CN105760036A - Rear shadow elimination film-coating method of OGS capacitive touch screen - Google Patents
Rear shadow elimination film-coating method of OGS capacitive touch screen Download PDFInfo
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- CN105760036A CN105760036A CN201610220801.8A CN201610220801A CN105760036A CN 105760036 A CN105760036 A CN 105760036A CN 201610220801 A CN201610220801 A CN 201610220801A CN 105760036 A CN105760036 A CN 105760036A
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- touch screen
- capacitive touch
- ogs capacitive
- ogs
- film layer
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
- G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
- G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
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- General Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Human Computer Interaction (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Physical Vapour Deposition (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
The invention discloses a rear shadow elimination film-coating method of an OGS capacitive touch screen. The rear shadow elimination film-coating method of the OGS capacitive touch screen comprises the following steps: firstly washing the glass of the OGS capacitive touch screen via pure water, removing floating dust on the surface, then successively plating the washed glass of the OGS capacitive touch screen with a silicon oxide film layer and a silicon nitride film layer, wherein the thickness of the silicon oxide film layer is 20-60nm; the thickness of the silicon nitride film layer is 10-40nm. According to the rear shadow elimination film-coating method of the OGS capacitive touch screen, the pattern shadow adhered to the OGS capacitive touch screen can be eliminated by the silicon oxide film layer and the silicon nitride film layer; the transmission rate of the original OGS capacitive touch screen is increased; silicon nitride is used as the material of a shadow elimination layer, so that the situation of electric test failure of the OGS capacitive touch screen can be improved; the end of the touch screen is plated with the shadow elimination layer; meanwhile, the shadow elimination layer can replace OC protection of the conventional OGS and has an effect of protecting the OGS capacitive touch screen.
Description
Technical field
The invention belongs to electronic applications, specifically disappear after a kind of OGS capacitive touch screen shadow film plating process.
Background technology
In order to eliminate the pattern after etching ITO conducting film, meeting terminal use's vision requirement to electronic product, existing OGS capacitive touch screen screen cloth ITO electropane adopts Glass/Nb mostly2O5/SiO2/ITO、Glass/Nb2O5/SiO2/ BM/ITO or Glass/BM/Nb2O5/SiO2The frame modes such as ITO, reach the purpose of the shade formed after eliminating etching ITO, then carry out the follow-up making of capacitance touch screen.Above-mentioned three kinds of frame modes be all the shadow layer that disappears is placed on whole capacitance plate processing technology before, the shadow layer that will disappear is needed to mate with ITO layer, that is: different ITO square resistances needs the shadow layer that disappears that coupling is different, the making of follow-up OGS can not be taken into account, the shadow effect that disappears of viewfinder area and non-viewfinder area can not be taken into account simultaneously, and transmitance is also by the restriction of ITO resistance.
Summary of the invention
The technical problem to be solved disappears after being to provide a kind of OGS capacitive touch screen shadow film plating process, the method uses membranous layer of silicon oxide and silicon nitride film layer to eliminate the shade of OGS capacitive touch screen laminating, improves the transmitance of original OGS capacitive touch screen；With silicon nitride as the shadow layer material that disappears, it is possible to improve the situation that OGS capacitive touch screen electrical measurement is bad；By disappearing, shadow layer is plated in the last of touch screen, can simultaneously work as the protective effect to OGS capacitive touch screen.
For solving above-mentioned technical problem, disappear after the invention provides a kind of OGS capacitive touch screen shadow film plating process, comprises the following steps:
(1) OGS capacitive touch screen glass pure water is carried out, removes surface floating dust；
(2) on the OGS capacitive touch screen glass cleaned up, membranous layer of silicon oxide and silicon nitride film layer are plated successively；
Described OGS capacitive touch screen thickness of glass is 0.4～2.0mm；
Described silicon oxide film layer thickness is 20～60nm；
Described silicon nitride film layer thickness is 10～40nm.
The plated film mode of described membranous layer of silicon oxide adopts magnetron sputtering, intermediate frequency twin target, and coating temperature is 100～250 DEG C.
The plated film mode of described silicon nitride film layer is magnetron sputtering, intermediate frequency twin target, and coating temperature is 100～250 DEG C.
The present invention provides a kind of new shadow technology that disappears for OGS capacitive touch screen glass, it is possible to improve the apparent effect after the completely black laminating of capacitance touch screen；Use silicon oxide and silicon nitride film layer to eliminate the shade of OGS capacitive touch screen laminating, the shadow effect that disappears of window area and non-window area can be taken into account, improve the transmitance of original OGS capacitive touch screen；By disappearing, shadow layer is plated in the last of touch screen, also acts as the protective effect to OGS capacitive touch screen；Use silicon nitride as the shadow layer material that disappears, it is possible to improve the situation that OGS capacitive touch screen electrical measurement is bad.
Accompanying drawing explanation
Fig. 1 is that the band that the present invention makes disappears the OGS capacitive touch screen of shadow layer.
Detailed description of the invention
Below in conjunction with the drawings and specific embodiments, the invention will be further described.
Disappear after OGS capacitive touch screen shadow film plating process, comprises the following steps:
(1) employing level is cleaned line and OGS capacitive touch screen glass 1 is carried out pure water cleaning, removes surface floating dust；
(2) vertical continuous magnetron sputtering coating film production line is adopted to plate membranous layer of silicon oxide 2 and silicon nitride film layer 3 on the OGS capacitive touch screen glass 1 cleaned up successively, intermediate frequency twin target, coating temperature is set in 100～250 DEG C, transmission beat is 115 seconds, first use two silicon target is plated membranous layer of silicon oxide 2, sputtering power is 10～17KW, re-use another and silicon target is plated silicon nitride film layer 3, sputtering power is 5～10KW, argon flow amount 100～300scmm, oxygen flow 50～300scmm, nitrogen flow 100～300scmm, vacuum is 2.5 × 10-1～5.5 × 10-1Between Pa, successively membranous layer of silicon oxide 2 and silicon nitride film layer 3 are plated on OGS capacitive touch screen glass 1, membranous layer of silicon oxide 2 thickness obtained is 20～60nm, silicon nitride film layer 3 thickness is 10～40nm, and the disappear transmitance of OGS capacitive touch screen glass 1 of shadow layer of the increase obtained is 91.5% (550nm place).
