CN105575861B - A kind of quartz wafer bearing fixture - Google Patents
A kind of quartz wafer bearing fixture Download PDFInfo
- Publication number
- CN105575861B CN105575861B CN201510921225.5A CN201510921225A CN105575861B CN 105575861 B CN105575861 B CN 105575861B CN 201510921225 A CN201510921225 A CN 201510921225A CN 105575861 B CN105575861 B CN 105575861B
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- basket
- hole
- chip
- newel
- carries
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67313—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67023—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Drying Of Solid Materials (AREA)
Abstract
This application discloses a kind of quartz wafer bearing fixture, including：Chip carries basket, carries lid, newel, rotating gantry and rice word rotating disk on basket, wherein, chip carries the bayonet lock that basket is provided with multiple protrusions, carries and is covered on basket provided with the positioning hole with the position correspondence of each bayonet lock respectively, carries lid on basket and is connected by the bayonet lock with chip load basket；Chip carries basket by its central through hole, through rice word rotating disk strut end head and be connected with rice word rotating disk；Rotating gantry through newel and is fallen in the bottom of newel by its central through hole；Rice word rotating disk through newel and is fallen on the cylinder of newel by its central through hole；Chip, which is carried on basket, multiple cylindrical load holes in array distribution, carries and multiple pod apertures corresponding with each position for carrying hole respectively are stamped on basket.Multiple quartz wafers can be cleaned uniformly, and the quartz wafer remained on surface after cleaning is easier drying by the quartz wafer bearing fixture provided using the application.
Description
Technical field
The application is related to tool field, more particularly to a kind of quartz wafer bearing fixture.
Background technology
Quartz-crystal resonator is manufactured resonant element using the quartz wafer with piezo-electric effect.Due to quartz-crystal
A series of excellent characteristics such as body resonator has small volume, in light weight, reliability is high, frequency stability is excellent, are widely used
In the industries such as communication, medical treatment, Aero-Space, weaponry and field.
In the manufacturing process of quartz-crystal resonator, it usually needs precision cleaning is carried out to quartz wafer surface, to protect
Exposed quartz wafer clean surface is demonstrate,proved, so as to ensure that it is preferably attached that the metal electrode for being plated on quartz wafer surface afterwards has
Put forth effort.
When carrying out wet-cleaning to quartz wafer using chemical solvent, usually quartz wafer is put into after bearing fixture again
Bearing fixture is integrally infiltrated and carried out in chemical solvent.Bar shaped quartz wafer for small size, due to its length, width and
The size limitation (general length is less than 6mm, and width is less than 3mm, and thickness is only in below 0.3mm) of thickness, typically by a fixed number
The quartz wafer of amount is fitted into the basket of bearing fixture simultaneously to be cleaned, and is stacked, is held yet with multiple quartz wafers
Be also easy to produce that cleaning is uneven and cleaning after remained on surface the problem of being not easy to dry.
The content of the invention
Based on above-mentioned technical problem, the embodiment of the present application provides a kind of quartz wafer bearing fixture, for multiple quartz
Chip is uniformly cleaned, and the quartz wafer remained on surface after cleaning is easier drying.
The embodiment of the present application uses following technical proposals：
A kind of quartz wafer bearing fixture, including：Chip carries basket, carries lid on basket, newel, rotating gantry and rice word turn
Disk, wherein, chip carry basket be provided with multiple protrusions bayonet lock, carry basket on lid be provided with respectively with the position correspondence of each bayonet lock
Positioning hole, carry lid on basket and be connected by the multiple bayonet lock with chip load basket；Chip carries basket by its central through hole, turns through rice word
The strut end head of disk is simultaneously connected with rice word rotating disk；Rotating gantry through newel and is fallen at the bottom of newel by its central through hole
End；Rice word rotating disk through newel and is fallen on the cylinder of newel by its central through hole；It is in array to have multiple on chip load basket
The cylindrical load hole of distribution, and one end diameter of cylinder is more than the diameter of the other end；Carry basket on be stamped it is multiple respectively with it is each
Corresponding pod apertures are distinguished in the position for carrying hole, and the diameter of pod apertures is less than the width of quartz wafer.
