CN105988490B - A kind of outside temperature control type intelligence air-sensitive analytical equipment - Google Patents
A kind of outside temperature control type intelligence air-sensitive analytical equipment Download PDFInfo
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Abstract
The invention belongs to air-sensitive analysis system field, more particularly to a kind of outside temperature control type intelligence air-sensitive analytical equipment, it is characterized in that the Direct Analysis to material gas-sensitive property can be achieved, has broken away from dependence of the material gas-sensitive property research to senser element.The described outside temperature control type air-sensitive analytical equipment of invention includes test platform (1), air chamber (2), control system (3), cooling water circulation case (4), vavuum pump (5), dynamic gas mixer (6) and test software (7), and temperature regulating device (11), probe adjusting means (12), liquid evaporator (13), fan (14), illumination (15), vacuum meter (16), evacuation passageway (17), gas circuit (18) and Temperature Humidity Sensor (19) are included inside test platform (1)；The temperature regulating device (11) includes the water cooling protection system (114) coated around sample test platform (111), the interior heating (112) buried, temperature sensor (113) and heating (112), and outside temperature control can be directly carried out to test sample；The probe adjusting means (12) includes adjusting bracket (121) and elastic probe (122), by the contact point for adjusting adjusting bracket (121) adjustable elastic probe (122) and test sample.
Description
Technical field
The invention belongs to air-sensitive analytical equipment field, more particularly to a kind of outside temperature control type intelligence air-sensitive analytical equipment, its
Feature is that the Direct Analysis to material gas-sensitive property can be achieved, and has broken away from dependence of the material gas-sensitive property research to senser element.
Background technology
Gas sensor has important application value in fields such as environment, industry, food, traffic, national defence, and self-discovery rises
Just cause the broad interest of people.The most frequently used gas sensor is made based on semiconductor oxide materials in the market
It is that stability is high, uniformity is good into heater-type senser element, the advantages of this kind of sensor, but there is also poor selectivity, work
Make the defects such as temperature is high, sensitivity is low, test limit is low to compensate its defect, it is necessary to study new material.In recent years, with to material supply section
Going deep into for research is learned, the new gas such as organic semiconductor, conjugated polymer, carbon material (including nanotube, graphene) occurs
Quick material.Traditional gas sensitive studies the material that needs a person with the qualifications of a general and above-mentioned heater-type device is made, i.e., material grinding is reconciled into slurry
After be coated on earthenware, be then subsequently welded on base, finally penetrated from ceramic die for the heater strip to device heat supply
And weld, treat that its gas-sensitive property of corresponding device analysis just can be used after the completion of element manufacturing.This mode not only complex operation,
Also there is certain limitation, particularly cannot be used for the material and poor adhesion and the not gas sensitive of easy-sintering of film-type
Characteristic research.
The development of semiconducter process particularly silicon device makes planar device be applied in gas sensor domain,
This kind of device can solve the problem that the device problem of new material, but need to use MULTILAYER SUBSTRATE making devices, be needed on substrate
To realize measurement and temperature control simultaneously, generally this MULTILAYER SUBSTRATE makes for integral measuring electrode, heating electrode and thermometric electrode simultaneously
Complex process, cost it is higher.
The content of the invention
To solve the limitation of heater-type gas sensor in above-mentioned technical proposal in investigation of materials, while it is flat to reduce exploitation
The cost of face type gas sensor, the invention provides a kind of air-sensitive analytical equipment of outside temperature control type, the system uses probe
Measured material is directly connected to measure the gas-sensitive property of material, it is simple, convenient quick.
The air-sensitive analytical equipment major advantage of outside temperature control type of the present invention is by the way of outside temperature control, is passed through
Temperature regulating device directly heats to substrate, and heating-up temperature is controllable, without making heating electrode and thermometric electrode, section on substrate
About cost；Using probe connecting material and measuring circuit, measurement every time only need to change substrate and adjust probe location, eliminate
Traditional devices need the process welded, and it also avoid Ceramic Tube Type device and generally require grinding and the process being calcined again, will not
Destroy the pattern and structure of material, and the big I flexible design of specification of test sample, the either film of self-supporting, block
Material, or the material of growth or assembling on a planar substrate, or the material for directly coating or depositing on substrate
Directly test；Measurement pattern is optional, and measurement is whole without gearshift, and system software synchronization reading, numerical value can represent a variety of sensitive
Degree pattern is directly perceived convenient；The air-sensitive under static distribution, dynamic air-distributing, different pressure is supported to test, it is flexible, widely applicable.
