CN105783780B - A kind of unconventional sub-aperture stitching interferometer detection device of free form surface and method - Google Patents
A kind of unconventional sub-aperture stitching interferometer detection device of free form surface and method Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
Abstract
The invention discloses a kind of unconventional sub-aperture stitching interferometer detection device of free form surface and methods.The current effect that undertakes of most of freeform optics surfaces in optical system be mainly to provide or correction unit split axle on or the characteristics of off-axis aberration.The non-spherical wavefront that the present invention is emitted using nonzero digit interference system is as reference, the detection interference pattern of free form surface is divided into unconventional sub-aperture shape according to its shape feature, parameter configuration is divided according to model sub-aperture simultaneously and tests mechanism parameter, and then orthogonal polynomial is derived according to sub-aperture shape and carries out wavefront fitting, splice unified face shape eventually by synchronous reverse optimization restructing algorithm.The invention avoids resolution ratio caused by typical round or annular sub-aperture to waste, and reduces sub-aperture number, and the unconventional sub-aperture stitching of free form surface may be implemented.
Description
Technical field
The invention belongs to the detection technique field of free form surface more particularly to a kind of unconventional sub-aperture stitchings of free form surface
Interference checking device and method.
Background technology
Freeform optics surface pointedly can provide or correct on different axis or outside axis because its surface degree of freedom is larger
Aberration, while meeting contemporary optics system high-performance, the requirement of lightweight and micromation, to gradually start to become contemporary optics
The new lover of engineering field.Although in design, processing and detection etc. stable development, imaging field is for optical element face
The high-precision requirement of shape but limits the large-scale application of free form surface.In particular, the detection technique of free form surface has become system
The about most important factor of its application.
Currently, the detection method of free form surface is broadly divided into contact and contactless.Optics after polishing is certainly
The superhigh precision of measurement is required by curved surface and must be taken into account between measurement accuracy and measurement range in detection process
Contradiction makes traditional contact type measurement cannot achieve.The non-contact detection method of freeform optics surface mainly has the summer
Gram-Hartmann sensor method, phase deviation art and interferometry etc..Although Shack-Hartmann sensor can reach one
Very high measurement accuracy but its dynamic range is limited by lenslet dimension, and detects energy for the free form surface of big bias
Power is insufficient.Phase deviation art is stronger for the detectability of industrial free form surface, and for the inspection of high-precision optical free form surface
It is still limited to survey precision.Interferometry is as one of highest detection means of current precision, and in optical flat, spherical surface is
It has obtained unanimously generally acknowledging to aspherical detection field.By means of the compensator specially designed, high-precision zero-bit may be implemented
Interference detection, but the design of zero compensation machine, detection and adjustment can all introduce error.And it is irregular for those, non-rotating
Symmetrical freeform optics surface can not then be compensated by traditional zero compensation machine at all, it is necessary to special CGH is used,
And the high cost of CGH elements processing, it is highly difficult and the characteristics such as being relatively difficult to adjust makes its measurement range and measurement accuracy be limited
System.
Based on above-mentioned problem, sight has been turned to sub-aperture stitching technology by people, although CSSI and ASSI is in heavy caliber ball
The characteristics of high measurement accuracy being showed in face and the aspherical detection of moderate, but due to its sub-aperture feature so that it is non-
Application still not substantive breakthrough in the free form surface detection of rotational symmetry.
Currently, the effect that undertakes of most of freeform optics surfaces in optical system is mainly to provide or correction unit split axle
Upper or off-axis aberration, the light beam interacted therewith is substantially based on plane light wave and spherical light wave.Therefore, plane wave or ball
Single order needed for inevitable carrying system or multistage non-rotational symmetry in light wave aberration of the surface wave after free form surface reflects (transmission)
Aberration, thus the conoscope image of the wavefront and plane wave or spherical wave will also show as certain or a variety of aberration forms, without
It is completely rambling.Therefore interference detection is carried out to it using the spherical wave or aspherical wavefront of interferometer outgoing, still
Since the wavefront slope that free form surface returns not is continuous uniform distribution, slope local can exceed that interferometer range is (dry
It is very big to relate to fringe density), sub-aperture must be carried out to it divides measurement, and the surface degree of freedom of free form surface determines traditional circle
Ring shape sub-aperture divides the sub-aperture stitching interferometer measurement for no longer adapting to free form surface.
