CN105803402A - Imc蒸发舟皿绝热筒组件 - Google Patents
Imc蒸发舟皿绝热筒组件 Download PDFInfo
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
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- Engineering & Computer Science (AREA)
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Abstract
本发明公开了一种IMC蒸发舟皿绝热筒组件,所述IMC蒸发舟皿绝热筒组件包括IMC蒸发舟皿和绝热筒,所述绝热筒具有容纳绝热主体的容器,所述绝热主体容纳腔体。所述IMC蒸发舟皿接纳在所述腔体内,以便限定所述IMC蒸发舟皿与所述绝热主体之间的空气空间。加热器容纳在所述空气空间内。
Description
背景技术
本发明涉及可用于蒸发金属的金属间复合材料(IMC)蒸发舟皿绝热筒组件。更具体地讲,本发明涉及IMC蒸发舟皿绝热筒组件蒸发舟皿组件,该蒸发舟皿组件包括IMC蒸发舟皿和携带IMC蒸发舟皿的绝热筒,并且其中IMC蒸发舟皿绝热筒组件可结合真空装置用于蒸发金属。
迄今为止,IMC蒸发舟皿已经可用于提供容器或平台,在所述容器或平台上熔化金属以便蒸发金属以用于沉积在基底上。涉及蒸发舟皿或其他加热装置的示例性专利文献如下:授予Hamister的美国专利No.2,840,458、授予Mandorf的美国专利No.3,181,968、授予Malkin的美国专利No.3,345,448、授予Montgomery的美国专利No.3,724,996、授予Shinko的美国专利No.4,264,803、授予Finicle的美国专利No.5,032,366、授予Finicle的美国专利No.5,182,149、授予Morris的美国专利No.5,239,612、授予Seifert的美国专利No.6,081,652、授予Seifert的美国专利No.6,085,025、授予Seifert的美国专利No.6,645,572、授予Montgomery等人的美国专利No.5,604,164、Epstein的美国专利申请公布NO.US2009/0217876A1、优司科高科技制陶有限公司(ESKCeramicsGmBH)的德国专利申请文件DE102007045289,优司科高科技制陶有限公司的PCT专利申请公布WO2006/117119A1,以及优司科高科技制陶有限公司的PCT专利申请公布NO.WO2008/025447A1。
发明内容
在本发明的一种形式中,本发明为IMC蒸发舟皿绝热筒组件。该组件包括IMC蒸发舟皿和绝热筒。绝热筒包括容纳绝热主体的容器,所述绝热主体容纳腔体。IMC蒸发舟皿接纳在腔体内,以便限定IMC蒸发舟皿与绝热主体(70)之间的空气空间。加热器容纳在空气空间内。
附图说明
以下为形成本专利申请的一部分的附图说明:
图1为IMC蒸发舟皿绝热筒组件的具体实施例的等轴视图;
图2为图1的IMC蒸发舟皿绝热筒组件的端视图,其中容器的一个端部已被移除;
图3为图1的IMC蒸发舟皿绝热筒组件的具体实施例的等轴视图,其中IMC蒸发舟皿从绝热筒分解开;并且
图4为在其中具有IMC蒸发舟皿绝热筒组件并且在其中具有基底的真空室的示意图。
具体实施方式
参见附图,图1至图3示出一般标记为20的IMC蒸发舟皿绝热筒组件的具体实施例。IMC蒸发舟皿绝热筒组件20包括蒸发舟皿22和绝热筒50。IMC蒸发舟皿22具有容纳池26的顶面24,其中保持壁28限定池26。IMC蒸发舟皿22具有侧壁30(其成角度)、端壁32和底面34。IMC蒸发舟皿22可由以下金属间复合材料中的任一种制成:BN-TiB2或BN-AlN-TiB2。
绝热筒50包括细长容器52。容器52具有弧形部分54,该弧形部分终止于相对唇缘56和58。容器52具有相对的端面59。绝热筒50还包括细长绝热主体70。绝热主体70可由以下材料中的任一种制成:氧化铝-二氧化硅纤维或氧化铝纤维。
绝热主体70具有顶面72并且容纳腔体73。绝热主体70具有外表面74。腔体73由腔体表面76限定。腔体表面76具有截头圆锥形腔体部分78和弧形腔体部分80。腔体73进一步容纳端部腔体表面82。
当组装时,IMC蒸发舟皿22停留在绝热主体70中的腔体73内。IMC蒸发舟皿22的侧壁30抵靠限定腔体表面76的截头圆锥形腔体部分78的表面。IMC蒸发舟皿22的端壁32抵靠腔体73的端部腔体表面82。IMC蒸发舟皿22的底面34与绝热主体70的腔体表面76之间限定有空气空间84。更具体地讲,空气空间84限定在IMC蒸发舟皿22的底面34与弧形腔体部分80之间。
加热器元件90定位在空气空间84内。加热器元件90可由以下材料中的任一种制成:二硅化钼、或钨、或金属间复合材料(例如,BN-TiB2或BN-AlN-TiB2)、或碳化硅。热电偶96处于空气空间中并且延伸穿过容器52。
参见图4,该图为示出在其中具有IMC舟皿绝热筒组件20并且在其中具有基底102的真空室100的示意图。在操作中,将待蒸发的金属放置在(IMC舟皿绝热筒组件20的)蒸发舟皿22的顶面24上的池26中,并且向加热器90供电,所述待蒸发的金属通常呈线材的形式。来自加热器90的热量使得蒸发舟皿22变热,这继而将热量传递到待蒸发的金属。最终,金属蒸发,并且通常将被拉延以在基底102的表面上形成涂层。在授予Cooper等人的美国专利No.3,113,889(据此以引用方式全文并入本文中)和授予Goodman等人的美国专利No.5,904,781(据此以引用方式全文并入本文中)中示出和描述了其中使用IMC蒸发舟皿绝热筒组件的典型布置。