Outside temperature control type air-sensitive analytical equipment of the present invention includes test platform (1), air chamber (2), control system
(3), the part such as cooling water circulation case (4), vavuum pump (5), dynamic gas mixer (6) and test software (7).
Include temperature regulating device (11), probe adjusting means (12), liquid evaporation inside test platform (1) of the present invention
Device (13), fan (14), illumination (15), vacuum meter (16), evacuation passageway (17), gas circuit (18), Temperature Humidity Sensor (19).
Temperature regulating device (11) of the present invention is by sample test platform (111), interior heater strip (112), the TEMP buried
Water cooling protection system (114) composition of cladding around device (113) and heater strip (112), sample test platform (111) is stainless steel
Or ceramic material, outside is a diameter 10mm~100mm, and sample is placed during for testing and controls sample operating temperature.Add
Heated filament (112) can provide heat after certain heated current is applied, temperature sensor (113) provided feedback, in real time
Heated current is adjusted, water cooling protection system (114) external connection cooling water circulation case (4) provides water cooling protection, auxiliary for system
Regulation temperature simultaneously protects miscellaneous part.Probe adjusting means (12) includes adjusting bracket (121) and elastic probe (122) two
Point, adjusting bracket (121) is metal material, and the X-Y-Z three-dimensionals that probe can be achieved are adjusted, degree of regulation 0.001mm~0.1mm,
Regulation is always away from 1mm~20mm, for controlling the contact position between probe and material；Elastic probe (122) has thickness different
The first-class Multiple Type of tip, tack, plum blossom, outside gold-plated, contact resistance is minimum, good corrosion resistance, and the elastic tip of probe is direct
Engaged test sample, the other end are connected measuring electrode.
Test sample of the present invention can have solid shape directly to use the thin of elastic probe (122) contact
Film, block materials or powder, film, the poroid, block materials for thering is electrode substrate to support.Insert the electrode substrate of finger-like
(8) it is the most frequently used electrode substrate, its substrate material is mostly ceramics and silicon, and it is Au or Ag-Pd materials to insert finger electrode, generally every
Include more than two pairs of electrode on individual substrate, electrode length 1mm~50mm, width 0.01mm~10mm, thickness 0.01mm~
1mm, spacing width 0.01mm~10mm., only need to be by elastic probe when making test sample using the electrode substrate (8) of slotting finger-like
(122) it is pressed on the metal gasket at substrate both ends.
Air chamber (2) of the present invention is stainless steel, cylinder or pyramid type, volume 1L~50L, can pass through upset
Rotary shaft (21) forms closing or unlimited test environment with test platform, to provide the atmosphere of reaction for gas sensor.
Injecting hole (22), liquid injection hole (23), device observation window (24) and liquid evaporator observation window (25) are provided with air chamber (2), can
Support the gas under static state and liquid distribution.Wherein, injecting hole (22) is gas distribution hand-hole, and liquid injection hole (23) steams with liquid
Device (13) position correspondence is sent out, syringe or microsyringe injection liquid can be used, and can be looked into by liquid evaporator observation window (25)
See liquid injection and volatilization situation.Air chamber (2) designs for matrix with the interface that test platform (1) is connected and is mounted with to seal
Circle, sealing is fine, and final vacuum is up to 1 × 10-3Pa, it can support to suppress as 2 × 105After Pa closed air chambers (2), it can connect
Dynamic gas mixer carries out dynamic air-distributing, and preparing the gas of gas will enter from gas circuit (18).If dynamic gas mixer with reference to
The vacuum system being made up of vavuum pump (5), vacuum meter (16), evacuation passageway (17) etc. can also support the dynamic under different pressure
Distribution.In addition, system is additionally provided with fan (14), illumination (15) and the convenient mixed gas of device observation window (23) and observation device.