Preferably, spacing collar is further comprised, spacing collar through the newel and is fallen revolving by its central through hole
Ask on platform, and the upper end of spacing collar contacts with rice word rotating disk.
Preferably, further comprise latching, latch by its central through hole, through newel and fall in the upper of rice word rotating disk
End, and have the screwed hole perpendicular to newel cylinder length direction on lock.
Preferably, screw is further comprised, screw coordinates with screwed hole, and the termination of screw contacts with newel.
Preferably, further comprise abnormity nut, there is threaded post in the strut end head of rice word rotating disk, abnormity nut passes through spiral shell
Chip load basket is fixed in meter strut end head of word rotating disk by line post.
Preferably, chip, which carries, multiple cylindrical load holes in array distribution on basket, the shape that cylinder carries hole is in loudspeaker
One end diameter of shape, i.e. cylinder is more than the diameter of the other end.
Preferably, chip carries and is additionally provided with guiding gutter on the surface of basket side, and the one end in cylindrical load hole is located at water conservancy diversion
The bottom land position of groove.
Preferably, chip carries and guiding gutter is also distributed with the surface of basket opposite side, and is carried in chip in basket both side surface
Water conservancy diversion groove location is symmetrical.
Preferably, carry to be additionally provided with lid on basket and penetrate in the diversion window covered on load basket.
Preferably, in addition to drier, drier are connected with rotating gantry.
The above-mentioned technical proposal that the embodiment of the present application uses can reach following beneficial effect：It is more due to having on chip load basket
The individual cylindrical load hole in array distribution, so that the quartz wafer each carried in hole is uniformly cleaned, and after making cleaning
Quartz wafer remained on surface be easier drying.
Brief description of the drawings
Accompanying drawing described herein is used for providing further understanding of the present application, forms the part of the application, this Shen
Schematic description and description please is used to explain the application, does not form the improper restriction to the application.In the accompanying drawings：
Fig. 1 is the bearing fixture structure top view that the embodiment of the present application provides；
Fig. 2 is the bearing fixture structural front view in Fig. 1；
Fig. 3 a are that the chip in the bearing fixture that the embodiment of the present application provides carries basket surface structure schematic diagram；
Fig. 3 b are that the chip in Fig. 3 a carries surface texture schematic diagram in the key；
Cap upper surface structural representation on load basket in the bearing fixture that Fig. 4 a provide for the embodiment of the present application；
Fig. 4 b are lid lower surface configuration schematic diagram on the load basket in Fig. 4 a；
Fig. 5 a are that the chip load basket in the bearing fixture that the embodiment of the present application provides is illustrated with carrying the installation process covered on basket
Figure；
Fig. 5 b are that the chip in Fig. 5 a carries basket with carrying the final schematic view of the mounting position covered on basket；
Fig. 6 is the partial structural diagram in the bearing fixture that the embodiment of the present application provides；
Fig. 7 is load hole and pod apertures profile in the bearing fixture that the embodiment of the present application provides；
Reference in figure is：101- chips carry basket, and 102- is carried to be covered on basket, 103- newels, 104- rotating gantries,
105- spacing collars, 106- rice word rotating disks, 107- locks, 108- abnormity nuts, 109- screws, 110- loads hole, 111- guiding gutters,
112- pod apertures, 113- bayonet locks, 114- positioning holes, 115- diversion windows, 116- press strips, 117- quartz wafers.
Embodiment
To make the purpose, technical scheme and advantage of the application clearer, below in conjunction with the application specific embodiment and
Technical scheme is clearly and completely described corresponding accompanying drawing.Obviously, described embodiment is only the application one
Section Example, rather than whole embodiments.Based on the embodiment in the application, those of ordinary skill in the art are not doing
Go out under the premise of creative work the every other embodiment obtained, belong to the scope of the application protection.
