CN105696035A - 一种高性能填孔镀铜溶液 - Google Patents
一种高性能填孔镀铜溶液 Download PDFInfo
- Publication number
- CN105696035A CN105696035A CN201610260112.XA CN201610260112A CN105696035A CN 105696035 A CN105696035 A CN 105696035A CN 201610260112 A CN201610260112 A CN 201610260112A CN 105696035 A CN105696035 A CN 105696035A
- Authority
- CN
- China
- Prior art keywords
- copper plating
- additive
- copper
- plating additive
- solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/38—Electroplating: Baths therefor from solutions of copper
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D7/00—Electroplating characterised by the article coated
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/42—Plated through-holes or plated via connections
- H05K3/423—Plated through-holes or plated via connections characterised by electroplating method
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/07—Treatments involving liquids, e.g. plating, rinsing
- H05K2203/0703—Plating
- H05K2203/0723—Electroplating, e.g. finish plating
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electroplating And Plating Baths Therefor (AREA)
Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610260112.XA CN105696035A (zh) | 2016-04-18 | 2016-04-18 | 一种高性能填孔镀铜溶液 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201610260112.XA CN105696035A (zh) | 2016-04-18 | 2016-04-18 | 一种高性能填孔镀铜溶液 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN105696035A true CN105696035A (zh) | 2016-06-22 |
Family
ID=56217443
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201610260112.XA Pending CN105696035A (zh) | 2016-04-18 | 2016-04-18 | 一种高性能填孔镀铜溶液 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN105696035A (zh) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SU1581781A1 (ru) * | 1984-12-19 | 1990-07-30 | Днепропетровский государственный университет им.300-летия воссоединения Украины с Россией | Электролит цинковани |
CN102047438A (zh) * | 2008-05-30 | 2011-05-04 | 阿托特希德国有限公司 | 用于11(ib)族-13(iiia)族-16(via)族元素的金属、二元、三元、四元或五元合金沉积的电镀添加剂 |
CN102703939A (zh) * | 2012-06-07 | 2012-10-03 | 上海交通大学 | 甲基磺酸铜电镀液的应力消除剂及其使用方法 |
CN103290438A (zh) * | 2013-06-25 | 2013-09-11 | 深圳市创智成功科技有限公司 | 用于晶圆级封装的电镀铜溶液及电镀方法 |
CN103397354A (zh) * | 2013-08-08 | 2013-11-20 | 上海新阳半导体材料股份有限公司 | 一种用于减少硅通孔技术镀铜退火后空洞的添加剂 |
CN104532309A (zh) * | 2014-12-31 | 2015-04-22 | 上海新阳半导体材料股份有限公司 | 能控制tsv深孔镀铜结晶及生长方式的添加剂b及其用途 |
-
2016
- 2016-04-18 CN CN201610260112.XA patent/CN105696035A/zh active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SU1581781A1 (ru) * | 1984-12-19 | 1990-07-30 | Днепропетровский государственный университет им.300-летия воссоединения Украины с Россией | Электролит цинковани |
CN102047438A (zh) * | 2008-05-30 | 2011-05-04 | 阿托特希德国有限公司 | 用于11(ib)族-13(iiia)族-16(via)族元素的金属、二元、三元、四元或五元合金沉积的电镀添加剂 |
CN102703939A (zh) * | 2012-06-07 | 2012-10-03 | 上海交通大学 | 甲基磺酸铜电镀液的应力消除剂及其使用方法 |
CN103290438A (zh) * | 2013-06-25 | 2013-09-11 | 深圳市创智成功科技有限公司 | 用于晶圆级封装的电镀铜溶液及电镀方法 |
CN103397354A (zh) * | 2013-08-08 | 2013-11-20 | 上海新阳半导体材料股份有限公司 | 一种用于减少硅通孔技术镀铜退火后空洞的添加剂 |
CN104532309A (zh) * | 2014-12-31 | 2015-04-22 | 上海新阳半导体材料股份有限公司 | 能控制tsv深孔镀铜结晶及生长方式的添加剂b及其用途 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN105018977B (zh) | 一种填孔电镀整平剂、制备方法及应用该整平剂的电镀液 | |
CN111270277B (zh) | 盲孔填孔电镀工艺及采用该工艺得到的镀件、镀件的应用、电子产品 | |
TWI534304B (zh) | 銅電解電鍍浴及銅電解電鍍法 | |
JP2001200386A (ja) | ビアフィリング方法 | |
CN104244613A (zh) | 一种hdi板中金属化孔的制作方法 | |
CN110760898A (zh) | 一种锂电池用高抗拉电解铜箔制备方法 | |
CN108251869B (zh) | 镀锡液及其制备方法与应用 | |
CN105075411B (zh) | 多层配线基板的制造方法 | |
CN105316713A (zh) | 一种电镀铜溶解液及高深度盲孔快速填孔工艺 | |
CN111455416B (zh) | 一种高精密线路板高力学性能电解铜箔的制备工艺 | |
CN109989077A (zh) | 一种铜镀液 | |
KR100454270B1 (ko) | 저조도 전해동박의 제조방법 및 전해동박 | |
CN109457272A (zh) | 碱性蚀刻再生电解铜的稳定剂和电解液 | |
CN113026068A (zh) | 一种应用于晶圆先进封装领域的无氰化学镀金溶液及其镀金工艺 | |
EP1607495A1 (en) | Copper electrolytic solution containing quaternary amine compound polymer of specified skeleton and organic sulfur compound as additives and electrolytic copper foil produced therewith | |
CN103938222B (zh) | 一种从酸性蚀刻废液中回收铜的方法 | |
KR20060114588A (ko) | 고강도를 갖는 저조도 전해동박의 제조방법, 이 방법에의해 제조된 전해동박, 및 이 전해동박을 사용하여 제작한전자 부품 | |
CN108950614B (zh) | 一种vcp高效镀铜光亮剂 | |
CN113584537B (zh) | 一种带树脂层的极低粗糙度的极薄铜箔及其制造方法 | |
CN105603472B (zh) | 酸性镀铜系列添加剂 | |
TWI683931B (zh) | 電解鍍銅用陽極及使用其之電解鍍銅裝置 | |
CN105696035A (zh) | 一种高性能填孔镀铜溶液 | |
Wang et al. | Research and application of copper electroplating in interconnection of printed circuit board | |
US3812020A (en) | Electrolyte and method for electroplating an indium-copper alloy and printed circuits so plated | |
KR102339867B1 (ko) | 레벨링제 및 이를 포함하는 비아홀 충진을 위한 전기도금 조성물 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20180504 Address after: 311305 Hangzhou, Hangzhou, Zhejiang, Ling'an, Qingshan Lake Science and Technology City, Hangzhou road 618, Hangzhou, Lok Fu new Mstar Technology Ltd Applicant after: Hangzhou Loeve Mstar Technology Ltd Address before: 241000 Room 501, world garden, Tongling, Tongling, Anhui Applicant before: Cheng Minmin Applicant before: Zhang Bin Applicant before: Guo Yong |
|
TA01 | Transfer of patent application right | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20160622 |
|
WD01 | Invention patent application deemed withdrawn after publication |