CN105575756B - Excimer discharge lamp - Google Patents
Excimer discharge lamp Download PDFInfo
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- CN105575756B CN105575756B CN201510701472.4A CN201510701472A CN105575756B CN 105575756 B CN105575756 B CN 105575756B CN 201510701472 A CN201510701472 A CN 201510701472A CN 105575756 B CN105575756 B CN 105575756B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/046—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by using capacitive means around the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/04—Electrodes; Screens; Shields
- H01J61/06—Main electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/30—Vessels; Containers
- H01J61/33—Special shape of cross-section, e.g. for producing cool spot
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- Vessels And Coating Films For Discharge Lamps (AREA)
Abstract
The present invention provides Excimer discharge lamp, has dual pipe construction, is able to suppress inside tube relative to the axially eccentric of outboard tube and obtains with the Illumination Distribution compared with high uniformity.Excimer discharge lamp has the discharge container for the dual pipe construction being made of dielectric, the inside tube that the discharge container has outboard tube and configures with the outboard tube coaxial, and discharge space is formed between the outboard tube and inside tube, one electrode and another electrode are arranged opposite to each other across above-mentioned discharge container, above-mentioned Excimer discharge lamp is characterized in that, hollow tube is formed in one end of outer side pipe, outside extends the hollow tube in the axial direction and one end seals and inside is connected to the inside of the outboard tube, the protrusion for being inserted into the inside of the hollow tube is formed in one end of inside tube.
Description
Technical field
The present invention relates to the Excimer discharge lamps of dual pipe construction.
Background technique
As an example of Excimer discharge lamp used in sterilization, deodorization, organic pollutant removal based on ultraviolet light etc.,
Such as Patent Document 1 discloses the Excimer discharge lamps of the dual pipe construction with outboard tube and inside tube.
Fig. 4 is the sectional view for indicating an example of the structure of Excimer discharge lamp of previous dual pipe construction.The quasi-molecule
Discharge lamp has the discharge container 1 for the dual pipe construction being made of dielectrics such as synthetic quartz glass, and to institute inside it
Filling forms the electric discharge gas of quasi-molecule in the discharge space S of formation.
If being specifically illustrated, the outboard tube 2 and outer diameter that discharge container 1 has bottomed cylindrical are than the outboard tube 2
The inside tube 3 of the small bottomed cylindrical of internal diameter.It is outer along this that outboard tube 2 and inside tube 3 are configured to the inside tube 3 in outer side pipe 2
The bottom (being left part in Fig. 4) of the pipe axis of side pipe 2 and the bottom (being left part in Fig. 4) of outboard tube 2 and inside tube 3
Positioned at the state of the same direction.Also, it is in the bottom of the bottom of outer side pipe 2 and inside tube 3 there are in the state of gap, this is outer
The open edge of side pipe 2 engages in a gastight manner with the another side region (being right end side region in Fig. 4) of inside tube 3, and
Form the discharge space S of hollow cylindrical.
The outer peripheral surface of outboard tube 2 in discharge container 1, for example, the cylindric lateral electrode 7 that is made of metal mesh with
The outer peripheral surface of the outboard tube 2 touches configuration.In addition, the inside of the inside tube 3 in discharge container 1, such as configured with by metal
The medial electrode 8 that coil is constituted.
In addition, 6 be the portion exhaust pipe remnants, and 9A, 9B are sealing caps, and E is power supply unit in Fig. 4.
In the Excimer discharge lamp, the cylindric outer peripheral surface of outboard tube 2 is functioned as light exit window.
The discharge container 1 of the Excimer discharge lamp of this dual pipe construction is made as shown in Figure 5.
Specifically, firstly, the one end to the cylindrical tube 3a (referring to Fig. 5 (a)) as inside tube 3 (is left in Fig. 5
End) it is sealed, and by circular flange part 3b deposition in the another side region of cylindrical tube 3a (referring to Fig. 5 (b)).
Specifically, to internal diameter identical with the outer diameter of cylindrical tube 3a and have and the cylindrical tube as aftermentioned outboard tube 2
The circular flange part 3b of the identical outer diameter of the internal diameter of 2a, in the state that cylindrical tube 3a is inserted into flange part 3b into
Row heating, to carry out deposition to flange part 3b.
