CN104241176A - Annular flower basket for containing silicon wafers - Google Patents
Annular flower basket for containing silicon wafers Download PDFInfo
- Publication number
- CN104241176A CN104241176A CN201410414512.2A CN201410414512A CN104241176A CN 104241176 A CN104241176 A CN 104241176A CN 201410414512 A CN201410414512 A CN 201410414512A CN 104241176 A CN104241176 A CN 104241176A
- Authority
- CN
- China
- Prior art keywords
- round tube
- bayonet slot
- interior pipe
- pipe
- exterior bayonet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67313—Horizontal boat type carrier whereby the substrates are vertically supported, e.g. comprising rod-shaped elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67023—Apparatus for fluid treatment for general liquid treatment, e.g. etching followed by cleaning
Abstract
The invention provides a silicon wafer cleaning device which aims at solving the problem that multiple dead angles exist in an existing square flower basket, so that silicon wafers are not cleaned completely. The silicon wafer cleaning device comprises an inner round tube and an outer round tube. Outer clamping grooves are formed in the outer side wall of the inner round tube. Inner clamping grooves are formed in the inner side wall of the outer round tube. Rods are fixedly connected between the bottom of the inner round tube and the bottom of the outer round tube. Inner through grooves are formed in the inner round tube. The top of each outer clamping groove is communicated with the upper end of the inner round tube. The bottom of each outer clamping groove is not communicated with the bottom end of the inner round tube. Through grooves are formed in the outer round tube. The top of each inner clamping groove is communicated with the upper end of the outer round tube. The bottom of each inner clamping groove is not communicated with the bottom end of the outer round tube. A flower basket of the silicon wafer cleaning device is annular and dead angles do not exist. Accordingly, the silicon wafers are conveniently cleaned, work efficiency in the cleaning process is improved, part of water on the silicon wafers can be spun out through rotation in the following period, and the silicon wafers are convenient to dry.
Description
Technical field
The present invention relates to a kind of annular gaily decorated basket for placing silicon chip.
Background technology
Current is square for placing the gaily decorated basket of silicon chip, when cleaning silicon chip, because the square gaily decorated basket exists a lot of dead angle, is difficult to clean up, and inefficiency; Because the gaily decorated basket is square, follow-up dry time, the moisture on silicon chip throws away by the form not by rotating.
Summary of the invention
The invention provides a kind of silicon chip cleaning device, be intended to solve the existing square gaily decorated basket and there is more dead angle, cause the sordid problem of cleaning silicon chip.
In order to solve above technical problem, the present invention is achieved through the following technical solutions: a kind of annular gaily decorated basket for placing silicon chip, comprise coaxial interior pipe and outer pipe, the lateral wall of described interior pipe is provided with exterior bayonet slot, the madial wall of described outer pipe is provided with exterior bayonet slot one_to_one corresponding and coordinates the inner card cage placing silicon chip with exterior bayonet slot, is fixed with bar bottom described interior pipe and between the bottom of outer pipe; Described interior pipe offers for be communicated with exterior bayonet slot and interior pipe inner and with exterior bayonet slot one to one in groove, each exterior bayonet slot top all communicates with the upper end of interior pipe, and the bottom of each exterior bayonet slot does not all communicate with interior pipe bottom; Described outer pipe offers for be communicated with inner card cage and outer circular tube external and with inner card cage outer groove one to one, each inner card cage top all communicates with the upper end of outer pipe, and the bottom of each inner card cage does not all communicate with the bottom of outer pipe.
Further, described bar has three and is distributed between interior pipe and outer pipe; During more than three, waste material; When being less than three, fastness when interior pipe is connected with outer pipe is poor.
Compared with prior art advantage of the present invention is: the gaily decorated basket in the present invention is annular, there is not dead angle, is convenient to rinse clean clearly, improves operating efficiency during cleaning, being also conducive to postorder by rotating the portion of water thrown away on silicon chip, being convenient to drying.
