention have been described above, the present invention is not limited thereto, and those skilled in the art will readily understand that various modifications can be made.

● Explain mainly how the precision machining means can be replaced with a cutting tool selected from the group consisting of a planar processing tool, a shaper processing tool, a fly-cut processing tool, a diamond turning tool, and a micro milling tool. However, it is not necessarily limited to such an embodiment. For example, the precision machining means may be further replaceable with respect to the grinding tool. That is, a grinding tool may be replaced in addition to or instead of the above-described cutting tool. By using a grinding tool, higher precision precision machining can be realized. Typically, a grindstone is used as a grinding tool, and the surface of the workpiece can be ground by bringing the grindstone rotated into contact with the workpiece (see FIG. 28). Examples of the abrasive material that can be used for the grindstone include diamond, cubic boron nitride (cBN), alumina, and silicon carbide (SiC). Also, a resin bond grindstone, a metal bond grindstone, a metal resin grindstone, or the like may be used. Furthermore, the precision machining means may be replaceable with an ultrasonic machining horn, an ultrasonic vibration cutting tool, a polishing polishing tool, a micro drill, or the like.

● For the purpose of improving the sharpness of the cutting tool and reducing tool wear, a cutting fluid that can exert a lubricating action may be supplied to the cutting edge of the tool. There is no restriction | limiting in particular as a kind of cutting fluid, You may use the cutting fluid used for a conventional cutting process.

Finally, it should be noted that the present invention can also provide a method for determining a machining process based on an ultra-precise composite machining method for producing a fine workpiece from a workpiece. Such a method is
(I) a step of subjecting the workpiece to electromagnetic machining and roughing the workpiece; and (ii) a step of performing precision machining on the roughened workpiece,
In carrying out at least one of step (i) and step (ii), the shape of the workpiece is measured,
Information on the three-dimensional model of the fine workpiece;
Information on the removal volume removed from the workpiece during the production of fine workpieces; and “Data on removal processing time of electromagnetic machining means” and “Data on removal processing time of precision machining means”
Based on the above, it is determined whether to perform the electromagnetic wave machining (rough cutting process) of step (i) or to perform the precision machining of step (ii). About the effect about this method and its content, since the same thing as the matter already demonstrated above is applied, description is abbreviate | omitted in order to avoid duplication.

  In order to confirm the effect in the ultra-precise combined machining apparatus which is the object of the method of judging the machining means of the present invention, the following test was conducted.

<< Case A >>
A Fresnel lens mold as shown in FIG. 29A was manufactured by carrying out the processing method of the prior art (Comparative Example 1) and the processing method of the present invention (Example 1).

(Comparative Example 1)
As a conventional processing method, a Fresnel lens mold was manufactured from a difficult-to-cut material by performing all processing by cutting. A summary is shown in Table 1.

  As shown in the rightmost column of Table 1, the conventional processing method required "80 hours" to obtain the Fresnel lens mold shown in FIG.

Example 1
As an example of the present invention, a Fresnel lens mold was obtained by roughly cutting a workpiece by laser processing and subjecting the workpiece after the rough cutting to fine machining. The processing outline is shown in Table 2. In Example 1, the position measurement of the lens arrangement by a CCD camera as a shape measuring means and the shape measurement by light interference using a laser beam were performed. The surface roughness was measured by white interference measurement using light interference.

  As shown in the rightmost column of Table 2, the processing method of the present invention required “21 hours” to obtain the Fresnel lens mold shown in FIG.

  Thus, when obtaining the same Fresnel lens mold, the present invention was able to reduce the manufacturing time by about 74% compared to the prior art (see Table 3).

<< Case B >>
A multi-lens mold as shown in FIG. 29B was manufactured by carrying out the processing method of the prior art (Comparative Example 2) and the processing method of the present invention (Example 2).

