CN105800919B - A kind of laser glass packaging system and calibration method - Google Patents
A kind of laser glass packaging system and calibration method Download PDFInfo
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- CN105800919B CN105800919B CN201410845119.9A CN201410845119A CN105800919B CN 105800919 B CN105800919 B CN 105800919B CN 201410845119 A CN201410845119 A CN 201410845119A CN 105800919 B CN105800919 B CN 105800919B
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Abstract
The present invention discloses a kind of laser glass packaging system, which is characterized in that including：Including：Laser, CCD, scanning galvanometer, glass substrate, portal frame, portal frame guide rail and work stage；The portal frame carries the scanning galvanometer and is moved along the portal frame guide rail horizontal direction；The work stage carries out glass substrate thereon Rz to correction；The scanning galvanometer drive laser beam is scanned the glass substrate according to predetermined scan path, and with X to the freedom of motion of, Y-direction and Z-direction；By laser of the laser beam of the scanning galvanometer for two kinds of different wave lengths：Indicate light and work light；The alignment CCD measures the deviation of the deviation between the physical location and nominal position of the instruction light, the deviation between the physical location and nominal position of the work light, the instruction optical scanning path and predetermined scan path, so as to carry out deviation correction to the scan path of the work light.
Description
Technical field
The present invention relates to a kind of integrated circuit equipment manufacturing fields, more particularly to a kind of laser glass packaging system and calibration
Method.
Background technology
Laser assisted glass dust encapsulate, be with the frit (FRIT) after pre-sintering be intermediate package solder, by laser from
It is heated on the surface vertical irradiation to frit of glass packages upper surface, i.e. top glass substrate, to pass through upper glass base
The thawing of frit causes top glass substrate and lower glass substrate to cohere between plate and lower glass substrate, to realize glass packages
Laser package.
Current sealed in unit is a kind of using laser is loaded on portal frame, drives and swashs according to package path mobile gantry frame
Light device carries out laser package；Optics is passed through for aberration caused by the light of laser works light and two kinds of different-wavebands of reference light
Mode (plated film) compensates, and carries out prescan using reference light in encapsulation is scanned, while carry out measurement prescan using CCD
The deviation in path and actual package path (translation, rotation, multiplying power), by this deviation compensation in the optical scanning that works, it is ensured that encapsulation
Precision.
Another kind using mask assist packaged type, i.e., linear beam is subjected to shaping, and pass through in advance with encapsulation
The mask of FRIT pattern exactitude positions positions the FRIT of exposure in its lower section, local heating one forms accurate encapsulation
Line, this packaged type need using work stage motor pattern and a series of linear shaping elements and need often to safeguard more
Change set mask.
Invention content
It is an object of the invention to propose a kind of new pattern laser glass-encapsulated equipment and horizontal direction calibration method, including color
Poor removing method, with cost-effective raising encapsulation precision and yield.
In order to achieve the above-mentioned object of the invention, the present invention discloses a kind of laser glass packaging system, which is characterized in that including：
Including：Laser, CCD, scanning galvanometer, glass substrate, portal frame, portal frame guide rail and work stage；The portal frame carries institute
Scanning galvanometer is stated to move along the portal frame guide rail horizontal direction；The work stage carries out glass substrate thereon Rz to correction；
The scanning galvanometer drive laser beam is scanned the glass substrate according to predetermined scan path, and with X to, Y-direction with
And the freedom of motion of Z-direction；By laser of the laser beam of the scanning galvanometer for two kinds of different wave lengths：Indicate light and work
Light；The alignment CCD measures deviation, the actual bit of the work light between the physical location and nominal position of the instruction light
Deviation, the deviation for indicating optical scanning path and predetermined scan path between nominal position are put, so as to the work
The scan path of light carries out deviation correction.
