CN105652354A - Polarization-independent broadband absorber based on conical metal-dielectric multilayer grating structure - Google Patents
Polarization-independent broadband absorber based on conical metal-dielectric multilayer grating structure Download PDFInfo
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Abstract
The invention relates to a polarization-independent broadband absorber which is used for infrared band and based on a conical metal-dielectric multilayer grating structure. The polarization-independent broadband absorber comprises a metal-dielectric multilayer grating, a metal film reflecting layer and a dielectric substrate which are arranged from top to bottom, wherein the period d of the metal-dielectric multilayer grating is 1640-1645 nm, the metal-dielectric multilayer grating is formed by overlaying N pairs of metal gratings and dielectric gratings, and the duty cycle is gradually increased from top to bottom. When TE light and TM polarized light are vertically incident, the incident light in one relatively broad wave band range of the infrared band can be absorbed, bandwidth with polarization-independent absorption rate exceeding 90% is greater than 2 microns, and high polarization-independent absorption can be maintained in a great incident angle range, so that the polarization-independent broadband absorber provided by the invention has great angle independence and can be widely applied to the fields of thermo-photovoltaic devices, infrared stealth and the like. The polarization-independent broadband absorber provided by the invention is processed by combining a microelectronic deep etching technology, has easy accessibility of materials, low manufacturing cost and important practical prospect, and can realize mass production.
Description
Technical field
This patent relates to broadband spectral absorber, particularly a kind of polarization independent wideband absorber based on cone-shaped metal-dielectric multilayer optical grating construction for infrared band.
Background technology
In general, spectral absorption device based on sub-wavelength structure is divided into two kinds: a kind of is have desirable absorption in narrower bandwidth, it is mainly used in designing highly sensitive detector, heat imaging device and narrow-band absorption/heat radiator, is frequently referred to selective absorbing device. Another kind is all to have significantly high absorption within the scope of wider wavestrip, is called broad band absorber, and it is mainly used in solaode, thermo-photovoltaic device and the field such as stealthy. At present, the wide band absorption research based on sub-wavelength structure is had become as a focus direction.
But current absorber suffers from absorption band width and the defect that polarizability is sensitive. In order to extend Absorber Bandwidth, one simple and efficient method is exactly adopt multiple resonance structure within a cycle of absorber, they can realize the desirable absorption of nearly 100% in respective resonance wave strong point, and their resonance wavelength very close to, Absorber Bandwidth is overlapping, thus forming wide band absorption [at first technology 1:C.Wuetal., Opt.Lett.37,308 310 (2012)]. The limited amount of the resonance unit cell owing to can mix in a sub-wavelength period, thus the bandwidth that the method is expanded remains limited. In order to further extend Absorber Bandwidth, it has been proposed that the also experimental verification concept of anisotropy Meta Materials. Cui et al. proposes a kind of zigzag anisotropy metamaterial flat TM polarization isolator, when vertical incidence, it is higher than 95%[at first technology 2:Cui, Y.etal. the bandwidth range internal absorption factor of 3 to 5.5 ��m, NanoLett.12,1443-1447 (2012)]. Ji et al. is actual achieves a hyperbolic absorber based on multiple layer metal-thin dielectric film, and its wide band absorption can freely tune [in elder generation technology 3:Ji, D.etal., Sci.Rep.4,4498 (2014)] in near-infrared and mid-infrared light spectral limit again.Zhou et al. devises a TM polarized broadband absorber based on cone-shaped metal-dielectric multilayer structure, it all has higher absorption [at first technology 4:JingZhouetal. at visible ray and infrared band, ACSPhotonics, 1 (7), 618 624 (2014)]. While it is true, these have a common defect based on the broad band absorber of one-dimensional anisotropy Meta Materials, namely they are sensitive to the polarization state of incident illumination, this greatly limits their potential application. Ding et al. proposes a kind of truncated cone pyramid ultra broadband absorber based on two-dimensional and periodic metal-dielectric multilamellar tetragon, it has the unrelated absorption of polarization of nearly 100% [at first technology 5:Ding for the light of vertical incidence in 8GHz to 14GHz scope, Fetal.Appl.Phys.Lett.100,103506 (2012)]. Liang et al. proposes a kind of Meta Materials based on two dimension pyramid and polarizes unrelated absorber, it has high wide band absorption [at first technology 6:QiuqunLiangetal. within the scope of whole infrared band, Adv.Opt.Mater.1,43 49 (2013)]. While it is true, these are based on the very difficult making of polarization independent wideband absorber of Two-Dimensional Anisotropic Meta Materials, this limits the application that it is potential equally.