Resistance measuring module (31), voltage measurement module (32), electricity are included inside master control system (3) of the present invention
Flow measurement module (33), heated current control module (34), total control module (35), communication management module (36), power module
(37).Wherein, resistance measuring module (31), voltage measurement module (32) and current measurement module (33) are by multigroup sample resistance structure
Into, point resistance, partial pressure or a shunting can be played a part of, respectively three kinds of support resistance, voltage and current test patterns, and measurement model
Width is enclosed, it is 0.001 Ω~8000M Ω that resistance mode, which can survey scope, and it is 1 μ V~1V that voltage measuring mode, which can survey scope, and electric current is surveyed
It is ± 1fA~± 100mA that amount pattern, which can survey scope, measures whole process continuously without gearshift, particularly disclosure satisfy that some measurement models
Enclose the test request of the composite of non-constant width.Heated current control module (34) can provide the heating-up temperature of heater strip (112),
And the size of heating-up temperature, 1 DEG C of degree of regulation, rate of warming about 5 are automatically adjusted according to temperature sensor (113) feedack
DEG C/s, about 3 DEG C/s of cooling rate.Total control module (35) external connection touch control screen (38), and pass through communication management module
(36) perform touch control screen (38) instruction, can be set in touch control screen temperature regulating device (11) target temperature (381),
The evaporating temperature (383) of liquid evaporator, in real time monitor temperature regulating device (11) Current Temperatures (382), environment temperature (384),
Ambient humidity (385), environmental stress (386).Power management module (37) is used to convert input voltage into needed for modules
Operating voltage, its open and close by front panel power switch control.
Cooling water circulation case (4) of the present invention is the recirculated water that water cooling protects system (114) to provide 5 DEG C~25 DEG C,
The heating region for making system is only temperature regulating device (11) this small region.
Vavuum pump (5) of the present invention can quickly extract the gas in air chamber (2) and the long period is maintained at certain
Under pressure, coordinate dynamic gas mixer (6) that the gas-sensitive property analysis under certain pressure intensity can be carried out.
Dynamic gas mixer (6) of the present invention is used to accurately configure gas, and accurate atmosphere is provided for investigation of materials.
The information that upper computer software (7) of the present invention can provide according to communication management module (36), selection measurement mould
Formula, in the form of two kinds of curve and data record test result, be expressed as different sensitivity type (such as resistor-type be represented by Rg,
Rg/Ra, Ra/Rg, | Ra-Rg |/Ra etc.), the response-recovery time is calculated, and record the environment temperature of test, ambient humidity, device
The parameters such as part operating temperature.
Brief description of the drawings
Fig. 1：Outside temperature control type intelligence air-sensitive analytical equipment structure chart of the present invention.
Fig. 2：Test platform top view of the present invention.
Fig. 3：Temperature regulating device structure chart of the present invention.
Fig. 4：Air chamber structure figure of the present invention.
Fig. 5：Control system architecture block diagram of the present invention.
Fig. 6：Touch control screen layout of the present invention.
Fig. 7：Target temperature of the present invention and the homologous thread of sample test platform actual work temperature.
Fig. 8：The typical graphics of slotting finger electrode substrate of the present invention.
Fig. 9：The typical consequence of resistance measurement pattern of the present invention.
Figure 10：The typical consequence of voltage measuring mode of the present invention.
Figure 11：The typical consequence of current measurement pattern of the present invention.
Embodiment
As shown in figure 1, each several part is entitled：Test platform (1), air chamber (2), control system (3), cooling water circulation case
(4), vavuum pump (5), dynamic gas mixer (6) and test software device (7).Probe adjusting means (12) includes adjusting bracket
And elastic probe (122) two parts (121).Vavuum pump air-flow is controlled by angle valve (161), and dynamic air-distributing air-flow is by Gas mixing valve
(181) control.
As shown in Fig. 2 include temperature regulating device (11), probe adjusting means (12), liquid evaporator inside test platform (1)
(13), fan (14), illumination (15), vacuum meter (16), evacuation passageway (17), gas circuit (18), Temperature Humidity Sensor (19).
As shown in figure 3, temperature regulating device (11) is by sample test platform (111), interior heater strip (112), the temperature sensor buried
(113) and around heater strip (112) the water cooling protection system (114) of cladding forms.