The invention also discloses the laser glass of above-mentioned laser glass packaging system is used to encapsulate calibration method, feature exists
In including the following steps：
Step 1：Using standard substrate, base plate alignment is carried out, calibration portal frame horizontal direction scaling and horizontal direction are non-just
The property handed over；
Step 2：Heat-sensitive paper is affixed on the standard substrate, using the instruction light at a certain distance, gets instruction light
Lattice array；
Step 3：The instruction array of light spots is directed at using CCD, according to instruction array of light spots physical location and nominal position
Between deviation data, go out to indicate light and the deviation of CCD by models fitting, generation instruction optical alignment file；
Step 4：Heat-sensitive paper is affixed on the standard substrate, using the work light at a certain distance, gets work light
Lattice array；
Step 5：The work array of light spots is directed at using CCD, according to work array of light spots physical location and nominal position
Between deviation data, work light and the deviation of CCD are gone out by models fitting, generate work optical alignment file；
Step 6：According to the instruction optical alignment file and work optical alignment file, the deviation between two kinds of light is calculated
Relationship；
Step 7：It during online horizontal direction self-correcting, is first scanned using instruction light, instruction is calculated by CCD alignments
The deviation of light and predetermined scan path using this deviation as forward feedback correction amount, forms the scan path of work light.
Wherein, the standard substrate surface forms "+" shape pattern by a series of alignment marks.
Wherein, portal frame mobile and horizontal is corrected out to scaling and water using least square fitting in the step 1
It puts down to nonorthogonality.
Wherein, using identical high-order error modeling fitting algorithm, model is for the step three and step 5：
Wherein, Δ x, Δ y are site error；xf、yfCoordinate for any point；dxf、dyfFor picture
Face translates；Mfx、MfyFor multiplying power；φfx、φfyFor image shifting；Tx、TyIt distorts for irregular quadrilateral；Wx、WyIt distorts for wedge shape；
D3、D5It distorts for the distortion of three ranks with five ranks；RfFor residual error.
Compared with prior art, the present invention carries out prescan using instruction laser accunputure to package path, generates scanning deviation
Correction file；The scanning deviation correction file generated online is applied directly in work optical scanning, reaches and work light is swept
The forward feedback correction in path is retouched, so as to ensure encapsulation precision.
Description of the drawings
It can be obtained further by following detailed description of the invention and institute's accompanying drawings about the advantages and spirit of the present invention
Solution.
Fig. 1 is laser glass packaging system structure diagram of the present invention；
Fig. 2 is standard substrate alignment mark schematic diagram；
Fig. 3 is chromatic aberration correction lattice array schematic diagram.
Specific embodiment
The specific embodiment that the invention will now be described in detail with reference to the accompanying drawings.
Laser glass packaging system of the present invention for portal frame, move needed for completion jointly with scanning galvanometer by position, first gantry
Frame carries scanning galvanometer and is moved between each encapsulation field, and when being packaged, path in field is encapsulated by scanning galvanometer completion.
Fig. 1 is laser glass packaging system structure diagram, including：Laser 1 is directed at CCD 2, scanning galvanometer 3, glass
Substrate 4, portal frame 5, portal frame guide rail 6, the work stage (Substrate table) 7 of bearing glass plate 4, Dali Shitai County 8, damper 9 and ground
Base 10.For glass substrate 4 by board transport to work stage 7,7 horizontal direction of work stage only completes a rotation angle Rz corrections；Gantry
Frame 5 carries scanning galvanometer 3 and is moved along 6 horizontal direction of portal frame guide rail, carries out base plate alignment, after being aligned successfully, scanning galvanometer is moved
It moves to each encapsulation field center, portal frame no longer moves.When being packaged, laser 1 emits laser, is scanned through galvanometer
3 are irradiated on glass plate 4, and by the deflection of scanning galvanometer movable lens, the laser package of glass plate is carried out by package path.It sweeps
Laser of the galvanometer there are two types of different wave length is retouched, one kind is instruction light, and another kind is work light.
When being scanned encapsulation, prescan is carried out, and carried out using alignment CCD in sweep phase using instruction light first
The deviation of alignment, detection instruction light hot spot and scan path, so as to carry out deviation correction to work optical scanning path.This method
Premise calls instruction light and the hot spot of the light that works to be imaged on substrate be in same point, i.e., no color differnece influences.Therefore first
The aberration of instruction light and the light that works is corrected, this process is off-line correction.
