CN105575756A - Excimer discharge lamp - Google Patents
Excimer discharge lamp Download PDFInfo
- Publication number
- CN105575756A CN105575756A CN201510701472.4A CN201510701472A CN105575756A CN 105575756 A CN105575756 A CN 105575756A CN 201510701472 A CN201510701472 A CN 201510701472A CN 105575756 A CN105575756 A CN 105575756A
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- tube
- outboard
- discharge lamp
- electrode
- hollow tube
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/30—Vessels; Containers
- H01J61/33—Special shape of cross-section, e.g. for producing cool spot
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
Abstract
The invention provides an excimer discharge lamp having a double tube structure and being capable of suppressing axial off-center of an inner side tube with respect to an outer side tube and obtaining illumination distribution of high uniformity. The excimer discharge lamp is provided with a dielectric discharge vessel of a double tube structure. The discharge vessel is provided with an outer side tube and an inner side tube configured coaxially with the outer side tube, and a discharge space is formed between the outer side tube and the inner side tube. One electrode and the other electrode are disposed in opposite directions across the discharge vessel. The excimer discharge lamp is characterized in that one end of the outer side tube forms a hollowed tube; the hollowed tube extends laterally toward an axial direction, one end of the hollowed tube is sealed, and the interior of the hollowed tube communicates with the interior of the outer side tube; and one end of the inner side tube forms a convex portion inserted into the hollowed tube.
Description
Technical field
The present invention relates to the Excimer discharge lamp of dual pipe structure.
Background technology
As an example of the Excimer discharge lamp used based on ultraviolet sterilization, deodorizing, organic pollutant removal etc., such as, Patent Document 1 discloses the Excimer discharge lamp of the dual pipe structure with outboard tube and inside tube.
Fig. 4 is the profile of an example of the structure of the Excimer discharge lamp of the dual pipe structure represented in the past.This Excimer discharge lamp has the discharge vessel 1 of the dual pipe structure be made up of dielectrics such as synthetic quartz glass, and in formed discharge space S, fill the electric discharge gas forming quasi-molecule therein.
If be specifically described, then discharge vessel 1 possesses the inside tube 3 of the outboard tube 2 of bottomed cylindrical and the external diameter bottomed cylindrical less than the internal diameter of this outboard tube 2.Outboard tube 2 and inside tube 3 are configured in outboard tube 2 inside tube 3 along the tubular axis of this outboard tube 2 and the bottom (being left part in the diagram) of the bottom of outboard tube 2 (being left part in the diagram) and inside tube 3 is positioned at the state of equidirectional.And, under the state that the bottom of the bottom of outboard tube 2 and inside tube 3 exists gap, the edge of opening of this outboard tube 2 is engaged in a gastight manner with the other end side region (being right-hand member side region in the diagram) of inside tube 3, and forms the discharge space S of hollow cylindrical.
The outer peripheral face of the outboard tube 2 in discharge vessel 1, the lateral electrode 7 of the cylindrical shape be such as made up of wire netting touches with the outer peripheral face of this outboard tube 2 and configures.In addition, the inside of the inside tube 3 in discharge vessel 1, such as, be configured with the medial electrode 8 be made up of wire coil.
In addition, in the diagram, 6 is blast pipe remnants portions, and 9A, 9B are sealing caps, and E is electric supply installation.
In this Excimer discharge lamp, the outer peripheral face of the cylindrical shape of outboard tube 2 plays function as light exit window.
The discharge vessel 1 of the Excimer discharge lamp of this dual pipe structure makes as shown in Figure 5.
Specifically, first, one end (being left part in Figure 5) of the cylindrical duct 3a (with reference to Fig. 5 (a)) as inside tube 3 is sealed, and by the other end side region (with reference to Fig. 5 (b)) of circular flange part 3b deposition in cylindrical duct 3a.Specifically, to there is the internal diameter identical with the external diameter of cylindrical duct 3a and there is the circular flange part 3b of the external diameter identical with the internal diameter of the cylindrical duct 2a as outboard tube 2 described later, heat this cylindrical duct 3a being inserted under the state in flange part 3b, thus deposition is carried out to this flange part 3b.
On the other hand, separately using the blast pipe 6a of cylindrical shape in a gastight manner deposition in the cylindrical duct 2a as outboard tube 2 an end (being left part in Figure 5) (with reference to Fig. 5 (c)).