Invention content
The purpose of the present invention is in view of the deficiencies of the prior art, it is proposed that a kind of unconventional sub-aperture stitching of free form surface is dry
Relate to detection device and method.
The technical solution adopted by the present invention to solve the technical problems is as follows
A kind of unconventional sub-aperture stitching interferometer detection device of free form surface, including nonzero digit interference detection module and 6 DOF
Degree of freedom control module；
The nonzero digit interferes detection module, the collimated beam-expanding system of light pencil being emitted by frequency stabilized carbon dioxide laser expanded for
Angle pencil of ray directional light, angle pencil of ray directional light, which propagates to forward at beam-splitter, is divided into two-way light：It is propagated to forward all the way with reference to flat
Backtracking, which is used as, after the mirror of face refers to wave；Another way is returned after propagating to part zero-bit mirror forward by tested free form surface, again
Detection wave is formed after the zero-bit mirror of part；Reference wave and detection wave interfere at beam-splitter, and imaged mirror images in spy
It surveys at device；For piezoelectric ceramics, it to be used for phase shift；Nonzero digit interferes detection module；All elements are each attached on mounting plate；
The sextuple degree of freedom control module, including X, Y, Z axis guide rail, X, Y-direction pitching platform and Z axis turntable；
Wherein the sliding block of Z axis guide rail interferes the mounting plate of detection module to be fixed with nonzero digit, while Z axis guide rail is installed vertically on Y-axis and leads
On the sliding block of rail so that the element for the nonzero digit interference detection module that mounting plate is loaded can be achieved at the same time Z axis and Y direction
Two-dimension translational；Meanwhile free form surface is fixed on by clamping device on XY two dimension pitching platforms, to realize the XY for being tested free form surface
Two-dimentional pitching rotation, two-dimentional pitching platform is fixed on Z axis turntable the rotation about the z axis, it can be achieved that free form surface, and Z axis rotates
Platform is then fixed on the sliding block of X-axis guide rail；By entire sextuple degree of freedom control module, nonzero digit interference detection mould can be realized
The relative dimensional of block and tested surface translates and three-dimensional rotation；
The nonzero digit interference detection module and sextuple degree of freedom control module are fixed in marble platform.
A kind of unconventional sub-aperture stitching interferometer detection method of free form surface, specifically comprises the following steps：
Step 1 carries out nonzero digit interference detection module modeling using ray-tracing software；
Step 2, the distinguishable region shape of interference pattern locally returned according to tested free form surface divide unconventional sub-aperture
Diameter shape；
Change relative freedom between interferometer and tested free form surface in emulation, i.e. X, Y, the translation of Z-direction with turn
Dynamic, specific relative position configuration parameter change is as follows：X-direction distance Lx, Y-direction distance Ly, Z-direction distance Lz, X-direction are bowed
Elevation angle Rx, Y-direction pitch angle Ry, Z-direction rotation angle Rz realize the sub-aperture division to unified each local location, until
Sub-aperture covers unified position；
Step 3, according to sub-aperture number M, nonzero digit interference detection model is replicated, until having M model, Mei Gemo
System element in type is consistent, the difference is that the relative position between tested free form surface and nonzero digit interference detection module is joined
Number：Lx, Ly, Lz, Rx, Ry, Rz；
Step 4 configures actually detected device according to division configuration the parameter Lx, Ly, Lz, Rx, Ry, Rz of corresponding sub-aperture
In the kinematic parameter of each guide rail and pitching platform and turntable, be allowed to consistent with system model；
Step 5, the orthogonal polynomial that unconventional sub-aperture region wavefront characterization is built by Zernike multinomials；Specifically
's：According to sub-aperture shape, unconventional sub-aperture is derived using Schmidt process using Zernike circular polynomial
The orthogonal polynomial in region；
Step 6 obtains each unconventional sub-aperture wavefront interference pattern by the detection device of step 4, then carries out interference pattern
Demodulation obtains unconventional sub-aperture Wave-front phase, and it is real then to carry out unconventional sub-aperture using the orthogonal polynomial that step 5 obtains
Test wavefront fitting；
Step 7, the algorithm that reverse optimization reconstruct is synchronized by multiple aperture complete splicing, realize the unified face shape of free form surface
Detection.