(Comparative Example 1)
As a processing method of the prior art, a multi-lens lens mold was manufactured from a difficult-to-cut material by performing electric discharge machining and then cutting. A summary is shown in Table 4.

  As shown in the rightmost column of Table 4 above, the conventional processing method required “152 hours” to obtain the multi-lens mold shown in FIG.

(Example 2)
As an example of the present invention, a multi-lens mold was obtained by roughly cutting a workpiece by laser processing and subjecting the workpiece after the rough cutting to fine machining. A summary is shown in Table 5. In Example 2, shape measurement by optical interference using laser light as shape measurement means was performed. The surface roughness was measured by white interference measurement using light interference.

  As shown in the rightmost column of Table 5 above, the processing method of the present invention required “28 hours” to obtain the multi-lens mold shown in FIG.

  Thus, when obtaining the same multi-lens lens mold, the present invention was able to reduce the manufacturing time by about 82% compared to the prior art (see Table 6).

<Summary>
As can be seen from Case A and Case B, in the present invention, the manufacturing time can be shortened by 70 to 80% compared to the case of manufacturing a fine structure from a difficult-to-cut material by the conventional technique. Therefore, it will be understood that the present invention has extremely advantageous effects for the production of fine structures.

By carrying out the present invention, a fine workpiece can be obtained from a workpiece. In particular, in the present invention, it is possible to obtain a “mold for molding various parts and products corresponding to downsizing and high performance”.
Cross-reference of related applications

  This application is a priority under the Paris Convention based on Japanese Patent Application No. 2011-273089 (Filing Date: December 14, 2011, Title of Invention: “Method for Judging Processing Means in Ultraprecision Combined Machining Equipment”) Insist. All the contents disclosed in the application are incorporated herein by this reference.

DESCRIPTION OF SYMBOLS 10 Electromagnetic wave processing means 15 Laser processing means 15a Laser incident light 30 Precision machining means 30a Tool edge 31 Slide stand,
32 Vertical axis movable motor 33 Processing head 34 Shaper processing tool 35 Fly cut processing tool 36 Diamond turning processing tool 36a Vacuum chuck 36b Air spindle 36c Induction motor 36d Servo motor 36e Cutting oil tank 37 Micro milling tool 38 Grinding tool 38a Grinding tool Processing tool (diamond grinding wheel)
38b Truing whetstone 50 Shape measuring means 52 Imaging means / imaging means (shape measuring means)
54 Detector using laser beam (shape measuring means)
80 Work material 81 Roughly cut work material 82 Work material that has been precision machined after rough cutting (= fine structure)
82a Fine part 85 of fine structure Table 90 for placing work material Calculation means (for example, computer)
100 Ultra-precise Combined Processing Device 300 System 310 in Ultra-Precision Combined Processing Device Storage Unit 320 CPU
330 Input Device 340 Display Device 350 Output Device 360 Bus

Claims (14)