And, the cylindrical duct 3a as inside tube 3 is inserted in the mode of coaxial in the cylindrical duct 2a as outboard tube 2, and the edge of opening of one end (being right-hand member in Figure 5) of flange part 3b and the cylindrical duct 2a as outboard tube 2 is heated, thus carries out deposition in a gastight manner.In addition, after being filled with electric discharge gas from blast pipe 6a, one end (being right part in Figure 5) of this blast pipe 6a is sealed in a gastight manner, thus form blast pipe remnants portion 6, and make the discharge vessel 1 (with reference to Fig. 5 (d)) with discharge space S.
But, in the discharge vessel 1 of this Excimer discharge lamp, heating the flange part 3b that the cylindrical duct 2a as outboard tube 2 and the cylindrical duct 3a as inside tube 3 are formed during deposition, oxygen-hydrogen burner etc. is utilized to be heated into the processing temperature (about 2000 DEG C) of synthetic quartz glass.Now, due to the intensity of a fire of oxygen-hydrogen burner, make to rise as the temperature of the cylindrical duct 3a of inside tube 3 by conduction, radiation, inside tube 3 is the deposition relative to the axially eccentric of outboard tube 2 sometimes.
If inside tube 3 with the axially eccentric state relative to outboard tube 2 by deposition, then there are the following problems: can produce the uneven of the interelectrode distance in discharge space S significantly, the uneven of electric discharge is produced when lamp bright light, and produce the deviation of quasi-molecule luminescence, its result is, the uniformity step-down of the Illumination Distribution obtained.
Patent documentation 1: Japanese Unexamined Patent Publication 7-220689 publication
Summary of the invention
The present invention is based on above such situation and propose, its object is to provide and inside tube can be suppressed relative to the axially eccentric of outboard tube and obtain that there is the Excimer discharge lamp constructed compared with the dual pipe of the Illumination Distribution of high uniformity.
Excimer discharge lamp of the present invention has the discharge vessel of the dual pipe structure be made up of dielectric, this discharge vessel have outboard tube and with the inside tube that configures of this outboard tube coaxial ground, and discharge space is formed between this outboard tube and inside tube, one electrode and another electrode are arranged opposite to each other across above-mentioned discharge vessel, the feature of above-mentioned Excimer discharge lamp is, hollow tube is formed in one end of outboard tube, this hollow tube extends to axial outside and one end sealing and to be innerly communicated with the inside of this outboard tube, the protuberance of the inside being inserted into above-mentioned hollow tube is formed in one end of inside tube.
In Excimer discharge lamp of the present invention, be preferably, the hollow tube that the protuberance of above-mentioned inside tube is communicated with the inside of this inside tube by inside is formed, the end forming the medial electrode formation component of an above-mentioned electrode is inserted in the inside of above-mentioned hollow tube, and on the outer peripheral face of the hollow tube of one end of above-mentioned outboard tube formation, be configured with the part that the lateral electrode forming another electrode above-mentioned forms component.
Invention effect
In Excimer discharge lamp of the present invention, the protuberance being located at one end of inside tube is inserted into the inside of its internal diameter of the one end being located at outboard tube hollow tube less than the internal diameter of this outboard tube, thus, inhibits axially eccentric relative to outboard tube of inside tube.Therefore, be less by the uneven suppression of the interelectrode distance in discharge space, the uneven generation of electric discharge when therefore lamp is lighted is suppressed and suppresses to produce the deviation of quasi-molecule luminescence, and its result is, can obtain having the Illumination Distribution compared with high uniformity.
In addition, Excimer discharge lamp of the present invention can be configured to have the electrode approach portion structure of following local: the end that medial electrode forms component is inserted in the inside of hollow tube to the protuberance forming inside tube, and be located at outboard tube one end hollow tube outer peripheral face on configure the part that lateral electrode forms component.According to the Excimer discharge lamp of this structure, because of local electrode approach portion in lateral electrode and medial electrode current potential close to and easily produce electric discharge, therefore, it is possible to do not sacrifice effective length of illumination of discharge vessel, and startability is improved.
Accompanying drawing explanation
Fig. 1 is the profile of an example of the structure representing Excimer discharge lamp of the present invention.
Fig. 2 is the key diagram of the method for the discharge vessel representing the Excimer discharge lamp forming Fig. 1.