The basis is tested the distinguishable region shape of interference pattern that free form surface locally returns and divides unconventional sub-aperture
Diameter shape, specific method are：The template pixel for taking 3*3 is translated along the directions interference pattern x and y, calculates template pixel central pixel point
The directional derivative of numerical value I (i, j) and adjacent 8 pixel numerical value I (m, n), maximum directional derivative are gradient G (i, j), G (i, j)
Direction is the maximum place of pixel numerical value I (i, j) change rate, shows in interference pattern to be then the normal direction of interference pattern striped；
According to the resolution definition upper frequency limit of interferometer, the region that gradient G (i, j) is less than interferometer resolution ratio is distinguishable son
Aperture area.
The specific method of the orthogonal polynomial in the described unconventional sub-aperture region of derivation is：
If { Z1,…,ZnIndicate circle domain internal standard Zernike basic functions, { V1,…,VnIt is that unconventional sub-aperture is orthogonal more
Item formula basic function, then
Qi Zhong <·>And ||||Operation indicates inner product and modular arithmetic, is defined as follows：
Wherein Ω indicates that unconventional sub-aperture region, S indicate the area of unconventional sub-aperture region Ω.
Each guide rail and the kinematic parameter of pitching platform and turntable refer to basis in the actually detected system of configuration
Relative translation between interferometer and each sub-aperture and rotation distance in emulation, are arranged X in true experimental system, Y, Z-direction
The translation distance and X of guide rail, the rotation angle of Y pitching platform and Z axis turntable are allowed to and each sub-aperture detection structure in model
Unanimously.
The orthogonal polynomial of the structure unconventional sub-aperture region wavefront characterization is mainly due to Zernike multinomials
Orthogonality is lost in unconventional sub-aperture, has not been suitable for describing wave front aberration.For this purpose, need to reconfigure new orthogonal
Wave front aberration of the multinomial for unconventional sub-aperture describes.It is main using Zernike circular polynomial as one group of complete base,
It is acquired using Schmidt process.
It is to establish majorized function based on system model that more bores, which synchronize reverse optimization algorithm, with actually measured each
A unconventional sub-aperture wavefront orthogonal coefficient Vij(i is Polynomial Terms, and j is sub-aperture number) while as an optimization target, with model
In unconventional sub-aperture wavefront orthogonal coefficient V'ijFor dependent variable, using the tested unified face shape error of free form surface as independent variable.With
Each sub-aperture corresponding X, Y, the translation distance and X of Z-direction guide rail, the rotation angle of Y pitching platform and Z axis turntable execute
Majorized function makes each unconventional sub-aperture wavefront orthogonal coefficient V&apos in model;ijLevel off to practical measurement coefficient Vij, then it is assumed that mould
The unified face shape error of free form surface is tested in type close to actual value, to obtain the unified face shape error of tested surface.
The present invention has the beneficial effect that：
Unconventional sub-aperture stitching technology is introduced free form surface detection by the present invention, according to the regional area of free form surface
The directional derivative of interference pattern all directions calculates, and to divide sub-aperture shape, and has derived the orthogonal of unconventional sub-aperture region
Multinomial is fitted for wavefront, breaches the technology hardly possible that original round or annular sub-aperture is not suitable for free form surface detection
Point realizes the interference detection of high-precision free form surface.
Description of the drawings
Fig. 1 is a kind of unconventional sub-aperture stitching interferometer detection device schematic diagram of free form surface；
Fig. 2 is the unconventional sub-aperture (fan-shaped sub-aperture) in the detection of double cone face；
Fig. 3 is unified face shape obtained by fan-shaped sub-aperture stitching
Specific implementation mode
The present invention combination Fig. 1, Fig. 2 and Fig. 3 illustrate specific implementation mode.
Fig. 1 show a kind of unconventional sub-aperture stitching interferometer detection device schematic diagram of free form surface comprising nonzero digit
Interfere detection module and sextuple degree of freedom control module.