Accompanying drawing explanation
Below in conjunction with accompanying drawing, the invention will be further described:
Fig. 1 is structural representation of the present invention;
Fig. 2 is vertical view of the present invention.
Embodiment
Consult Fig. 1 and Fig. 2, a kind of annular gaily decorated basket for placing silicon chip, comprise coaxial interior pipe 1 and outer pipe 2, the lateral wall of described interior pipe 1 is provided with exterior bayonet slot 11, the madial wall of described outer pipe 2 is provided with exterior bayonet slot 11 one_to_one corresponding and coordinates the inner card cage 21 placing silicon chip with exterior bayonet slot 11, bottom described interior pipe 1 and be fixed with bar 3 between the bottom of outer pipe 2; Described interior pipe 1 offers for be communicated with exterior bayonet slot 11 and interior pipe 1 inner and with exterior bayonet slot 11 one to one in groove 12, each exterior bayonet slot 11 top all communicates with the upper end of interior pipe 1, and the bottom of each exterior bayonet slot 11 does not all communicate with interior pipe 1 bottom; Described outer pipe 2 offers for be communicated with inner card cage 21 and outer pipe 2 outside and with inner card cage 21 outer groove 22 one to one, each inner card cage 21 top all communicates with the upper end of outer pipe 2, and the bottom of each inner card cage 21 does not all communicate with the bottom of outer pipe 2; Described bar 3 has three and is distributed between interior pipe 1 and outer pipe 2.
When placing silicon chip, often organize and all place a silicon chip between exterior bayonet slot 11 and inner card cage 21 one to one.
The gaily decorated basket in the present invention is annular, there is not dead angle, is convenient to rinse clean clearly, improves operating efficiency during cleaning, being also conducive to postorder by rotating the portion of water thrown away on silicon chip, being convenient to drying.
The foregoing is only specific embodiments of the invention, but technical characteristic of the present invention is not limited thereto, any those skilled in the art is in the field of the invention, and the change done or modification are all encompassed among the scope of the claims of the present invention.
Claims (2)
1. one kind for placing the annular gaily decorated basket of silicon chip, it is characterized in that: comprise coaxial interior pipe (1) and outer pipe (2), the lateral wall of described interior pipe (1) is provided with exterior bayonet slot (11), the madial wall of described outer pipe (2) is provided with exterior bayonet slot (11) one_to_one corresponding and coordinates the inner card cage (21) placing silicon chip with exterior bayonet slot (11), is fixed with bar (3) between described interior pipe (1) bottom and the bottom of outer pipe (2); Described interior pipe (1) offers for be communicated with exterior bayonet slot (11) and interior pipe (1) inner and with exterior bayonet slot (11) one to one in groove (12), each exterior bayonet slot (11) top all communicates with the upper end of interior pipe (1), and the bottom of each exterior bayonet slot (11) does not all communicate with interior pipe (1) bottom; Described outer pipe (2) offers for be communicated with inner card cage (21) and outer pipe (2) outside and with inner card cage (21) outer groove (22) one to one, each inner card cage (21) top all communicates with the upper end of outer pipe (2), and the bottom of each inner card cage (21) does not all communicate with the bottom of outer pipe (2).