Rectangular raster is to utilize micro-nano technology technique, the grating with rectangle flute profile processed on substrate. The Diffraction Problems of subwavelength grating with rectangular grooves, it is impossible to processed by simple scalar optical grating diffraction, and the Maxwell equation of vector form must be adopted and in conjunction with boundary condition, accurately solved by the computer program encoded. Moharam et al. has given the algorithm [first technology 7:M.G.Moharametal., J.Opt.Soc.Am.A.12,1077 (1995)] of rigorous coupled wave approach, it is possible to solve the Diffraction Problems of this kind of sub-wave length grating.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of polarization independent wideband absorber based on cone-shaped metal-dielectric multilayer optical grating construction for infrared band, when TE and TM polarized light vertical incidence, it will be absorbed at the incident illumination of the wider wavestrip scope of infrared band one, polarize the unrelated absorbance band more than 90% and be wider than 2 microns, and the significantly high unrelated absorption of polarization can be maintained in very big ranges of incidence angles, there is very big angle independence. Therefore, this polarization independent wideband absorber has important practical value.
The technical solution of the present invention is as follows:
A kind of polarization independent wideband absorber based on cone-shaped metal-dielectric multilayer optical grating construction for infrared band, including top-down metal-dielectric multi-layer grating, metal film reflector layer and dielectric substrate, wherein the cycle d of metal-dielectric multi-layer grating is 1640��1645 nanometers, metal grating and electrolyte grating superposition are made up of by this metal-dielectric multi-layer grating N, and dutycycle is from top to bottom gradually increased, the thickness of metal grating and electrolyte grating respectively 5.5��6.5 nanometers and 257��259 nanometers, the width of top grating and bottom grating respectively 100��105 nanometers and 1595��1600 nanometers, the thickness of metal film reflector layer is more than the light skin depth at infrared band.
The screen periods of best polarization independent wideband absorber is 1643 nanometers, the thickness of metal grating and electrolyte grating respectively 6 nanometers 258 nanometers, the width of top grating and bottom grating respectively 103 nanometers and 1599 nanometers, the thickness of metal film reflector layer is 200 nanometers.
The technique effect of the present invention is as follows:
When the screen periods of absorber is 1643 nanometers, the thickness of metal grating and electrolyte grating respectively 6 nanometers 258 nanometers, the width of top grating and bottom grating respectively 103 nanometers and 1599 nanometers, when the thickness of metal film reflector layer is 200 nanometers:
(1) when TE and TM polarized light vertical incidence, it will be absorbed at the incident illumination of the wider wavestrip scope of infrared band one, polarize the unrelated absorbance band more than 90% and be wider than 2 microns, and the significantly high unrelated absorption of polarization can be maintained in very big ranges of incidence angles, there is very big angle independence.
(2) have flexible and convenient to use, to polarize unrelated Absorber Bandwidth wider, the advantages such as angle independence is good that polarization independent wideband absorbs, it is that a kind of ideal polarization independent wideband absorbs device, utilize optical holographic recording technology or electron-beam direct writing device in conjunction with Microelectronic etching technique, can high-volume, produce at low cost, absorption after making/irradiation device stable performance, reliable, there is important practical prospect.
