TWI277478B - Laser marking method - Google Patents

Abstract

A method for marking a work piece by a laser beam at a pre-defined location, the work piece being supported on a platform and having at least two identification signs, the method comprises determining the compensating factor for errors resulting from difference in the wavelengths of the laser beam used for marking and the visible light used for detection, detecting an image of each of the two identification signs to determine a position of the work piece relative to the platform, generating a set of marking coordinates based on the pre-defined location, the position of the work piece and the compensating factor, and directing a laser beam onto the work piece at the set of marking coordinates to mark the work piece.

Description

1277478, invention description (1) using laser station [Technical field to which the invention belongs] The present invention relates to a laser processing method, and particularly relates to a method for producing a mark on a work object [Prior Art] Ray The stencil printing method is a method of generating a perceptible mark by using a laser beam at a determined position of the /work object. There are many types of lasers in the industry that can be used for marking, including carbon dioxide lasers, YAG lasers, and diode lasers. In addition to marking, a laser can also be used for micromachining (m i c r 〇 - m a c h i n i n g ), surface treatment, modification, splicing, and cutting. In a laser processing method, the parameters of the coordinate data or position are generated at the marking location on the workpiece, programmed to design a laser beam position controller, and have a reference coordinate. In an ideal situation, the work is placed in a determined theoretical position, ie aligned with the coordinate system described above. The laser beam is then applied to the work object based on the stylized coordinate data described above so that it can be imprinted at the defined location. However, in a consistent situation, a work item is usually not placed in alignment with the coordinate system and/or the reference template. Also, people are poor, the operation is wrong or the above work is placed ° ', (mechanically, - the work is usually placed in a dislocation... This, the theoretical position of the shoulder is defined along the line of the fish in the fish. And/or a direction of rotation

1277478 The work has not been tested for the movement of the straight line and the direction of rotation, and the undesired position on the object of the column is 'not allowed to be generated. </ br> = "The crops are under the above-mentioned laser beam. The key consideration is that the &amp;&amp; degree is to ensure that the lightning affects a laser beam - such as 'the above laser system and the work, the above work has been determined by the system and the measurement of the above work volume 0 The factor of positioning accuracy on the object guides the optical error of the 31 laser beam: the position and the fixed system and the operation, etc., a controller will be measured in the system, and the relative position will be adjusted to compensate the upper detector system. Required, and therefore inefficient. The above-mentioned external source of sensing. j [For example, the position of the measurement and the position of the position and the theoretical position detection I έ士里山LX i '^ The position sensor transmits to the above-mentioned laser #击LV » Kam Tin and the above work, and the offset of the above work. A separate measurement and position 2 The establishment and operation of the above system will be awkward = state Increase U.S. Patent No. 6,545,25, the entire disclosure of which is incorporated herein by reference to U.S. Pat. No. No. No. No. No. No. No. No No No No No No No No No No No No No No No No No No No No No No No No No No No No No No No No No No No No No No No No No No No No No No No No No No No No No No. The reference guides a light beam to the surface of the work object, and the light reflected by the work object is received by an optical detector, so that the comparison between the set value and the real value can be obtained before the real processing, and can be determined by the work. The actual position of a contour

Page 7 1277478 V. Description of invention (3). In the present system and prior systems, the above-described contour (c ο n t 〇 u r ) or the detected position of the profile is considered to guide a laser beam to process the actual position of the workpiece. However, in the laser processing operation, the position of a measurement is not always the same as the actual position. Since the detection of the position may introduce an error, it may be caused by, for example, the systematic error of the above-mentioned measurement sensor. Or optical and / or the above-mentioned laser beam and the arrangement of the beam is not appropriate. These system errors may have a significant impact on certain laser processing applications. For applications that require a relatively high positioning accuracy, such as laser marking, a bit error is typically required to be approximately or less than 0.1 mm. The relationship between the set position and the actual value provided by the U.S. Patent No. 6,5,425,250 is compared to the laser that requires high positioning accuracy. Not applicable in marking operations. Therefore, it is necessary to provide a laser marking device and system for imprinting on a precise position on a work object, that is, to produce a high positioning accuracy on a workpiece, for example, approximately positive and negative (K 0 2 mm accuracy). SUMMARY OF THE INVENTION According to one aspect of the present invention, a method for marking a work object is provided. The method includes generating a wavelength compensation factor representative of one of a laser beam and a visible light beam due to a wavelength difference Deviation amount to

