CN107102436A - A kind of wave plate group design method for compensating any optical phase put-off - Google Patents
A kind of wave plate group design method for compensating any optical phase put-off Download PDFInfo
- Publication number
- CN107102436A CN107102436A CN201710332040.XA CN201710332040A CN107102436A CN 107102436 A CN107102436 A CN 107102436A CN 201710332040 A CN201710332040 A CN 201710332040A CN 107102436 A CN107102436 A CN 107102436A
- Authority
- CN
- China
- Prior art keywords
- wave plate
- plate group
- optical phase
- phase put
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/286—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising for controlling or changing the state of polarisation, e.g. transforming one polarisation state into another
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Polarising Elements (AREA)
Abstract
The invention discloses a kind of wave plate group design method for compensating any optical phase put-off, including：1) wave plate group is placed in the front end or rear end of the optical system light path of optical phase put-off to be compensated；2) referred to the optical system of optical phase put-off to be compensated, the quick shaft direction of optical system is abscissa, sets up cartesian coordinate system；3) by corresponding Jones matrix successively premultiplication, the Jones matrix of the optical system after being modulated through wave plate group is obtained；4) by corresponding Jones vector successively premultiplication, the Jones vector of outgoing light wave is obtained；5) Jones vector of the outgoing light wave after modulation Jones vector corresponding with required outgoing optical polarization is compared, calculate need adjust wave plate group in each wave plate with reference frame abscissa angle；6) each wave plate in wave plate group is rotated with reference frame abscissa angle according to each wave plate in the wave plate group calculated, completes the compensation of optical phase put-off produced to optical phase put-off optical system to be compensated.
Description
Technical field
The present invention relates to crystal Wave-front phase compensation technique field, polarization Modulation field, and in particular to one kind compensation
The wave plate group design method of any optical phase put-off.
Background technology
With the development of the technologies such as Fibre Optical Communication Technology, super-resolution microtechnic, optical fiber sensing technology, to optical phase
Accurate control brings higher requirement.Due to the presence of the various polarizers in optical system, optical phase can be induced and prolonged
Late, then the polarization state of light is changed, finally directly affects the capacity usage ratio or imaging effect of optical system.Cause
This, it is necessary to optical phase put-off caused by non-design factor in optical system is compensated for, with eliminate or reduction system in it is non-
The influence for the optical phase put-off that design factor is introduced, so as to improve the operating efficiency and work quality of optical system.
In Wu Wendi et al. patent document《Dual wavelength optical phase delay device》, in Publication No. CN105700059A,
There is provided a kind of wave plate combined for optical phase-retardation compensating, the patent document employs monolithic birefringent filter group
Close, by calculating the thickness for the birefringent filter that need to compensate optical phase, change the thickness of birefringent filter to obtain
Need optical phase difference.But the present invention has limitation, it can only be compensated for fixed optical phase put-off.In optics phase
Limitation is larger in terms of the delay compensation of position, and the patented technology need to adjust the thickness of birefringent filter to change optical phase
Difference, complex operation realizes that difficulty is big.And in Zhao Shuqing et al. patent document《Optical phase delay device》, Publication No.
In CN1387071A, light beam is split using birefringece crystal, a branch of is ordinary light, and another beam is extraordinary ray, then
This two beams polarised light is coupled using parallel beam splitter piece, the angle of two beam splitting chip optical axises of control can obtain required optics phase
Position delay, but still there are some defects：First, using the method for birefringece crystal beam splitting, optical phase put-off can be caused
Accuracy of measurement is not high；Second, in optical phase put-off needed for producing, it is necessary to realized by changing the thickness of parallel beam splitter piece,
Complex operation, cost is higher, and universality is poor.
The content of the invention
The present invention is poor for existing optical phase-retardation compensating device universality, versatility, flexibility, for optical system
The middle optical phase-retardation compensating excessively complicated and not high technical problem of compensation precision, it is proposed that any optics of one kind compensation
The wave plate group design method of phase delay.The optical phase produced using the wave plate group being made up of half-wave plate and quarter-wave plate
Difference, is compensated to the optical phase put-off that non-design factor is produced in the optical system of optical phase put-off to be compensated, this
Compensation way just can be realized to optics by adjusting the angle of half-wave plate and quarter-wave plate and reference frame abscissa
The compensation of the arbitrary optical phase put-off produced in system.