A kind of quartz wafer bearing fixture that the embodiment of the present application provides it can be seen from Fig. 1 and Fig. 2, mainly includes：It is brilliant
Piece carries basket 101, carries lid 102, newel 103, rotating gantry 104 and rice word rotating disk 106 on basket.
Chip is can be seen that with reference to Fig. 3 a and Fig. 4 b and carries bayonet lock 113 of the basket 101 provided with multiple protrusions, carries lid 102 on basket
It is provided with the positioning hole 114 with the position correspondence of each bayonet lock respectively.Can specifically it find out in conjunction with Fig. 5 a and Fig. 5 b, chip carries
The edge on the both sides of the upper surface of basket 101,3 raised " Г " type bayonet locks 113 are respectively designed with along its length, while carry on basket
The correspondence position of lid 102 is provided with positioning hole 114 corresponding with bayonet lock.When chip carries lid 102 on installation load basket on basket 101,
Positioning hole 114 is directed at " Г " type bayonet lock 113 and is enclosed on chip and is carried on basket 101, now because between positioning hole 114 and bayonet lock 113
Dislocation displacement so that carry lid 102 on basket and there is the edge on one side to carry the edge of basket 101 than chip and protrude, promote and carry lid 102 on basket
The edge that beyond protrudes carries the edge of basket 101 with chip and flushed, and carries lid 102 on basket and has been stuck in bayonet lock 113 by positioning hole 114
Chip has been fixed in groove to carry on basket 101, that is, is realized lid 102 on load basket and passed through above-mentioned multiple bayonet locks and chip load basket
101 connections.
In conjunction with Fig. 2 as can be seen that the chip after being connected with lid 102 on load basket carries basket 101 and carries the center of basket 101 by chip
The central through hole of position, through rice word rotating disk 106 strut end head and be connected with rice word rotating disk 106, wherein rice word rotating disk 106
The central through hole that end structure carries basket 101 with chip is engaged, and chip is carried basket 101 and is connected with rice word rotating disk 106, and protects
Hold chip and carry the position holding of basket 101 vertically.It is connected it should be noted that chip here carries basket 101 with rice word rotating disk 106,
Chip carries basket 101 and is connected again with carrying lid 102 on basket simultaneously, therefore correspondence position that can be on basket is carried on lid 102 is also provided with phase
The through hole answered, so as to coordinate with rice word rotating disk 106.
Rotating gantry 104 through newel 103 and is fallen in the bottom of newel 103 by its central through hole, can be with by Fig. 2
Find out, the section of the cylinder of newel 103 is square, and cylinder bottom surface has in cylinder and cylindrical cross-section area is more than square section
The collet of face area, by above-mentioned cylinder and collet, rotating gantry 104 can be made to be passed through by its central through hole on newel 103,
And both are not caused to separate when lifting newel 103.
Rice word rotating disk 106 through newel 103 and is fallen on the cylinder of newel by its central through hole.Rice word rotating disk 106
When being connected with newel, at both link positions that can be on cylinder, the recess that pole section diminishes is set so that rice
Word rotating disk 106 is through in the recessed position of newel 103, and and is unlikely to make a meter word rotating disk 106 slide downwards along cylinder.Certainly
Can also be by adding spacing collar 105, spacing collar 105 through newel 103 and is fallen in rotating gantry by its central through hole
On 104, and the upper end of spacing collar 105 contacts with rice word rotating disk 106, and such spacing collar 105 is i.e. sustainable and limits a meter word
Rotating disk 106 carries the integrated hanging of basket 101 in the position of newel 103, final guarantee chip.
The central through hole of central through hole and rice word rotating disk 106 for above-mentioned rotating gantry 104, all should be with newel
The sectional dimension of 103 cylinders is engaged, can be it is as shown in Figure 2 be all square-section, energy when being rotated so as to rotating gantry 104
Enough newel 103 is driven to rotate, newel 103 rotates and then a meter word rotating disk 106 can be driven to rotate.