The nonzero digit interferes detection module, the collimated beam-expanding system L2 of light pencil being emitted by frequency stabilized carbon dioxide laser L1 to be expanded
Beam is angle pencil of ray directional light, and angle pencil of ray directional light, which propagates to forward at beam-splitter L3, is divided into two-way light：It propagates to forward all the way
Backtracking, which is used as, after reference planes mirror L4 refers to wave；Another way propagates to forward after the zero-bit mirror L8 of part by being tested free form surface
L9 is returned, and detection wave is formed after again passing by part zero-bit mirror L8.Reference wave and detection wave interfere at beam-splitter L3, pass through
Imaging lens L6 is imaged at detector L7.L5 is piezoelectric ceramics, is used for phase shift.Nonzero digit interferes detection module (except tested free
Curved surface) all elements are each attached on mounting plate L10.
The sextuple degree of freedom control module, including X, Y, Z axis guide rail, X, Y-direction pitching platform and Z axis turntable.
Wherein the sliding block of Z axis guide rail L11 interferes the mounting plate L10 of detection module to fix with nonzero digit, while Z axis guide rail is installed vertically on
On the sliding block of Y-axis guide rail L12 so that the element for the nonzero digit interference detection module that mounting plate L10 is loaded can be achieved at the same time Z
The two-dimension translational of axis and Y direction.Meanwhile free form surface L9 is fixed on by clamping device on XY two dimension pitching platforms L13, to realize
The XY two dimension pitching rotation of tested free form surface L9, two-dimentional pitching platform L13 are fixed on Z axis turntable L14, it can be achieved that freely bent
The rotation about the z axis of face L9, and Z axis turntable L14 is then fixed on the sliding block L15 of X-axis guide rail.Pass through entire sextuple degree of freedom control
Molding block can realize relative dimensional translation and the three-dimensional rotation of nonzero digit interference detection module and tested surface L9.
The nonzero digit interference detection module and sextuple degree of freedom control module are fixed on marble platform L16.
The unconventional sub-aperture stitching interferometer detection method of the free form surface, specifically comprises the following steps：
Step 1 carries out nonzero digit interference detection module modeling using ray-tracing software.
Step 2, the distinguishable region shape of interference pattern locally returned according to tested free form surface divide unconventional sub-aperture
Diameter shape.
The basis is tested the distinguishable region shape of interference pattern that free form surface locally returns and divides unconventional sub-aperture
Diameter shape, specific method are：The template pixel for taking 3*3 is translated along the directions interference pattern x and y, calculates template pixel central pixel point
The directional derivative of numerical value I (i, j) and adjacent 8 pixel numerical value I (m, n), maximum directional derivative are gradient G (i, j), G (i, j)
Direction is the maximum place of pixel numerical value I (i, j) change rate, shows in interference pattern to be then the normal direction of interference pattern striped.
According to the resolution definition upper frequency limit of interferometer, the region that gradient G (i, j) is less than interferometer resolution ratio is distinguishable son
Aperture area.
Change relative freedom between interferometer and tested free form surface in emulation, i.e. X, Y, the translation of Z-direction with turn
Dynamic, specific relative position configuration parameter change is as follows：X-direction distance Lx, Y-direction distance Ly, Z-direction distance Lz, X-direction are bowed
Elevation angle Rx, Y-direction pitch angle Ry, Z-direction rotation angle Rz realize the sub-aperture division to unified each local location, until
Sub-aperture covers unified position.
Step 3, according to sub-aperture number M, nonzero digit interference detection model is replicated, until having M model, Mei Gemo
System element in type is consistent, the difference is that the relative position between tested free form surface and nonzero digit interference detection module is joined
Number：Lx, Ly, Lz, Rx, Ry, Rz.
Step 4 configures actually detected device according to division configuration the parameter Lx, Ly, Lz, Rx, Ry, Rz of corresponding sub-aperture
In the kinematic parameter of each guide rail and pitching platform and turntable, be allowed to consistent with system model；
Step 5, the orthogonal polynomial that unconventional sub-aperture region wavefront characterization is built by Zernike multinomials；Specifically
's：According to sub-aperture shape, unconventional sub-aperture is derived using Schmidt process using Zernike circular polynomial
The orthogonal polynomial in region.