As shown in figure 4, air chamber (2) can form closing or unlimited survey by overturning rotary shaft (21) and test platform (1)
Test ring border.Injecting hole (22), liquid injection hole (23), device observation window (24) and liquid evaporator observation window are provided with air chamber (2)
(25)。
Surveyed as shown in figure 5, including resistance measuring module (31), voltage measurement module (32), electric current inside control system (3)
Module (33), heated current control module (34), total control module (35), communication management module (36), power module (37) are measured,
Outside is provided with touch control screen (38).
As shown in fig. 6, target temperature (381) and sample test platform (111) real work are set in touch control screen (38)
Temperature approximation is linear, and the controlled range of target temperature (381) is room temperature~700 DEG C, the sample of corresponding stainless steel
Product testboard (111) can actual temperature-control range be room temperature~500 DEG C.
Touch control screen as shown in Figure 7 includes target temperature (381), Current Temperatures (382), evaporating temperature (383), environment
Temperature (384), ambient humidity (385), environmental stress (386).
A kind of domain of typical slotting finger electrode substrate (8) as shown in Figure 8.
The typical consequence of resistance measurement pattern as shown in Figure 9.
The typical consequence of voltage measuring mode as shown in Figure 10.
The typical consequence of current measurement pattern as shown in figure 11.
The embodiment of the present invention is described further with reference to above-mentioned accompanying drawing：From PHILIPS
LPC214x ARM7 microprocessors are as total control module (35)；Beijing Ai Lite Science and Technology Ltd.s R121 chipsets are resistance
Measurement module (31) master chip, Beijing Ai Lite Science and Technology Ltd.s V212 chipsets be voltage measurement module (32) master chip,
Beijing Ai Lite Science and Technology Ltd.s I120 chipsets are current measurement module (33) master chip, and Matsushita Electric G310 chipsets are
Power module (37) master chip, PCB is drawn, each chip and sample resistance and other related devices are soldered to electricity
Road plate；
Total control module (35) docks with touch control screen (38), realizes and sets target temperature in touch control screen (38)
(381), evaporating temperature (383), Current Temperatures (382), environment temperature (384), ambient humidity (385) and environment are monitored in real time
Pressure (386).
Embodiment 1
The present embodiment uses Beijing Zhong Ju Science and Technology Ltd.s CZ-16 type Ce-doped ZnO powders as test sample,
To provide the specific method that above-mentioned air-sensitive analytical equipment is used for gas-sensitive property analysis.
Method one is the dynamic air-distributing method of testing under different pressure, and its step is as follows：
1st, sample preparation methods：It is 18.0M Ω cm by sample and resistivity-1Deionized water be mixed into slurry, be coated in
The slotting finger electrode part of electrode substrate (8), is then dried at 60 DEG C.
2nd, refering to Fig. 1 and 2, the sample prepared is placed on sample test platform (111), used adjusting bracket (121)
The position of regulation elasticity probe (122), it is ensured that contact of the probe with sample is good.
3rd, connect circuit and open test system, the operating temperature of test sample is set in touch control screen (38),
Settable temperature range is 25~700 DEG C, and stable a period of time.
4th, angle valve (161) is opened, vacuum pump switch is opened and vacuumizes, check environmental stress on touch-screen (386) numerical value, treat gas
After air pressure reaches certain value in case, angle valve is closed, to keep vacuum, final vacuum of the invention：1×10-1Pa, the limit are true
Empty pumping speed：1×105Pa~1 × 10-1Pa (7 minutes), vacuum conservation degree：1×10-1Pa~20Pa (50 minutes).
5th, test software device (7) is opened, measurement pattern is selected, there is that resistance, voltage, electric current Three models are optional, each mould
The measurement range of formula is 0.001 Ω~8000M Ω, 1 μ V~1V, ± 1fA~± 100mA respectively, and measurement is whole without gearshift, surveys
Amount result includes two kinds of forms of figure and data.By taking resistance measurement pattern as an example, after selecting resistance measurement pattern, test software
Operation interface will show the numerical value of resistance variations automatically.
