CN105586571A - 基于电子束蒸发的双钨坩埚结构 - Google Patents
基于电子束蒸发的双钨坩埚结构 Download PDFInfo
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- CN105586571A CN105586571A CN201610133184.8A CN201610133184A CN105586571A CN 105586571 A CN105586571 A CN 105586571A CN 201610133184 A CN201610133184 A CN 201610133184A CN 105586571 A CN105586571 A CN 105586571A
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- tungsten crucible
- noumenon
- electron beam
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- tungsten
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
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- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
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Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201610133184.8A CN105586571B (zh) | 2016-03-09 | 2016-03-09 | 基于电子束蒸发的双钨坩埚结构 |
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CN201610133184.8A CN105586571B (zh) | 2016-03-09 | 2016-03-09 | 基于电子束蒸发的双钨坩埚结构 |
Publications (2)
Publication Number | Publication Date |
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CN105586571A true CN105586571A (zh) | 2016-05-18 |
CN105586571B CN105586571B (zh) | 2018-03-16 |
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CN201610133184.8A Active CN105586571B (zh) | 2016-03-09 | 2016-03-09 | 基于电子束蒸发的双钨坩埚结构 |
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CN (1) | CN105586571B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106017083A (zh) * | 2016-05-31 | 2016-10-12 | 南京达峰合金有限公司 | 太阳能冶金用石墨坩埚及太阳能冶金装置 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201832664U (zh) * | 2010-07-02 | 2011-05-18 | 昆明理工大学 | 一种双层坩埚 |
CN204097309U (zh) * | 2014-09-10 | 2015-01-14 | 湖北新华光信息材料有限公司 | 一种铂金子母埚用套筒 |
JP2015067847A (ja) * | 2013-09-27 | 2015-04-13 | 株式会社日立ハイテクファインシステムズ | 真空蒸着装置 |
CN204365335U (zh) * | 2014-11-28 | 2015-06-03 | 鞍钢股份有限公司 | 一种实验用可防止炸裂的复合坩埚 |
CN204589289U (zh) * | 2015-04-30 | 2015-08-26 | 中国电子科技集团公司第四十四研究所 | 新型热蒸发用坩埚结构 |
CN205398717U (zh) * | 2016-03-09 | 2016-07-27 | 苏州新材料研究所有限公司 | 基于电子束蒸发的双钨坩埚结构 |
-
2016
- 2016-03-09 CN CN201610133184.8A patent/CN105586571B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201832664U (zh) * | 2010-07-02 | 2011-05-18 | 昆明理工大学 | 一种双层坩埚 |
JP2015067847A (ja) * | 2013-09-27 | 2015-04-13 | 株式会社日立ハイテクファインシステムズ | 真空蒸着装置 |
CN204097309U (zh) * | 2014-09-10 | 2015-01-14 | 湖北新华光信息材料有限公司 | 一种铂金子母埚用套筒 |
CN204365335U (zh) * | 2014-11-28 | 2015-06-03 | 鞍钢股份有限公司 | 一种实验用可防止炸裂的复合坩埚 |
CN204589289U (zh) * | 2015-04-30 | 2015-08-26 | 中国电子科技集团公司第四十四研究所 | 新型热蒸发用坩埚结构 |
CN205398717U (zh) * | 2016-03-09 | 2016-07-27 | 苏州新材料研究所有限公司 | 基于电子束蒸发的双钨坩埚结构 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106017083A (zh) * | 2016-05-31 | 2016-10-12 | 南京达峰合金有限公司 | 太阳能冶金用石墨坩埚及太阳能冶金装置 |
CN106017083B (zh) * | 2016-05-31 | 2019-01-18 | 南京达峰合金有限公司 | 太阳能冶金用石墨坩埚及太阳能冶金装置 |
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Publication number | Publication date |
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CN105586571B (zh) | 2018-03-16 |
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Effective date of registration: 20180314 Address after: 215125 Jiangsu Province, Suzhou City Industrial Park BioBAY Xinghu Street No. 218 building C18 Co-patentee after: Eastern superconducting technology (Suzhou) Co., Ltd. Patentee after: Suzhou Advanced Materials Research Istitute Co., Ltd. Co-patentee after: Jiangsu Etern Co., Ltd. Address before: 215125 Jiangsu Province, Suzhou City Industrial Park BioBAY Xinghu Street No. 218 building C18 Patentee before: Suzhou Advanced Materials Research Istitute Co., Ltd. |
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