On the other hand, separately by cylindric exhaust pipe 6a in a gastight manner deposition in the cylindrical tube 2a as outboard tube 2
One end (in Fig. 5 be left part) (referring to Fig. 5 (c)).
Also, the mode into the cylindrical tube 2a as outboard tube 2 coaxially is inserted into the cylindrical tube as inside tube 3
3a, and the open edge of one end (being right end in Fig. 5) of the cylindrical tube 2a to flange part 3b and as outboard tube 2 adds
Heat, to carry out deposition in a gastight manner.In addition, after being filled with electric discharge gas from exhaust pipe 6a, to one end of exhaust pipe 6a
Portion's (being right part in Fig. 5) is sealed in a gastight manner, to form the portion exhaust pipe remnants 6, and making has electric discharge empty
Between S discharge container 1 (referring to Fig. 5 (d)).
However, in the discharge container 1 of this Excimer discharge lamp, to the cylindrical tube 2a as outboard tube 2 and as interior
It is formed by flange part 3b on the cylindrical tube 3a of side pipe 3 to be heated when deposition, is heated into synthesis using oxygen-hydrogen burner etc.
The processing temperature (about 2000 DEG C) of quartz glass.At this point, being made by conducting, radiating as interior due to the intensity of a fire of oxygen-hydrogen burner
The temperature of the cylindrical tube 3a of side pipe 3 rises, the deposition relative to outboard tube 2 axially eccentric sometimes of inside tube 3.
If inside tube 3 is with the axially eccentric state relative to outboard tube 2 by deposition, there are the following problems: can be larger
Ground generates the uneven of the interelectrode distance in discharge space S, and the uneven of electric discharge is generated in lamp bright light, and generates quasi-molecule
Luminous deviation, as a result, the uniformity of obtained Illumination Distribution is lower.
Patent document 1: Japanese Unexamined Patent Publication 7-220689 bulletin
Summary of the invention
It is proposed the present invention is based on the situation as above, its purpose is to provide be able to suppress inside tube relative to outer
The Excimer discharge lamp of the dual pipe construction that is axially eccentric and obtaining the Illumination Distribution for having compared with high uniformity of side pipe.
Excimer discharge lamp of the invention has the discharge container for the dual pipe construction being made of dielectric, the discharge container
With outboard tube and the inside tube configured with the outboard tube coaxial, and electric discharge is formed between the outboard tube and inside tube
Space, an electrode and another electrode are arranged opposite to each other across above-mentioned discharge container, and above-mentioned Excimer discharge lamp is characterized in that,
One end of outboard tube is formed with hollow tube, and outside extends and one end sealing and internal with the outboard tube hollow tube in the axial direction
Inside connection, the protrusion for being inserted into the inside of above-mentioned hollow tube is formed in one end of inside tube.
In Excimer discharge lamp of the invention, preferably, the protrusion of above-mentioned inside tube is by the internal and inside tube
The hollow tube of portion's connection is constituted, and the one end for forming the medial electrode formation component of an above-mentioned electrode is inserted in above-mentioned hollow tube
Inside, and configured with the outside for forming above-mentioned another electrode on the outer peripheral surface for the hollow tube that one end of above-mentioned outboard tube is formed
A part of electrode formation component.
Invention effect
In Excimer discharge lamp of the invention, it is inserted into set on the protrusion of one end of inside tube set on one end of outboard tube
The inside of its internal diameter hollow tube smaller than the internal diameter of the outboard tube, thus, it is suppressed that inside tube is relative to the axial inclined of outboard tube
The heart.Therefore, being unevenly suppressed to for the interelectrode distance in discharge space is smaller, therefore electric discharge when lamp is lighted is non-uniform
It generates and is suppressed and inhibits to generate the luminous deviation of quasi-molecule, as a result, can obtain with the illumination compared with high uniformity
Distribution.
In addition, Excimer discharge lamp of the invention can be configured to the electrode proximity structure with following part: to structure
The one end of component is formed at the inside insertion medial electrode of the hollow tube of the protrusion of inside tube, and is being set to the one of outboard tube
A part that lateral electrode forms component is configured on the outer peripheral surface of the hollow tube at end.Excimer discharge lamp according to this structure,
Because the current potential of lateral electrode and medial electrode in the electrode proximity of part close to due to be easy to produce electric discharge, therefore can not be sacrificial
Effective length of illumination of domestic animal discharge container, and improve startability.