6th, Gas mixing valve (181) is opened, is passed through background gas, conventional background gas have pure air, nitrogen etc., this implementation
Example can close Gas mixing valve after air pressure in gas tank reaches target air pressure, can also ventilate always by taking nitrogen as an example, what the present invention supported
Air pressure range is 1 × 10-1Pa~2 × 105Pa, the test sample that the operation interface of software to be tested is shown is in background gas
After resistance value (Ra) basically reaches stabilization, Gas mixing valve (181) can be closed.
7th, it is again turned on angle valve (161), the operation in repeat step 4, is then shut off angle valve (161), opens Gas mixing valve
(181) object gas, is passed through from the dynamic gas mixer (6) of connection, the dynamic gas mixer that the present invention uses can support ppb
To the multiple gases distribution of ppt levels, the present embodiment is by taking 50ppm H2S as an example, test that the operation interface of software to be tested is shown
After resistance value (Rg) of the sample in object gas basically reaches stabilization, Gas mixing valve (181) can be closed.
8th, the operation in repeat step 4, angle valve (161) is then shut off, opens Gas mixing valve (181), match somebody with somebody from the dynamic of connection
Gas system is passed through background gas again in (6), to detect recovery situation of the test sample in background gas.To test resistance again
Secondary stabilization, it can stop testing.
9th, in the representation of " sensitivity curve " place selection sensitivity, by taking resistance measurement pattern as an example, the resistance of test
Value Rg can directly be converted into Ra/Rg, Rg/Ra and | Ra-Rg | the form such as/Ra, can finally store data as txt or xls forms,
Fig. 8 be operating temperature at 250 DEG C, H of the test sample to 50ppm2S test result.
Method two be normal pressure by force under dynamic air-distributing method of testing, its step is unlike method one：
Angle valve (161) is closed all the time when the 1st, testing, that is, without using vacuum system in operating.
When the 2nd, testing, Gas mixing valve (181) is opened, background gas is passed through from the dynamic gas mixer (6) of connection first, treats
Be passed through again after the resistance value stabilization of test sample object gas until resistance value stablize again, be finally passed through background gas again extremely
The resistance value stabilization of test sample, complete the test of a circulation.
Method three is the method for testing of static distribution mode under normal pressure, and its step is unlike method one：
It need not be vacuumized and dynamic air-distributing when the 1, testing, close angle valve (161) and Gas mixing valve (181) all the time.
If the 2nd, it can be passed through using gas source distribution directly with syringe or the gas of sampler measured amounts
Injecting hole is injected into air chamber；If using the distribution of liquid source of the gas, it is necessary to using liquid evaporator (13), and in evaporating temperature
(383) liquid evaporation temperature is directly set on, for being difficult to the steam to volatilize, it is also necessary on opening control (3) front panel
Fan (14) controlling switch.
Embodiment 2
The present embodiment uses Beijing Ai Lite Science and Technology Ltd.s YSZ-103 type Y-doped ZrO2Film is as test specimens
Product, to provide the specific method that above-mentioned air-sensitive analytical equipment is used for gas-sensitive property analysis.
The present embodiment supports above-mentioned three kinds of method of testings simultaneously, as different from Example 1：
1st, test sample is the film made on silicon chip, and 2 points of film respectively has the Pt electrodes that a magnetron sputtering makes,
Therefore need to be only pressed in without using other substrates, during test with probe on Pt electrodes.
2nd, test pattern is changed to voltage testing mode.Fig. 9 gives the lower 400 DEG C typical cases to 10ppm NO of dynamic air-distributing and surveyed
Test result.
Embodiment 3
The present embodiment uses Beijing Zhong Ju Science and Technology Ltd.s PW-115 types WO3Nanotube is as test sample, to provide
Above-mentioned air-sensitive analytical equipment is used for the specific method of gas-sensitive property analysis.
The present embodiment supports above-mentioned three kinds of method of testings simultaneously, as different from Example 1：
1st, test pattern is changed to testing current pattern.Test sample is to static configuration when Figure 10 gives 200 DEG C
The test result of 100ppm ethanol.
