CN205608168U - A standard component for calibrating in high worth resistance measurement system of piece - Google Patents
A standard component for calibrating in high worth resistance measurement system of piece Download PDFInfo
- Publication number
- CN205608168U CN205608168U CN201620421174.XU CN201620421174U CN205608168U CN 205608168 U CN205608168 U CN 205608168U CN 201620421174 U CN201620421174 U CN 201620421174U CN 205608168 U CN205608168 U CN 205608168U
- Authority
- CN
- China
- Prior art keywords
- metal electrode
- substrate
- standard component
- high value
- value resistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn - After Issue
Links
Abstract
The utility model discloses a standard component for calibrating in high worth resistance measurement system of piece relates to measurement technical field. The utility model discloses a standard component includes the substrate, injects the boron ion on the substrate into, is equipped with a plurality ofly to metal electrode on injecting boron ionic substrate into, and each constitutes a separate unit to metal electrode, and the all metal electrode's on same substrate height is the same with length, interval homogeneous phase between two electrodes of metal electrode in the different separate units etc. And metal electrode's width begins to be the range that increases progressively or decrease progressively from the line of same substrate and the one end of row, target resistance that the overall dimension of substrate and metal electrode's overall dimension and number were calibrated as required and deciding. The utility model provides a standard component has good repeatability and long term stability, can satisfy the high value resistance measurement measurement calibration's of system needs, ensures that the magnitude is accurate unanimous.
Description
Technical field
This utility model relates to field of measuring techniques, a kind of standard component measuring system for calibration at sheet high value resistor.
Background technology
Measuring system at sheet high value resistor can carry out measuring at sheet high value resistor, be usually used in the industry such as quasiconductor, microelectromechanical systems (MEMS), test wafer, bare chip etc., whether the high value resistor investigating tested ad hoc structure meets design requirement.
The typical structure of system is measured as it is shown on figure 3, be made up of high value resistor measuring instrument, probe station and cable at sheet high value resistor.Wherein, probe station has for carrying tested pallet and in order to realize the probe system measured at sheet；High value resistor measuring instrument has high value resistor and measures function；High value resistor measuring instrument is coupled together by cable with probe station.
Whether the insulation characterisitic that high value resistor measurement is usually used in judging between product ad hoc structure meets product design requirement, and the accuracy that high value resistor is measured is significant to product test.
As a example by the wafer of MEMS capacitance accelerometer product is tested.Wafer test is requisite important step in the whole technological process of MEMS sensor product.Between this Xiang Qian road and postchannel process, after chip manufacturing process is fully completed, before encapsulation, the parameter of the MEMS chip on wafer is tested and examination one by one, be monitoring processing quality and the most important and the most direct test stage of yield rate.By MEMS wafer built-in testing, on the one hand can reject the chip being unsatisfactory for index request, it is to avoid it enters next working link.The encapsulation of MEMS and testing cost account for the 70% of totle drilling cost, if unscreened chip being direct plungeed into postchannel process can cause the significant wastage of cost；On the other hand the control of technique is played critical directive function by test data, can be the design of MEMS product and manufacturing process improve the reference data providing important, thus it is effectively improved production efficiency, shorten the lead time, save valuable time, manpower and resources for research.Typically capacitance accelerometer structure is as shown in Figure 4, Figure 5, for comb structure.Fixing interdigital change that the change of extraneous non electrical quantity can be converted into capacitance interdigital with activity, for the measurement of the physical quantitys such as acceleration.Its a, c point-to-point transmission and b, c point-to-point transmission answer mutual insulating, if insulating properties are unsatisfactory for requirement, are likely to result in product overheated, and can be short-circuited time serious causes product to burn.Therefore, measure the accuracy of system at sheet high value resistor and product quality is had very important meaning.
In view of the significance to product quality of the accuracy in sheet high value resistor measurement system, need such system is carried out measurement and calibration, it is achieved tracing to the source of sheet high value resistor value, it is ensured that value is accurately, unanimously.
Prior art scenario is as follows:
The technological means being disclosed and product all cannot realize the measurement and calibration measuring system at sheet high value resistor, the most common way is by system partition metering or to use standard sample to verify, but both means all cannot realize parameter traces to the source, reach the purpose that value is accurate, consistent, be specifically described separately below.
