CN105698697A - 一种检测晶片基底二维形貌的装置 - Google Patents
一种检测晶片基底二维形貌的装置 Download PDFInfo
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5248889A (en) * | 1990-08-14 | 1993-09-28 | Tencor Instruments, Inc. | Laser apparatus and method for measuring stress in a thin film using multiple wavelengths |
JPH08159726A (ja) * | 1994-12-01 | 1996-06-21 | Nikon Corp | パターン検出装置 |
CN1403783A (zh) * | 2002-09-18 | 2003-03-19 | 清华大学 | 一种非球面镜顶点曲率半径测量方法及装置 |
CN101373134A (zh) * | 2008-10-24 | 2009-02-25 | 天津大学 | 一种线状激光窄带滤光psd热辐射板厚测量方法 |
CN102023068A (zh) * | 2010-10-10 | 2011-04-20 | 徐建康 | 薄膜应力测量设备及其测量方法 |
CN102620868A (zh) * | 2012-03-10 | 2012-08-01 | 中国科学院苏州纳米技术与纳米仿生研究所 | 具有垂直光路结构的薄膜应力测量装置及其应用 |
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- 2014-11-26 CN CN201410692622.5A patent/CN105698697B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5248889A (en) * | 1990-08-14 | 1993-09-28 | Tencor Instruments, Inc. | Laser apparatus and method for measuring stress in a thin film using multiple wavelengths |
JPH08159726A (ja) * | 1994-12-01 | 1996-06-21 | Nikon Corp | パターン検出装置 |
CN1403783A (zh) * | 2002-09-18 | 2003-03-19 | 清华大学 | 一种非球面镜顶点曲率半径测量方法及装置 |
CN101373134A (zh) * | 2008-10-24 | 2009-02-25 | 天津大学 | 一种线状激光窄带滤光psd热辐射板厚测量方法 |
CN102023068A (zh) * | 2010-10-10 | 2011-04-20 | 徐建康 | 薄膜应力测量设备及其测量方法 |
CN102620868A (zh) * | 2012-03-10 | 2012-08-01 | 中国科学院苏州纳米技术与纳米仿生研究所 | 具有垂直光路结构的薄膜应力测量装置及其应用 |
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Inventor after: Liu Jianpeng Inventor after: Ma Tiezhong Inventor after: Jiao Hongda Inventor after: Zhang Lifang Inventor after: Sang Yungang Inventor before: Liu Jianpeng Inventor before: Zhang Tang Inventor before: Jiao Hongda Inventor before: Zhang Lifang Inventor before: Sang Yungang |
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