Off-line correction further includes instruction light and the preparation before the light chromatic aberration correction that works, and is exactly in school for the device
Before positive instruction light and work are photochromic, the horizontal direction calibration of device is first carried out, predominantly corrects the movement of portal frame horizontal direction
Scaling (scaling) and nonorthogonality.Fig. 2 is standard substrate, and surface forms "+" shape figure by a series of alignment marks
Sample.This pattern is located in substrate surface by point-device, and one is in the X-axis direction, and other one in the Y-axis direction.
Above-mentioned two labels band forms point-device 90 ° of angles.After standard substrate is uploaded to work stage, carries out base plate alignment and obtain correspondence
The physical location and nominal position of label, the physical location refer to that the galvanometer drive laser beam carries out the road of horizontal direction scanning
The position of diameter, the nominal position refer to that the portal frame drives the position in the path of the scanning galvanometer horizontal direction movement, make
With least square fitting correct out portal frame movement scaling with it is nonopiate.
After being corrected to the horizontal direction movement scaling (scaling) of portal frame with nonorthogonality, correction instruction light and work
Making photochromic difference method is：
First by heat-sensitive paper patch on the glass substrate, instruction light is sent out in encapsulation field magnitude range using galvanometer, in heat
"+" form point array is got on quick paper at a certain distance, is the physical location of these lattice arrays, indicates array of light spots structure such as Fig. 3
It is shown, CCD movements then are driven using portal frame, these array points is directed at, measures the nominal position of these lattice arrays, count simultaneously
Calculate the deviation between physical location and nominal position, generate calibration measurement data file, and using high-order alignment model in field into
Error term fitting modeling in row field, generation calibration file expression instruction error of the light with respect to CCD.
Error of the work light with respect to CCD is measured using same method.Heat-sensitive paper is attached on substrate first, in an envelope
It fills in the magnitude range of field, sends out work light using galvanometer and get "+" form point array at a certain distance on heat-sensitive paper, be these points
The physical location of array, instruction array of light spots is identical with work array of light spots structure, and work array of light spots structure is also such as Fig. 3 institutes
Show, then drive CCD movements using portal frame, be directed at these array points, measure the nominal position of these lattice arrays, calculate simultaneously
Deviation between physical location and nominal position generates calibration measurement data file, equally using high-order alignment model in field into
Error term fitting modeling in row field, generation calibration file expression error of the work light with respect to CCD.By this indirect mode,
By galvanometer instruction light and work light in substrate image planes focal imaging in same point.
The above-mentioned fitting algorithm that instruction light and the light that works are calibrated using CCD, using high-order error modeling in identical field：
Wherein,
Δx、Δy：Site error in；
xf、yf:The field internal coordinate at any point；
rf：
dxf、dyf：Image planes translation in；
Mfx、Mfy：Multiplying power in；
φfx、φfy：Image shifting；
Tx、Ty：Irregular quadrilateral distorts；
Wx、Wy：Wedge shape distortion；
D3、D5：Three ranks are distorted distorts with five ranks；
Rf：Residual error in.
It after generating calibration file by off-line correction, is input in plant control unit, ensures itself instruction light and work
Light carries out online progress laser package work after real estate is imaged on same point.
The preferred embodiment of the only present invention described in this specification, above example are only to illustrate the present invention
Technical solution rather than limitation of the present invention.All those skilled in the art pass through logic analysis, reasoning under this invention's idea
Or the limited available technical solution of experiment, it all should be within the scope of the present invention.