Fig. 3 is the schematic diagram of the example representing Excimer discharge lamp of the present invention.
Fig. 4 is the profile of an example of the structure of the Excimer discharge lamp of the dual pipe structure represented in the past.
Fig. 5 is the key diagram of the method for the discharge vessel representing the Excimer discharge lamp forming Fig. 4.
Description of reference numerals
1 discharge vessel
2 outboard tube
2a cylindrical duct
3 inside tube
3a cylindrical duct
3b flange part
6 blast pipe remnants portions
6a blast pipe
7 lateral electrodes
8 medial electrodes
9A, 9B sealing cap
10 Excimer discharge lamps
11 discharge vessels
12 outboard tube
12a cylindrical duct
13 inside tube
13a cylindrical duct
13b flange part
Hollow tube inside 15
Hollow tube outside 16
16a blast pipe
17 lateral electrodes
18 medial electrodes
19A, 19B sealing cap
20 water treatment facilities
21 housings
21a flow inlet
21b water outlet
22 process chambers
25 through sleeve pipes
E electric supply installation
S discharge space
Embodiment
Fig. 1 is the profile of an example of the structure representing Excimer discharge lamp of the present invention.
This Excimer discharge lamp 10 has the discharge vessel 11 of the dual pipe structure be made up of dielectric.If be described particularly, then discharge vessel 11 has: the inside tube 13 of the outboard tube 12 of the bottomed cylindrical of light transmission and the external diameter bottomed cylindrical less than the internal diameter of this outboard tube 12.Outboard tube 12 and inside tube 13 are configured in outboard tube 12 inside tube 13 along the tubular axis of this outboard tube 12 and the bottom (being left part in FIG) of the bottom of outboard tube 12 (being left part in FIG) and inside tube 13 is positioned at the state of equidirectional.And, under the state that the bottom of the bottom of outboard tube 12 and inside tube 13 exists gap, the edge of opening of this outboard tube 12 is engaged in a gastight manner with the other end side region (being right-hand member side region in FIG) of inside tube 13, and forms the discharge space S of hollow cylindrical.
The outer peripheral face of the outboard tube 12 in discharge vessel 11, lateral electrode 17 touches with the outer peripheral face of this outboard tube 12 and configures.In addition, the internal configurations of the inside tube 13 in discharge vessel 11 has medial electrode 18.
In addition, in FIG, 19A, 19B are sealing caps, and E is electric supply installation.
In this Excimer discharge lamp 10, the outer peripheral face of the cylindrical shape of outboard tube 12 plays function as light exit window.
The thickness (distance between the inner peripheral surface of outboard tube 12 and the outer peripheral face of inside tube 13) of discharge space S is such as 4 ~ 20mm.
As the dielectric substance forming discharge vessel 11, such as synthetic quartz glass can be used.
Hollow tube is formed (following in the bottom of outboard tube 12, also referred to as " outside hollow tube ") 16, this hollow tube 16 extends to axial outside and has bottomed cylindrical inaccessible to one end (being left end in FIG), and by the bottom of the edge of opening of the other end and outboard tube 12 deposition make its inside be communicated with the inside of this outboard tube 12 in a gastight manner.
As hollow tube outside this 16, be preferably its internal diameter and external diameter compared with outboard tube 12 less respectively, blast pipe remnants portion can be used as and the hollow tube that formed.
In addition, in the bottom of inside tube 13, the protuberance that the inside being formed with the outside hollow tube 16 of outside side pipe 12 is inserted.
Specifically, protuberance is (following by hollow tube, also referred to as " inner side hollow tube ") 15 formations, this hollow tube 15 has bottomed cylindrical inaccessible to one end (being left end in FIG), the axially outside of inside side pipe 13 extends, and by the bottom of the edge of opening of the other end and inside tube 13 deposition make its inside be communicated with the inside of this inside tube 13 in a gastight manner.
If enumerate an example of the size of discharge vessel 11, then the external diameter of outboard tube 12 is 18.5mm, internal diameter is 16.5mm, the external diameter of inside tube 13 is 8mm, internal diameter is 6mm, effective length of illumination is 80mm, the external diameter of outside hollow tube 16 is 6.15mm, internal diameter is 4.15mm, length is 15mm, and the external diameter of inner side hollow tube 15 is 3mm, internal diameter is 1mm, length is 12mm.