Accompanying drawing explanation
Fig. 1 is the geometry of the polarization independent wideband absorber based on cone-shaped metal-dielectric multilayer optical grating construction for infrared band of the present invention.
In figure, 1 represents region 1, and (refractive index is n1), 2 represent metal-dielectric multi-layer grating, and 3 represent metal film reflector layer, and material is the same with metal grating in metal-dielectric multi-layer grating 2, and 4 represent dielectric substrate, and (refractive index is n2), material is vitreous silica. TE polarized light (direction of an electric field along y-axis) and TM polarized light (magnetic direction along y-axis) this device incident from region 1. D is screen periods, the thickness respectively h of metal grating and electrolyte grating in cone-shaped metal-dielectric multilayer grating1And h2, the width of top grating and bottom grating respectively wtAnd wb, corresponding dutycycle respectively ft=wt/ d and fb=wb/ d, the width of grating or dutycycle are from the w of bottomb(fb) change at random is to the w at topt(ft), and following raster width or dutycycle are more than above.
Fig. 2 is TE and the TM polarization absorption efficiency curve with wavelength change of an embodiment within the scope of application claims.
Fig. 3 is the TE polarization absorption efficiency X-Y scheme with angle of incidence and wavelength change of embodiment in Fig. 2.
Fig. 4 is the TM polarization absorption efficiency X-Y scheme with angle of incidence and wavelength change of embodiment in Fig. 2.
Detailed description of the invention
Below in conjunction with embodiment and accompanying drawing, the invention will be further described, but should not limit the scope of the invention with this.
First refer to the geometry that Fig. 1, Fig. 1 are the polarization independent wideband absorbers based on cone-shaped metal-dielectric multilayer optical grating construction for infrared band of the present invention. In figure, region 1,4 is all uniform, respectively air (refractive index n1=1) and vitreous silica (refractive index n2=1.45). TE polarized light (direction of an electric field along y-axis) and TM polarized light (magnetic direction along y-axis) �� at a certain angle incides this device.
As seen from the figure, the polarization independent wideband absorber based on cone-shaped metal-dielectric multilayer optical grating construction for infrared band of the present invention, including top-down metal-dielectric multi-layer grating 2, metal film reflector layer 3, and dielectric substrate 4, wherein metal grating 21 and electrolyte grating 22 are made up of by metal-dielectric multi-layer grating N, and dutycycle is from top to bottom gradually increased, screen periods d is 1640��1645 nanometers, the thickness h of metal grating1Thickness h with electrolyte grating2Respectively 5.5��6.5 nanometers and 257��259 nanometers, the width w of top gratingtWidth w with bottom gratingbRespectively 100��105 nanometers and 1595��1600 nanometers, the thickness of metal film reflector layer 3 is more than the light skin depth at infrared band.
Under geometry as shown in Figure 1, the present invention adopts rigorous coupled wave approach [in first technology 7] to calculate this polarization independent wideband absorber absorption efficiency within the scope of infrared band. Rigorous coupled wave approach [in first technology 7] and simulated annealing rule [first technology 8:W.Goffeetal., J.Econometrics60,65-99 (1994)] is utilized to be optimized, thus obtaining the structural parameters of this polarization independent wideband absorber.
A specific embodiment of the present invention is given below, now metal grating layer is gold (Au) with the material of metal film reflector layer, its dielectric constant is taken from and is tested the data recorded in document [at first technology 9:Palik, E.D.HandbookofOpticalConstantsofSolids; AcademicPress:NewYork, 1998.]. Cone-shaped metal-dielectric multilayer optical grating construction is staggered is formed by 15 pairs of metal grating and electrolyte grating, and grating is rectangular configuration, they one tapers of whole formation. The material of electrolyte grating is germanium (Ge), and refractive index is 4. Screen periods d=1643nm, the thickness of metal grating and electrolyte grating respectively h1=6nm and h2=258nm, 15 pairs of metal gratings and electrolyte grating dutycycle are respectively as follows: 0.0629,0.0856,0.142,0.193,0.277,0.356,0.409,0.468,0.504,0.637,0.658,0.712,0.797,0.820,0.975 from the top to the bottom.
