CN105938973A - Novel high-precision laser energy/power attenuator - Google Patents

Novel high-precision laser energy/power attenuator Download PDF

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Publication number
CN105938973A
CN105938973A CN201610444253.7A CN201610444253A CN105938973A CN 105938973 A CN105938973 A CN 105938973A CN 201610444253 A CN201610444253 A CN 201610444253A CN 105938973 A CN105938973 A CN 105938973A
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China
Prior art keywords
polarization splitting
splitting prism
laser
energy
prism
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Pending
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CN201610444253.7A
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Chinese (zh)
Inventor
岱钦
姚俊
崔建丰
卢春良
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Shenyang Ligong University
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Shenyang Ligong University
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Priority to CN201610444253.7A priority Critical patent/CN105938973A/en
Publication of CN105938973A publication Critical patent/CN105938973A/en
Pending legal-status Critical Current

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

The invention provides a novel high-precision laser energy/power attenuator, which comprises a laser device, a first polarization beam splitter prism, a prism clamp and a second polarization beam splitter prism, wherein the first polarization beam splitter prism and the second first polarization beam splitter prism are sequentially arranged at one side of the laser device; the axes of the first polarization beam splitter prism and the second polarization beam splitter prism and laser light emitted from the laser device are located on the same straight line; the prism clamp is located on the first polarization beam splitter prism and the second polarization beam splitter prism to play fixing and clamping roles; and the first polarization beam splitter prism and the second polarization beam splitter prism can freely rotate employing a laser beam propagation direction as the axis. Aiming at the problems that a traditional laser energy/power attenuator is insufficient in extinction ratio, complicated in adjusting procedure and the like and stray light cannot be easily processed, significant improvement is provided.