A kind of wave plate group design method for compensating any optical phase put-off, it is characterised in that comprise the following steps：
1) wave plate group is placed in the front end or rear end of the optical system light path of optical phase put-off to be compensated, wave plate group is vertical
Light wave propagation direction is placed in light path, is prolonged for compensating the optical phase that the optical system of optical phase put-off to be compensated is produced
Late；
2) referred to the optical system of optical phase put-off to be compensated, the quick shaft direction of optical system is abscissa, light
The slow-axis direction of system is ordinate, sets up cartesian coordinate system；
3) by the Jones matrix and step 1 of the optical system of optical phase put-off to be compensated) in wave plate group Jones matrix
According to light wave incidence order in light path successively premultiplication, the Jones matrix of the optical system after being modulated through wave plate group is obtained；
4) by step 3) in through wave plate group modulate after optical phase put-off to be compensated optical system Jones matrix with
Incident light wave Jones vector premultiplication successively, obtains the optical system through optical phase put-off to be compensated, going out after the modulation of wave plate group
Penetrate the Jones vector of light wave；
5) by step 4) in the optical system through optical phase put-off to be compensated, wave plate group modulation after outgoing light wave fine jade
This vector Jones vector corresponding with required outgoing optical polarization is compared, and calculates each in the wave plate group for needing to adjust
Wave plate is with reference frame abscissa angle；
6) according to step 5) in the wave plate group that calculates each wave plate with reference frame abscissa angle, rotate wave plate
The wave plate of each in group, completes the compensation of optical phase put-off produced to optical phase put-off optical system to be compensated.
Step 1) in, preferably, the wave plate group is the combination of linear polarizer, half-wave plate and quarter-wave plate；
It is linearly polarized light that the linear polarizer, which is used to regulate and control incident light wave,；
The optical phase put-off is to pass through optical phase put-off to be compensated between the vertical component and parallel component of light wave
Optical system after the phase difference that produces.
Step 2) in, the fast axle of the optical system of the optical phase put-off to be compensated is the inclined of the fast light wave components of propagation
Shake direction, and its vertical direction is slow-axis direction.
Step 3) in, the fast axle of quarter-wave plate and reference frame abscissa angle are θ, half-wave in the wave plate group
The fast axle of piece and the angle of reference frame abscissa are α, the optics phase of the optical system generation of optical phase put-off to be compensated
Position delay is η；
Half-wave plate, quarter-wave plate fast axis correspond in half-wave plate and quarter-wave plate propagate respectively in the wave plate group
The polarization direction of fast light wave components, its vertical direction corresponds to the direction of half-wave plate and a quarter slow axis respectively；
The two-dimentional square formation that linear transformation of the Jones matrix to characterize polarizer is acted on；
The Jones matrix of Jones matrix of the Jones matrix comprising half-wave plate and quarter-wave plate in the wave plate group；
The Jones matrix of the half-wave plate is：
The Jones matrix of the quarter-wave plate is：
The Jones matrix of the optical system of the optical phase put-off to be compensated is：
It is described modulated through wave plate group after the Jones matrix of optical system be：
Step 4) in, the incident light wave is modulated to linearly polarized light after linear polarizer；
The Jones vector of outgoing light wave after the modulation is：
Wherein, A, B, C, D, K are：
Step 5) in, the required outgoing optical polarization is the focal plane for the optical system for wanting to enter into phase to be compensated
Light wave polarization state, can for linearly polarized light, circularly polarized light or elliptically polarized light etc. random polarization state polarised light, its Jones
Vector representation is：
Wherein, a, b, c, d take appropriate value to represent the polarised light of any correspondence polarization state, will be through optics phase to be compensated
Position delay optical system, wave plate group modulation after outgoing light wave Jones vector E1It is corresponding with required outgoing optical polarization
Jones vector EoutIt is compared, calculates the fast axle and reference frame abscissa angle theta of quarter-wave plate0And half-wave plate
Fast axle and reference frame abscissa angle α0。
Wave plate includes with reference frame abscissa angle in the wave plate group for needing to adjust：Quarter-wave plate it is fast
Axle and reference frame abscissa angle theta and the fast axle of half-wave plate and the angle α of reference frame abscissa.