Claims (11)
1. a kind of method of testing of outside temperature control type intelligence air-sensitive analytical equipment, the analytical equipment include：Test platform (1),
Air chamber (2), control system (3), cooling water circulation case (4), vavuum pump (5), dynamic gas mixer (6) and test software (7) dress
Put, include inside test platform (1) temperature regulating device (11), probe adjusting means (12), liquid evaporator (13), fan (14),
Illuminate (15), vacuum meter (16), evacuation passageway (17), gas circuit (18) and Temperature Humidity Sensor (19)；The temperature regulating device
(11) include around sample test platform (111), the interior heater strip (112) buried, temperature sensor (113) and heater strip (112)
The water cooling protection system (114) of cladding, outside temperature control can be directly carried out to test sample；The probe adjusting means (12) includes
Adjusting bracket (121) and elastic probe (122), by adjusting adjusting bracket (121) adjustable elastic probe (122) and test specimens
The contact point of product；It is characterized in that：Including：It is 18.0M Ω cm by sample and resistivity-1Deionized water be mixed into slurry, apply
The slotting finger electrode part of electrode substrate (8) is overlayed on, is then dried；The sample prepared is placed on sample test platform (111)
On, use the position of adjusting bracket (121) regulation elasticity probe (122), it is ensured that contact of the probe with sample is good；Set
The operating temperature of sample, and stable a period of time；Angle valve (161) is opened, vacuum pump switch is opened and vacuumizes, treat gas in gas tank
After pressure reaches certain value, angle valve is closed, to keep vacuum；Test software device (7) is opened, selects measurement pattern, measurement knot
Fruit includes two kinds of forms of figure and data；Gas mixing valve (181) is opened, background gas is passed through, treats that air pressure reaches target gas in gas tank
Gas mixing valve is closed after pressure；Angle valve (161) is again turned on, vacuum pump switch is opened and vacuumizes, after air pressure reaches certain value in gas tank,
Angle valve is closed, to keep vacuum, Gas mixing valve (181) is then opened, target gas is passed through from the dynamic gas mixer (6) of connection
Body；Angle valve (161) is again turned on, vacuum pump switch is opened and vacuumizes, after air pressure reaches certain value in gas tank, closes angle valve, with
Vacuum is kept, Gas mixing valve (181) is then opened, background gas is passed through again from the dynamic gas mixer (6) of connection, with inspection
Recovery situation of the sample in background gas is surveyed, is stablized again to test resistance, stops test.
2. method of testing according to claim 1, it is characterised in that：All the time angle valve (161) is closed during test, during test,
Gas mixing valve (181) is opened, is passed through background gas, the resistance value of sample to be tested from the dynamic gas mixer (6) of connection first
Object gas is passed through after stable again until resistance value is stablized again, is finally passed through background gas again to the resistance value of sample
It is stable, complete the test of a circulation.
3. method of testing according to claim 1, it is characterised in that：It need not be vacuumized during test and dynamic air-distributing, all the time
Close angle valve (161) and Gas mixing valve (181)；Use gas source distribution or liquid source of the gas distribution.
4. method of testing according to claim 1, it is characterised in that：Sample test platform (111) is stainless steel or ceramics
Material, outer dia 10mm~500mm, sample is placed during for testing and controls sample operating temperature, heater strip (112) is being applied
Heat can be provided after adding certain heated current, temperature sensor (113) provided feedback, adjusts heated current in real time,
Water cooling protection system (114) external connection cooling water circulation case (4) provides water cooling protection and auxiliary temperature regulation.
5. method of testing according to claim 1, it is characterised in that：Adjusting bracket (121) is metal material, can be achieved to visit
The X-Y-Z three-dimensionals regulation of pin, degree of regulation 0.001mm~0.1mm, is adjusted always away from 1mm~20mm, for controlling probe and material
Between contact position；The direct engaged test sample of elastic tip of elastic probe (122), the other end are connected measuring electrode.
6. method of testing according to claim 1, it is characterised in that：Air chamber (2) is stainless steel, cylinder or circular cone
Type, volume 1L~50L, closing or unlimited test environment, air chamber are formed by overturning rotary shaft (21) and test platform (1)
(2) interface being connected with test platform (1) designs for matrix and installs sealing ring (26).