本发明的实施例提供了某些迄今无法获得的优点。就此而言,早期的IMC蒸发舟皿在操作中经历了显著的热损失,这是因为电流直接通过蒸发舟皿。在本发明中,结合绝热筒使用IMC蒸发舟皿显著减少操作过程中的热损失。热量通过加热器产生,所述加热器被绝热筒包围以便减少热损失。IMC蒸发舟皿在所有侧面(除顶面以外)上都被绝热筒包围,这减少了操作过程中的热损失。
通过提供导致热损失减少有所改善的IMC蒸发舟皿绝热筒组件,实现了对于整个金属蒸发过程的显著功率节省。通过减少操作过程中的热损失,需要更少的功率来操作整个金属蒸发过程。因此,与在金属蒸发过程中使用早期的蒸发舟皿相比,使用本发明的IMC蒸发舟皿绝热筒组件由于对于整个过程的显著功率节省而提供了显著的操作优点。
本文指出的专利和其他文献据此以引用方式并入本文。根据对本说明书的考虑或实施本文所公开的发明,本发明的其他实施例对于本领域的技术人员将是显而易见的。本说明书和实例仅是示例性的,无意限制本发明的范围。本发明的真实范围和精神由以下的权利要求书指出。
Claims (12)
1.一种IMC蒸发舟皿绝热筒组件,包括:
IMC蒸发舟皿;
绝热筒,所述绝热筒包括容纳绝热主体的容器,所述绝热主体容纳腔体;
所述IMC蒸发舟皿接纳在所述腔体内,以便限定所述IMC蒸发舟皿与所述绝热主体之间的空气空间;以及
加热器(90),所述加热器容纳在所述空气空间内。
2.根据权利要求1所述的IMC蒸发舟皿绝热筒组件,其中所述IMC蒸发舟皿具有容纳池的顶面,而且所述IMC蒸发舟皿具有侧壁和底面。
3.根据权利要求2所述的IMC蒸发舟皿绝热筒组件,其中腔体表面限定所述腔体,并且所述腔体表面包括截头圆锥形腔体部分和弧形腔体部分。
4.根据权利要求3所述的IMC蒸发舟皿绝热筒组件,其中所述IMC蒸发舟皿接纳在所述腔体内,所述IMC蒸发舟皿的所述侧壁接触所述腔体表面的所述截头圆锥形腔体部分,并且所述空气空间限定在所述IMC蒸发舟皿的所述底面与所述腔体表面的所述弧形腔体部分之间。
5.根据权利要求1所述的IMC蒸发舟皿绝热筒组件,其中热电偶定位在所述空气空间内。
6.根据权利要求1所述的IMC蒸发舟皿绝热筒组件,其中所述IMC蒸发舟皿具有容纳池的顶面,而且所述IMC蒸发舟皿具有侧壁、底面,以及端壁。
7.根据权利要求6所述的IMC蒸发舟皿绝热筒组件,其中腔体表面限定所述腔体,并且所述腔体表面包括截头圆锥形腔体部分、弧形腔体部分,以及端部腔体表面。
8.根据权利要求7所述的IMC蒸发舟皿绝热筒组件,其中所述IMC蒸发舟皿接纳在所述腔体内,所述IMC蒸发舟皿的所述侧壁接触所述腔体表面的所述截头圆锥形腔体部分,而所述IMC蒸发舟皿的所述端壁接触所述腔体的所述端部腔体表面,并且所述空气空间限定在所述IMC蒸发舟皿的所述底面与所述腔体表面的所述弧形腔体部分之间。
9.根据权利要求1所述的IMC蒸发舟皿绝热筒组件,其中所述IMC蒸发舟皿包含选自以下组的下述金属间复合材料中的一种:BN-TiB2或BN-AlN-TiB2。
10.根据权利要求1所述的IMC蒸发舟皿绝热筒组件,其中所述绝热主体包含选自以下组的所述材料中的一种:氧化铝-二氧化硅纤维或氧化铝纤维。
11.根据权利要求1所述的IMC蒸发舟皿绝热筒组件,其中所述IMC蒸发舟皿包含选自以下组的下述金属间复合材料中的一种:BN-TiB2或BN-AlN-TiB2,并且所述绝热主体包含选自以下组的所述材料中的一种:氧化铝-二氧化硅纤维或氧化铝纤维。
12.根据权利要求1所述的IMC蒸发舟皿绝热筒组件,其中所述加热器包含选自二硅化钼、或钨、或金属间复合材料、或碳化硅的所述材料中的一种。
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US14/600,471 | 2015-01-20 | ||
US14/600,471 US10184168B2 (en) | 2015-01-20 | 2015-01-20 | IMC evaporator boat-thermal insulation cartridge assembly |
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CN207038182U (zh) | 2017-03-29 | 2018-02-23 | 泰拉能源有限责任公司 | 铯收集器 |
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KR20220051165A (ko) * | 2019-08-23 | 2022-04-26 | 테라파워, 엘엘씨 | 나트륨 기화기 및 나트륨 기화기의 사용 방법 |
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US10184168B2 (en) | 2019-01-22 |
US20160208374A1 (en) | 2016-07-21 |
DE102015122552B4 (de) | 2023-07-20 |
CN105803402B (zh) | 2020-02-07 |
DE102015122552A1 (de) | 2016-07-21 |
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