Page 8 1277478 V. Description of the invention (4) and a position compensation factor representing the difference between the expected position of the work object and the actual position detected by a visual system. These compensation factors are used to derive the above-described imprinted coordinates for guiding the above-mentioned laser beam onto the above-mentioned crop to produce a high-accuracy imprint. According to an embodiment of the invention, the wavelength compensation factor is generated by generating a first calibration point on the platform or a calibration template. Generating the light guiding member by guiding a laser beam in a first state, so that the first group of coordinate data is transparent to the light guiding member to a first light beam by a light guiding member A difference, through which the error caused by the compensation is visually detected. The above-mentioned two-state detector is connected to obtain the upper difference beam and the received light. A second group of the first group and the fixed wavelength compensation are as described above. The positive sign of visible light is in an optic assembly) the first correction mark. One arrives. Next, adjust one of the last calibration tokens to the second group. According to another embodiment of the present invention, the two correction marks are generated due to the difference in the compensation factor wavelength of the material passing through the coordinate data. By the interpolation (i n t e r ρ ο 1 a t i ο η) calculation, the compensation factor of one of the straight lines along one of the two correction marks is determined according to the compensation factors of the two correction marks. The above two correction marks are selected such that the above defined mark position falls on the line defined by the above two correction marks. Three, four or more correction marks are generated to define a trigonometric, quadrilateral or polygonal region, respectively, such that the above region encompasses the above defined imprinting position. Use the above three, four or more

Page 9 1277478 V. INSTRUCTIONS (5) The compensation factor of the correction mark is used to calculate the compensation factor of a point or a point overlapping with the above defined mark position or through the interpolation position. As for the above-mentioned position compensation factor, the above-described engraved work has two or more identification marks previously prepared thereon. The position on the above-mentioned work piece that produces the engraving has been defined to be related to the above two or more identification marks. An image of each of the identification marks of the crop is detected by receiving a visible light beam through an f-theta lens to determine a position of the work object relative to one of the platforms supporting the work. A set of inscribed coordinates is generated based on the location of the work and the defined location. This set of imprinted coordinates compensates for the error caused by the misalignment of the above-mentioned workpieces (mi sal igned), which is usually generated in the operation process. By interpolating the above wavelengths and position compensation factors into the previously designed imprinting parameters, a corrected inscribed coordinate is obtained to direct the laser beam to a position detected and/or calculated based on the workpiece. According to another aspect of the present invention, a method of marking a work object supported on a platform is provided. The above method includes generating a compensation factor to represent an amount of offset due to a wavelength difference between a laser beam forming one of the correction marks and a visible light beam detecting one of the correction marks. Defining a location on the above-described imprinted work utilizes a first set of position identifiers. Determining a position of the work object relative to the platform, and according to the first set of position identifiers, the position of the work object, and the supplement

Page 10 1277478 V. INSTRUCTIONS (6) The compensation factor produces a second set of position identifiers. A laser beam is directed onto the workpiece and to the second set of position identifiers to mark the workpiece. According to still another aspect of the present invention, a method for marking a work object by laser is provided, the method comprising: loading a first work object onto a platform; defining a position on the first work object to utilize a first Marking a set of coordinates; detecting an image of the first work object to determine a position of the first work object relative to the platform; generating a compensation factor to reduce a laser beam by a first work object a position difference between the first point pointed and the second point detected by a visible light beam; generating a second set of coordinates according to the first set of coordinates, the position of the first work object and the compensation factor; And directing a laser beam to the second set of coordinates on the first batch of work objects to mark the first work object. [Embodiment] FIG. 1A shows a laser marking apparatus 100 imprinting a work object according to an embodiment of the present invention. Figure 1B shows the apparatus of Figure A above and a work placed on top of the apparatus for marking. According to FIG. 1A and FIG. 1B, the apparatus 100 includes a laser source 110, such as a YAG laser or a carbon dioxide laser, providing a laser beam 1 1 2 with sufficient energy to generate It is printed on a work at a time. A first mirror 120 excurs the laser beam 1 1 2 to a second mirror 130. The second mirror 130 further deflects the laser beam 11 2 to a light guiding member (guiding optics assembly)

Page 11 1277478 V. Description of the invention (7)), such as the scan head 140. Two current controlled (= vOCOntrolled) mirrors 142 and 144 are coupled to receive and direct the laser beam 112 to a platform 15 which supports a workpiece 2 for laser marking. The current controlled reflection σ (galvo rairror) 142 and 144 axes are aligned with each other on a vertical plane. Each current control mirror is independently fixed to one of the corresponding axes. The scanning head 140 has two current control mirrors 142 arranged in a square row, / deflected, guided and manipulated the above-mentioned laser beam 112: X direction and a gamma direction, relatively, the above laser beam 112 can reach any position of the two-dimensional environment on the platform 150. The device 100 has a visual detector 160, such as a CCD camera, for receiving and detecting the visible light beam 212 from the platform 15 and/or the workpiece 200. The visual detector 16 is placed on the first mirror 130. The second mirror is a dichroic mirror that reflects the laser beam and allows the visible light to pass therethrough.

A convergent lens 170 is located between the scanning head 140 and the platform 150. The condensing mirror 17 is a f-theta lens. The above-mentioned linear focusing mirror (f_theta lens) 170 focuses the above-described lightning beam 11 2 on the above-mentioned workpiece 2 〇 。. The visible light beam 2 1 2 also passes through the above-mentioned f-fheta lens 170 and can be guided to pass back through the current control mirrors 1 4 2, 1 4 4 and

1277478 V. INSTRUCTION DESCRIPTION (8) The first mirror 1 3 上述 enters the visual detector 丨6 〇. A "linear focusing mirror $ f-theta lens" is a concentrating mirror that maintains the focus of a laser and/or visible beam above a plane when the angle of incidence of the above-mentioned laser and/or visible beam is changed to 'Ai Shou. There is a linear relationship between the incident angle and the moving distance of the above-mentioned laser and/or visible light beam. In one embodiment, the linear lens (f theta lens) is a color correction (c〇i〇r correct) scanning lens ( Scan lens) allows two or more lasers and/or beams of different wavelengths to maintain their focus on the same plane as they pass.

The above-mentioned viewing angle is measured as 16 〇 its optical axis (〇pt丨ca 1 ^ X is) 162 and the above-mentioned laser beam 1 1 2 in the above-mentioned current control mirror i 4 2 and the above second mirror 13 The path between 0 is aligned. According to the arrangement as described above, the visible light 212 from the crop 20 or the platform 15 will travel in the same path as the laser beam n 2 described above. A controller 180 is coupled to the scan head 140 and the above-mentioned y is measured as 160. A processor (p r 〇 c e s s 0 r) 1 9 0 ♦ is coupled to the above controller 1 800. The controller 1 8 〇 controls the current control mirror 1 4 2,

1 4 4 pivoting (p丨v 01 ing) to deflect the laser beam 1 1 2 onto the platform 150 and direct a visible beam 21 2 back to the visual detector 1 60 . The controller 180 also determines to direct a first point P1 of the laser beam and the visual detector 16 to detect a position coordinate of a second point P2 of one of the images. The processor 1 9 calculates a difference between the first point and the second point coordinate position to determine a compensation factor for reducing or eliminating

Page 13 1277478 V. Description of the Invention (9) The positional coordinate difference between the first point P 1 and the second point P 2 described above. According to the present invention, the above-described laser beam 1 1 2 guided to the workpiece and the visible beam 212 reflected from the workpiece can be quantitatively guided. In order to determine the positional relationship between the above-mentioned laser beam 1^2 and the above-mentioned visible light beam 2 1 2, the above-mentioned platform 150 is used as a calibration template. Or a calibration template 1 52 is provided above the platform 150. Figure 2A shows a laser beam directed onto a workpiece for marking, and a visible beam is likewise reflected from the workpiece for visual inspection. According to the above picture

A and B, the same reference numerals denote the same elements, a laser beam 1 1 2 which is deflected by the current-controlled mirrors 1 4 2 and 14 4 and which is a f-theta lens 17 0 is focused and directed onto the above work object 20 0 for marking. Since the laser and the visible light have different wavelengths, when the current control mirrors 1 4 2 and 1 4 4 are fixed at a specific position or state, corresponding to a specific coordinate group, there is a position difference or displacement (〇 ffset). There is a point P1 at which the laser beam 1 1 2 is located on the workpiece 2 0 0, and a second point P 2 from which the visible beam 212 is reflected back from the workpiece 20. Thus, a set of specific coordinate groups determined by the current-controlled mirrors 丄42 and 144 represent the position ρι of the laser beam Π2, and the position P 2 of the visible light beam 21 2 . According to the teaching; +, , people

&lt;%, can be mixed, the marking process is carried out on the above work item 2000, all the second s version g, the above flow control mirrors 1 4 2 and 1 4 4 if the marking position of the upper electric power is not properly adjusted It will be between *1 + the same as the deviation value between the marking position and the actual marking position detected by the above-mentioned visual detector.

Page 14 1277478 V. INSTRUCTIONS (10) According to the above confirmation of the existence of the offset, the present invention further provides an effective solution to compensate for the above offset, which will be described in detail below in conjunction with FIG.

As shown in FIG. 2B, in order to determine the value of the offset, the pivotal angles of the current control mirrors 14 2 and 14 4 are from a first state, respectively, to 1 4 2 a. It is adjusted to a second state, which is represented by 142b and 1 44b, respectively, and is located at a position where point P 2 coincides with point P 1 . As described above, the rotation angles of the current control mirrors 1 4 2 and 14 4 correspond to the first and second states being decoded by the controller 1 80, by corresponding to each state. The coordinate information that can be obtained. Comparing the coordinate data decoded by each of the above states, the value of the offset can be quantified and defined as a compensation factor to reduce or eliminate the position difference between P1 and P2. A corrective operation (〇 P e r a t i ο η) can be implemented in the manner shown in Figure 2b. In the first step, the current-controlled mirrors i 42 and 1 44 are respectively fixed to a brother-in-law 1 4 2 a and 144a. The above-mentioned laser beam I! 2 is passed through the above-mentioned current control mirrors 142, 144 and a linear focusing mirror (f-theta lens) 17 0 to the above-mentioned workpiece 200 or the first point P1 on the above-mentioned calibration template ι52. The controller 1 80 decodes and records the first set of position coordinates corresponding to the first shape. In the next step, the current control mirrors 调整 are respectively adjusted to a second state 142b and 144b, so that the visual detection is crying, and the visible light located at the above point pi is detected. Use the above current control to control the mirror ι42

Page 15 1277478 V. INSTRUCTIONS (11) AND 1 4 4 Adjusting from the first state to the second state described above, P 2 and P 1 can be overlapped. The controller 1 800 then decodes and records a second set of position coordinates corresponding to one of the second states described above. The difference between the first set and the second set of position coordinates is calculated by the processor 190, such as a compensation factor to reduce or eliminate the error between a detected position and an imprinted position.

According to an embodiment of the invention, the compensation factor is determined by a first group (f i r s t p a r t y) which provides a laser marking system or calibrates the above-described laser marking system. a second party that performs the above-described marking operation for a user of the laser marking system, receives and uses the compensation factor of the laser marking system, and cooperates with the determined design data to produce an inscribed coordinate or imprinted material. To carry out the above marking. According to another embodiment of the present invention, the determining of the compensation coefficient may be performed before the user terminal performs the marking operation according to the determined marking position. The above compensation factor can be used in conjunction with the above determined design data to produce an inscribed coordinate or imprinted material to perform the above imprinting.

According to the above description, as the angle of rotation of the current-controlled mirror around the axis changes, the laser beam will be directed to different points of the workpiece or calibration template. The above offset or error value changes with the position of the above point. In an actual marking operation, a compensation factor can produce the above position if only a determined position is used to generate a mark. If, based on the two determined positions, a mark is produced, the above-mentioned two compensation factors must be generated for the two positions 1277478. Alternatively, the compensation factor for each determined position may be obtained from the interpolation point to a line along one or both of the determined positions. In the above event according to three or more determined positions to generate an imprint, the compensation factors of the above three or more determined positions may be inserted by inserting all three or more of the above-mentioned points. One of the locations is a quadrilateral, quadrilateral or polygonal area to get. The details of the compensation factor generated in the above case will be described in detail below. Figure 2 and the two sides of the visual detection profile ((: 〇]: 11: 〇 111 ^ 312 and 314

(shown in phantom) 'The coordinate data decoded by the current-controlled mirror according to the above' may be different from a relatively true imprinted profile 3 2 2 and 3 2 4, 3 2 6 (to achieve display). In Figure 3A, the visual detection profile 3丨2 is smaller than the actual engraved outline 3 2 2 . In Figure 3, the visual detection profile 3丨4 is larger than the actual engraved contour. 3 24 °

Determining the error of a detected position relative to a marking position, first, as shown in Figure 4A, 'special features, such as four small circles 4 0 2, 4 0 4, 4 0 6 and 4 0 8 are engraved on the platform 1 5 〇 or calibrate each corner of the template 1 5 2, for example, at points &amp; (10,10), ]3 (100,10), (:(10,100), and (1(100,100)). As described above, the coordinates of points a, b, c, and d are controlled by current-controlled mirrors fixed in the first state. The current-controlled mirrors are adjusted to the second state by the visual detectors 160. a beam reflected by the small circles 4 0 2, 4 0 4, 4 0 6 and 40 8. Since the laser beam is misaligned with the beam, the detection positions of the four small circles are offset from the actual marking position. E.g,

Page 17 1277478 V. Description of invention (13) a, (99. 8, 9. 8), b' (100· 2, 9·8), c, (9·8, 1 Ο Ο· 2), d '(100. 2,100.2), shown in Figure 4. The positional errors Ea, Eb, Ec, and Ed of each circle along the X and Υ directions can be determined by comparing the two sets of coordinate data. Refer to Figure 5. The error calculation of one of the positions between the two reference points is described, wherein Ea and Eb represent the errors between the two reference points 5 0 2 and 5 0 4 , respectively. Reference

En represents the error of one of the selected positions η between points 5 0 2 and 5 0 4 . The location representative will mark one of the positions that have been determined to be 5 5 0. Ε η can therefore be obtained by the following equation:

En=Ea+(Eb-Ea)氺a/b(1) where a is the point 5 0 2 and the distance b between the points η is the distance between the point 5 0 2 and the point 5 0 4 in the above embodiment, The two reference points are arranged to be in a position to be engraved on a work object to be marked 5 5 0. Preferably, the selected position η overlaps the position 505. Similarly, according to another embodiment of the invention and with reference to Figure 5, the error Em at a point m between the two reference points 506 and 508 can be calculated from the following equation:

Em=Ec+(Ed-Ec)氺c/d(2)

Page 18 1277478 V. INSTRUCTIONS (14) In addition, the error E 0 at any point in the rectangular area defined by points 502, 504, 50 6 and 508 on the above platform can be calculated as follows:

Ex = En + (Em - En) * x / n (3) In this embodiment, the above rectangular area is arranged to include a position 650 on a work to be inscribed. Preferably, the position X is selected to overlap the position 506. According to another embodiment of the invention, three reference points 5 0 2, 5 0 4, 5 0 6 are provided and a triangular region on the platform is formed, as shown in Figure 5C. Similar reference marks represent similar features, and the error Eo of one of the above triangular regions can be determined as follows:

Ex II Ec+(En-Ec)*x/n=Ec+{[Ea+(Eb-Ea)*a/b]-Ec}*x/n(4) In the present embodiment, the above triangular region is arranged to be included A work object is engraved on one of the positions 5 7 0. Preferably, the position X is selected at a position overlapping the position 570. The error or offset value of each programmed point is introduced to compensate for the error between the above visible light and the above described laser light. According to one of the systems of the present invention, after the above compensation processing, it can be implemented

Page 19 1277478 V. INSTRUCTIONS (15) Visual inspection to calculate the actual position of the above work object to produce an accurate mark on the determined position. In the actual imprinting process, another factor may cause the imprint to be generated at an undesired position on the work piece, i.e., the work may be misplaced during processing and fixing. Successfully compensating for the initial error between the above-described laser beam and visible light, a laser printing system and method according to the present invention provides a reliable solution to detect the actual position of a workpiece, thus compensating for the above-mentioned work due to errors Align the ancient Wu caused by the alignment. As shown in Fig. = A, after the above-mentioned error or deviation between the above-mentioned laser beam and the visible beam is compensated as described above before the actual imprinting process, the sample plate 600 is placed on the above-mentioned platform 65. Reference yoke R η n ancient. , 汲b 0 〇 has at least two distinct features 6 1 2 and 6 1 4 are located at known positions, for example, at position and (丨5丨5, and (6 0, 60). Through visual inspection, The teachings are based on '^ 4 衣直 C apparatus' to identify and record the above shape/rim and the above-mentioned distinct features 612 and 614. As shown in FIG. 6B, when a workpiece 200 is placed on the platform 65〇 for marking, the visual detector will search through the two-dimensional region of the workpiece 2 by the previous step and The above shape/contour fit features 612 and 614. According to only one example, features 6 2 2 and 6 24 on the work object 20 are identified to match the shape or contour of the reference features 612 and 614, respectively. Due to the shifting and rotation of the workpiece 200, the detection of the above feature 6 2 2

Page 20 1277478 V. Description of the invention (16) is set to (15· 2, 15· 2) and the detection position of feature 6 2 4 is 59.5, 60. κ 1 U and by comparing the above registered (registered) positions (1 b ' The reference template (6 0, 60) can determine the linear translation and angular translation of the above work object 200 relative to the upper 600. Therefore, the error value calculated by the term can be introduced. In the above reference template σ and ° ^

(d e s i g n e d) is printed in the coordinates, so it can compensate for the shift and/or rotation of the workpiece 200. In actual marking, the above marking can be produced at the correct position required for the above-mentioned displaced work. Thus, when a work item is misaligned, the above system is able to compensate for the above translation and produce an imprint in the correct position. When the next work object is placed on the above platform for marking, the same feature-searing step will be repeated before the imprinting, so that the translation and rotation of the current work can be determined and the engraving is performed in the correct position. on.

In accordance with another embodiment of the present invention, a batch of work, such as a semiconductor IC chip module on a lead frame, is imprinted. These objects are placed in an array on the platform 705, as shown in Figure 7. In this embodiment, each of the workpieces contains visually detectable features that are pre-manufactured on the workpiece during the manufacturing process. Above

1277478 V. INSTRUCTIONS (17) The size, shape and position of the visual inspection are the same on each work object and are used to mark the positioning reference of the above work. A first work item 7 0 2 has two reference circles or points 7 0 2 a and 7 0 2 b as positioning references, each located at one corner of the above work object. The first workpiece 70 2 is placed in one of the positions of the platform 75 0 and is as a reference template. The above information relates to the size, shape and position of the reference points 7 0 2 a and 7 0 2 b, which are detected and recorded by the above-mentioned laser marking device. When the next work object is inscribed, for example, the work item 74, the above-mentioned laser marking device detection reference points 7 0 4 a and 7 0 4 b are pre-engaged on the work item 7 0 4 . The above-mentioned guess results are then compared with the above recorded information to determine the linear and/or rotational translation of the workpiece 74. The actual position of the marking on the crop can be determined by introducing the above linear and/or rotational translation values into the above-described pre-programmed imprinting data or parameters. A laser beam is directed above the workpiece 704 according to the actual position of the workpiece 74, so that the marking on the workpiece 704 is in the correct position. The same record, comparison and decision procedure is repeated for the subsequent work items 7 0 6 , 7 0 8 , etc., in order to produce the correct position imprinted on each subsequent work item. Referring now to Figure 8, a method 800 is provided to provide a crop on an imprinted platform. According to the present invention, at least two identification marks are pre-produced on each of the engraved work items. In a first block 802, a template with a correction mark is used to generate a wavelength compensation factor representative of the laser beam and

Page 22 1277478 V. INSTRUCTIONS (18) The deviation between the above visible light due to the difference in wavelength. In a second block 804, the identification mark placed on the work object of the platform can be identified by receiving visible light through a linear focusing mirror (f - t h e t a 1 e n s) to determine the position of the work object relative to the platform. The difference in the pre-defined position of the above work is used to derive the above position compensation factor. In the next block 806, the newly derived imprinted coordinate set is based on the predefined position, the actual position of the work object, and the wavelength and position compensation factor. The compensation factor is used to reduce the difference between the first point guided by a laser beam on a platform or a work object and the second point where visible light is detected. In a subsequent block 808, a laser beam is directed onto the work object to derive a set of imprinted coordinate sets to mark the work at the precise desired location. The present invention has been described above by way of a preferred embodiment, and is not intended to limit the scope of the claimed invention. The scope of patent protection is subject to the scope of the patent application and its equivalent fields. Any modification or refinement made by those skilled in the art without departing from the spirit or scope of the present invention is equivalent to the equivalent change or design made in the spirit of the present disclosure, and should be included in the following patent application scope. Inside.

1277478 BRIEF DESCRIPTION OF THE DRAWINGS [Brief Description of the Drawings] FIG. 1A is a schematic view showing a laser marking apparatus according to an embodiment of the present invention. The first B is a schematic view showing that the laser marking device of Fig. 1A has a workpiece placed thereon for marking. Figure 2A is a schematic diagram showing the scanning of a laser beam onto a workpiece for marking, and the reflection of visible light from the workpiece to visual inspection. The second B diagram shows the compensation schematic of the laser beam and the visible beam as shown in Fig. 2A. The third A and third B are schematic diagrams showing the possible difference between a detected imprint and an actual imprint. Figure 4A is a schematic diagram showing the distinct features of the imprint that determines the error between the imprint detections. Figure 4B shows a schematic representation of the features at the detection location. Figure 5A is a schematic diagram of the use of two correction marks to determine the correction factor. Figure 5B is a schematic diagram of the use of four correction marks to determine the correction factor. The fifth C diagram is a schematic diagram of determining the correction factor using three correction marks. Figure 6A is a schematic diagram showing the characteristics of the above-described visual detector to record a standard reference position. Figure 6B is a view of the work being detected and the same features as compared to the standard reference position described above. The seventh figure is a schematic view of another embodiment of the present invention in which a set of work objects are placed on the above-mentioned laser system for marking. The eighth figure is a flow chart of a laser marking according to the present invention.

Page 24 1277478 Brief Description of Drawings [Description of Main Components] Laser Marking Device 1 Laser Source 110 Laser Beam 112 First Mirror 1 2 0 Second Mirror 130 Scan Head 140 Current Control Mirror 142, 144 sin current control mirror first state 142a, 144a current control mirror second state 142b, 144b platform 150, 650, 750 calibration template 1 5 2 visual detector 160 optical axis 162 linear focusing mirror f-theta lens 170 control 180 processor 190 workpiece 200 visible beam 2 1 2 visual detection profile 3 1 2, 3 1 4 relatively true engraved contour 3 2 2, 3 2 4 small circle 402, 404, 406, 408 reference point 502, 504, 506, 508 326 _

1277478 Schematic description of the position has been determined 550 position of the engraving 5 6 0, 5 7 0 reference template 6 0 0 feature 6 1 2, 6 1 4, 6 2 2, 6 2 4 first work object 702 reference point 7 0 2a, 7 0 2b, 7 0 4a, 70 4b Subsequent work 7 0 4, 7 0 6 , 7 0 8 Method 8 0 0 First block 8 0 2 Second block 804 Third block 8 0 6 Fourth block 8 0 8 position P Bu P 2

Claims (1)

1277478 6. Patent application scope 1. A method for marking a defined position on a work object by using a laser beam supported on a platform and having at least two identification marks, the method comprising: generating a wavelength compensation factor, wherein the wavelength compensation factor represents an offset between a laser beam and a visible beam due to a difference in wavelength; detecting the two identifications through a linear focusing mirror (f-theta 1 ens) Each visible beam of the mark determines a position of the work object relative to the platform to derive a position compensation factor; generating the position compensation factor according to the defined position, the position of the work object, the wavelength compensation factor, and the position compensation factor A set of imprinted coordinates; and directing - a laser beam into the set of imprinted coordinates on the work to imprint the work. 2. The method of marking a laser beam at a defined position on a work object according to claim 1, wherein generating the wavelength compensation factor further comprises: transmitting a guiding optic assembly to the first The first state guides a laser beam onto a calibration template to form a first calibration mark, wherein the first state corresponds to a first set of coordinates; and the second state is detected by the light guiding member One of the correction marks is visible to the light beam, wherein the second state corresponds to a second set of coordinates; and a coordinate difference between the first set and the second set of coordinates is determined; wherein the wavelength compensation factor is based on the coordinate difference produce. Page 27 1277478 VI. Scope of Application Patent 3. A method of marking a laser beam at a defined position on a work object using a laser beam according to item 2 of the patent application, wherein the first correction mark is associated with the defined position Overlapping to mark the work. 4. The method of marking a laser beam at a defined position on a work object according to item 2 of the patent application, further comprising: forming a second correction mark, wherein the first and second correction marks define a straight line Passing the defined position; and determining a second compensation factor of the second correction symbol; wherein the wavelength compensation factor is generated according to the first and second compensation factors. 5. The method of marking a laser beam at a defined position on a work object according to item 4 of the patent application, further comprising: forming a third correction mark, wherein the first, second and third corrections The mark defines a triangular area surrounding the defined position; and a third compensation factor determining one of the third correction marks; wherein the wavelength compensation factor is generated according to the first, second and third compensation factors. 6. The method of marking a laser beam at a defined position on a work object according to claim 5, further comprising: forming a fourth correction mark, wherein the first, second, third The fourth correction mark defines a rectangular area surrounding the defined position; Page 28 1277478 VI. Patent Application Range The fourth compensation factor is determined as one of the fourth correction symbols; wherein the wavelength compensation factor is generated according to the first, second, third and fourth compensation factors. 7. The method of marking a defined position using a laser beam on a workpiece according to claim 1 of the patent application, further comprising: providing a reference template having at least two position locators, wherein Each locator corresponds to one of the identification marks on the work object; detecting a visible light beam of each of the at least two locators on the reference template; recording a position of each of the at least two locators; and _ plucking Detecting one of each of the two identification marks on the work object; wherein the position compensation factor of the work object is determined by comparing each of the detection identification marks with a corresponding positioner. 8. The method of marking a laser beam at a defined position on a work object according to item 7 of the patent application, further comprising: simultaneously loading at least two work objects onto the platform; determining the at least two a first position of the first work of the work; marking the first work; determining a second position of the second work of the at least two work; β marking the second work; and taking out (un 1 Oad) The at least two work items. 9. A method of marking a work object using a laser, the work object supported on a Page 29 1277478 6. On the patent application scope platform, the method includes: generating a compensation factor to represent an offset (0 ffset), which is due to forming a laser beam of a correction mark and detecting the correction mark One of the wavelength differences between visible light; defining a location on the inscribed work using a first set of location identifiers; determining a location of the work object relative to the platform; Generating a second set of position identifiers according to the first set of position identifiers, the position of the work object and the compensation factor; and guiding a laser beam onto the work object to the second set of position identifiers Mark the work. A method for laser-printing a work object according to claim 9, wherein the generating the compensation factor further comprises: guiding a laser beam to a calibration template in a first state through a light guiding member; Forming a first correction mark, wherein the first state corresponds to a first set of coordinates; detecting, by the light guiding member, a visible light beam of the first correction mark in a second state, wherein the second state corresponds to And a second set of coordinates; and determining a difference between the first group and the second set of coordinates to determine the compensation factor. 1 1. The method of laser-printing a work object according to claim 9, wherein the determining the location of the work comprises: providing a reference template having at least two locators; Page 30 1277478 6. The patent application scope detects a visible image of each of the at least two locators; records a position of each of the at least two locators; detects at least two provided on the work object Identifying one of the images of the indicia; and comparing the image of each of the identification indicia with a corresponding positioner to determine a position of the work object relative to the reference template. 1 2. A method of marking a work object using a laser, comprising: generating a compensation factor to reduce a first point on a first work object pointed by a laser beam and being detected by a visible light beam a position difference between the second point; loading the first work object onto a platform; defining a position on the first work object to mark with a first set of coordinates; detecting the first work object An image to determine a position of the first work object relative to the platform; generating a second set of coordinates according to the first set of coordinates, the position of the first work object and the compensation factor; and guiding a mine A second set of coordinates is emitted to the first batch of work to imprint the first work. A method for laser-printing a work object according to claim 12, wherein the generating the compensation factor further comprises: guiding a laser beam to a calibration template in a first state through a light guiding member Forming a correction mark, wherein the first state corresponds to a first Page 31 1277478 6. Applying a patent range group coordinate; detecting, by the light guiding member, a visible light beam of the first correction mark in a second state, wherein the second state corresponds to a second set of coordinates; and determining the The difference between the first set and the second set of coordinates determines the compensation factor. 1 4 . The method of laser-printing a work object according to claim 12, further comprising: loading at least one subsequent work object on the platform and the first work object; determining the first work a first position of the object; marking the first work object; determining a second position of the at least one subsequent work item; and marking the at least one subsequent work item. Page 32