Claims (4)
1. a kind of laser glass encapsulates calibration method, applied in laser glass packaging system, the laser glass packaging system
Including：
Laser, CCD, scanning galvanometer, glass substrate, portal frame, portal frame guide rail and work stage；Described in the portal frame carrying
Scanning galvanometer is moved along the portal frame guide rail horizontal direction；The work stage carries out glass substrate thereon upper piece rotation angle Rz
Correction；The scanning galvanometer drive laser beam is scanned the glass substrate according to predetermined scan path, and with X to, Y
To and Z-direction freedom of motion；By laser of the laser beam of the scanning galvanometer for two kinds of different wave lengths：Indicate light and work
Make light；The CCD measures deviation, the physical location of the work light between the physical location and nominal position of the instruction light
The deviation of deviation, the instruction optical scanning path and predetermined scan path between nominal position, so as to the work light
Scan path carry out deviation correction, which is characterized in that include the following steps：
Step 1：Using standard substrate, base plate alignment is carried out, portal frame horizontal direction scaling is calibrated and horizontal direction is nonopiate
Property；
Step 2：Heat-sensitive paper is affixed on the standard substrate, using the instruction light at a certain distance, gets instruction luminous point battle array
Row；
Step 3：The instruction array of light spots is directed at using CCD, according between instruction array of light spots physical location and nominal position
Deviation data, go out to indicate light and the deviation of CCD by models fitting, generation instruction optical alignment file；
Step 4：Heat-sensitive paper is affixed on the standard substrate, using the work light at a certain distance, gets work luminous point battle array
Row；
Step 5：The work array of light spots is directed at using CCD, according between work array of light spots physical location and nominal position
Deviation data, work light and the deviation of CCD are gone out by models fitting, generate work optical alignment file；
Step 6：According to the instruction optical alignment file and work optical alignment file, the offset relation between two kinds of light is calculated；
Step 7：During online horizontal direction self-correcting, be first scanned using instruction light, by CCD alignments calculate instruction light with
The deviation of predetermined scan path using this deviation as forward feedback correction amount, forms the scan path of work light.
A series of 2. calibration method as described in claim 1, which is characterized in that the standard substrate surface is by alignment mark shapes
Into "+" shape pattern.
3. calibration method as described in claim 1, which is characterized in that corrected in the step 1 using least square fitting
Go out portal frame mobile and horizontal to scaling and horizontal direction nonorthogonality.
4. calibration method as claimed in claim 3, which is characterized in that the step three and step 5 use identical high-order
Error modeling fitting algorithm, model are：
Wherein, Δ x, Δ y are site error；
xf、yfCoordinate for any point；
dxf、dyfIt is translated for image planes；
Mfx、MfyFor multiplying power；
φfx、φfyFor image shifting；
Tx、TyIt distorts for irregular quadrilateral；
Wx、WyIt distorts for wedge shape；
D3、D5It distorts for the distortion of three ranks with five ranks；
RfFor residual error.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201410845119.9A CN105800919B (en) | 2014-12-31 | 2014-12-31 | A kind of laser glass packaging system and calibration method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410845119.9A CN105800919B (en) | 2014-12-31 | 2014-12-31 | A kind of laser glass packaging system and calibration method |
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| CN105800919A CN105800919A (en) | 2016-07-27 |
| CN105800919B true CN105800919B (en) | 2018-06-26 |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107799667B (en) * | 2016-08-30 | 2020-01-24 | 上海微电子装备（集团）股份有限公司 | Glass material packaging equipment and packaging method thereof |
| CN112399038B (en) * | 2019-08-15 | 2022-08-09 | 上海微电子装备（集团）股份有限公司 | Laser packaging equipment and laser packaging method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101821081A (en) * | 2007-08-23 | 2010-09-01 | 3D系统公司 | Automatic geometric calibration using laser scanning reflectometry |
| CN101909827A (en) * | 2007-10-23 | 2010-12-08 | 海雷激光有限公司 | Scan head calibration system and method |
| CN102818538A (en) * | 2012-09-14 | 2012-12-12 | 洛阳兰迪玻璃机器股份有限公司 | Detection system based on modulated glass thread structure laser image |
| CN202896121U (en) * | 2012-10-31 | 2013-04-24 | 义乌市圣石激光技术有限公司 | Large-format laser engraving machine |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6335784B2 (en) * | 1996-01-16 | 2002-01-01 | Canon Kabushiki Kaisha | Scan type projection exposure apparatus and device manufacturing method using the same |
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- 2014-12-31 CN CN201410845119.9A patent/CN105800919B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101821081A (en) * | 2007-08-23 | 2010-09-01 | 3D系统公司 | Automatic geometric calibration using laser scanning reflectometry |
| CN101909827A (en) * | 2007-10-23 | 2010-12-08 | 海雷激光有限公司 | Scan head calibration system and method |
| CN102818538A (en) * | 2012-09-14 | 2012-12-12 | 洛阳兰迪玻璃机器股份有限公司 | Detection system based on modulated glass thread structure laser image |
| CN202896121U (en) * | 2012-10-31 | 2013-04-24 | 义乌市圣石激光技术有限公司 | Large-format laser engraving machine |
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