CN105932100A - Preparation method of solar battery - Google Patents

Preparation method of solar battery Download PDF

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Publication number
CN105932100A
CN105932100A CN201610334115.3A CN201610334115A CN105932100A CN 105932100 A CN105932100 A CN 105932100A CN 201610334115 A CN201610334115 A CN 201610334115A CN 105932100 A CN105932100 A CN 105932100A
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China
Prior art keywords
silicon chip
preparation
solaode
silver
silicon
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CN201610334115.3A
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Chinese (zh)
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CN105932100B (en
Inventor
方结彬
秦崇德
石强
黄玉平
何达能
陈刚
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Zhejiang Aiko Solar Energy Technology Co Ltd
Guangdong Aiko Solar Energy Technology Co Ltd
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Guangdong Aiko Solar Energy Technology Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic System
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0232Optical elements or arrangements associated with the device
    • H01L31/02327Optical elements or arrangements associated with the device the optical elements being integrated or being directly associated to the device, e.g. back reflectors
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/52PV systems with concentrators
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/547Monocrystalline silicon PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Abstract

The invention discloses a preparation method of a solar battery, and belongs to the technical field of solar batteries. The method comprises the following steps: 1) selecting a P-type silicon as a silicon chip, and etching on the frontage of the silicon chip; 2) diffusing on the frontage of the silicon chip to form a N-type emitting electrode; 3) removing phosphorosilicate glass formed in the diffusion process in the step 2); 4) forming a back passivation layer on the back of the silicon chip; 5) forming a passivation film on the frontage of the silicon chip; 6) depositing silver nano-particles on the passivation film; 7) forming a back electric field and a back electrode on the back of the silicon chip; 8) forming the positive electrode on the frontage of the silicon chip; 9) sintering the silicon chip. Through the deposition of the silver nano-particles on the frontage passivation film of the silicon chip, the surface plasma oscillation of the silver nano-particles is excited dependent on the incident light, the absorption rate of the sunlight can be obviously enhanced, and the photoelectric conversion efficiency of the battery is promoted through the adding of the diffusion effect of the silver particles at the same time.

