CN105990468B - 硅片生产系统 - Google Patents
硅片生产系统 Download PDFInfo
- Publication number
- CN105990468B CN105990468B CN201510072543.9A CN201510072543A CN105990468B CN 105990468 B CN105990468 B CN 105990468B CN 201510072543 A CN201510072543 A CN 201510072543A CN 105990468 B CN105990468 B CN 105990468B
- Authority
- CN
- China
- Prior art keywords
- silicon chip
- equipment
- air
- heated
- air drying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 117
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 117
- 239000010703 silicon Substances 0.000 title claims abstract description 117
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 39
- 238000007605 air drying Methods 0.000 claims abstract description 85
- 238000005530 etching Methods 0.000 claims abstract description 52
- 238000000034 method Methods 0.000 claims abstract description 49
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims abstract description 47
- 230000005540 biological transmission Effects 0.000 claims abstract description 28
- 230000003647 oxidation Effects 0.000 claims abstract description 27
- 238000007254 oxidation reaction Methods 0.000 claims abstract description 27
- 238000005192 partition Methods 0.000 claims abstract description 11
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 38
- 238000005516 engineering process Methods 0.000 claims description 16
- 230000008569 process Effects 0.000 claims description 16
- 239000003513 alkali Substances 0.000 claims description 8
- 238000011144 upstream manufacturing Methods 0.000 claims description 4
- 238000009423 ventilation Methods 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 2
- 238000004080 punching Methods 0.000 claims 1
- 238000005406 washing Methods 0.000 claims 1
- 238000005096 rolling process Methods 0.000 abstract description 10
- 238000009826 distribution Methods 0.000 abstract description 7
- 230000004044 response Effects 0.000 abstract description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 239000003054 catalyst Substances 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 230000002378 acidificating effect Effects 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000007602 hot air drying Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- 238000010306 acid treatment Methods 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002209 hydrophobic effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Weting (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510072543.9A CN105990468B (zh) | 2015-02-11 | 2015-02-11 | 硅片生产系统 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510072543.9A CN105990468B (zh) | 2015-02-11 | 2015-02-11 | 硅片生产系统 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN105990468A CN105990468A (zh) | 2016-10-05 |
CN105990468B true CN105990468B (zh) | 2018-09-07 |
Family
ID=57041934
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201510072543.9A Expired - Fee Related CN105990468B (zh) | 2015-02-11 | 2015-02-11 | 硅片生产系统 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN105990468B (zh) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110237709A (zh) * | 2019-07-10 | 2019-09-17 | 中威新能源(成都)有限公司 | 基于太阳电池制造工艺的硅片表面抑制氧化方法 |
CN112616232B (zh) * | 2020-12-23 | 2024-01-26 | 西安奕斯伟材料科技股份有限公司 | 硅片处理设备 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102210014A (zh) * | 2008-09-30 | 2011-10-05 | 积水化学工业株式会社 | 表面处理装置 |
CN103872184A (zh) * | 2014-04-03 | 2014-06-18 | 苏州阿特斯阳光电力科技有限公司 | 一种抗pid晶体硅太阳能电池制作方法 |
WO2014199798A1 (ja) * | 2013-06-12 | 2014-12-18 | 信越化学工業株式会社 | 太陽電池劣化抑制用の塗工液及びその薄膜、並びに太陽電池劣化抑制方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103409752B (zh) * | 2013-07-18 | 2015-10-14 | 新奥光伏能源有限公司 | 一种湿法刻蚀设备及湿法刻蚀方法 |
CN104821345B (zh) * | 2015-05-05 | 2017-04-12 | 广东爱康太阳能科技有限公司 | 一种抗电势诱导衰减太阳能电池的制备方法 |
CN204668333U (zh) * | 2015-05-05 | 2015-09-23 | 广东爱康太阳能科技有限公司 | 一种抗电势诱导衰减太阳能电池的生产设备 |
-
2015
- 2015-02-11 CN CN201510072543.9A patent/CN105990468B/zh not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102210014A (zh) * | 2008-09-30 | 2011-10-05 | 积水化学工业株式会社 | 表面处理装置 |
WO2014199798A1 (ja) * | 2013-06-12 | 2014-12-18 | 信越化学工業株式会社 | 太陽電池劣化抑制用の塗工液及びその薄膜、並びに太陽電池劣化抑制方法 |
CN103872184A (zh) * | 2014-04-03 | 2014-06-18 | 苏州阿特斯阳光电力科技有限公司 | 一种抗pid晶体硅太阳能电池制作方法 |
Also Published As
Publication number | Publication date |
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CN105990468A (zh) | 2016-10-05 |
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Legal Events
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20201203 Address after: 071000 No.56, Hengyuan West Road, Baoding, Hebei Province Patentee after: YINGLI Group Ltd. Patentee after: YINGLI ENERGY (CHINA) Co.,Ltd. Patentee after: BAODING TIANWEI YINGLI NEW ENERGY Co.,Ltd. Patentee after: BAODING JIASHENG PHOTOVOLTAIC TECHNOLOGY Co.,Ltd. Address before: 071051 Chaoyang North Street, Hebei, Baoding, No. 3399 Patentee before: YINGLI Group Ltd. Patentee before: YINGLI ENERGY (CHINA) Co.,Ltd. Patentee before: BAODING TIANWEI YINGLI NEW ENERGY Co.,Ltd. Patentee before: HEBEI LIUYUN NEW ENERGY TECHNOLOGY Co.,Ltd. |
|
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180907 |