Step 6) in, the modulator approach of each wave plate is in the rotation wave plate group：Quarter-wave plate is rotated simultaneously
Fast axle and reference frame abscissa angle are θ0, the fast axle of half-wave plate and the angle of reference frame abscissa be α0。
Relative to prior art, the present invention has following beneficial technique effect：
The wave plate group that the present invention is made up of wave plates such as the linear polarizers, half-wave plate, quarter-wave plate to introducing, is placed
The correct position in optical system, and the optical phase of the non-design factor generation of optical element introducing in optical system is prolonged
Measure late, by being precisely calculated, show that each wave plate needs the angle adjusted in wave plate group, finally to by linear polarization
The wave plate group of the wave plates such as device, half-wave plate, quarter-wave plate composition makees corresponding adjustment, realizes to optical element in optical system
The compensation for the optical phase put-off that the non-design factor introduced is produced.The present invention can be in a series of measurements relatively easily realized
After calculating, relatively simple adjustment is made to the wave plate group being made up of wave plates such as linear polarizer, half-wave plate, quarter-wave plates,
And on the premise of extra phase difference is not introduced, it compensate for what the non-design factor that optical element is introduced in optical system was produced
Any optical phase put-off.Any optical phase put-off method of present invention compensation is flexible and changeable, simple and easy to operate, and embodiment party
Method is cheap, applied widely.
Brief description of the drawings
Fig. 1 is applied to laser scanning confocal micro- scope for a kind of wave plate group design method for compensating any optical phase put-off
The structural representation of system；
Fig. 2 is the optical phase put-off figure of dichroscope reflected light.
Embodiment
Illustrate the present invention below in conjunction with the accompanying drawings, but the present invention is not limited thereto.
It is a kind of wave plate group design method of any optical phase put-off of compensation of one embodiment of the invention as shown in Figure 1
Applied to the structural representation of laser scanning confocal micro- scope system, the system of the embodiment includes：1st, laser；2nd, linear polarization
Device；3rd, total reflective mirror；4th, half-wave plate；5th, quarter-wave plate；6th, dichroscope；7th, object lens；8th, sample cell；9th, photodetector.
Laser 1 export light wave, be modulated to linearly polarized light through linear polarizer 2, incided after total reflective mirror 3 from half-wave plate 4 and two to
Look mirror 6, shines after then being modulated through quarter-wave plate 5 from the sample stimulated luminescence in the arrival sample cell 8 of object lens 7, sample cell 8
Penetrate, the detection light emitted reaches photodetector 9 respectively through object lens 7, dichroscope 6, by half in wave plate group
Wave plate 4 and quarter-wave plate 5 are adjusted, and optical phase put-off is mended caused by the non-design factor introduced to dichroscope 6
Repay, so as to regulate and control to the exciting light for inciding object lens 7, to obtain output light-wave of the polarization state as circularly polarized light, finally reach
To the purpose for improving microscopic system resolution ratio.
The wave plate group being made up of linear polarizer 2, half-wave plate 4, quarter-wave plate 6 is positioned over dichroic as shown in Figure 1
The front end or rear end of mirror 5.