Description

A kind of preparation method of solaode
Technical field
The present invention relates to a kind of solaode, be specifically related to the preparation method of a kind of solaode, belong to solaode skill Art field.
Background technology
Solaode is that one effectively absorbs solar radiant energy, utilizes photovoltaic effect to convert optical energy into the device of electric energy, When solar irradiation is in quasiconductor P-N junction (P-N Junction), form new hole-electron to (V-E pair), in P-N junction Under the effect of electric field, hole is flowed to P district by N district, and electronics is flowed to N district by P district, is formed for electric current after connecting circuit.
The manufacturing process of crystal silicon solar batteries has six procedures, respectively making herbs into wool, spread, etch, plated film, silk screen printing, Sintering.Making herbs into wool is that front side of silicon wafer is etched into rough matte, increases the absorption of sunlight;Diffusion is in front side of silicon wafer shape Become PN junction, produce photovoltaic effect;Etching is to remove silicon chip back side and the PN junction at edge and the phosphorosilicate glass in front;Plated film is In front side of silicon wafer silicon nitride film, reduce the reflection of sunlight;Silk screen printing is to starch at front side of silicon wafer and back up anelectrode Material, back electrode slurry and Al-back-surface-field (BSF) paste;Sintering is the slurry curing by front side of silicon wafer and back up, forms electrode.
The photoelectric transformation efficiency preparing solaode in existing preparation method is relatively low.
Summary of the invention
The problem existed for above-mentioned prior art, the present invention provides the preparation method of a kind of solaode, the solar energy of preparation Battery can improve sunlight absorbance, thus improves photoelectric transformation efficiency.
To achieve these goals, the preparation method of a kind of solaode that the present invention uses, comprise the following steps:
1) P-type silicon is chosen as silicon chip, and in the front making herbs into wool of silicon chip;
2) front at silicon chip is diffused forming N-type emitter stage;
3) removal step 2) diffusion process formed phosphorosilicate glass;
4) backside passivation layer is formed at silicon chip back side;
5) passivating film is formed at front side of silicon wafer;
6) on passivating film, silver nano-grain is deposited;
7) back of the body electric field and back electrode are formed at silicon chip back side;
8) anelectrode is formed at front side of silicon wafer;
9) silicon chip is sintered.
As improvement, described step 6) concrete operations be:
Silicon chip after plated film is placed in silver nitrate solution, after standing 1-10min, takes out silicon chip and put into citric acid and polyethylene pyrrole In the mixed solution of pyrrolidone, after reaction 1-10min, take out silicon chip, clean up with deionized water, dry up.
As improvement, the concentration of described silver nitrate is 0.5-2.0mol/L.
As improvement, the concentration of described citric acid is 3-5mol/L, and the consumption of citric acid is 5-10L.
As improvement, the consumption of described polyvinylpyrrolidone is 0.02-0.20g.
As improvement, described silicon chip time of repose in silver nitrate solution is 1-5min.
As improvement, described silicon chip response time in mixed solution is 1-5min.
As improvement, described step 6) in formed silver nano-grain be square, spheroid or pyramid shape.
As improvement, a diameter of 20-80nm of described silver nano-grain.
As improvement, described step 8) positive electrode surface be electroplate with at least one silver layer, described silver layer is wrapped in described anelectrode On.
Compared with prior art, the present invention, by chemical deposition silver nano-grain on front side of silicon wafer passivating film, relies on incident illumination to swash Send out the surface plasma vibration of silver nano-grain, the absorbance of sunlight can be obviously enhanced, simultaneously plus the astigmatism effect of Argent grain, Thus promote the photoelectric transformation efficiency of battery.
Accompanying drawing explanation
Fig. 1 is the process chart of the present invention;
Fig. 2 is the structural representation that the inventive method prepares solaode;
In figure: 1, P-type silicon, 2, N-type emitter stage, 3, passivating film, 4, anelectrode, 5, backside passivation layer, 6, back of the body electric field, 7, back electrode.
Detailed description of the invention
For making the object, technical solutions and advantages of the present invention of greater clarity, below by drawings and Examples, to the present invention It is further elaborated.However, it should be understood that specific embodiment described herein is only in order to explain the present invention, not For limiting the scope of the present invention.