Detailed description of the invention
Fig. 1 is the sectional view for indicating an example of structure of Excimer discharge lamp of the invention.
Fig. 2 is the explanatory diagram for indicating to be formed the method for the discharge container of Excimer discharge lamp of Fig. 1.
Fig. 3 is the schematic diagram for indicating the use example of Excimer discharge lamp of the invention.
Fig. 4 is the sectional view for indicating an example of the structure of Excimer discharge lamp of previous dual pipe construction.
Fig. 5 is the explanatory diagram for indicating to be formed the method for the discharge container of Excimer discharge lamp of Fig. 4.
Description of symbols
1 discharge container
2 outboard tubes
2a cylindrical tube
3 inside tubes
3a cylindrical tube
3b flange part
6 portions exhaust pipe remnants
6a exhaust pipe
7 lateral electrodes
8 medial electrodes
9A, 9B sealing cap
10 Excimer discharge lamps
11 discharge containers
12 outboard tubes
12a cylindrical tube
13 inside tubes
13a cylindrical tube
13b flange part
15 inside hollow tubes
16 outside hollow tubes
16a exhaust pipe
17 lateral electrodes
18 medial electrodes
19A, 19B sealing cap
20 water treatment facilities
21 shells
21a flow inlet
21b water outlet
22 process chambers
25 perforation casings
E power supply unit
S discharge space
Specific embodiment
Fig. 1 is the sectional view for indicating an example of structure of Excimer discharge lamp of the invention.
The Excimer discharge lamp 10 has the discharge container 11 for the dual pipe construction being made of dielectric.If specifically carrying out
Illustrate, then discharge container 11 include the bottomed cylindrical of translucency outboard tube 12 and outer diameter it is smaller than the internal diameter of the outboard tube 12
Bottomed cylindrical inside tube 13.Outboard tube 12 and inside tube 13 are configured in outer side pipe 12 inside tube 13 along on the outside of this
The pipe axis of the pipe 12 and bottom (being left part in Fig. 1) of outboard tube 12 and the bottom of inside tube 13 (are left end in Fig. 1
Portion) it is located at the state of the same direction.Also, in the bottom of the bottom of outer side pipe 12 and inside tube 13 there are in the state of gap,
In a gastight manner by the another side region (being right end side region in Fig. 1) of the open edge of the outboard tube 12 and inside tube 13
Engagement, and form the discharge space S of hollow cylindrical.
The outer peripheral surface of outboard tube 12 in discharge container 11, lateral electrode 17 and the outer peripheral surface contiguity of the outboard tube 12 are matched
It sets.In addition, the inside of the inside tube 13 in discharge container 11 is configured with medial electrode 18.
In addition, 19A, 19B are sealing caps in Fig. 1, E is power supply unit.
In the Excimer discharge lamp 10, the cylindric outer peripheral surface of outboard tube 12 is functioned as light exit window.
The thickness (inner peripheral surface of outboard tube 12 and the distance between the outer peripheral surface of inside tube 13) of discharge space S is, for example, 4
~20mm.
As the dielectric substance for constituting discharge container 11, it is able to use such as synthetic quartz glass.
Be formed with hollow tube (hereinafter also referred to as " outside hollow tube ") 16 in the bottom of outer side pipe 12, the hollow tube 16 to
Axially external extend simultaneously has the bottomed cylindrical of one end (in Fig. 1 be left end) occlusion, and by the open edge of the other end
Deposition and it is connected to it internal with the inside of the outboard tube 12 in a gastight manner with the bottom of outboard tube 12.
As the outside hollow tube 16, preferably its internal diameter and outer diameter are smaller respectively compared with outboard tube 12, are able to use
The hollow tube formed as the portion exhaust pipe remnants.
In addition, being formed with the protrusion of the inside insertion of the outside hollow tube 16 of outside side pipe 12 in the bottom of inside tube 13.
Specifically, protrusion is made of hollow tube (hereinafter also referred to as " inside hollow tube ") 15, which has will
The bottomed cylindrical of one end (being left end in Fig. 1) occlusion, the axially external extension of inside side pipe 13, and opening the other end
Mouthful edge and the bottom of inside tube 13 deposition and make to be connected to inside it with the inside of the inside tube 13 in a gastight manner.