The specific method of the orthogonal polynomial in the described unconventional sub-aperture region of derivation is：
If { Z1,…,ZnIndicate circle domain internal standard Zernike basic functions, { V1,…,VnIt is that unconventional sub-aperture is orthogonal more
Item formula basic function, then
Qi Zhong <·>And ||||Operation indicates inner product and modular arithmetic, is defined as follows：
Wherein Ω indicates that unconventional sub-aperture region, S indicate the area of unconventional sub-aperture region Ω.
Step 6 obtains each unconventional sub-aperture wavefront interference pattern by the detection device of step 4, then carries out interference pattern
Demodulation obtains unconventional sub-aperture Wave-front phase, and it is real then to carry out unconventional sub-aperture using the orthogonal polynomial that step 5 obtains
Test wavefront fitting；
Step 7, the algorithm that reverse optimization reconstruct is synchronized by multiple aperture complete splicing, realize the unified face shape of free form surface
Detection.
Embodiment
The example that the present invention is applied to the unconventional sub-aperture stitching interferometer detection of free form surface is described as follows.
Tested free form surface is double cone face, and equation is
Fig. 1 is the unconventional sub-aperture stitching interferometer detection device figure of free form surface, and optical maser wavelength is λ=632.8nm,
In, rx=239.8mm, ry=240.2mm, kx=-1.2, ky=-0.8.The collimated expansion of light pencil of frequency stabilized carbon dioxide laser L1 outgoing
Beam system L2 is expanded as angle pencil of ray directional light, and directional light, which propagates to forward at beam-splitter L3, is divided into two-way light.All the way forward
Backtracking is used as with reference to wave after propagating to reference planes mirror L4；Another way propagates to forward after the zero-bit mirror L8 of part by being tested certainly
It is returned by curved surface L9, enters to be formed detection wave after again passing by part zero-bit mirror L8.The two interferes at beam-splitter L3, through at
As mirror L6 is imaged at detector L7.
System model is established, the sub-aperture started in model divides, and division result is four fan-shaped sub-apertures, wherein sub-aperture
Diameter 1 and sub-aperture 2 correspond to a position, and configuration parameter is Lx=0, Ly=0, Lz=301.3mm, Rx=0, Ry=0, Rz
=0；Sub-aperture 3 and sub-aperture 4 correspond to a position, and configuration parameter is Lx=0, Ly=0, Lz=302.1722mm, Rx
=0, Ry=0, Rz=0；Pay attention to the fore-and-aft distance between Lz expression tested surfaces and part zero-bit mirror here.Corresponding four fans
Shape sub-aperture is respectively as shown in Fig. 2, sub-aperture parameter is as shown in table 1.
The fan-shaped sub-aperture of table 1 divides parameter
System model is divided into 2 models (because each model can divide two sub-aperture herein according to sub-aperture number 4
Diameter), the system element in each model is consistent, unlike tested relative position ginseng between free form surface and interference system
It is different to only have Lz as shown in table 1, between two models for number.
The orthogonal polynomial of sector region is derived, as shown in table 2.Interference pattern is carried out respectively to 4 sub-apertures shown in Fig. 2
Demodulation, then fitting of a polynomial is carried out, fitting coefficient is as shown in table 3.
2 sector region orthogonal polynomial of table
Table 3 tests wavefront orthogonal coefficient in fan-shaped sub-aperture region
It is to establish majorized function based on system model that more bores, which synchronize reverse optimization algorithms, with it is actually measured it is each very
Advise sub-aperture wavefront orthogonal coefficient Vij(1≤i≤15,1≤j≤4) while as an optimization target, by unconventional sub-aperture in model
Wavefront orthogonal coefficient V'ijIt is set as dependent variable, the Zernike multinomials to be tested the unified face shape error of free form surface are from change
Amount.With the corresponding X of each sub-aperture, Y, the translation distance and X of Z-direction guide rail, the rotation angle of Y pitching platform and Z axis turntable：
Lx=0, Ly=0, Lz=302.1722mm, Rx=0, Ry=0, Rz=0 are the constraint of each sub-aperture detection model, are executed excellent
Change function and makes each unconventional sub-aperture wavefront orthogonal coefficient V&apos in model;ijLevel off to practical measurement coefficient Vij, then it is assumed that model
In be tested the unified face shape error of free form surface close to actual value, to obtain the unified face shape error of tested surface, such as Fig. 3 institutes
Show.