Unless otherwise defined, the skill of all of technical term used herein and scientific terminology and the technical field belonging to the present invention The implication that art personnel are generally understood that is identical, and the term used the most in the description of the invention is intended merely to describe concrete The purpose of embodiment, it is not intended that in limiting the present invention.
Embodiment one
As it is shown in figure 1, the preparation method of a kind of solaode, comprise the following steps:
1) P-type silicon is chosen as silicon chip, and in the front making herbs into wool of silicon chip;
2) front at silicon chip is diffused forming N-type emitter stage;
3) removal step 2) diffusion process formed phosphorosilicate glass;
4) backside passivation layer is formed at silicon chip back side;
5) passivating film is formed at front side of silicon wafer;
6) silicon chip after plated film is placed in the silver nitrate solution that concentration is 0.5mol/L, after standing 10min, takes out, then will Silicon chip puts into the mixed solution (citric acid in mixed solution of citric acid that concentration is 3mol/L and polyvinylpyrrolidone (PVP) Consumption be 5L, the consumption of polyvinylpyrrolidone is 0.02g) in, reaction 10min after, take out silicon chip, use deionized water Clean up, dry up, the silicon chip of silver nano-grain, wherein a diameter of 20-80nm of silver nano-grain must be deposited, formation Silver nano-grain is square, spheroid or pyramid shape;
7) back of the body electric field and back electrode are formed at silicon chip back side;
8) forming anelectrode at front side of silicon wafer, positive electrode surface is electroplate with at least one silver layer, and described silver layer is wrapped in described anelectrode On, make anelectrode become silver electrode;
9) silicon chip is sintered.
Embodiment two
The step 6 of this embodiment) in, the silicon chip after plated film is placed in the silver nitrate solution that concentration is 2.0mol/L, stands 1min After, take out, then silicon chip is put into the citric acid and the mixed solution (mixed solution of polyvinylpyrrolidone that concentration is 5mol/L The consumption of middle citric acid is 8L, and the consumption of polyvinylpyrrolidone is 0.10g) in, after reaction 1min, take out silicon chip, spend Ionized water cleans up, and dries up, and must deposit the silicon chip of silver nano-grain, wherein a diameter of 20-80nm of silver nano-grain, The silver nano-grain formed is square, spheroid or pyramid shape;Remaining operating procedure is identical with embodiment one.
Embodiment three
The step 6 of this embodiment) in, the silicon chip after plated film is placed in the silver nitrate solution that concentration is 1.0mol/L, stands 5min After, take out, then silicon chip is put into the citric acid and the mixed solution (mixed solution of polyvinylpyrrolidone that concentration is 4mol/L The consumption of middle citric acid is 10L, and the consumption of polyvinylpyrrolidone is 0.20g) in, after reaction 5min, take out silicon chip, use Deionized water cleans up, and dries up, and must deposit the silicon chip of silver nano-grain, wherein a diameter of 20-80nm of silver nano-grain, The silver nano-grain formed is square, spheroid or pyramid shape;Remaining operating procedure is identical with embodiment one.
The structure of solaode is obtained as in figure 2 it is shown, this battery includes P-type silicon 1 by provider's legal system of the present invention;
The front of P-type silicon 1 is provided with N-type emitter stage 2, and the front of described N-type emitter stage 2 is provided with passivating film 3, described passivating film The front of 3 is provided with anelectrode 4, and the front deposition of passivating film 3 has silver nano-grain;
The back side of described P-type silicon 1 is provided with backside passivation layer 5, and described backside passivation layer 5 is provided with back of the body electric field 6 and back electrode 7, Described back electrode 7 is positioned at the back side of back of the body electric field 6.
The present invention, by chemical deposition silver nano-grain on front side of silicon wafer passivating film, relies on incident illumination to excite the table of silver nano-grain Face plasma oscillation, can be obviously enhanced the absorbance of sunlight, simultaneously plus the astigmatism effect of Argent grain, thus promote battery Photoelectric transformation efficiency.
The foregoing is only presently preferred embodiments of the present invention, not in order to limit the present invention, all spirit in the present invention and former Any amendment, equivalent or the improvement etc. made within then, should be included within the scope of the present invention.