The inside of the inside tube 13 in discharge vessel 11, the medial electrode 18 be such as made up of wire coil is to extend vertically and the end (in FIG for left part) that the medial electrode forming this medial electrode 18 forms component is inserted into the state configuration of the inside of inner side hollow tube 15.
The outer peripheral face of the outboard tube 12 in discharge vessel 11, the lateral electrode 17 of the cylindrical shape be such as made up of wire netting touches with the outer peripheral face of this outboard tube 12 and configures.
The part that lateral electrode 17 forms component with the lateral electrode forming this lateral electrode 17 extends to arranging with the mode of medial electrode 18 position in opposite directions in the outer peripheral face of outside hollow tube 16, forms the electrode approach portion of local thus.
Electric discharge gas is sealed with in discharge space S in discharge vessel 11.As electric discharge gas, the mist etc. of xenon, argon gas and chlorine can be used.The inclosure of electric discharge gas is different according to the thickness of discharge space S at all, such as, can be set to 100 ~ 300Torr.
The discharge vessel 11 of the Excimer discharge lamp 10 of this dual pipe structure makes in the manner shown in figure 2.
Specifically, first, at the inner side hollow tube 15 of one end (be left end in fig. 2) deposition bottomed cylindrical in a gastight manner of the cylindrical duct 13a (with reference to Fig. 2 (a)) as inside tube 13, and by the other end side region (reference Fig. 2 (b)) of circular flange part 13b deposition in cylindrical duct 13a.Specifically, to there is the internal diameter identical with the external diameter of cylindrical duct 13a and there is the circular flange part 13b of the external diameter identical with the internal diameter of the cylindrical duct 12a as outboard tube 12 described later, heat this cylindrical duct 13a being inserted under the state in flange part 13b, thus deposition is carried out to this flange part 13b.
On the other hand, separately using the blast pipe 16a of cylindrical shape in a gastight manner deposition in the cylindrical duct 12a as outboard tube 12 an end (being left part in fig. 2) (with reference to Fig. 2 (c)).
And, the cylindrical duct 13a coaxial as inside tube 13 being inserted into as under the state in the cylindrical duct 12a of outboard tube 12 in mode inner side hollow tube 15 is inserted in blast pipe 16a, the edge of opening of one end (being right-hand member in fig. 2) of flange part 13b and the cylindrical duct 12a as outboard tube 12 is heated, thus carries out deposition in a gastight manner.In addition, after being filled with electric discharge gas from blast pipe 16a, one end (being right part in fig. 2) of this blast pipe 16a is sealed in a gastight manner, thus the outside hollow tube 16 formed as blast pipe remnants portion, and make the discharge vessel 11 (with reference to Fig. 2 (d)) with discharge space S.
As mentioned above, heating the flange part 13b of the cylindrical duct 12a as the outboard tube 12 and cylindrical duct 13a as inside tube 13 during deposition, inner side hollow tube 15 is in the state of the inside being inserted into outside hollow tube 16.Thus, even if when the cylindrical duct 13a as inside tube 13 acts on relative to the axially eccentric power of the cylindrical duct 12a as outboard tube 12, also make the contact internal walls of inner side hollow tube 15 and outside hollow tube 16 and be kept, therefore, it is possible to prevent inside tube 13 eccentric significantly relative to outboard tube 12.
In above-mentioned Excimer discharge lamp 10, if apply high frequency voltage between electrode 17 and medial electrode 18 laterally by electric supply installation E, then the lateral electrode 17 toward each other in the discharge space S of discharge vessel 11 and produce dielectric barrier between medial electrode 18 and discharge.Its result is, in discharge space S, produce quasi-molecule, and thus, quasi-molecule light radiates via the tube wall of outboard tube 12.
This Excimer discharge lamp 10 such as can use as the light source of water treatment facilities.
Such as, as shown in Figure 3, arranging with in the water treatment facilities 20 of the state two ends of the through process chamber 22 externally through sleeve pipe 25 of the tubular of opening, with this through sleeve pipe 25 coaxial the mode that extends Excimer discharge lamp 10 inserted and use.
Through sleeve pipe 25 is made up of the cylinder of light transmission.
In addition, in figure 3,21 is the housings being formed with process chamber 22 in inside, and 21a is the flow inlet flowed into for process water, and 21b is the water outlet of discharging for process water.