One, partition metering, is to dismantle each ingredient measuring system at sheet high value resistor to measure respectively.According to the common recognition of metering field, overall metering is better than disassembling metering, and this is that simultaneously because measure system at sheet high value resistor to belong to precision equipment, structure is complicated, repeatedly disassembles and easily affects systematic function owing to the duty of system is more pressed close in entirety metering.On the other hand, published technological means is not currently also had individually probe station can be carried out measurement and calibration.
Two, use standard sample to verify, be to choose the preferable product of stability as standard sample, periodically use and measure systematic survey standard sample at sheet high value resistor, to verify the stability of system.Further, it is also possible to utilize standard sample to contrast between sheet high value resistor measurement system in multiple stage, confirmatory measurement result concordance.But, originating due to the high value resistor of product is often insulation resistance, its design object does not accounts for stability and the repeatability of resistance, the measurement reproducibility causing the resistance of standard sample is the most poor, and easily by environmental influence, long-time stability are also unable to reach the level that measurement and calibration field requires.
To sum up, existing public technology cannot solve to measure the calibration problem of system at sheet high value resistor.
Utility model content
Technical problem to be solved in the utility model is to provide a kind of standard component measuring system for calibration at sheet high value resistor, this standard component has good repeatability and long-time stability, high value resistor can be met and measure the needs of system meters calibration, realize measuring tracing to the source of system at sheet high value resistor, it is ensured that value is precisely consistent.
For solving above-mentioned technical problem, technical solution adopted in the utility model is: a kind of standard component measuring system for calibration at sheet high value resistor, including substrate, substrate injects boron ion, the substrate injecting boron ion is provided with some metal electrodes to being arranged in array, every pair of metal electrodes constitutes a separate unit, the height of all of metal electrode on the same substrate is identical with length, it is provided with spacing between two electrodes of pair of metal electrodes, the spacing between two electrodes of metal electrode in different separate units is the most equal, the width of each pair of metal electrode all differs, the width of metal electrode is to start from one end of the row and column of same substrate to arrange in increasing or decreasing；Wherein, depending on the target resistance that the overall dimensions of substrate and the overall dimensions of metal electrode and number are calibrated as required.
Further technical scheme, substrate uses GaAs material to make.
Further technical scheme, metal electrode uses Au to make.
Further technical scheme, is arranged with Jie Yin district outside every pair of metal electrode.
Further technical scheme, height and the material in Jie Yin district are identical with metal electrode.
Further technical scheme, when target resistance is 1G Ω, the height of all metal electrodes is that 200 μm keep constant, and spacing 4 μm between two electrodes of every pair of metal electrode keeps constant, and metal electrode width is alternation between 10 μm～400 μm.
Use and have the beneficial effects that produced by technique scheme: this utility model utilizes semiconductor technology, it is produced on the high value resistor standard component of sheet form, the target resistance that resistance can be measured as required is designed, there are good repeatability and long-time stability, high value resistor can be met and measure the needs of system meters calibration, realize tracing to the source at sheet high value resistor, it is ensured that value is accurately, unanimously.
Accompanying drawing explanation
Fig. 1 is the structural representation of one embodiment of this utility model；
Fig. 2 is the structural representation of this utility model pair of metal electrodes；
Fig. 3 is the structure principle chart typically measuring system at sheet high value resistor；
Fig. 4 is the structure chart of typical capacitance accelerometer；
Fig. 5 is Fig. 4 structure chart when accelerating；
In figure: 1, substrate；2, metal electrode；3, Jie Yin district；4, fixing tooth；5, support beam；6, mass.
Detailed description of the invention
With detailed description of the invention, this utility model is described in further detail below in conjunction with the accompanying drawings.
The standard component of the system of measuring at sheet high value resistor for calibration that the utility model proposes, standard high value resistor can be provided, this resistance can be traceable to high value resistor National primary standard, for measuring the measurement and calibration of system at sheet high value resistor, realize tracing to the source at sheet high value resistor, it is ensured that sheet high value resistor measures the measurement result of system accurately, unanimously.
As an embodiment of the present utility model, be given below a kind of target resistance 1G Ω in sheet high value resistor standard component scheme, as shown in Figure 1 and Figure 2.
