CN105514301B - 蒸镀装置及蒸镀方法 - Google Patents

蒸镀装置及蒸镀方法 Download PDF

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CN105514301B
CN105514301B CN201610039759.XA CN201610039759A CN105514301B CN 105514301 B CN105514301 B CN 105514301B CN 201610039759 A CN201610039759 A CN 201610039759A CN 105514301 B CN105514301 B CN 105514301B
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沐俊应
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Wuhan China Star Optoelectronics Technology Co Ltd
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Abstract

本发明提供一种蒸镀装置，包括载台、底座和光源，所述载台放置于所述底座上，所述底座上还设置有真空针脚，所述真空针脚能够相对所述底座移动，所述载台上设置有针孔，所述真空针脚穿过所述针孔以吸附基板，所述载台远离所述底座的一侧涂覆有光敏粘合剂，所述光源用于照射介于所述载台与所述基板之间的所述光敏粘合剂，使其粘性下降，以便将基板与载台分离，从而实现较小的形变，达到提升产品良率的技术效果。本发明的蒸镀方法在基板与间隔垫分离时能实现较小的形变，达到提升产品良率的技术效果。

Description

蒸镀装置及蒸镀方法
技术领域
本发明涉及显示技术领域的制造设备，尤其涉及一种蒸镀装置及方法。
背景技术
有机发光二极管(OrganicLightEmittingDiode，简称OLED)是一种有机薄膜电致发光器件，其具有易形成柔性结构、视角宽等优点；因此，利用有机发光二极管的显示技术已成为一种重要的显示技术。
对有机发光器件的基板进行蒸镀的蒸镀装置包括蒸镀腔体、位于蒸镀腔体内的蒸镀源和用于承载基板的载板。目前，在对有机发光器件的基板进行蒸镀作业时，通常将基板粘贴在载板上，然后基板的向下、且蒸镀源向上的蒸镀方式进行蒸镀，进而能够避免蒸镀腔室内落下的粒子对器件本身造成影响。当基板蒸镀完成后翻转载板，使载板的承载面向上，然后控制针脚装置的针脚自载板的针孔穿过以将基板顶起，以使基板与载板的承载面分离。但是在分离过程中，由于基板与所述载板粘贴过紧，针脚将基板顶起时会使得基板布局发生较大的形变，造成产品不良。因此亟待改进。
发明内容
本发明的目的在于提供一种蒸镀装置，通过该装置可以有效减小基板蒸镀过程中产生的形变，提高产品的良率。
本发明的另一目的在于提供一种采用上述蒸镀装置对基板进行蒸镀的方法。
为了实现上述目的，本发明实施方式提供如下技术方案：
本发明提供一种蒸镀装置，包括载台、底座和光源，所述载台放置于所述底座上，所述底座上还设置有真空针脚，所述真空针脚能够相对所述底座移动，所述载台上设置有针孔，所述真空针脚穿过所述针孔以吸附基板，所述载台远离所述底座的一侧涂覆有光敏粘合剂，所述光源用于照射介于所述载台与所述基板之间的所述光敏粘合剂，使其粘性下降。
其中，所述载台包括载板和间隔垫，所述间隔垫贴附于所述载板上，所述间隔垫介于所述载板与所述基板之间，所述针孔设在所述载板上，所述间隔垫在远离所述载板的一侧涂覆有所述光敏粘合剂。
其中，所述间隔垫包括粘接片和固定于所述粘接片两侧的胶垫，所述粘接片上设有与所述针孔相连通的通孔，所述胶垫在远离所述粘接片的一侧涂覆有所述光敏粘合剂。
其中，所述载板为透明材料制成，所述光源能够透过所述载板照射所述光敏粘合剂。
其中，所述胶垫通过粘合剂贴附于所述粘接片两侧。
其中，所述针孔呈阵列分布，所述针孔与真空针脚一一对应。
其中，所述光源为紫外线光源。
本发明还提供一种蒸镀方法，包括如下步骤：
将载台放置于底座上，所述底座上的真空针脚伸出并穿过所述载台上的针孔；
将基板放置于所述真空针脚上，所述真空针脚吸附所述基板；
所述真空针脚缩回所述底座，使得所述基板与所述载台接触，所述基板与所述载台之间通过光敏粘合剂粘接；
对所述基板进行蒸镀后，光源照射所述基板与所述载台之间的光敏粘合剂，以使得所述光敏粘合剂的粘性下降；
底座上的真空针脚伸出并穿过所述载台上的针孔将所述基板顶起，使所述基板与所述载台分离。