2. a kind of annular gaily decorated basket for placing silicon chip according to claim 1, is characterized in that: described bar (3) has three and is distributed between interior pipe (1) and outer pipe (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410414512.2A CN104241176B (en) | 2014-08-21 | 2014-08-21 | Annular flower basket for containing silicon wafers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410414512.2A CN104241176B (en) | 2014-08-21 | 2014-08-21 | Annular flower basket for containing silicon wafers |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104241176A true CN104241176A (en) | 2014-12-24 |
| CN104241176B CN104241176B (en) | 2017-02-01 |
Family
ID=52229018
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410414512.2A Expired - Fee Related CN104241176B (en) | 2014-08-21 | 2014-08-21 | Annular flower basket for containing silicon wafers |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104241176B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105174745A (en) * | 2015-09-09 | 2015-12-23 | 通用生物系统（安徽）有限公司 | Device used for surface chemical treatment of glass sheet and manufacturing method for device |
| CN106298601A (en) * | 2016-10-08 | 2017-01-04 | 无锡宏纳科技有限公司 | Wafer storage cylinder |
| CN109158373A (en) * | 2018-11-09 | 2019-01-08 | 江苏德润光电科技有限公司 | A kind of polysilicon chip Intelligent cleaning device |
| CN109277366A (en) * | 2018-11-09 | 2019-01-29 | 江苏德润光电科技有限公司 | A kind of Wafer Cleaning loading attachment |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201345369Y (en) * | 2008-12-29 | 2009-11-11 | 上海蓝光科技有限公司 | Deformable flower basket |
| US20100078867A1 (en) * | 2008-09-29 | 2010-04-01 | Tokyo Electron Limited | Substrate processing apparatus |
| US20120235342A1 (en) * | 2011-03-16 | 2012-09-20 | Fuji Electric Co., Ltd. | Substrate support jig |
| CN202662579U (en) * | 2012-05-04 | 2013-01-09 | 苏州协鑫工业应用研究院有限公司 | Silicon wafer cleaning device |
| CN203983248U (en) * | 2014-08-21 | 2014-12-03 | 浙江辉弘光电能源有限公司 | A kind of for placing the annular gaily decorated basket of silicon chip |
-
2014
- 2014-08-21 CN CN201410414512.2A patent/CN104241176B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100078867A1 (en) * | 2008-09-29 | 2010-04-01 | Tokyo Electron Limited | Substrate processing apparatus |
| CN201345369Y (en) * | 2008-12-29 | 2009-11-11 | 上海蓝光科技有限公司 | Deformable flower basket |
| US20120235342A1 (en) * | 2011-03-16 | 2012-09-20 | Fuji Electric Co., Ltd. | Substrate support jig |
| CN202662579U (en) * | 2012-05-04 | 2013-01-09 | 苏州协鑫工业应用研究院有限公司 | Silicon wafer cleaning device |
| CN203983248U (en) * | 2014-08-21 | 2014-12-03 | 浙江辉弘光电能源有限公司 | A kind of for placing the annular gaily decorated basket of silicon chip |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105174745A (en) * | 2015-09-09 | 2015-12-23 | 通用生物系统（安徽）有限公司 | Device used for surface chemical treatment of glass sheet and manufacturing method for device |
| CN106298601A (en) * | 2016-10-08 | 2017-01-04 | 无锡宏纳科技有限公司 | Wafer storage cylinder |
| CN109158373A (en) * | 2018-11-09 | 2019-01-08 | 江苏德润光电科技有限公司 | A kind of polysilicon chip Intelligent cleaning device |
| CN109277366A (en) * | 2018-11-09 | 2019-01-29 | 江苏德润光电科技有限公司 | A kind of Wafer Cleaning loading attachment |
| CN109158373B (en) * | 2018-11-09 | 2023-10-10 | 江苏德润光电科技有限公司 | Intelligent belt cleaning device of polycrystalline silicon piece |
| CN109277366B (en) * | 2018-11-09 | 2023-12-19 | 江苏德润光电科技有限公司 | Loading device for cleaning silicon wafer |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104241176B (en) | 2017-02-01 |
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Legal Events
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 314200 No. 899 Xinxing three road, Pinghu economic and Technological Development Zone, Jiaxing, Zhejiang Patentee after: Zhejiang Hui Guang light Limited by Share Ltd Address before: 314200 No. 899 Xinxing three road, Pinghu Economic Development Zone, Jiaxing, Zhejiang Patentee before: ZHEJIANG HUIHONG PHOTOELECTRIC ENERGY CO., LTD. |
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| CP03 | Change of name, title or address | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170201 Termination date: 20190821 |
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| CF01 | Termination of patent right due to non-payment of annual fee |