Substrate 1 uses GaAs material to make, and by injecting boron ion on GaAs substrate 1, destroys the original lattice of GaAs, thus be obviously enhanced the insulating properties of material, reduces leakage current, as high dielectric substrate 1.Then in the high dielectric substrate 1 prepared, using Au to make metal electrode 2, wherein, every pair of metal electrode constitutes a separate unit, it is to avoid different on the impact between metal electrode；Metal electrode 2 height is that 200 μm keep constant, is to keep constant away from 4 μm between metal electrode 2, and metal electrode 2 width changes between 10 μm～400 μm.Wherein the outside at metal electrode 2 is arranged with Jie Yin district 3, the material in Jie Yin district 3 is identical with metal electrode, it is integrally formed with metal electrode 2, the probe acting as needing the system of calibration in Jie Yin district 3 provides the region inserted, when i.e. measuring, probe is to insert and Jie Yin district 3, therefore, the region drawing insertion is connect for making probe have, when metal electrode width is the least, the width in Jie Yin district is more than the width of metal electrode, when the width of metal electrode is bigger, Jie Yin district is identical with the width of metal electrode, the width in overall Shi Jieyin district is the trend of increasing or decreasing from one end of the row or column of unit module, the trend of its change is identical with the trend that metal electrode changes.
Wherein, as in figure 2 it is shown, herein, width refers to the length that metal electrode is horizontal, is labeled as d in figure；Spacing between metal electrode is the e in figure；G in a length of figure of metal electrode.
Wherein, measure system at sheet high value resistor refer to by probe station, measuring instruments and connect what cable etc. was constituted, it is possible to be implemented in the measurement system of the high value resistor parameter measurement of sheet form.Little at the measured resistance volume of sheet, its electrode size is in micron dimension, and conventional interface shape (such as BNC, Tri-axial) and measured material are the most inapplicable, measures at sheet and completes by probe station.Probe station has microprobe, and its tip dimensions, at micron to sub-micrometer scale, uses the mode of lower press contacts to be connected with the electrode of the measured resistance in sheet form thus implements to measure.
Standard component uses scaling system to calibrate the resistance value between the pair of metal electrodes in each separate unit after completing, and obtains the standard electric resistance that can trace to the source, then select wherein resistance and 1G Ω closest to use as standard component.
In the present embodiment, the resistance selecting resistance close with 1G Ω is calibrated, and scaled values is 1.001G Ω, and the standard deviation that 6 times are measured is 0.001998G Ω, and repeatability is good, it is possible to meet the needs at sheet height value calibration.
This utility model comprises the following steps:
A, employing GaAs material make substrate 1；
B, on substrate 1 injection boron ion；
C, inject boron ion substrate 1 on generate the metal electrode 2 being arranged in array；
D, with scaling system, the resistance value in each unit module is calibrated, obtain the standard electric resistance that can trace to the source；
E, the resistance of repeated measure each unit module, select with need calibration desired value closest to resistance as standard component.
The main points of utility model are as follows:
1) the semi-conducting material manufacturing substrate of high resistivity is used；
2) use ion implantation technique, destroy the lattice of backing material, improve the resistivity of substrate further；
3) use sputtering technology, at the various sizes of metal electrode of Grown, obtain different resistance with relative position by controlling the size of electrode.
This standard component can provide the standard electric resistance with traceability, resistance can need to be designed according to client, can be such as 10M Ω, 100M Ω, 2G Ω etc., the target resistance for different customer requirements be different, and metal electrode height therein, width and spacing are required to adjust.
This standard component uses high dielectric substrate so that resistance has good repeatability and long-time stability.
Claims (6)
1. the standard component measuring system for calibration at sheet high value resistor, it is characterized in that, including substrate (1), at substrate (1) upper injection boron ion, the substrate (1) injecting boron ion is provided with some to the metal electrode being arranged in array (2), every pair of metal electrodes (2) constitutes a separate unit, the height of all of metal electrode (2) on same substrate (1) is identical with length, it is provided with spacing between two electrodes of pair of metal electrodes, the spacing between (2) two electrodes of metal electrode in different separate units is the most equal, the width of each pair of metal electrode all differs, the width of metal electrode (2) is to start from one end of the row and column of same substrate (1) to arrange in increasing or decreasing；Wherein, depending on the target resistance that the overall dimensions of substrate (1) and the overall dimensions of metal electrode (2) and number are calibrated as required.
The standard component measuring system for calibration at sheet high value resistor the most according to claim 1, it is characterised in that substrate (1) uses GaAs material to make.
The standard component measuring system for calibration at sheet high value resistor the most according to claim 1, it is characterised in that metal electrode (2) uses Au to make.