In the structure of fig. 1, the thickness of metal film reflector layer should be greater than the light skin depth at infrared band, and selecting its thickness is 200nm, thus avoiding light transmission to go out. Owing to it can stop the transmission (T (��)=0) of light, thus the absorption efficiency of device can be passed through reflection efficiency R (��) and calculate:
A(��)��1-R(��)(1)
Table 1 gives a series of embodiments of the present invention, and �� �� represents the bandwidth polarizing unrelated absorbance higher than 90%.
When Fig. 2 is TE polarization and the TM polarized light vertical incidence of this embodiment, the absorbance of device is with the curve of wavelength change, and as seen from the figure, the light within the scope of a very wide wavestrip will be absorbed, and the wave-length coverage internal absorption factor at 2321nm to 4631nm is higher than 90%.
Fig. 3 is the TE polarization absorption efficiency X-Y scheme with angle of incidence and wavelength change of embodiment in Fig. 2, as can be seen from the figure, when angle of incidence is less than 30 �� (52 ��), absorbance higher than 90% (70%), has good angle independence in 2500nm to 4404nm (2259nm to 4413nm) wave-length coverage.
Fig. 4 is the TM polarization absorption efficiency X-Y scheme with angle of incidence and wavelength change of embodiment in Fig. 2, as can be seen from the figure, when angle of incidence is less than 40 �� (70 ��), absorbance higher than 90% (70%), has good angle independence in 2321nm to 5000nm (2296nm to 5000nm) wave-length coverage.
Make the present invention for infrared band based on the polarization independent wideband absorber of cone-shaped metal-dielectric multilayer optical grating construction time, suitably select screen periods, the dutycycle of each layer grating and thickness just can be absorbed in certain ranges of incidence angles efficiency height and the good polarization independent wideband absorber of angle independence.
The polarization independent wideband absorber based on cone-shaped metal-dielectric multilayer optical grating construction of the present invention, have flexible and convenient to use, to polarize unrelated Absorber Bandwidth wider, the advantages such as angle independence is good that polarization independent wideband absorbs, it is that a kind of ideal polarization independent wideband absorbs device, utilize optical holographic recording technology or electron-beam direct writing device in conjunction with Microelectronic etching technique, can high-volume, produce at low cost, absorption after making/irradiation device stable performance, reliable, there is important practical prospect.
The absorption efficiency at peak wavelength place during table 1TE polarized light vertical incidence
Claims (2)
1. the polarization independent wideband absorber based on cone-shaped metal-dielectric multilayer optical grating construction for infrared band, it is characterised in that include top-down metal-dielectric multi-layer grating, metal film reflector layer and dielectric substrate; The cycle d of described metal-dielectric multi-layer grating is 1640��1645 nanometers, metal grating and electrolyte grating superposition are made up of by this metal-dielectric multi-layer grating N, and dutycycle is from top to bottom gradually increased, the thickness of metal grating and electrolyte grating respectively 5.5��6.5 nanometers and 257��259 nanometers, the width of top grating and bottom grating respectively 100��105 nanometers and 1595��1600 nanometers, the thickness of metal film reflector layer is more than the light skin depth at infrared band.
2. the polarization independent wideband absorber based on cone-shaped metal-dielectric multilayer optical grating construction according to claim 1, it is characterized in that described screen periods d is 1643 nanometers, the thickness of metal grating is 6 nanometers, the thickness of electrolyte grating is 258 nanometers, the width of top grating is 103 nanometers, the width of bottom grating is 1599 nanometers, and the thickness of metal film reflector layer is 200 nanometers.
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