Description

A kind of novel high-precision laser energy/power attenuator
Technical field
The present invention relates to a kind of novel high-precision continuously adjustable laser output energy/power attenuator, belong to laser field.
Background technology
Along with developing rapidly of laser technology, the effect that laser plays in fields such as industry, medical science, military project, scientific researches is the most irreplaceable.For such as laser index carving, liquid crystal is repaired, in large scale integrated circuit laser ablation and micro Process etc. many retrofits application, the control accuracy that laser exports energy requires more and more higher, and most of laser instrument, the Adjustment precision of its supporting power supply cannot meet use requirement, especially when required laser instrument runs the output energy needed or power less than fully loaded energy/power 50%, realize often bringing the variation of laser energy/power stability by regulation Laser Power Devices electric current or running voltage, therefore laser energy/power attenuator just becomes requisite accessory.
The structure of traditional laser energy/power attenuator is to put into 1/2nd wave plates corresponding with optical maser wavelength between the Brewster film polarizer that two panels is placed in parallel, by rotate change wave plate optical axis and laser polarizing face angle Ф control transmitted through laser energy/power.It is designed with more limitation: first, and the extinction effect of this system depends entirely on 1/2nd wave plates that extinction ratio is relatively low, causes attenuator under high-energy/power laser output to have been set to no light condition, and reality still has laser to export, i.e. light leakage phenomena;Second, the putting position of the polaroid of conventional attenuator presets, the polarization direction of laser output is proposed requirement, though polarization direction can be adjusted by the method adding 1/2nd wave plates before incident attenuator, but too increases complexity and use cost simultaneously;3rd, conventional attenuator, during rotating 1/2nd wave plates, due to the problem of film polarizer reflection angle, evokes dust for ensureing that veiling glare will not be beaten on attenuator inwall, the volume of attenuator need to be increased away from the position additional veiling glare absorption plant of light path in the exit direction of veiling glare.
Summary of the invention
The problem existed for prior art, the problems such as the present invention uses easy structure based on polarization splitting prism, and the extinction ratio existed for conventional laser energy/power attenuator is not enough, adjust complex procedures, veiling glare is the most disposable provide and significantly improve.
A kind of novel high-precision laser energy/power attenuator, as it is shown in figure 1, its composition includes laser instrument, the first polarization splitting prism, prism fixture, the second polarization splitting prism;Described first polarization splitting prism and the second polarization splitting prism are sequentially emitted on laser instrument side, and first the laser that sends of axis and the laser instrument of polarization splitting prism and the second polarization splitting prism be located along the same line, described prism fixture lays respectively at the effect playing fixed clamp on the first polarization splitting prism, the second polarization splitting prism;Described first polarization splitting prism, the second polarization splitting prism can rotate freely with laser beam propagation direction for axle.
Described a kind of novel high-precision laser energy/power attenuator, its method of work is: open laser instrument Output of laser, energy meter or energy meter are placed in laser outbound course, synchronous rotary the first polarization splitting prism and the second polarization splitting prism, until the output energy that detects of energy meter or energy meter or power and the energy of laser when not adding attenuator or power approximately equal and be designated as Emax, fix the first polarization splitting prism, labelling the second polarization splitting prism position S1;Again by rotate the second polarization splitting prism make laser output energy or power be 0, labelling the second polarization splitting prism position S2;The energy of laser of output or power can be made from Emax to delustring (energy or power are 0) and continuously adjustabe by rotating the second polarization splitting prism between S1 and S2 afterwards.
Described a kind of novel high-precision laser energy/power attenuator, as in figure 2 it is shown, arrange magneto optic isolator to constitute magneto-optic shielding system between described first polarization splitting prism and the second polarization splitting prism;The laser coaxial that described magneto optic isolator and laser instrument send;The larization rotation angle of described magneto optic isolator is 45 °.Described its control method of magneto-optic shielding system is: after adjusting described attenuator as shown in Figure 1, second polarization splitting prism is in the position of S1, now laser output energy or power are Emax, magneto optic isolator is placed between the first polarization splitting prism and the second polarization splitting prism, make itself and laser coaxial, regulating the second polarization splitting prism afterwards makes laser output energy again reach Emax, now fixes the second polarization splitting prism, constitutes magneto-optic shielding system.
The laser sent for the laser instrument of different wave length, can be by the most corresponding to the first polarization splitting prism and plated film system of the second polarization splitting prism institute.
Compared with conventional energy/power attenuator, the invention have the benefit that
1) due to the extinction capability of polarization splitting prism than wave plate one or two magnitude high, so the present invention can damping capacity dynamic range and much bigger than conventional attenuator of adjustable accuracy;
2) present invention is only made up of two pieces of polarization splitting prisms, and volume is little, features simple structure, failure rate is low;
3) the initial polarization direction no requirement (NR) to laser instrument, universality is strong;
4) the veiling glare exit direction produced through attenuator is vertical with laser outbound course, therefore can directly be absorbed by prism fixture, it is not necessary to additional veiling glare absorption plant.
Accompanying drawing explanation
Fig. 1 is the attenuator structure schematic diagram of the present invention;
Fig. 2 is the magneto-optic shielding system structural representation of the present invention;
Wherein: 1 is laser instrument, 2 is the first polarization splitting prism, 3 is the first prism fixture, 5 is the second prism fixture, 4 is the second polarization splitting prism, and 6 is magneto optic isolator.
Detailed description of the invention
The invention will be further described below in conjunction with the accompanying drawings:
A kind of novel high-precision laser energy/power attenuator, as it is shown in figure 1, its composition includes laser instrument the 1, first polarization splitting prism the 2, first prism fixture the 3, second prism fixture the 5, second polarization splitting prism 4;Described first polarization splitting prism 2 and the second polarization splitting prism 4 are sequentially emitted on laser instrument 1 side, and first the laser that sends of axis and the laser instrument 1 of polarization splitting prism 2 and the second polarization splitting prism 4 be located along the same line, described first prism fixture 3 is positioned on the first polarization splitting prism 2, second prism fixture 5 is positioned on the second polarization splitting prism 4, and polarization splitting prism is played the effect of fixed clamp by prism fixture;Described first polarization splitting prism the 2, second polarization splitting prism 4 can rotate freely with laser beam propagation direction for axle.
Described a kind of novel high-precision laser energy/power attenuator, its method of work is: open laser instrument Output of laser, energy meter or energy meter are placed in laser outbound course, synchronous rotary the first polarization splitting prism 2 and the second polarization splitting prism 4, until the output energy that detects of energy meter or energy meter or power and the energy of laser when not adding attenuator or power approximately equal and be designated as Emax, fix the first polarization splitting prism 2, labelling the second polarization splitting prism 4 position S1;Again by rotate the second polarization splitting prism 4 make laser output energy or power be 0, labelling the second polarization splitting prism 4 position S2;The energy of laser of output or power can be made to be 0 and continuously adjustabe from Emax to delustring energy or power by rotating the second polarization splitting prism 4 between S1 and S2 afterwards.
Described a kind of novel high-precision laser energy/power attenuator, as in figure 2 it is shown, arrange magneto optic isolator 6 to constitute magneto-optic shielding system between described first polarization splitting prism 2 and the second polarization splitting prism 4;The laser coaxial that described magneto optic isolator 6 sends with laser instrument 1;The deflection angle of described magneto optic isolator 6 is 45 °.Its control method is: after adjusting described attenuator as shown in Figure 1, second polarization splitting prism 4 is in the position of S1, now laser output energy or power are Emax, magneto optic isolator 6 is placed between the first polarization splitting prism 2 and the second polarization splitting prism 4, make itself and laser coaxial, regulating the second polarization splitting prism 4 afterwards makes laser output energy again reach Emax, now fixes the second polarization splitting prism 4, constitutes magneto-optic shielding system.Compared with conventional magneto-optic shielding system, also due to without 1/2nd wave plates in this system, therefore its isolating power to exceed 1 to 2 magnitudes.
The different optical maser wavelength sent for laser instrument, by the most corresponding to the first polarization splitting prism 2 and 4 plated film systems of the second polarization splitting prism.
As increased property easy to use and the Adjustment precision of attenuator, can be connected with motor by fixture, the energy/power that can be realized exact numerical labelling by software programming is exported.