7. the method for testing according to claim 1 or 6, it is characterised in that：Test platform (1) is combined with air chamber (2), can
Support the dynamic air-distributing under static distribution and different pressure；Wherein, static distribution includes gas dilution distribution and liquid evaporation
Distribution, gas of the gas dilution distribution from injecting hole (22) injection certain volume；Liquid evaporation distribution is injected from liquid injection hole (23)
To liquid evaporator (13), the heating-up temperature of evaporator is set by the evaporating temperature (383) in touch control screen (38)；Dynamically
Distribution includes test platform (1) connection dynamic gas mixer (6), and after Gas mixing valve (181) is opened, gas will enter from gas circuit (18)
Air inlet chamber；Vacuum system includes vavuum pump (5), vacuum meter (16), evacuation passageway (17) and angle valve (161), can be to closing
Air chamber carries out vacuumize process and keeps certain vacuum, after using dynamic gas mixer (6) ventilation, passes through touch control
Shield air pressure during environmental stress (386) the locking test sample work of (38) display, so as to support the dynamic under different pressure to match somebody with somebody
Gas is tested.
8. method of testing according to claim 1, it is characterised in that：Resistance measuring module is included inside control system (3)
(31), voltage measurement module (32), current measurement module (33), heated current control module (34), total control module (35), logical
Believe management module (36) and power module (37).
9. method of testing according to claim 8, it is characterised in that：Resistance measuring module (31), voltage measurement module
(32) it is made up of with current measurement module (33) multigroup sample resistance, point resistance, partial pressure or a shunting can be played a part of, propped up respectively
Hold three kinds of resistance, voltage and current test patterns.
10. method of testing according to claim 8, it is characterised in that：Heated current control module (34) provides heater strip
(112) heating-up temperature, and automatically adjust according to temperature sensor (113) feedack the size of heating-up temperature.
11. method of testing according to claim 8, it is characterised in that：Total control module (35) external connection touch control
Shield (38), and the instruction of touch control screen (38) is performed by communication management module (36), temperature control is set in touch control screen
The target temperature (381) of device (11), the evaporating temperature (383) of liquid evaporator, the current of temperature regulating device (11) is monitored in real time
Temperature (382) environment temperature (384), ambient humidity (385) and ambient pressure (386).
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| CN201510464190.7A CN105988490B (en) | 2015-08-03 | 2015-08-03 | A kind of outside temperature control type intelligence air-sensitive analytical equipment |
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| CN201510464190.7A CN105988490B (en) | 2015-08-03 | 2015-08-03 | A kind of outside temperature control type intelligence air-sensitive analytical equipment |
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| CN105988490B true CN105988490B (en) | 2018-02-16 |
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| CN111579725B (en) * | 2020-06-04 | 2020-12-11 | 浙江特富发展股份有限公司 | Gas analyzer device capable of automatically adjusting temperature |
| CN112834572B (en) * | 2020-12-30 | 2023-04-28 | 广东电网有限责任公司电力科学研究院 | Gas sensor testing method applied to detection of sulfur hexafluoride and decomposition product gas sensor thereof |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101487812A (en) * | 2009-01-20 | 2009-07-22 | 天津大学 | Test system for resistivity-temperature characteristics and air-sensitive characteristics of components |
| CN203350241U (en) * | 2013-07-24 | 2013-12-18 | 天津大学 | Testing system for detecting characteristic parameters of gas sensor |
| CN103760200A (en) * | 2014-01-20 | 2014-04-30 | 吉林大学 | Ion-type gas-sensitive material analysis device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10019853A1 (en) * | 2000-04-13 | 2001-10-25 | Auergesellschaft Gmbh | Gas sensor arrangement |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101487812A (en) * | 2009-01-20 | 2009-07-22 | 天津大学 | Test system for resistivity-temperature characteristics and air-sensitive characteristics of components |
| CN203350241U (en) * | 2013-07-24 | 2013-12-18 | 天津大学 | Testing system for detecting characteristic parameters of gas sensor |
| CN103760200A (en) * | 2014-01-20 | 2014-04-30 | 吉林大学 | Ion-type gas-sensitive material analysis device |
Non-Patent Citations (1)
| Title |
|---|
| 新型智能气体传感器分析设备;徐冬梅;《材料保护》;20131130;第46卷;第1.2节及图2-3 * |
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