Set up cartesian coordinate system by x-axis of the fast axle of dichroscope 6, the angle of quarter-wave plate fast axis and x-axis is θ,
The angle of half-wave plate fast axle and x-axis is α；The wavelength of the output exciting light of laser 1 is 550 nanometers, is adjusted to by linear polarizer 2
Linearly polarized light.Half-wave plate 4, Jones vector E of the exciting light after the modulation of half-wave plate 4 are incided by total reflective mirror 30For：
E0From the outgoing of half-wave plate 4, incide on dichroscope 6, as shown in Fig. 2 wavelength is incident for 550 nanometers of exciting light
Optical phase put-off η=0.0332 caused by the non-design factor introduced to dichroscope 6.By the Jones matrix of dichroscope 6
Jones matrix with quarter-wave plate obtains the light after being modulated through wave plate group according to light wave incidence order in light path successively premultiplication
The Jones matrix of system is：
By Jones matrix and the incident light wave Jones vector of the optical system after being modulated through wave plate group successively premultiplication, obtain through
The Jones vector E of outgoing light wave after dichroscope 6, the modulation of wave plate group1For：
Wherein：
Required circularly polarized light Jones vector is：
Wherein：
A=0, b=1, c=0, d=1；
Will after linear polarizer 2, half-wave plate 4, dichroscope 6, quarter-wave plate 5 are modulated, the exciting light of outgoing
Jones vector E1With required circularly polarized light Jones vector EoutIt is compared, calculates the fast of the quarter-wave plate 6 that needs are adjusted
The fast axle of angle theta and half-wave plate 4 and the angle α of x-axis of axle and x-axis be：
α=0 °, θ=45 ° or α=90 °, θ=- 45 °.
Rotate simultaneously the fast axle of quarter-wave plate 6 and the angle theta of x-axis be 45 °, the angle of the fast axle of half-wave plate 4 and x-axis
α is 0 °；Or, while rotate the fast axle of quarter-wave plate 6 and the angle theta of x-axis be -45 °, the fast axle of half-wave plate 4 and x-axis
Angle α is 90 °.Now, the Jones vector E of the outgoing light wave after modulation1For：
Wherein：
Now, by linear polarizer 2, half-wave plate 4, quarter-wave plate 5 modulation, complete and dichroscope 6 introduced
Non- design factor caused by optical phase put-off compensation, so as to obtain E1The circularly polarized light for needed for.
Claims (6)
1. a kind of wave plate group design method for compensating any optical phase put-off, it is characterised in that comprise the following steps：
1) wave plate group is placed in the front end or rear end of the optical system light path of optical phase put-off to be compensated, wave plate group is perpendicular to light
Light wave propagation direction is placed in road, for compensating the optical phase put-off that the optical system of optical phase put-off to be compensated is produced；
2) referred to the optical system of optical phase put-off to be compensated, the quick shaft direction of optical system is abscissa, optical system
The slow-axis direction of system is ordinate, sets up cartesian coordinate system；
3) by the Jones matrix and step 1 of the optical system of optical phase put-off to be compensated) in wave plate group Jones matrix according to
Light wave incidence order premultiplication successively in light path, obtains the Jones matrix of the optical system after being modulated through wave plate group；
4) by step 3) in modulated through wave plate group after optical phase put-off to be compensated optical system Jones matrix with it is incident
Light wave Jones vector premultiplication successively, obtains the optical system through optical phase put-off to be compensated, the emergent light after the modulation of wave plate group
The Jones vector of ripple；
5) by step 4) in the optical system through optical phase put-off to be compensated, wave plate group modulation after outgoing light wave Jones arrow
Amount Jones vector corresponding with required outgoing optical polarization is compared, and calculates each wave plate in the wave plate group for needing to adjust
With reference frame abscissa angle；
6) according to step 5) in the wave plate group that calculates each wave plate with reference frame abscissa angle, rotate in wave plate group
Each wave plate, completes the compensation of optical phase put-off produced to optical phase put-off optical system to be compensated.
2. a kind of wave plate group design method for compensating any optical phase put-off according to claim 1, it is characterised in that：
Step 1) described in wave plate group be linear polarizer, half-wave plate and quarter-wave plate combination.
3. a kind of wave plate group design method for compensating any optical phase put-off according to claim 1, it is characterised in that：
Step 2) described in optical phase put-off to be compensated optical system fast axle to propagate the polarization direction of fast light wave components, its
Vertical direction is slow-axis direction.
4. a kind of wave plate group design method for compensating any optical phase put-off according to claim 1, it is characterised in that：
Step 3) described in Jones matrix of the Jones matrix comprising half-wave plate in wave plate group and quarter-wave plate Jones matrix.
5. a kind of wave plate group design method for compensating any optical phase put-off according to claim 1, it is characterised in that：
Step 5) described in need regulation wave plate group in wave plate include with reference frame abscissa angle：Quarter-wave plate it is fast
Axle and the fast axle of reference frame abscissa angle and half-wave plate and the angle of reference frame abscissa.