In addition, chip, which carries, multiple cylinder load holes 110 in array distribution on basket 101, and one end diameter of cylinder is big
In the other end diameter, it is necessary to explanation, cylinder carry smaller one section of the body diameter of hole 110 diameter be less than quartz wafer
117 width, the diameter that cylinder carries the one end being relatively large in diameter in hole 110 and carried among hole are all higher than quartz wafer 117
Width, specifically it may refer to shown in Fig. 7.Carry lid 102 on basket have it is multiple respectively with the position in each load hole is corresponding respectively leads
Discharge orifice 112, and the diameter of pod apertures 112 is less than the width of quartz wafer 117.
The quartz wafer bearing fixture provided using the embodiment of the present application, it is in array due to being provided with multiple on chip load basket
Equally distributed cylinder carries hole so that the bar shaped quartz wafer of small size, can piece piece independence do not have completely along its length
Enter in each load hole, it is therefore prevented that the stacking between quartz wafer；Quartz wafer can be in the cylindrical space for carrying hole in simultaneously
Mandrel freely rotates, no clamping dead angle, so as to ensure that quartz wafer surface uniformly can be cleaned and be dried comprehensively, simultaneously
Do not damage quartz wafer；Simultaneously because the cylinder design in hole is carried, and one end diameter of cylinder is more than the diameter of the other end so that
The tool can overcome small size bar shaped chip to be not easy the difficulty that travel direction accurately adjusts operation easily, only need to be by arbitrary orientation
Quartz wafer is clamped, adjustment short side alignment carries the larger one end of bore dia, lost in the hole of load hole, quartz wafer can be easily
Slip into and carry in hole, quartz wafer loading operation facility.
When cleaning quartz wafer, the infiltration of whole bearing fixture in cleaning fluid, using ultrasonic wave make cleaning vibration of liquid from
And quartz wafer is cleaned.Due to carrying the position in corresponding load hole on lid on basket, it is slightly less than wafer width size provided with diameter
Pod apertures, and carry the width that hole base diameter is less than quartz wafer, above-mentioned load hole and pod apertures are complemented each other to form along circle
The fluid passage in post direction, form good flow-guiding channel so that liquid lotion can be abundant during cleaning quartz wafer process
Circulation overload hole, chip can fully infiltrate the wellability in a liquid, realizing that tool is good, quartz wafer is obtained uniformly
Cleaning.
In addition, when drying quartz wafer, chip carries indigo plant with vertical state, and the veneer being distributed in planet is fixed on meter word and turned
On each offset column end of disk, chip carries the main surface of basket towards on the outside of newel so that the load hole post equipped with chip to
Along rotating disk radial direction.When whole bearing fixture, which rotates, to be dried, just to remain in quartz wafer surface and carry in hole
Liquid realizes good drying performance along hole post is carried to fully throwing away.
When drying quartz wafer using bearing fixture, got rid of because whole bearing fixture is fixed on by rotating gantry 104
Rotated at a high speed on dry machine, can also be in the top of rice word rotating disk addition lock 107 in order to ensure safety, lock 107 is by its center
Through hole, through newel 103 and fall in the upper end of rice word rotating disk 106, and have on lock perpendicular to the cylinder length side of newel 103
To screwed hole.Screw 109 can also be further utilized, above-mentioned screw coordinates with screwed hole, and 107 will be latched using screw 109
Newel 103, and then the rice word rotating disk 106 that 107 lower ends will be latched are fixed on, spacing collar 105, and rotating gantry 104 are equal
It is securely seated between on newel 103.
The connected mode of basket 101 and rice word rotating disk 106 is carried for chip, can further include abnormity nut 108, is led to
Cross in the strut end head of rice word rotating disk 106 and be threaded post, abnormity nut 108 may pass through threaded post and chip is carried into basket 101
It is fixed in meter strut end head of word rotating disk 106.