High frequency voltage is applied to Excimer discharge lamp 10 and irradiates to the process water be filled in process chamber 22 via through sleeve pipe 25 via the light that the tube wall of the outboard tube 12 of discharge vessel 11 radiates.Now, because the light radiated from Excimer discharge lamp 10 of the present invention has the Illumination Distribution compared with high uniformity, therefore, it is possible to carry out homogeneous water treatment.
In this Excimer discharge lamp 10, the inner side hollow tube 15 arranged in one end of inside tube 13 is inserted into and arranges and the inside of its internal diameter outside hollow tube 16 little than the internal diameter of this outboard tube 12 in one end of outboard tube 12, thereby inhibiting the axially bias of inside tube 13 relative to outboard tube 12.Therefore, the interelectrode distance in discharge space S uneven is suppressed to less, and the uneven generation of the electric discharge therefore during lamp bright light is suppressed and suppresses to produce the deviation of quasi-molecule luminescence, and its result is, can obtain having the Illumination Distribution compared with high uniformity.
In addition, this Excimer discharge lamp 10 is configured to the structure of the electrode approach portion with following local: the inside of hollow tube 15 is inserted an end of medial electrode formation component and on the outer peripheral face of outside hollow tube 16, configured the part that lateral electrode forms component to the inside.According to the Excimer discharge lamp 10 of this structure, due to because of local electrode approach portion in lateral electrode 17 and medial electrode 18 current potential close to and easily produce electric discharge, therefore, it is possible to do not sacrifice effective length of illumination of discharge vessel 11 and make startability improve.
Above, embodiments of the present invention are illustrated, but the present invention is not limited to above-mentioned execution mode.
Such as, medial electrode 18 and lateral electrode 17 are not limited to by being formed respectively with discharge vessel 11 wire coil, wire netting etc. are formed.Specifically, also can by formed by metal material is carried out slurry coating etc. to the inner peripheral surface of the outer peripheral face of the outboard tube 12 of discharge vessel 11, inside tube 13 with the Structure composing of this discharge vessel 11 one.
Below, the experimental example for confirming effect of the present invention is shown.
< experimental example 1 >
Made 5 shapes roughly shown in Fig. 1, insert inner side hollow tube in hollow tube and insert medial electrode in hollow tube to the inside and the lateral electrode Excimer discharge lamp (1) that extends to the position corresponding with the medial electrode in the hollow tube of inner side and arrange laterally.As follows specifically.
Outboard tube; Material: synthetic quartz glass, external diameter:
internal diameter:
Outside hollow tube; External diameter:
internal diameter:
length: 15mm
Inside tube; Material: synthetic quartz glass, external diameter:
internal diameter:
Inner side hollow tube; External diameter:
internal diameter:
length: 12mm
Effective length of illumination: 80mm
Lateral electrode; By the wire netting that the wire of monel metal is worked out
Medial electrode; Be attached at the aluminium foil of the 17.5mm × 75mm × t0.1mm of the inner peripheral surface of inside tube
Electric discharge gas; Kind: the mist comprising xenon and chlorine, encloses pressure: 200Torr
< experimental example 2 >
Make the Excimer discharge lamp (2) that 5 have eradicated structure identical with above-mentioned Excimer discharge lamp (1) outside following situation difference in experimental example 1: be not inserted into by medial electrode in the hollow tube of inner side, in addition lateral electrode is arranged to the state not extending to the position corresponding with inner side hollow tube, and be set to the structure of the electrode approach portion without local, and the inclosure of electric discharge gas is installed with as 110Torr.
To above Excimer discharge lamp (1), (2), carry out following startability test: utilize the Excimer discharge lamp bright light power supply of Vp-p=4.5kV, frequency 126kHz to make Excimer discharge lamp bright light, and confirm startability.
Uprise if Excimer discharge lamp generally has to enclose to press, be difficult to the tendency of starting.
And, the result of having carried out above-mentioned startability test is that have in the Excimer discharge lamp (1) of the electrode approach portion of local, the inclosure pressure of electric discharge gas is the high pressure of 200Torr, but 5 whole bright lights within 200msec in test radical 5, confirm to have good startability.
In contrast, do not have in the Excimer discharge lamp (2) of the electrode approach portion of local, even if the inclosure pressure of electric discharge gas is 110torr, also all less than bright light within 200msec in test radical 5, confirm start delay occurs.