Claims (3)
1. a kind of unconventional sub-aperture stitching detection method of free form surface, it is characterised in that specifically comprise the following steps：
Step 1 carries out nonzero digit interference detection module modeling using ray-tracing software；
Step 2, the distinguishable region shape of interference pattern locally returned according to tested free form surface divide unconventional sub-aperture shape
Shape；
Change the relative freedom between interferometer and tested free form surface in emulation, i.e. X, Y, the translation and rotation of Z-direction, tool
The relative position configuration parameter change of body is as follows：X-direction distance Lx, Y-direction distance Ly, Z-direction distance Lz, X-direction pitch angle
Rx, Y-direction pitch angle Ry, Z-direction rotation angle Rz are realized and are divided to the sub-aperture of unified each local location, until sub-aperture
Diameter covers unified position；
Step 3, according to sub-aperture number M, nonzero digit interference detection model is replicated, until having M model, in each model
System element it is consistent, unlike relative position parameter between tested free form surface and nonzero digit interference detection module：Lx,
Ly, Lz, Rx, Ry, Rz；
Step 4 configures in actually detected device respectively according to division configuration the parameter Lx, Ly, Lz, Rx, Ry, Rz of corresponding sub-aperture
The kinematic parameter of a guide rail and pitching platform and turntable is allowed to consistent with system model；
Step 5, the orthogonal polynomial that unconventional sub-aperture region wavefront characterization is built by Zernike multinomials；Specifically：Root
According to sub-aperture shape, unconventional sub-aperture region is derived using Schmidt process using Zernike circular polynomial
Orthogonal polynomial；
Step 6 obtains each unconventional sub-aperture wavefront interference pattern by the detection device of step 4, then carries out interference pattern demodulation
Unconventional sub-aperture Wave-front phase is obtained, then carrying out unconventional sub-aperture using the orthogonal polynomial that step 5 obtains tests wave
Preceding fitting；
Step 7, the algorithm that reverse optimization reconstruct is synchronized by multiple aperture complete splicing, realize the unified face shape inspection of free form surface
It surveys；
The basis is tested the distinguishable region shape of interference pattern that free form surface locally returns and divides unconventional sub-aperture shape
Shape, specific method are：The template pixel for taking 3*3 is translated along the directions interference pattern x and y, calculates template pixel center pixel point value
The directional derivative of I (i, j) and adjacent 8 pixel numerical value I (m, n), maximum directional derivative are gradient G (i, j), the direction G (i, j)
For the maximum place of pixel numerical value I (i, j) change rate, show in interference pattern to be then the normal direction of interference pattern striped；According to
The resolution definition upper frequency limit of interferometer, the region that gradient G (i, j) is less than interferometer resolution ratio is distinguishable sub-aperture
Region；
It is to establish majorized function based on system model that the multiple aperture, which synchronizes reverse optimization algorithm, with actually measured each non-
Conventional sub-aperture wavefront orthogonal coefficient VijTarget as an optimization, with unconventional sub-aperture wavefront orthogonal coefficient V&apos in model;ijFor because
Variable, using the tested unified face shape error of free form surface as independent variable；With the corresponding X of each sub-aperture, Y, Z-direction guide rail is put down
The rotation angle of distance and X, Y pitching platform and Z axis turntable is moved, majorized function is executed and makes each unconventional sub-aperture wave in model
Preceding orthogonal coefficient V'ijLevel off to practical measurement coefficient Vij, then it is assumed that it is close that the unified face shape error of free form surface is tested in model
Actual value, to obtain the unified face shape error of tested surface.
2. the unconventional sub-aperture stitching detection method of a kind of free form surface according to claim 1, it is characterised in that described
The specific method of orthogonal polynomial in the unconventional sub-aperture region of derivation be：
If { Z1,…,ZnIndicate circle domain internal standard Zernike basic functions, { V1,…,VnIt is unconventional sub-aperture orthogonal polynomial
Basic function, then
Qi Zhong <·>And ||||Operation indicates inner product and modular arithmetic, is defined as follows：
Wherein Ω indicates that unconventional sub-aperture region, S indicate the area of unconventional sub-aperture region Ω.