Chip, which carries, multiple cylindrical load holes 110 in array distribution on basket 101, a kind of preferable scheme is cylinder
The shape flare in hole 110 is carried, i.e. one end diameter of cylinder is more than the diameter of the other end, specific as shown in Figure 7.It is left in Fig. 7
Above there are pod apertures 112 side, right side is that chip carries basket 101, is to carry hole 110 among right side, may be used also in addition to carry lid 102 on basket
To see position of the quartz wafer 117 in hole 110 is carried, the width of the quartz wafer 117 in Fig. 7, which is less than, carries hole centre position
Width, carried so as to which quartz wafer is put into hole, in addition, the load bottom side of hole 110 is the right side in Fig. 7, and pod apertures 112
Diameter be respectively less than the width of quartz wafer 117, carry hole 110 so as to be limited to quartz wafer 117 in cleaning and drying
In.
Chip carries the straight-through sedimentation guiding gutter 111 being additionally provided with the surface of basket side along hole column distribution is carried, see Fig. 3 a and
Fig. 3 b, the one end in cylindrical load hole 110 are located at the bottom land position of guiding gutter 111.Chip is carried on the surface of the opposite side of basket 101
Guiding gutter 111 is distributed with, and it is symmetrical in the position of guiding gutter 111 that chip is carried in the both side surface of basket 101.These guiding gutters cause
The chip placed vertically carry in basket 101 can fully water conservancy diversion cleaning fluid, and remove the capillarity in load hole 110 simultaneously, these are led
Discharge orifice 110 and guiding gutter 111 are cooperated, and good passage is formed to cleaning fluid.
The lower surface of lid 102 on basket is carried simultaneously and is additionally provided with prominent press strip 116, Fig. 4 a and Fig. 4 b, is carried and is also set on lid 102 on basket
It is equipped with and penetrates in the diversion window 115 for carrying lid 102 on basket.These press strips 116 carry the chi of guiding gutter 111 of the upper surface of basket 101 with chip
Very little formation precision-fit, it both can guarantee that carrying the precision of lid 102 on basket fixes to be substantially prevented from quartz wafer from the escape for carrying hole, and can
The space that makes to have reasonable size between press strip 116 and guiding gutter 111 and give full play to diversion function, while diversion window 115 is also
It can prevent from carrying between lid and chip on basket carry basket interlayer and clamp liquid when drying, fully be dried with ensureing to dry.Meanwhile referring to
Shown in Fig. 6, the abnormity nut 108, chip load basket 101 need to can only can be fixed in meter word sabot 106 easily with hand,
Without installation tool.In addition, it is shown in Figure 6, by the newel 103, rotating gantry 104, spacing collar 105, rice
Word rotating disk 106, the order installation of lock 107 form the cleaning bracket with rotation drying functions, can be continuous after the completion of once mounting
Use, each component is detachably positioned to when not using to save space, easy to use and flexible.
Embodiments herein is these are only, is not limited to the application.To those skilled in the art,
The application can have various modifications and variations.All any modifications made within spirit herein and principle, equivalent substitution,
Improve etc., it should be included within the scope of claims hereof.
Claims (10)
- A kind of 1. quartz wafer bearing fixture, it is characterised in that including：Chip carries basket, carries lid, newel, rotating gantry on basket And rice word rotating disk, wherein,Chip carries the bayonet lock that basket is provided with multiple protrusions, carries lid on basket and is provided with the positioning with the position correspondence of each bayonet lock respectively Hole, carry lid on basket and be connected by the multiple bayonet lock with chip load basket；Chip carries basket by its central through hole, through rice word rotating disk strut end head and be connected with rice word rotating disk；Rotating gantry through newel and is fallen in the bottom of newel by its central through hole；Rice word rotating disk through newel and is fallen on the cylinder of newel by its central through hole；Chip, which carries, multiple cylindrical load holes in array distribution on basket, and one end diameter of cylinder is more than the straight of the other end Footpath；Carry and multiple corresponding pod apertures of position difference with each load hole, and the diameter of pod apertures is less than stone respectively are stamped on basket The width of English chip.
- 2. bearing fixture according to claim 1, it is characterised in that further comprise spacing collar, spacing collar is by it Central through hole, through the newel and fall on rotating gantry, and the upper end of spacing collar contacts with rice word rotating disk.