Claims (2)
1. an Excimer discharge lamp, there is the discharge vessel of the dual pipe structure be made up of dielectric, described discharge vessel have outboard tube and with the inside tube that configures of this outboard tube coaxial ground, and discharge space is formed between this outboard tube and inside tube, one electrode and another electrode are arranged opposite to each other across described discharge vessel
The feature of described Excimer discharge lamp is,
Be formed with hollow tube in one end of outboard tube, described hollow tube extends and one end sealing outside axially, and the inside of described hollow tube is communicated with the inside of this outboard tube,
The protuberance of the inside being inserted into described hollow tube is formed in one end of inside tube.
2. Excimer discharge lamp according to claim 1, is characterized in that,
The hollow tube that the protuberance of described inside tube is communicated with the inside of this inside tube by inside is formed,
The end forming the medial electrode formation component of a described electrode is inserted in the inside of described hollow tube, and
The outer peripheral face of the hollow tube of one end of described outboard tube formation is configured with the part that the lateral electrode forming another electrode described forms component.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014-221002 | 2014-10-30 | ||
| JP2014221002A JP6107789B2 (en) | 2014-10-30 | 2014-10-30 | Excimer discharge lamp |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105575756A true CN105575756A (en) | 2016-05-11 |
| CN105575756B CN105575756B (en) | 2018-12-18 |
Family
ID=55885772
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510701472.4A Active CN105575756B (en) | 2014-10-30 | 2015-10-26 | Excimer discharge lamp |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6107789B2 (en) |
| KR (1) | KR20160052358A (en) |
| CN (1) | CN105575756B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7462524B2 (en) | 2020-09-17 | 2024-04-05 | 株式会社オーク製作所 | Excimer lamps, UV irradiation devices and ozone generators |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004335213A (en) * | 2003-05-06 | 2004-11-25 | Ushio Inc | Excimer lamp |
| US20050253525A1 (en) * | 2004-05-12 | 2005-11-17 | Patent-Treuhand-Gesellschaft Fur Elektrische Gluhlampen Mbh | Tubular dielectric barrier discharge lamp and method for its production |
| JP2007179891A (en) * | 2005-12-28 | 2007-07-12 | Ushio Inc | Excimer lamp |
| CN101878518A (en) * | 2007-11-28 | 2010-11-03 | 皇家飞利浦电子股份有限公司 | Dielectric barrier discharge lamp |
| US20110001426A1 (en) * | 2008-02-21 | 2011-01-06 | Axel Hombach | Dielectric Barrier Discharge Lamp with a Retaining Disc |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3043565B2 (en) * | 1994-01-26 | 2000-05-22 | ウシオ電機株式会社 | Dielectric barrier discharge lamp |
| JP3439679B2 (en) * | 1999-02-01 | 2003-08-25 | 株式会社オーク製作所 | High brightness light irradiation device |
| JP3606154B2 (en) * | 2000-03-30 | 2005-01-05 | ウシオ電機株式会社 | Dielectric barrier discharge lamp device |
-
2014
- 2014-10-30 JP JP2014221002A patent/JP6107789B2/en active Active
-
2015
- 2015-10-26 CN CN201510701472.4A patent/CN105575756B/en active Active
- 2015-10-28 KR KR1020150150247A patent/KR20160052358A/en not_active Application Discontinuation
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004335213A (en) * | 2003-05-06 | 2004-11-25 | Ushio Inc | Excimer lamp |
| US20050253525A1 (en) * | 2004-05-12 | 2005-11-17 | Patent-Treuhand-Gesellschaft Fur Elektrische Gluhlampen Mbh | Tubular dielectric barrier discharge lamp and method for its production |
| JP2007179891A (en) * | 2005-12-28 | 2007-07-12 | Ushio Inc | Excimer lamp |
| CN101878518A (en) * | 2007-11-28 | 2010-11-03 | 皇家飞利浦电子股份有限公司 | Dielectric barrier discharge lamp |
| US20110001426A1 (en) * | 2008-02-21 | 2011-01-06 | Axel Hombach | Dielectric Barrier Discharge Lamp with a Retaining Disc |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105575756B (en) | 2018-12-18 |
| JP2016091618A (en) | 2016-05-23 |
| JP6107789B2 (en) | 2017-04-05 |
| KR20160052358A (en) | 2016-05-12 |
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