A method for determining a processing means in an ultra-precise composite processing apparatus that manufactures a fine workpiece from a workpiece,
The ultra-precise combined machining apparatus is
Electromagnetic wave processing means for roughing the workpiece;
Precision machining means for performing precision machining on the rough-cut workpiece; and shape measuring means for measuring the shape of the workpiece in use of the electromagnetic wave machining means and the precision machining means Comprising
In the judgment of the processing means,
Information of a three-dimensional model of the fine workpiece;
Information on the removal volume removed from the workpiece during the production of the fine workpiece; and data on the removal processing time of the electromagnetic processing means and data on the removal processing time of the precision machining means Whether or not the precision machining means is used, and the processing means is pre-processed using the three-dimensional CAD data of the final shape of the workpiece. Then
Create an offset surface offset by a specified amount from each surface of the final shape,
A method for determining whether or not to implement the electromagnetic wave processing means, depending on whether or not the offset surface is located inside the outermost surface level of the workpiece.   When the offset surface located inside the outermost surface level of the workpiece is present, a region surrounded by the offset surface located inside and the outermost surface level is a provisional electromagnetic wave processing unit. The method of claim 1, wherein:   The shape of the provisional electromagnetic wave processing section is compared with a processable shape database of the electromagnetic wave processing means, thereby determining whether or not to implement the electromagnetic wave processing means. The method described. Calculating the volume of the provisional electromagnetic wave processing section, and calculating a processing time A based on correlation data A between a removal volume and a removal processing time related to the electromagnetic wave processing means for the calculated volume; Whether or not to implement the electromagnetic wave processing means by calculating the processing time B based on the correlation data B between the removal volume and the removal processing time relating to the processing means, and comparing the processing time A with the processing time B To determine,
The method according to claim 3 or 4, characterized in that:   The comparison between the machining time A and the machining time B additionally takes into account a setup time required for switching from the electromagnetic wave machining means to the precision machining means. Method.   (A) extraction of the provisional electromagnetic wave processable part, (b) comparison of the shape of the temporary electromagnetic wave processing part and the processable shape database, and (c) the processing time A and the processing time B The method according to claim 5, dependent on claim 4, characterized in that the comparisons are performed sequentially.   The ultra-precise combined machining apparatus further comprises means for controlling the electromagnetic wave machining means or the precision machining means based on information on the shape of the workpiece measured by the shape measuring means. A method according to any one of claims 1 or 3-7.   The precision machining means is characterized in that a cutting tool selected from the group consisting of a planar processing tool, a shaper processing tool, a fly-cut processing tool, a diamond turning tool, and a micro milling tool is replaceable. A method according to any one of claims 1 or 3-8.   The method according to claim 1, wherein the electromagnetic wave processing means is a laser processing means.   The method according to any one of claims 1 and 3 to 10, wherein a fine part size of the fine workpiece is in a range of 10 nm to 15 mm.   The method according to claim 11, wherein the fine workpiece is an optical lens mold or an optical lens. An ultra-precise composite processing device that manufactures fine workpieces from workpieces,
Electromagnetic wave processing means for roughing the workpiece;
Precision machining means for performing precision machining on the rough-cut workpiece; and shape measuring means for measuring the shape of the workpiece in use of the electromagnetic wave machining means and the precision machining means Comprising
The ultra-precise combined machining apparatus further comprises a system including a storage unit storing processing data used for the ultra-precise combined machining apparatus,
The processing data includes information on a three-dimensional shape model of the fine workpiece; information on a removal volume removed from the workpiece when the fine workpiece is manufactured; and data on a removal processing time of the electromagnetic wave processing means; Based on the data related to the removal processing time of the precision machining means, it is processing data for determining whether to use the electromagnetic wave processing means or the precision machining means, and the processing data Whether or not an offset surface that is offset by a specified amount from each surface of the final shape using the three-dimensional CAD data of the final shape of the workpiece is positioned inside the outermost surface level of the workpiece. An ultra-precise combined machining apparatus characterized in that it is machining data for determining whether to implement the electromagnetic wave machining means.   When the offset surface located on the inner side of the outermost surface level of the workpiece exists, the processing data provisionally displays a region surrounded by the offset surface located on the inner side and the outermost surface level. The electromagnetic wave processing unit is processing data for determining whether to implement the electromagnetic wave processing unit by comparing the shape of the provisional electromagnetic wave processing unit with the processable shape database of the electromagnetic wave processing unit. The ultra-precise combined machining apparatus according to claim 13.   The processing data calculates a volume of the provisional electromagnetic wave processing section, and calculates a processing time A based on correlation data A between a removal volume and a removal processing time related to the electromagnetic wave processing means for the calculated volume. And calculating the machining time B based on the correlation data B between the removal volume and the removal machining time relating to the precision machining means, and comparing the machining time A and the machining time B to thereby calculate the electromagnetic wave machining means. 14. The ultra-precise combined machining apparatus according to claim 13, wherein the machining data is for determining whether or not to execute.