Claims (5)

1. novel high-precision laser energy/power attenuator, it is characterised in that its composition includes laser instrument (1), the first polarization splitting prism (2), the first prism fixture (3), the second polarization splitting prism (4), the second prism fixture (5);Described first polarization splitting prism (2) and the second polarization splitting prism (4) are sequentially emitted on laser instrument (1) side, and first the laser that sends of axis and the laser instrument (1) of polarization splitting prism (2) and the second polarization splitting prism (4) be located along the same line, described first prism fixture (3) is positioned on the first polarization splitting prism (2), and the second prism fixture (5) is positioned at the effect playing fixed clamp on the second polarization splitting prism (4);Described first polarization splitting prism (2), the second polarization splitting prism (4) can rotate freely with laser beam propagation direction for axle.
A kind of novel high-precision laser energy/power attenuator the most according to claim 1, it is characterized in that, Faraday Magneto-optical Isolator (6) is set between described first polarization splitting prism (2) and the second polarization splitting prism (4) and constitutes magneto-optic shielding system;The laser coaxial that described magneto optic isolator (6) and laser instrument (1) send;The polarization optically-active angle of described magneto optic isolator (6) is 45 °.
A kind of novel high-precision laser energy/power attenuator the most according to claim 1, it is characterized in that, its method of work is: open laser instrument Output of laser, energy meter or energy meter are placed in laser outbound course, synchronous rotary the first polarization splitting prism (2) and the second polarization splitting prism (4), until the output energy that detects of energy meter or energy meter or power and the energy of laser when not adding attenuator or power approximately equal and be designated as Emax, fix the first polarization splitting prism (2), labelling the second polarization splitting prism (4) position S1;Again by rotate the second polarization splitting prism (4) make laser output energy or power be 0, labelling the second polarization splitting prism (4) position S2;The energy of laser of output or power can be made from Emax to 0 and continuously adjustabe by rotating the second polarization splitting prism (4) between S1 and S2 afterwards.
A kind of novel high-precision laser energy/power attenuator the most according to claim 3, it is characterized in that, after adjusting described attenuator, second polarization splitting prism (4) is in the position of S1, now laser output energy or power are Emax, magneto optic isolator (6) is placed between the first polarization splitting prism (2) and the second polarization splitting prism (4), make itself and laser coaxial, rotating the second polarization splitting prism (4) afterwards makes laser output energy again reach Emax, now fix the second polarization splitting prism (4), constitute magneto-optic shielding system.
5. novel high-precision laser energy/power attenuator, it is characterised in that for the laser instrument of different wave length, by the most corresponding to the first polarization splitting prism (2) and plated film system of the second polarization splitting prism (4) institute.
CN201610444253.7A 2016-06-21 2016-06-21 Novel high-precision laser energy/power attenuator Pending CN105938973A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111069792A (en) * 2019-12-30 2020-04-28 东莞市盛雄激光先进装备股份有限公司 Laser power adjusting device, laser cutting device and laser cutting machine tool
CN111897136A (en) * 2020-08-13 2020-11-06 中国科学院长春光学精密机械与物理研究所 Dynamic continuous attenuation device for mid-infrared laser
CN113644537A (en) * 2021-07-02 2021-11-12 中国科学院上海光学精密机械研究所 Device for controlling broadband laser output energy
CN114384706A (en) * 2022-01-10 2022-04-22 中国人民解放军63892部队 Polarization-independent high-precision continuous dynamic laser energy attenuation device

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111069792A (en) * 2019-12-30 2020-04-28 东莞市盛雄激光先进装备股份有限公司 Laser power adjusting device, laser cutting device and laser cutting machine tool
CN111897136A (en) * 2020-08-13 2020-11-06 中国科学院长春光学精密机械与物理研究所 Dynamic continuous attenuation device for mid-infrared laser
CN113644537A (en) * 2021-07-02 2021-11-12 中国科学院上海光学精密机械研究所 Device for controlling broadband laser output energy
CN114384706A (en) * 2022-01-10 2022-04-22 中国人民解放军63892部队 Polarization-independent high-precision continuous dynamic laser energy attenuation device

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