CN105938301B - 一种升降机构以及移动对位模组 - Google Patents
一种升降机构以及移动对位模组 Download PDFInfo
- Publication number
- CN105938301B CN105938301B CN201610410031.3A CN201610410031A CN105938301B CN 105938301 B CN105938301 B CN 105938301B CN 201610410031 A CN201610410031 A CN 201610410031A CN 105938301 B CN105938301 B CN 105938301B
- Authority
- CN
- China
- Prior art keywords
- base
- elevating mechanism
- roof panel
- mobile
- mobile base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610410031.3A CN105938301B (zh) | 2016-06-12 | 2016-06-12 | 一种升降机构以及移动对位模组 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610410031.3A CN105938301B (zh) | 2016-06-12 | 2016-06-12 | 一种升降机构以及移动对位模组 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN105938301A CN105938301A (zh) | 2016-09-14 |
CN105938301B true CN105938301B (zh) | 2018-03-13 |
Family
ID=57152453
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201610410031.3A Active CN105938301B (zh) | 2016-06-12 | 2016-06-12 | 一种升降机构以及移动对位模组 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN105938301B (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN116360225B (zh) * | 2023-03-17 | 2024-02-06 | 广东科视光学技术股份有限公司 | 一种双面pcb板曝光机及其在线自动对位装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1851557A (zh) * | 2006-06-02 | 2006-10-25 | 中国科学院光电技术研究所 | 一种二维扫描精密激光曝光系统 |
CN102466975A (zh) * | 2010-11-08 | 2012-05-23 | 上海微电子装备有限公司 | 连杆驱动工件台系统 |
CN103592824A (zh) * | 2013-11-29 | 2014-02-19 | 中国科学院光电技术研究所 | 一种二自由度高精度大行程气浮工件台 |
CN205899244U (zh) * | 2016-06-12 | 2017-01-18 | 深圳市海目星激光科技有限公司 | 一种升降机构以及移动对位模组 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4368639B2 (ja) * | 2003-08-19 | 2009-11-18 | 株式会社アドテックエンジニアリング | 投影露光装置 |
JP2013205836A (ja) * | 2012-03-29 | 2013-10-07 | Nsk Technology Co Ltd | 露光装置 |
-
2016
- 2016-06-12 CN CN201610410031.3A patent/CN105938301B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1851557A (zh) * | 2006-06-02 | 2006-10-25 | 中国科学院光电技术研究所 | 一种二维扫描精密激光曝光系统 |
CN102466975A (zh) * | 2010-11-08 | 2012-05-23 | 上海微电子装备有限公司 | 连杆驱动工件台系统 |
CN103592824A (zh) * | 2013-11-29 | 2014-02-19 | 中国科学院光电技术研究所 | 一种二自由度高精度大行程气浮工件台 |
CN205899244U (zh) * | 2016-06-12 | 2017-01-18 | 深圳市海目星激光科技有限公司 | 一种升降机构以及移动对位模组 |
Also Published As
Publication number | Publication date |
---|---|
CN105938301A (zh) | 2016-09-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN201567183U (zh) | 直线往复式升降装置 | |
CN101643186B (zh) | 自动升降机构 | |
CN104576471B (zh) | 一种紧凑型片针升降机构 | |
CN106078917A (zh) | 一种柔性电路板的全自动冲切机 | |
CN206536457U (zh) | 一种基板搬送机器人 | |
CN206901341U (zh) | 一种移动码垛机器人 | |
WO2021012361A1 (zh) | 基于扭轴结构的多连杆全电伺服同步折弯机 | |
CN105938301B (zh) | 一种升降机构以及移动对位模组 | |
CN206153768U (zh) | 一种晶硅太阳能电池片激光切半机 | |
CN205899244U (zh) | 一种升降机构以及移动对位模组 | |
CN206614548U (zh) | 一种自动化数控切割机械臂 | |
CN208216013U (zh) | 一种高精度的调整平台 | |
CN110000104A (zh) | 一种led晶片自动分选机用硅片架升降组合件 | |
CN105538890A (zh) | 卷料自动对位的丝网印刷系统 | |
CN206253890U (zh) | 一种五轴联动的玻璃加工设备 | |
CN211846981U (zh) | 一种龙门式上片机 | |
CN205029980U (zh) | 一种柔性电路板料盘的输入输出设备 | |
CN201449995U (zh) | 升降机构 | |
CN111136476A (zh) | 一种滑枕式双交换工作台机床 | |
CN205353575U (zh) | 一种曝光机用升降对位装置 | |
CN114435955A (zh) | 一种塑料盒覆膜机机械手 | |
CN210818435U (zh) | 一种新型二维工作台 | |
CN205942251U (zh) | 一种用于菲林板与治具对位的拍照对位装置 | |
CN209467842U (zh) | 片材自动上料装置 | |
CN208746951U (zh) | 一种复合运动对位平台 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: 518000 Longhua New District, Shenzhen, Guangdong, 26 guanhuan Road, Guanlong street, Jun long community. Patentee after: SHENZHEN HYMSON LASER INTELLIGENT EQUIPMENTS Co.,Ltd. Address before: 518000 26 Longhua Ring Road, Guanlan Jun long, Longhua New District, Shenzhen, Guangdong Patentee before: SHENZHEN HMX LASER TECHNOLOGY Co.,Ltd. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20180803 Address after: 213000 168 Huacheng Road, Jintan District, Changzhou, Jiangsu Patentee after: Hymson Laser Intelligent Equipment (Jiangsu) Co.,Ltd. Address before: 518000 Longhua New District, Shenzhen, Guangdong, 26 guanhuan Road, Guanlong street, Jun long community. Patentee before: SHENZHEN HYMSON LASER INTELLIGENT EQUIPMENTS Co.,Ltd. |