3. interference detection used in the unconventional sub-aperture stitching detection method of a kind of free form surface according to claim 2
Device, it is characterised in that including nonzero digit interference detection module and sextuple degree of freedom control module；
The nonzero digit interferes detection module, and the collimated beam-expanding system of light pencil being emitted by frequency stabilized carbon dioxide laser is expanded as wide light
Beam directional light, angle pencil of ray directional light, which propagates to forward at beam-splitter, is divided into two-way light：Propagate to reference planes mirror forward all the way
Backtracking, which is used as, afterwards refers to wave, and the piezoelectric ceramics for phase shift is provided with after reference planes mirror；Another way propagates to forward portion
It is returned by tested free form surface after dividing zero-bit mirror, detection wave is formed after again passing by part zero-bit mirror；Reference wave and detection wave exist
It is interfered at beam-splitter, imaged mirror images at detector；All elements of nonzero digit interference detection module are each attached to
On mounting plate；
The sextuple degree of freedom control module, including X, Y, Z axis guide rail, X, Y-direction pitching platform and Z axis turntable；Wherein Z
The sliding block of axis rail interferes the mounting plate of detection module to be fixed with nonzero digit, while Z axis guide rail is installed vertically on the cunning of Y-axis guide rail
On block so that the element for the nonzero digit interference detection module that mounting plate is loaded can be achieved at the same time the two dimension of Z axis and Y direction
Translation；Meanwhile free form surface is fixed on by clamping device on XY two dimension pitching platforms, to realize that the XY two dimensions for being tested free form surface are bowed
Rotation is faced upward, two-dimentional pitching platform is fixed on Z axis turntable the rotation about the z axis, it can be achieved that free form surface, and Z axis turntable is then solid
It is scheduled on the sliding block of X-axis guide rail；By entire sextuple degree of freedom control module, can realize nonzero digit interference detection module and by
The relative dimensional in survey face translates and three-dimensional rotation；
The nonzero digit interference detection module and sextuple degree of freedom control module are fixed in marble platform.
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| CN106247978B (en) * | 2016-08-04 | 2019-03-05 | 中国科学院长春光学精密机械与物理研究所 | It is a kind of to remove the method and device supported in splicing detection |
| CN106802136B (en) * | 2017-01-16 | 2019-07-23 | 暨南大学 | One kind is based on the polynomial cylinder interference joining method of Legendre's Fourier and system |
| CN107883912B (en) * | 2017-11-13 | 2019-09-10 | 西安工业大学 | A kind of heavy caliber axisymmetric aspheric surface test method and device |
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| CN101709955B (en) * | 2009-11-24 | 2011-02-23 | 中国科学院长春光学精密机械与物理研究所 | Device for detecting surface shape of optical aspheric surface by sub-aperture stitching interferometer |
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| CN102661719B (en) * | 2012-04-16 | 2014-03-26 | 中国人民解放军国防科学技术大学 | Near-null compensator, surface shape measuring instrument and measuring method for matching measurement of sub-apertures of aspheric surfaces |
| JP2017513043A (en) * | 2014-02-26 | 2017-05-25 | コーニング インコーポレイテッド | A method for setting tolerances on optical surfaces using local pupil regions |
| CN103852030B (en) * | 2014-03-17 | 2016-04-27 | 南京理工大学 | For the free-curved-surface shape reconstructing method of the corrugated nonzero digit interference system that tilts |
| CN204064260U (en) * | 2014-06-16 | 2014-12-31 | 浙江大学 | A kind of optics self-focusing for free form surface topography measurement is popped one's head in |
| CN104251672B (en) * | 2014-10-13 | 2016-09-21 | 南京理工大学 | Free form surface part to be measured spatial attitude method of adjustment in nonzero digit interference system |
| CN105318847A (en) * | 2015-11-12 | 2016-02-10 | 浙江大学 | Aspheric non-zero digit circular subaperture stitching method based on system modeling |
| CN105423948B (en) * | 2015-12-14 | 2018-10-16 | 中国科学院长春光学精密机械与物理研究所 | The device of aspheric surface is detected using the stitching interferometer of distorting lens |
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