If enumerating an example of the size of discharge container 11, the outer diameter of outboard tube 12 is 18.5mm, internal diameter 16.5mm, interior
The outer diameter of side pipe 13 is 8mm, internal diameter 6mm, effective length of illumination are 80mm, and the outer diameter of outside hollow tube 16 is 6.15mm, interior
Diameter is 4.15mm, length 15mm, and the outer diameter of inside hollow tube 15 is 3mm, internal diameter 1mm, length 12mm.
The inside of inside tube 13 in discharge container 11, such as the medial electrode 18 being made of wire coil is along axial direction
The one end (being left part in Fig. 1) for extending and being formed the medial electrode formation component of the medial electrode 18 is inserted into inside
The state of the inside of hollow tube 15 configures.
The outer peripheral surface of outboard tube 12 in discharge container 11, such as the cylindric lateral electrode 17 being made of metal mesh
Touch with the outer peripheral surface of the outboard tube 12 and configures.
Lateral electrode 17 with formed the lateral electrode 17 lateral electrode formed component a part extend to outside it is hollow
The mode of the position opposite with medial electrode 18 in the outer peripheral surface of pipe 16 is arranged, and local electrode proximity is consequently formed.
Electric discharge gas is sealed in the discharge space S in discharge container 11.As electric discharge gas, it is able to use xenon
Gas, argon gas and mixed gas of chlorine etc..Electric discharge gas it is enclosed different according to the thickness of discharge space S at all, such as can
Enough it is set as 100~300Torr.
The discharge container 11 of the Excimer discharge lamp 10 of this dual pipe construction makes in the manner shown in figure 2.
Specifically, firstly, one end in the cylindrical tube 13a (referring to Fig. 2 (a)) as inside tube 13 (is left in Fig. 2
End) deposition bottomed cylindrical in a gastight manner inside hollow tube 15, and by circular flange part 13b deposition in cylindrical tube
The another side region of 13a (referring to Fig. 2 (b)).Specifically, to have internal diameter identical with the outer diameter of cylindrical tube 13a and
Circular flange part 13b with outer diameter identical with the aftermentioned internal diameter of cylindrical tube 12a as outboard tube 12, should
Cylindrical tube 13a is heated in the state of being inserted into flange part 13b, to carry out deposition to flange part 13b.
On the other hand, separately by cylindric exhaust pipe 16a in a gastight manner deposition in the cylindrical tube as outboard tube 12
The one end (being left part in Fig. 2) (referring to Fig. 2 (c)) of 12a.
Also, will be as the cylindrical tube of inside tube 13 in the mode that is inserted into inside hollow tube 15 in exhaust pipe 16a
In the state of being inserted into 13a coaxial in the cylindrical tube 12a as outboard tube 12, to flange part 13b and as outboard tube 12
The open edge of one end (in Fig. 2 be right end) of cylindrical tube 12a heated, to carry out deposition in a gastight manner.This
Outside, after being filled with electric discharge gas from exhaust pipe 16a, to the one end (being right part in Fig. 2) of exhaust pipe 16a with airtight side
Formula is sealed, to form the outside hollow tube 16 as the portion exhaust pipe remnants, and is made the electric discharge with discharge space S and is held
Device 11 (referring to Fig. 2 (d)).
As described above, in the flange part to the cylindrical tube 12a as outboard tube 12 and the cylindrical tube 13a as inside tube 13
13b is heated when deposition, and inside hollow tube 15 is in the state for being inserted into the inside of outside hollow tube 16.Even if as a result,
It is acted in the cylindrical tube 13a as inside tube 13 relative to the axially eccentric power of the cylindrical tube 12a as outboard tube 12
In the case where, so that inside hollow tube 15 is contacted and is kept with the inner wall of outside hollow tube 16, therefore inside tube can be prevented
13 is significantly eccentric relative to outboard tube 12.
In above-mentioned Excimer discharge lamp 10, if by being applied between the outside lateral electrode 17 of power supply unit E and medial electrode 18
Add high frequency voltage, then between the lateral electrode 17 and medial electrode 18 toward each other in the discharge space S of discharge container 11
Generate dielectric barrier electric discharge.As a result, generating quasi-molecule in discharge space S, quasi-molecule light is via outboard tube 12 as a result,
Tube wall and radiate.
This Excimer discharge lamp 10 for example can as water treatment facilities light source and use.
For example, as shown in figure 3, setting with penetrate through tubular from the state both ends of process chamber 22 to external opening perforation set
In water treatment facilities 20 made of pipe 25, Excimer discharge lamp 10 is inserted in a manner of extending with 25 coaxial of perforation casing
Enter and uses.