The standard component measuring system for calibration at sheet high value resistor the most according to claim 1, it is characterised in that be arranged with Jie Yin district (3) in every pair of metal electrode (2) outside.
The standard component measuring system for calibration at sheet high value resistor the most according to claim 1, it is characterised in that height and the material of Jie Yin district (3) are identical with metal electrode (2).
The standard component measuring system for calibration at sheet high value resistor the most according to claim 1, it is characterized in that, when target resistance is 1G Ω, the height of metal electrode (2) is that 200 μm keep constant, spacing 4 μm between two electrodes of every pair of metal electrode (2) keeps constant, and metal electrode (2) width is alternation between 10 μm～400 μm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620421174.XU CN205608168U (en) | 2016-05-11 | 2016-05-11 | A standard component for calibrating in high worth resistance measurement system of piece |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620421174.XU CN205608168U (en) | 2016-05-11 | 2016-05-11 | A standard component for calibrating in high worth resistance measurement system of piece |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205608168U true CN205608168U (en) | 2016-09-28 |
Family
ID=56966694
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620421174.XU Withdrawn - After Issue CN205608168U (en) | 2016-05-11 | 2016-05-11 | A standard component for calibrating in high worth resistance measurement system of piece |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205608168U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105785304A (en) * | 2016-05-11 | 2016-07-20 | 中国电子科技集团公司第十三研究所 | Standard part for calibrating on-chip high-value resistor measurement system, and preparation method for standard part |
| CN108680111A (en) * | 2018-06-08 | 2018-10-19 | 东莞塔菲尔新能源科技有限公司 | A kind of reference substance for pole piece tilted object, preparation method and applications method |
-
2016
- 2016-05-11 CN CN201620421174.XU patent/CN205608168U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105785304A (en) * | 2016-05-11 | 2016-07-20 | 中国电子科技集团公司第十三研究所 | Standard part for calibrating on-chip high-value resistor measurement system, and preparation method for standard part |
| CN105785304B (en) * | 2016-05-11 | 2018-09-18 | 中国电子科技集团公司第十三研究所 | For calibrating the standard component in piece high value resistor measuring system |
| CN108680111A (en) * | 2018-06-08 | 2018-10-19 | 东莞塔菲尔新能源科技有限公司 | A kind of reference substance for pole piece tilted object, preparation method and applications method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104502878B (en) | Microwave GaAs substrate is in piece S parameter microstrip line TRL calibrating devices | |
| CN205608168U (en) | A standard component for calibrating in high worth resistance measurement system of piece | |
| CN106098582B (en) | Calibration is used in chip capacitor standard component and preparation method thereof | |
| CN203133171U (en) | Testing device for testing wafer of electronic circuit | |
| CN107345986B (en) | Impedance testing method in de-embedding mode | |
| EP3519836B1 (en) | Probe systems and methods | |
| DE102009030471A1 (en) | Chuck for receiving and holding a test substrate and a calibration substrate | |
| CN105785304B (en) | For calibrating the standard component in piece high value resistor measuring system | |
| CN107636476A (en) | Support more pin probes of execution parallel measurement | |
| EP2647041B1 (en) | Method and device for measuring a microelectromechanical semiconductor component | |
| CN103418924B (en) | Modularized array electrode of precision simulate welded joint and manufacturing method thereof | |
| CN101009268A (en) | Base board and its electric test method | |
| KR100600482B1 (en) | test probe for semiconductor package | |
| CN104678339B (en) | Calibration device, system and method for probe type microwave voltage measurement system | |
| CN208847794U (en) | A kind of micro- inductance measurement device | |
| CN106526322B (en) | Can trace to the source in piece high value resistor measuring system and its source tracing method | |
| CN105021865A (en) | A voltage measurement method allowing compensation | |
| CN105928451B (en) | A kind of multiple rows of combination probe moving displacement test macro | |
| US9702906B2 (en) | Non-permanent termination structure for microprobe measurements | |
| KR20070049939A (en) | Manufacturing method of the sensor for liquid concentration measurement and sensor thereof | |
| CN102072990A (en) | Ageing detection device for laser | |
| KR20040053657A (en) | A method for measuring a dielectric constant of a printed circuit board for RIMM | |
| CN206177407U (en) | Continuous charge level indicator of components of a whole that can function independently electrode | |
| US20080094083A1 (en) | Versatile materials probe | |
| CN202631590U (en) | Multi-probe device for manual probe table |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20160928 Effective date of abandoning: 20180918 |