6. a kind of wave plate group design method for compensating any optical phase put-off according to claim 1, it is characterised in that：
Step 6) described in rotate the modulator approach of each wave plate in wave plate group and be：Fast axle and the reference of quarter-wave plate are rotated simultaneously
The fast axle of coordinate system abscissa angle and half-wave plate and the angle of reference frame abscissa.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710332040.XA CN107102436B (en) | 2017-05-10 | 2017-05-10 | Wave plate set design method for compensating any optical phase delay |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710332040.XA CN107102436B (en) | 2017-05-10 | 2017-05-10 | Wave plate set design method for compensating any optical phase delay |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107102436A true CN107102436A (en) | 2017-08-29 |
| CN107102436B CN107102436B (en) | 2020-01-24 |
Family
ID=59670590
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710332040.XA Expired - Fee Related CN107102436B (en) | 2017-05-10 | 2017-05-10 | Wave plate set design method for compensating any optical phase delay |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107102436B (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109932827A (en) * | 2019-03-29 | 2019-06-25 | 惠州学院 | The full fiber waveguide device of polarization information and strength information is utilized based on collaboration |
| CN110146993A (en) * | 2018-02-13 | 2019-08-20 | 李卫 | A kind of method and apparatus for the biasing of fibre ring interferometer passive phase |
| CN111708168A (en) * | 2019-07-19 | 2020-09-25 | 业成科技（成都）有限公司 | Head-mounted virtual reality display device and optical system thereof |
| CN112219143A (en) * | 2018-03-02 | 2021-01-12 | 加里夏普创新有限责任公司 | Retarder stack pair for polarization basis vector conversion |
| CN112558332A (en) * | 2020-12-30 | 2021-03-26 | 山西大学 | Automatic phase compensation device and use method thereof |
| WO2021104293A1 (en) * | 2019-11-26 | 2021-06-03 | 深圳惠牛科技有限公司 | Lightweight and thin optical module and vr device |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2037457A2 (en) * | 2007-09-13 | 2009-03-18 | Samsung Electronics Co., Ltd. | Optical pickup |
| CN102393555A (en) * | 2011-11-08 | 2012-03-28 | 华中科技大学 | Alignment method for optical axis of compound wave plate and device for same |
| CN102508346A (en) * | 2011-11-08 | 2012-06-20 | 华中科技大学 | Clamping device for alignment of optical axis of compound wave plate |
| CN203519903U (en) * | 2013-09-30 | 2014-04-02 | 武汉光迅科技股份有限公司 | Composite wave plate fast axis perpendicularity adjustment device |
| CN104914497A (en) * | 2015-06-25 | 2015-09-16 | 武汉颐光科技有限公司 | Composite wave plate phase delayer optimal design method |
| CN105628343A (en) * | 2016-01-17 | 2016-06-01 | 武汉光电工业技术研究院有限公司 | Wave-plate detection device and method |
| CN105700059A (en) * | 2016-05-03 | 2016-06-22 | 曲阜师范大学 | Dual-wavelength optical phase delayer |
| CN106154422A (en) * | 2015-03-31 | 2016-11-23 | 夏巍 | A kind of isolated optical fiber polarization controller |
-
2017
- 2017-05-10 CN CN201710332040.XA patent/CN107102436B/en not_active Expired - Fee Related
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2037457A2 (en) * | 2007-09-13 | 2009-03-18 | Samsung Electronics Co., Ltd. | Optical pickup |
| CN102393555A (en) * | 2011-11-08 | 2012-03-28 | 华中科技大学 | Alignment method for optical axis of compound wave plate and device for same |
| CN102508346A (en) * | 2011-11-08 | 2012-06-20 | 华中科技大学 | Clamping device for alignment of optical axis of compound wave plate |
| CN203519903U (en) * | 2013-09-30 | 2014-04-02 | 武汉光迅科技股份有限公司 | Composite wave plate fast axis perpendicularity adjustment device |
| CN106154422A (en) * | 2015-03-31 | 2016-11-23 | 夏巍 | A kind of isolated optical fiber polarization controller |
| CN104914497A (en) * | 2015-06-25 | 2015-09-16 | 武汉颐光科技有限公司 | Composite wave plate phase delayer optimal design method |
| CN105628343A (en) * | 2016-01-17 | 2016-06-01 | 武汉光电工业技术研究院有限公司 | Wave-plate detection device and method |