Perforation casing 25 is made of the cylinder of translucency.
In addition, 21 be to be formed with the shell of process chamber 22 in inside, and 21a is that the water flowed into for processing water flows into Fig. 3
Mouthful, 21b is the water outlet for processing water discharge.
The light that high frequency voltage is applied to Excimer discharge lamp 10 and is radiated via the tube wall of the outboard tube of discharge container 11 12
It is irradiated via perforation casing 25 to the processing water being filled in process chamber 22.At this point, due to from Excimer discharge lamp of the invention
The light of 10 radiation has the Illumination Distribution compared with high uniformity, therefore is able to carry out homogeneous water process.
In this Excimer discharge lamp 10, the inside hollow tube 15 being arranged in one end of inside tube 13 is inserted on the outside
The inside for the outside hollow tube 16 that one end of pipe 12 is arranged and its internal diameter is smaller than the internal diameter of the outboard tube 12 thereby inhibits inside
Pipe 13 is axially eccentric relative to outboard tube 12.Therefore, the interelectrode distance in discharge space S unevenly be suppressed to compared with
It is small, therefore the non-uniform generation of electric discharge when lamp bright light is suppressed and inhibits to generate the luminous deviation of quasi-molecule, as a result,
It can obtain with the Illumination Distribution compared with high uniformity.
In addition, the Excimer discharge lamp 10 is configured to the structure of the electrode proximity with following part: hollow inwardly
The inside insertion medial electrode of pipe 15 forms the one end of component and on the outside configuration outside electricity on the outer peripheral surface of hollow tube 16
A part of pole formation component.Excimer discharge lamp 10 according to this structure, due to outer in the electrode proximity because of part
The current potential of lateral electrode 17 and medial electrode 18 is close and is easy to produce electric discharge, therefore can not sacrifice effective hair of discharge container 11
Light length and improve startability.
More than, embodiments of the present invention are illustrated, but the present invention is not limited to above-mentioned embodiments.
For example, medial electrode 18 and lateral electrode 17 are not limited to wire coil, gold by being respectively formed with discharge container 11
Belong to net etc. to constitute.Specifically, can also from by by metal material to the outer peripheral surface of the outboard tube 12 of discharge container 11, inside
The structure integrated with the discharge container 11 that the inner peripheral surface of pipe 13 carries out slurry coating etc. and formed is constituted.
Hereinafter, showing the experimental example for confirming effect of the invention.
1 > of < experimental example
5 shapes substantially shown in FIG. 1, insertion inside hollow tube and hollow inwardly in hollow tube outward are made
Insertion medial electrode and lateral electrode extend to position corresponding with the medial electrode in the hollow tube of inside and the standard that is arranged in pipe
Molecular discharge lamp (1).It is specifically as follows.
Outboard tube；Material: synthetic quartz glass, outer diameter:Internal diameter:
Outside hollow tube；Outer diameter:Internal diameter:Length: 15mm
Inside tube；Material: synthetic quartz glass, outer diameter:Internal diameter:
Inside hollow tube；Outer diameter:Internal diameter:Length: 12mm
Effective length of illumination: 80mm
Lateral electrode；The metal mesh that the wire of monel metal is worked out
Medial electrode；It is attached at 17.5mm × 75mm × t 0.1mm aluminium foil of the inner peripheral surface of inside tube
Gas is used in electric discharge；Type: the mixed gas comprising xenon and chlorine encloses pressure: 200Torr
2 > of < experimental example
It has made 5 and has eradicated except following situation is different in experimental example 1 the identical knot with above-mentioned Excimer discharge lamp (1)
The Excimer discharge lamp (2) of structure: medial electrode is not inserted into the hollow tube of inside, in addition is arranged to not extend by lateral electrode
The extremely state of position corresponding with inside hollow tube, and it is set as the structure of the electrode proximity without part, and will electric discharge
110Torr is set as with the enclosed pressure of gas.
To above Excimer discharge lamp (1), (2), following startability test is carried out: having utilized Vp-p=4.5kV, frequency
The Excimer discharge lamp bright light power supply of rate 126kHz makes Excimer discharge lamp bright light, and confirms startability.
Excimer discharge lamp generally has the tendency being difficult to start up if enclosed buckling height.
