CN105698698A - 一种单透镜型检测晶片基底二维形貌和温度的装置 - Google Patents
一种单透镜型检测晶片基底二维形貌和温度的装置 Download PDFInfo
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Publication number | Priority date | Publication date | Assignee | Title |
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CN114523192A (zh) * | 2022-02-16 | 2022-05-24 | 浙江大学 | 飞秒激光加工系统和三维表面形貌及温度在线测量方法 |
Citations (8)
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WO2002000963A1 (en) * | 2000-06-23 | 2002-01-03 | Steven John Ouderkirk | Selective beam deposition |
CN101275825A (zh) * | 2008-01-11 | 2008-10-01 | 浙江工业大学 | Cmp过程中晶圆下液体薄膜中间变量的测量装置 |
CN102620868A (zh) * | 2012-03-10 | 2012-08-01 | 中国科学院苏州纳米技术与纳米仿生研究所 | 具有垂直光路结构的薄膜应力测量装置及其应用 |
CN103411703A (zh) * | 2013-07-18 | 2013-11-27 | 西安交通大学 | 一种基于碲化镉量子点光致发光的非接触式测温方法 |
CN103673926A (zh) * | 2013-11-11 | 2014-03-26 | 北京理工大学 | 反射腔式共焦超大曲率半径测量方法 |
CN103733037A (zh) * | 2011-08-15 | 2014-04-16 | 富士通株式会社 | 温度分布测定装置以及温度分布测定方法 |
CN103994719A (zh) * | 2014-05-30 | 2014-08-20 | 中国科学院国家天文台南京天文光学技术研究所 | 基于盖革apd阵列的高精度三维成像装置及其使用方法 |
CN203858418U (zh) * | 2014-04-21 | 2014-10-01 | 上海兆九光电技术有限公司 | 光束均匀化装置 |
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Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2002000963A1 (en) * | 2000-06-23 | 2002-01-03 | Steven John Ouderkirk | Selective beam deposition |
CN101275825A (zh) * | 2008-01-11 | 2008-10-01 | 浙江工业大学 | Cmp过程中晶圆下液体薄膜中间变量的测量装置 |
CN103733037A (zh) * | 2011-08-15 | 2014-04-16 | 富士通株式会社 | 温度分布测定装置以及温度分布测定方法 |
CN102620868A (zh) * | 2012-03-10 | 2012-08-01 | 中国科学院苏州纳米技术与纳米仿生研究所 | 具有垂直光路结构的薄膜应力测量装置及其应用 |
CN103411703A (zh) * | 2013-07-18 | 2013-11-27 | 西安交通大学 | 一种基于碲化镉量子点光致发光的非接触式测温方法 |
CN103673926A (zh) * | 2013-11-11 | 2014-03-26 | 北京理工大学 | 反射腔式共焦超大曲率半径测量方法 |
CN203858418U (zh) * | 2014-04-21 | 2014-10-01 | 上海兆九光电技术有限公司 | 光束均匀化装置 |
CN103994719A (zh) * | 2014-05-30 | 2014-08-20 | 中国科学院国家天文台南京天文光学技术研究所 | 基于盖革apd阵列的高精度三维成像装置及其使用方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN114523192A (zh) * | 2022-02-16 | 2022-05-24 | 浙江大学 | 飞秒激光加工系统和三维表面形貌及温度在线测量方法 |
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