- 3. bearing fixture according to claim 2, it is characterised in that further comprise latching, latch by its central through hole, Through newel and fall in the upper end of rice word rotating disk, and have the screwed hole perpendicular to newel cylinder length direction on lock.
- 4. bearing fixture according to claim 3, it is characterised in that further comprise screw, screw coordinates with screwed hole, And the termination of screw contacts with newel.
- 5. bearing fixture according to claim 1, it is characterised in that further comprise abnormity nut, the branch of rice word rotating disk There is threaded post on styletable head, chip load basket is fixed in meter strut end head of word rotating disk by abnormity nut through threaded post.
- 6. bearing fixture according to claim 1, chip, which is carried on basket, multiple cylindrical load holes in array distribution, its It is characterised by, cylinder carries the shape flare in hole, i.e. one end diameter of cylinder is more than the diameter of the other end.
- 7. bearing fixture according to claim 6, it is characterised in that chip carries and is additionally provided with water conservancy diversion on the surface of basket side Groove, the one end in cylindrical load hole are located at the bottom land position of guiding gutter.
- 8. bearing fixture according to claim 7, it is characterised in that chip is carried also to be distributed with the surface of basket opposite side and led Chute, and it is symmetrical in the water conservancy diversion groove location that chip is carried in basket both side surface.
- 9. bearing fixture according to claim 1, it is characterised in that carry to be additionally provided with to penetrate on lid on basket and covered on load basket Diversion window.
- 10. bearing fixture according to claim 1, it is characterised in that further comprise drier, drier is held in the palm with rotation Platform connects.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510921225.5A CN105575861B (en) | 2015-12-11 | 2015-12-11 | A kind of quartz wafer bearing fixture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510921225.5A CN105575861B (en) | 2015-12-11 | 2015-12-11 | A kind of quartz wafer bearing fixture |
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| Publication Number | Publication Date |
|---|---|
| CN105575861A CN105575861A (en) | 2016-05-11 |
| CN105575861B true CN105575861B (en) | 2018-03-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510921225.5A Active CN105575861B (en) | 2015-12-11 | 2015-12-11 | A kind of quartz wafer bearing fixture |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109332331A (en) * | 2018-09-28 | 2019-02-15 | 芜湖华宇彩晶科技有限公司 | Supporting and positioning device is used in a kind of cleaning of display screen |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203170663U (en) * | 2013-03-12 | 2013-09-04 | 汇隆电子（金华）有限公司 | Wafer cleaning jig |
| CN203206185U (en) * | 2013-04-28 | 2013-09-18 | 浙江东晶电子股份有限公司 | Chip-arranging and secondary-washing tool used for small-size quartz crystal resonator |
| CN203778451U (en) * | 2014-03-03 | 2014-08-20 | 浙江东晶电子股份有限公司 | Quartz crystal polished section oscillator cleaning jig |
| CN204396370U (en) * | 2015-01-20 | 2015-06-17 | 深圳市深宇峰电子有限公司 | A kind of cleaning load plate of paster crystal oscillator pedestal |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007000833A (en) * | 2005-06-27 | 2007-01-11 | Shinka Jitsugyo Kk | Cleaning tool |
-
2015
- 2015-12-11 CN CN201510921225.5A patent/CN105575861B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203170663U (en) * | 2013-03-12 | 2013-09-04 | 汇隆电子（金华）有限公司 | Wafer cleaning jig |
| CN203206185U (en) * | 2013-04-28 | 2013-09-18 | 浙江东晶电子股份有限公司 | Chip-arranging and secondary-washing tool used for small-size quartz crystal resonator |
| CN203778451U (en) * | 2014-03-03 | 2014-08-20 | 浙江东晶电子股份有限公司 | Quartz crystal polished section oscillator cleaning jig |
| CN204396370U (en) * | 2015-01-20 | 2015-06-17 | 深圳市深宇峰电子有限公司 | A kind of cleaning load plate of paster crystal oscillator pedestal |
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| CN105575861A (en) | 2016-05-11 |
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