| CN105700059A (en) * | 2016-05-03 | 2016-06-22 | 曲阜师范大学 | Dual-wavelength optical phase delayer |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110146993A (en) * | 2018-02-13 | 2019-08-20 | 李卫 | A kind of method and apparatus for the biasing of fibre ring interferometer passive phase |
| CN112219143A (en) * | 2018-03-02 | 2021-01-12 | 加里夏普创新有限责任公司 | Retarder stack pair for polarization basis vector conversion |
| CN112219143B (en) * | 2018-03-02 | 2022-11-22 | 加里夏普创新有限责任公司 | Retarder stack pair for polarization basis vector conversion |
| CN109932827A (en) * | 2019-03-29 | 2019-06-25 | 惠州学院 | The full fiber waveguide device of polarization information and strength information is utilized based on collaboration |
| CN109932827B (en) * | 2019-03-29 | 2021-12-31 | 惠州学院 | All-optical waveguide device based on cooperative utilization of polarization information and intensity information |
| CN111708168A (en) * | 2019-07-19 | 2020-09-25 | 业成科技（成都）有限公司 | Head-mounted virtual reality display device and optical system thereof |
| WO2021104293A1 (en) * | 2019-11-26 | 2021-06-03 | 深圳惠牛科技有限公司 | Lightweight and thin optical module and vr device |
| CN112558332A (en) * | 2020-12-30 | 2021-03-26 | 山西大学 | Automatic phase compensation device and use method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107102436B (en) | 2020-01-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107102436A (en) | A kind of wave plate group design method for compensating any optical phase put-off | |
| JP6453266B2 (en) | Microscope and microscopy | |
| CN101859030B (en) | Device and method for coaxially adjusting double beams in real time | |
| CN106225667B (en) | A kind of single frequency laser interferometer nonlinear error compensation device | |
| US10215854B2 (en) | Distance measuring module comprising a variable optical attenuation unit including an LC cell | |
| EP2863200B1 (en) | Device and method for measuring phase delay distribution and fast axis azimuth distribution in real time | |
| CN106324850A (en) | Method and device for producing vector vortex beam | |
| CN108007571B (en) | CARS light beam space stability test control system and method based on optical fiber coupling | |
| CN101915542B (en) | Biaxial MEMS reflective galvanometer and F-Theta lens-based linear scanning system used for laser heterodyne interferometer | |
| CN102221728A (en) | Optical mixer of free space | |
| CN108629787B (en) | Edge extraction method and system based on optical spin Hall effect spatial differentiator | |
| CN106842605A (en) | Light-dividing device based on polarization spectroscope | |
| CN104111590B (en) | Based on the laser direct-writing device of combined vortex bivalve focal beam spot | |
| CN102589428B (en) | Asymmetric-incidence-based sample axial position tracking and correcting method and device | |
| WO2021083046A1 (en) | Laser interference photolithography system | |
| CN109332879A (en) | Based on the online galvanometer positioning accuracy correction system of processing of Michelson interference and method | |
| WO2022111602A1 (en) | Super-resolution microscopic imaging method and apparatus based on shared-path parallel fluorescence emission difference | |
| CN103307969A (en) | White-light interferometric measuring device | |
| CN112731694A (en) | Liquid crystal optical phase shift detection system and detection method based on interference method | |
| CN104965309A (en) | Beam splitter, achieving any polarization state output, with beam splitting ratio being continuously adjustable | |
| CN206671690U (en) | Light-dividing device based on polarization spectroscope | |
| CN108415177A (en) | A kind of device and method quantitatively controlling multimode fibre speckle field focus point degree of polarization | |
| CN101382653B (en) | Double liquid crystal self-adapting closed loop system | |
| CN107831120B (en) | Polarization pump detection device | |
| CN111562002B (en) | High-flux high-resolution high-contrast polarization interference spectrum imaging device and method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200124 Termination date: 20210510 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |