CN105785304B - For calibrating the standard component in piece high value resistor measuring system - Google Patents
For calibrating the standard component in piece high value resistor measuring system Download PDFInfo
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- CN105785304B CN105785304B CN201610307574.2A CN201610307574A CN105785304B CN 105785304 B CN105785304 B CN 105785304B CN 201610307574 A CN201610307574 A CN 201610307574A CN 105785304 B CN105785304 B CN 105785304B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
- G01R35/005—Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references
- G01R35/007—Standards or reference devices, e.g. voltage or resistance standards, "golden references"
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Abstract
The standard component that the present invention provides a kind of for calibrating in piece high value resistor measuring system, is related to field of measuring techniques.The standard component of the present invention includes substrate, boron ion is injected on substrate, it is equipped on the substrate of injection boron ion several to metal electrode, a separate unit is constituted per a pair of metal electrodes, the height of all metal electrodes on the same substrate is identical with length, the spacing between two electrodes of metal electrode in different separate units is equal, and it is in that increasing or decreasing arranges that the width of metal electrode, which is since one end of the row and column of same substrate,；Depending on the target resistance value that the appearance and size of substrate and the appearance and size of metal electrode and number are calibrated as needed.Standard component proposed by the present invention has good repeatability and long-time stability, can meet the needs of high value resistor measuring system measurement and calibration, it is ensured that magnitude is precisely consistent.
Description
Technical field
The present invention relates to field of measuring techniques, specifically a kind of standard for calibrating in piece high value resistor measuring system
Part.
Background technology
It can carry out measuring in piece high value resistor in piece high value resistor measuring system, be usually used in semiconductor, microelectron-mechanical
In the industries such as system (MEMS), wafer, bare chip etc. are tested, whether the high value resistor for investigating tested specific structure is full
Sufficient design requirement.
Piece high value resistor measuring system typical structure as shown in figure 3, by high value resistor measuring instrument, probe station and
Cable is constituted.Wherein, probe station has for carrying tested pallet and to realize the probe system measured in piece；High level electricity
Resistance measuring instrument has the function of high value resistor measurement；Cable connects high value resistor measuring instrument with probe station.
High value resistor measurement is usually used in judging whether the insulation characterisitic between product specific structure meets product design requirement,
The accuracy that high value resistor measures is significant to product test.
By taking the wafer built-in testing of MEMS capacitance accelerometer products as an example.Wafer built-in testing is that MEMS sensor product is entire
Essential important link in technological process.This is all complete in chip manufacturing process between preceding road and postchannel process
Before Cheng Hou, encapsulation, the parameter of the MEMS chip on wafer is tested one by one and screening, is monitoring processing quality and yield rate
Most important and most direct test stage.By MEMS wafer built-in testing, the core for being unsatisfactory for index request on the one hand can be rejected
Piece avoids it from entering next working link.The encapsulation of MEMS device and testing cost account for about the 70% of totle drilling cost, if will be without
The chip of screening, which direct plunges into postchannel process, can lead to the significant wastage of cost；Another aspect test data plays the control of technique
To critical directive function, important reference data can be provided for the design of MEMS product and the improvement of manufacturing process,
To effectively improve production efficiency, shorten the lead time, saves valuable time, manpower and resources for research.Typical capacitance adds
Accelerometer structure is as shown in Figure 4, Figure 5, is comb structure.Fixation is interdigital and activity is interdigital to convert the variation of extraneous non electrical quantity
At the variation of capacitance, the measurement for physical quantitys such as acceleration.Its a, c point-to-point transmission and b, c point-to-point transmission answer mutual insulating, if
Insulation performance is unsatisfactory for requiring, and product may be caused to overheat, and short circuit can occur when serious causes product to burn.Therefore, in piece height
The accuracy of value resistance measuring system has very important meaning to product quality.
In view of the accuracy in piece high value resistor measuring system to the significance of product quality, need to such system into
Row measurement and calibration realizes tracing to the source in piece high value resistor magnitude, it is ensured that magnitude is accurate, consistent.
Prior art scenario is as follows：
The technological means and product being disclosed cannot achieve to the measurement and calibration in piece high value resistor measuring system, mesh
Preceding common way is that system is decoupled metering or is verified using standard sample, but both means cannot achieve ginseng
Number is traced to the source, and is achieved the purpose that magnitude is accurate, consistent, is specifically described separately below.
One, partition metering, is that will dismantle to count respectively in each component part of piece high value resistor measuring system
Amount.According to the common recognition of metering field, whole metering is better than dismantling metering, this is because whole metering is more close to the work of system
State, simultaneously because belonging to precision equipment in piece high value resistor measuring system, complicated, dismantling repeatedly is easy to influence systematicness
Energy.On the other hand, also can measurement and calibration individually be carried out to probe station without published technological means at present.
Two, it is verified using standard sample, is to choose the preferable product of stability as standard sample, regular use exists
Piece high value resistor measuring system measurement standard sample, to verify the stability of system.Further, it is also possible to using standard sample more
Platform is compared between piece high value resistor measuring system, confirmatory measurement result consistency.But due to the high value resistor of product
Source is often insulation resistance, and design object does not account for the stability and repeatability of resistance value, leads to the resistance value of standard sample
Measurement reproducibility it is often poor, and be easy by environmental influence, long-time stability are also unable to reach measurement and calibration field
It is required that level.
To sum up, existing public technology can not solve the calibration problem in piece high value resistor measuring system.
Invention content
The standard that technical problem to be solved by the invention is to provide a kind of for calibrating in piece high value resistor measuring system
Part and preparation method thereof, the standard component have good repeatability and long-time stability, can meet high value resistor measuring system
The needs of measurement and calibration realize tracing to the source in piece high value resistor measuring system, it is ensured that magnitude is precisely consistent.
In order to solve the above technical problems, the technical solution used in the present invention is：One kind is for calibrating in piece high value resistor
The standard component of measuring system, including substrate, inject boron ion on substrate, are equipped on the substrate of injection boron ion several to being in
The metal electrode of array arrangement constitutes a separate unit, all metals on the same substrate per a pair of metal electrodes
The height of electrode is identical with length, and spacing, the metal in different separate units are equipped between two electrodes of a pair of metal electrodes
Spacing between two electrodes of electrode is equal, and the width of each pair of metal electrode is all different, and the width of metal electrode is from same
One end of the row and column of one substrate starts to arrange in increasing or decreasing；Wherein, the appearance and size of substrate and the shape of metal electrode
Depending on the target resistance value that size and number are calibrated as needed.
Further technical solution, substrate are made of GaAs materials.
Further technical solution, metal electrode are made of Au.
Further technical solution is arranged with the areas Jie Yin on the outside of each pair of metal electrode.
Further technical solution, the height and material in the areas Jie Yin are identical as metal electrode.
Further technical solution, when target resistance value is 1G Ω, the height of all metal electrodes is 200 μm and keeps not
Become, 4 μm of spacing between two electrodes of each pair of metal electrode remains unchanged, metal electrode width alternation between 10 μm~400 μm.
A kind of preparation method for calibrating in the standard component of piece high value resistor measuring system includes the following steps：
A, substrate is made using GaAs materials；
B, boron ion is injected on substrate；
C, the metal electrode being arranged in array is generated on the substrate of injection boron ion；
D, the resistance value in each unit module is calibrated with scaling system, obtains the standard electric resistance value that can be traced to the source；
E, the resistance value of duplicate measurements each unit module, the resistance value for selecting the desired value calibrated with needs closest is as mark
Quasi- part.
It is using advantageous effect caused by above-mentioned technical proposal：The present invention utilizes semiconductor technology, is produced on piece shape
The high value resistor standard component of formula, the target resistance value that resistance value can measure as needed are designed, have it is good repeatability and
Long-time stability can meet the needs of high value resistor measuring system measurement and calibration, realize tracing to the source in piece high value resistor, it is ensured that
Magnitude is accurate, consistent.
Description of the drawings
Fig. 1 is the structural schematic diagram of one embodiment of the invention；
Fig. 2 is the structural schematic diagram of a pair of metal electrodes of the present invention；
Fig. 3 is typically in the structure principle chart of piece high value resistor measuring system；
Fig. 4 is the structure chart of typical capacitance accelerometer；
Fig. 5 is structure chart when Fig. 4 accelerates；
In figure：1, substrate；2, metal electrode；3, the areas Jie Yin；4, fixed tooth；5, supporting beam；6, mass block.
Specific implementation mode
The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.
Standard component proposed by the present invention for calibrating in piece high value resistor measuring system is capable of providing standard high level electricity
Resistance, the resistance value can be traceable to high value resistor National primary standard, for the measurement and calibration in piece high value resistor measuring system, realize
Piece high value resistor is traced to the source, it is ensured that the measurement result of piece high value resistor measuring system is accurate, consistent.
As an embodiment of the present invention, be given below a kind of target resistance value 1G Ω in piece high value resistor standard component side
Case, as shown in Figure 1 and Figure 2.
Substrate 1 is made of GaAs materials, and by injecting boron ion on GaAs substrates 1, destroys the original crystalline substances of GaAs
Lattice reduce leakage current, as high dielectric substrate 1 to significantly increase the insulating properties of material.Then in the height insulation prepared
On substrate 1, metal electrode 2 is made using Au, wherein each pair of metal electrode constitutes a separate unit, avoids difference to metal
Influence between electrode；2 height of metal electrode is 200 μm and remains unchanged, to be remained unchanged away from 4 μm between metal electrode 2, metal electricity
2 width of pole changes between 10 μm~400 μm.Wherein the areas Jie Yin 3, the material in the areas Jie Yin 3 are arranged in the outside of metal electrode 2
Identical as metal electrode, integrally formed with metal electrode 2, the probe of the system for acting as needing to calibrate in the areas Jie Yin 3, which provides, to be inserted
The region entered, that is, when measuring, probe is to be inserted into therefore to connect the region for drawing insertion with the areas Jie Yin 3 to make probe have, work as metal
When electrode width very little, the width in the areas Jie Yin is more than the width of metal electrode, when the width of metal electrode is larger, the areas Jie Yin with
Metal electrode it is of same size, be integrally the areas Jie Yin width from one end of the row or column of unit module becoming in increasing or decreasing
The trend of gesture, variation is identical as the trend that metal electrode changes.
Wherein, as shown in Fig. 2, herein, width refers to the length of metal electrode transverse direction, and d is labeled as in figure；Metal electricity
Spacing between pole is the e in figure；The length of metal electrode is the g in figure.
Wherein, refer to being made of probe station, measuring instrumentss and connection cables etc. in piece high value resistor measuring system, it can
Implement the measuring system in the high value resistor parameter measurement of sheet form.Small in the measured resistance of piece, electrode size is micro-
Rice magnitude, conventional interface form (such as BNC, Tri-axial) and measured material are not applicable, measure to come by probe station in piece
It completes.Probe station has microprobe, and tip dimensions are in micron to sub-micrometer scale, by the way of lower press contacts and in piece shape
The electrode of the measured resistance of formula is connected to implement to measure.
Standard component uses resistance of the scaling system between a pair of metal electrodes in each separate unit after completing
Value is calibrated, and the standard electric resistance value that can be traced to the source is obtained, and then selects wherein resistance value and 1G Ω closest as standard component
It uses.
In the present embodiment, the selection resistance value resistance close with 1G Ω is calibrated, and scaled values are 1.001G Ω, 6 surveys
The standard deviation of amount is 0.001998G Ω, and repeatability is good, disclosure satisfy that the needs in the high value calibration of piece.
The present invention includes the following steps：
A, substrate 1 is made using GaAs materials；
B, boron ion is injected on substrate 1；
C, the metal electrode 2 being arranged in array is generated on the substrate 1 of injection boron ion；
D, the resistance value in each unit module is calibrated with scaling system, obtains the standard electric resistance value that can be traced to the source；
E, the resistance value of duplicate measurements each unit module, the resistance value for selecting the desired value calibrated with needs closest is as mark
Quasi- part.
The main points of invention are as follows：
1) the semi-conducting material manufacturing substrate of high resistivity is used；
2) ion implantation technique is used, the lattice of substrate material is destroyed, further increases the resistivity of substrate；
3) sputtering technology is used, various sizes of metal electrode is grown on substrate, passes through the size and phase of coordination electrode
Different resistance values are obtained to position.
The standard component is capable of providing the standard electric resistance value with traceability, and resistance value can need to be designed according to client,
Such as can be 10M Ω, 100M Ω, 2G Ω etc., the target resistance value required for different clients is different, and metal electrode therein is high
Degree, width and spacing are required to adjust.
The standard component uses high dielectric substrate so that resistance value has good repeatability and long-time stability.
Claims (6)
1. a kind of standard component for calibrating in piece high value resistor measuring system, which is characterized in that including substrate (1), in substrate
(1) boron ion is injected on, and several metal electrodes (2) to being arranged in array are equipped on the substrate (1) of injection boron ion, it is each
One separate unit, the height and length of all metal electrodes (2) on the same substrate (1) are constituted to metal electrode (2)
It spends identical, spacing is equipped between two electrodes of a pair of metal electrodes, (2) two electrodes of metal electrode in different separate units
Between spacing be equal, the width of each pair of metal electrode is all different, and the width of metal electrode (2) is from same substrate (1)
Row and column one end start in increasing or decreasing arrange；Wherein, the appearance and size of substrate (1) and the shape of metal electrode (2)
Depending on the target resistance value that size and number are calibrated as needed.
2. the standard component according to claim 1 for calibrating in piece high value resistor measuring system, which is characterized in that substrate
(1) GaAs materials are used to make.
3. the standard component according to claim 1 for calibrating in piece high value resistor measuring system, which is characterized in that metal
Electrode (2) is made of Au.
4. the standard component according to claim 1 for calibrating in piece high value resistor measuring system, which is characterized in that every
To being arranged with the areas Jie Yin (3) on the outside of metal electrode (2).
5. the standard component according to claim 1 for calibrating in piece high value resistor measuring system, which is characterized in that connect and draw
The height and material in area (3) are identical as metal electrode (2).
6. the standard component according to claim 1 for calibrating in piece high value resistor measuring system, which is characterized in that work as mesh
When mark resistance value is 1G Ω, the height of metal electrode (2) is 200 μm and remains unchanged, between two electrodes of each pair of metal electrode (2)
4 μm of spacing remains unchanged, metal electrode (2) width alternation between 10 μm~400 μm.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610307574.2A CN105785304B (en) | 2016-05-11 | 2016-05-11 | For calibrating the standard component in piece high value resistor measuring system |
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| CN201610307574.2A CN105785304B (en) | 2016-05-11 | 2016-05-11 | For calibrating the standard component in piece high value resistor measuring system |
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| CN105785304B true CN105785304B (en) | 2018-09-18 |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106526322B (en) * | 2016-10-27 | 2019-04-02 | 中国电子科技集团公司第十三研究所 | Can trace to the source in piece high value resistor measuring system and its source tracing method |
| CN109449135B (en) * | 2018-09-29 | 2020-09-29 | 全球能源互联网研究院有限公司 | Packaging structure of semiconductor power device and electrode of packaging structure |
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| CN101657912A (en) * | 2007-04-16 | 2010-02-24 | 罗姆股份有限公司 | Semiconductor light-emitting device and method for manufacturing the same |
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