The shadow Rotating fields that disappears that the present embodiment prepares, improves the shadow effect that disappears of OGS capacitive touch screen, improves light transmittance, reduce reflectance.
Claims (3)
- Disappear after 1.OGS capacitance touch screen shadow film plating process, it is characterised in that comprises the following steps:(1) OGS capacitive touch screen glass pure water is carried out, removes surface floating dust；(2) on the OGS capacitive touch screen glass cleaned up, membranous layer of silicon oxide and silicon nitride film layer are plated successively；Described OGS capacitive touch screen thickness of glass is 0.4～2.0mm；Described silicon oxide film layer thickness is 20～60nm；Described silicon nitride film layer thickness is 10～40nm.
- 2. disappear after OGS capacitive touch screen as claimed in claim 1 shadow film plating process, it is characterised in that: the plated film mode of described membranous layer of silicon oxide adopts magnetron sputtering, intermediate frequency twin target, and coating temperature is 100～250 DEG C.
- 3. disappear after OGS capacitive touch screen as claimed in claim 1 or 2 shadow film plating process, it is characterised in that: the plated film mode of described silicon nitride film layer is magnetron sputtering, intermediate frequency twin target, and coating temperature is 100～250 DEG C.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610220801.8A CN105760036A (en) | 2016-04-08 | 2016-04-08 | Rear shadow elimination film-coating method of OGS capacitive touch screen |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610220801.8A CN105760036A (en) | 2016-04-08 | 2016-04-08 | Rear shadow elimination film-coating method of OGS capacitive touch screen |
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| Publication Number | Publication Date |
|---|---|
| CN105760036A true CN105760036A (en) | 2016-07-13 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610220801.8A Pending CN105760036A (en) | 2016-04-08 | 2016-04-08 | Rear shadow elimination film-coating method of OGS capacitive touch screen |
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| CN (1) | CN105760036A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106756829A (en) * | 2016-12-15 | 2017-05-31 | 芜湖长信科技股份有限公司 | A kind of SiONx top layers disappear shadow technology and SiONx method for manufacturing thin film |
| CN110129750A (en) * | 2019-05-20 | 2019-08-16 | 信利光电股份有限公司 | A kind of film plating process of double shadow layers that disappear |
| CN110658947A (en) * | 2019-08-22 | 2020-01-07 | 信利光电股份有限公司 | Integrated black touch screen and manufacturing method thereof |
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| CN103699286A (en) * | 2013-12-31 | 2014-04-02 | 深圳力合光电传感股份有限公司 | Blanking manufacturing method of capacitance touch screen |
| CN204166518U (en) * | 2014-10-15 | 2015-02-18 | 福建省辉锐电子技术有限公司 | A kind of OGS capacitive touch screen |
| CN104571761A (en) * | 2014-12-30 | 2015-04-29 | 深圳南玻伟光导电膜有限公司 | Integrated capacitive touch screen and manufacturing method thereof |
| CN104656997A (en) * | 2015-03-13 | 2015-05-27 | 京东方科技集团股份有限公司 | Touch base plate and touch display device |
| CN105138200A (en) * | 2015-09-01 | 2015-12-09 | 京东方科技集团股份有限公司 | Touch screen substrate, manufacturing method of touch screen substrate, touch panel and display device |
| CN105398120A (en) * | 2015-11-13 | 2016-03-16 | 北京航玻新材料技术有限公司 | Disapparate permeability-improvement film, conductive film, conductive glass and touch screen |
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2016
- 2016-04-08 CN CN201610220801.8A patent/CN105760036A/en active Pending
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| CN103699286A (en) * | 2013-12-31 | 2014-04-02 | 深圳力合光电传感股份有限公司 | Blanking manufacturing method of capacitance touch screen |
| CN204166518U (en) * | 2014-10-15 | 2015-02-18 | 福建省辉锐电子技术有限公司 | A kind of OGS capacitive touch screen |
| CN104571761A (en) * | 2014-12-30 | 2015-04-29 | 深圳南玻伟光导电膜有限公司 | Integrated capacitive touch screen and manufacturing method thereof |
| CN104656997A (en) * | 2015-03-13 | 2015-05-27 | 京东方科技集团股份有限公司 | Touch base plate and touch display device |
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| CN105398120A (en) * | 2015-11-13 | 2016-03-16 | 北京航玻新材料技术有限公司 | Disapparate permeability-improvement film, conductive film, conductive glass and touch screen |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106756829A (en) * | 2016-12-15 | 2017-05-31 | 芜湖长信科技股份有限公司 | A kind of SiONx top layers disappear shadow technology and SiONx method for manufacturing thin film |
| CN110129750A (en) * | 2019-05-20 | 2019-08-16 | 信利光电股份有限公司 | A kind of film plating process of double shadow layers that disappear |
| CN110658947A (en) * | 2019-08-22 | 2020-01-07 | 信利光电股份有限公司 | Integrated black touch screen and manufacturing method thereof |
| CN110658947B (en) * | 2019-08-22 | 2023-04-25 | 信利光电股份有限公司 | Integrated black touch screen and manufacturing method thereof |
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Application publication date: 20160713 |