Also, the result for having carried out above-mentioned startability test is to have the quasi-molecule electric discharge of the electrode proximity of part
In lamp (1), the enclosed pressure of electric discharge gas is the high pressure of 200Torr, but test radical 5 in 5 all 200msec with
Interior bright light, it is thus identified that there is good startability.
In contrast, not having in the Excimer discharge lamp (2) of the electrode proximity of part, even if the electric discharge envelope of gas
Entering pressure is 110torr, the also equal not no bright light within 200msec in test radical 5, it is thus identified that generation start delay.
Claims (1)
1. a kind of Excimer discharge lamp has the discharge container for the dual pipe construction being made of dielectric, the discharge container tool
The inside tube for having outboard tube and being configured with the outboard tube coaxial, and electric discharge sky is formed between the outboard tube and inside tube
Between, an electrode and another electrode are arranged opposite to each other across the discharge container,
The Excimer discharge lamp is characterized in that,
It is formed with outside hollow tube in one end of outer side pipe, outside extends the outside hollow tube in the axial direction and one end seals, institute
The inside for stating outside hollow tube is connected to the inside of the outboard tube,
The inside hollow tube for being inserted into the inside of the outside hollow tube, the inside hollow tube are formed in one end of inside tube
Inside be connected to the inside of the inside tube,
The internal diameter and outer diameter of the inside hollow tube are respectively smaller than the internal diameter and outer diameter of the inside tube, and the inside is hollow
The outer diameter of pipe is less than the internal diameter of the outside hollow tube,
The medial electrode for forming an electrode forms the one end of component and is inserted in the inside of the inside hollow tube, and
Configured with the outside electricity for forming another electrode on the outer peripheral surface for the outside hollow tube that one end of the outboard tube is formed
A part of pole formation component.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014221002A JP6107789B2 (en) | 2014-10-30 | 2014-10-30 | Excimer discharge lamp |
| JP2014-221002 | 2014-10-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105575756A CN105575756A (en) | 2016-05-11 |
| CN105575756B true CN105575756B (en) | 2018-12-18 |
Family
ID=55885772
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510701472.4A Active CN105575756B (en) | 2014-10-30 | 2015-10-26 | Excimer discharge lamp |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6107789B2 (en) |
| KR (1) | KR20160052358A (en) |
| CN (1) | CN105575756B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7462524B2 (en) | 2020-09-17 | 2024-04-05 | 株式会社オーク製作所 | Excimer lamps, UV irradiation devices and ozone generators |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101878518A (en) * | 2007-11-28 | 2010-11-03 | 皇家飞利浦电子股份有限公司 | Dielectric barrier discharge lamp |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3043565B2 (en) * | 1994-01-26 | 2000-05-22 | ウシオ電機株式会社 | Dielectric barrier discharge lamp |
| JP3439679B2 (en) * | 1999-02-01 | 2003-08-25 | 株式会社オーク製作所 | High brightness light irradiation device |
| JP3606154B2 (en) * | 2000-03-30 | 2005-01-05 | ウシオ電機株式会社 | Dielectric barrier discharge lamp device |
| JP4461707B2 (en) * | 2003-05-06 | 2010-05-12 | ウシオ電機株式会社 | Excimer lamp |
| DE102004023460A1 (en) * | 2004-05-12 | 2005-12-08 | Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH | Tubular dielectric barrier discharge lamp and method for its production |
| JP4816075B2 (en) * | 2005-12-28 | 2011-11-16 | ウシオ電機株式会社 | Excimer lamp |
| JP5200250B2 (en) * | 2008-02-21 | 2013-06-05 | オスラム ゲーエムベーハー | Dielectric barrier discharge lamp with holding disc |
-
2014
- 2014-10-30 JP JP2014221002A patent/JP6107789B2/en active Active
-
2015
- 2015-10-26 CN CN201510701472.4A patent/CN105575756B/en active Active
- 2015-10-28 KR KR1020150150247A patent/KR20160052358A/en not_active Application Discontinuation
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101878518A (en) * | 2007-11-28 | 2010-11-03 | 皇家飞利浦电子股份有限公司 | Dielectric barrier discharge lamp |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20160052358A (en) | 2016-05-12 |
| CN105575756A (en) | 2016-05-11 |
| JP6107789B2 (en) | 2017-04-05 |
| JP2016091618A (en) | 2016-05-23 |
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