Claims (10)

1. the preparation method of a solaode, it is characterised in that comprise the following steps:
1) P-type silicon is chosen as silicon chip, and in the front making herbs into wool of silicon chip;
2) front at silicon chip is diffused forming N-type emitter stage;
3) removal step 2) diffusion process formed phosphorosilicate glass;
4) backside passivation layer is formed at silicon chip back side;
5) passivating film is formed at front side of silicon wafer;
6) on passivating film, silver nano-grain is deposited;
7) back of the body electric field and back electrode are formed at silicon chip back side;
8) anelectrode is formed at front side of silicon wafer;
9) silicon chip is sintered.
The preparation method of a kind of solaode the most according to claim 1, it is characterised in that described step 6) tool Gymnastics conduct:
Silicon chip after plated film is placed in silver nitrate solution, after standing 1-10min, takes out silicon chip and put into citric acid and polyethylene pyrrole In the mixed solution of pyrrolidone, after reaction 1-10min, take out silicon chip, clean up with deionized water, dry up.
The preparation method of a kind of solaode the most according to claim 2, it is characterised in that the concentration of described silver nitrate For 0.5-2.0mol/L.
The preparation method of a kind of solaode the most according to claim 2, it is characterised in that the concentration of described citric acid For 3-5mol/L, the consumption of citric acid is 5-10L.
5. according to the preparation method of a kind of solaode described in claim 2 or 4, it is characterised in that described polyethylene pyrrole The consumption of pyrrolidone is 0.02-0.20g.
The preparation method of a kind of solaode the most according to claim 2, it is characterised in that described silicon chip is at silver nitrate In solution, time of repose is 1-5min.
7. according to the preparation method of a kind of solaode described in claim 2 or 6, it is characterised in that described silicon chip is mixed In conjunction solution, the response time is 1-5min.
The preparation method of a kind of solaode the most according to claim 1, it is characterised in that described step 6) in shape The silver nano-grain become is square, spheroid or pyramid shape.
The preparation method of a kind of solaode the most according to claim 1, it is characterised in that described step 6) in silver A diameter of 20-80nm of nano-particle.
The preparation method of a kind of solaode the most according to claim 1, it is characterised in that described step 8) Positive electrode surface is electroplate with at least one silver layer, and described silver layer is wrapped on described anelectrode.
CN201610334115.3A 2016-05-18 2016-05-18 A kind of preparation method of solar cell Active CN105932100B (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101717927A (en) * 2009-12-02 2010-06-02 浙江大学 Solution for replacing silver plating in deposited nanostructure on surface of silicon matrix and use method thereof
CN102332477A (en) * 2011-07-27 2012-01-25 常州时创能源科技有限公司 Light trapping structure for monocrystalline silicon solar cell
US20120142140A1 (en) * 2010-12-02 2012-06-07 Applied Nanotech Holdings, Inc. Nanoparticle inks for solar cells
CN103066160A (en) * 2013-01-15 2013-04-24 浙江大学 Method for generating porous silicon on solar battery silicon wafer surface
CN104201216A (en) * 2014-08-21 2014-12-10 广东爱康太阳能科技有限公司 Solar cell and preparation method thereof

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101717927A (en) * 2009-12-02 2010-06-02 浙江大学 Solution for replacing silver plating in deposited nanostructure on surface of silicon matrix and use method thereof
US20120142140A1 (en) * 2010-12-02 2012-06-07 Applied Nanotech Holdings, Inc. Nanoparticle inks for solar cells
CN102332477A (en) * 2011-07-27 2012-01-25 常州时创能源科技有限公司 Light trapping structure for monocrystalline silicon solar cell
CN103066160A (en) * 2013-01-15 2013-04-24 浙江大学 Method for generating porous silicon on solar battery silicon wafer surface
CN104201216A (en) * 2014-08-21 2014-12-10 广东爱康太阳能科技有限公司 Solar cell and preparation method thereof

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
陈国杰等: ""纳米银的制备及应用研究"", 《中国颗粒学会第六届学术年会暨海峡两岸颗粒技术研讨会》 *

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Address after: 528100, Sanshui District, Guangdong City, Foshan Industrial Park, No. C District, No. 69

Patentee after: GUANGDONG AIKO SOLAR ENERGY TECHNOLOGY Co.,Ltd.

Address before: 528100, Sanshui District, Guangdong City, Foshan Industrial Park, No. C District, No. 69

Patentee before: GUANGDONG AIKO SOLAR ENERGY TECHNOLOGY Co.,Ltd.

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Effective date of registration: 20180102

Address after: 528100, Sanshui District, Guangdong City, Foshan Industrial Park, No. C District, No. 69

Co-patentee after: ZHEJIANG AIKO SOLAR ENERGY TECHNOLOGY Co.,Ltd.

Patentee after: GUANGDONG AIKO SOLAR ENERGY TECHNOLOGY Co.,Ltd.

Address before: 528100, Sanshui District, Guangdong City, Foshan Industrial Park, No. C District, No. 69

Patentee before: GUANGDONG AIKO SOLAR ENERGY TECHNOLOGY Co.,Ltd.