其中，所述载台包括载板和间隔垫，所述间隔垫两侧通过光敏粘合剂分别贴附所述载板和所述基板，所述基板与所述间隔垫分离后，所述光源照射所述载板和所述间隔垫之间的光敏粘合剂，所述光敏粘合剂的粘性下降后，将所述间隔垫从所述载板上去除。
其中，所述光源为紫外线光源。
本发明实施例具有如下优点或有益效果：
本发明提供的蒸镀装置将基板通过光敏粘合剂贴附在载台上，然后通过移动载台完成对基板的蒸镀过程，蒸镀完成后通过光源照射所述光敏粘合剂，以使得光敏粘合剂粘性降低，然后通过真空针脚将基板顶起，使其与载台分离，从而实现较小的形变，达到提升产品良率的技术效果。本发明的蒸镀方法在基板与间隔垫分离时能实现较小的形变，达到提升产品良率的技术效果。
附图说明
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。
图1是本发明第一种实施方式蒸镀装置结构示意图；
图2是本发明第二种实施方式蒸镀装置结构示意图。
具体实施方式
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明的一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动的前提下所获得的所有其它实施例，都属于本发明保护的范围。
此外，以下各实施例的说明是参考附加的图示，用以例示本发明可用以实施的特定实施例。本发明中所提到的方向用语，例如，“上”、“下”、“前”、“后”、“左”、“右”、“内”、“外”、“侧面”等，仅是参考附加图式的方向，因此，使用的方向用语是为了更好、更清楚地说明及理解本发明，而不是指示或暗指所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本发明的限制。
在本发明的描述中，需要说明的是，除非另有明确的规定和限定，术语“安装”、“相连”、“连接”应做广义理解，例如，可以是固定连接，也可以是可拆卸地连接，或者一体地连接；可以是机械连接；可以是直接相连，也可以通过中间媒介间接相连，可以是两个元件内部的连通。对于本领域的普通技术人员而言，可以具体情况理解上述术语在本发明中的具体含义。
此外，在本发明的描述中，除非另有说明，“多个”的含义是两个或两个以上。若本说明书中出现“工序”的用语，其不仅是指独立的工序，在与其它工序无法明确区别时，只要能实现该工序所预期的作用则也包括在本用语中。另外，本说明书中用“～”表示的数值范围是指将“～”前后记载的数值分别作为最小值及最大值包括在内的范围。在附图中，结构相似或相同的用相同的标号表示。
请参阅图1，本发明的第一种实施方式中，蒸镀装置包括载台10、底座20和光源(图未示出)，所述载台10用于承载基板50，通过移动和旋转所述载台10实现对基板50的蒸镀过程。所述载台10放置于所述底座20上，所述底座20上还设置有真空针脚21，所述真空针脚21能够相对于所述底座所在的水平面沿竖直方向移动，所述真空针脚21与空气压缩设备(图未示出)相连接，所述载台10上设置有针孔30，所述真空针脚21能够穿过所述针孔30以吸附所述基板50。所述载台10在远离所述底座20的一侧涂覆有光敏粘合剂，所述基板50与所述载台10之间通过所述光敏粘合剂可分离连接。所述光敏粘合剂在所述光源的作用下粘性下降，以便所述基板50与所述载台10顺利分离。
进一步具体的，所述载台10包括载板11和间隔垫12，所述间隔垫12贴附于所述载板11上。所述间隔垫12用于间隔开所述基板50与所述载板11，所述间隔垫12在远离所述载板的一侧涂覆有所述光敏粘合剂，用于粘接所述基板50。在保证粘接强度的前提下，通过设置间隔垫12可以减小载台10与所述基板50的接触面积，以便于蒸镀结束后将所述基板50从所述载台10上分离。
进一步具体的，所述载板11上阵列设有所述针孔30，所述间隔垫12设置在所述针孔30之间的区域。所述针孔30与所述真空针脚21一一对应。
可以理解的是，本发明的蒸镀装置还包括控制系统、移动机构、旋转机构和蒸镀机构等等，因这些机构不是本发明的重点，此处没有详细介绍。
可以理解的是，所述真空针脚21吸附所述基板50的压力和时间可以在控制系统中预先设置，以使得当所述真空针脚21下降，所述基板50恰好贴附在所述间隔垫12上时，真空针脚恰好放开对所述基板50的吸附作用。
在其他实施方式中，所述载台10可以仅包括载板11，也就是说可以将所述基板50通过光敏粘合剂直接贴附于所述载板11上。
进一步的，所述光源为紫外线(Ultraviolet，简称UV)光源。
显而易见的，在其他实施方式中，所述光敏粘结剂还可以为其他形式的粘结剂，只要是能够通过一定的处理方式后降低粘结剂的粘结性的即可。例如所述光敏粘结剂还可以是热敏粘结剂，相应的通过热源替换所述光源，同样可以达到上述效果。本发明只是做示范性举例，任何在上述实施方式的精神和原则之内所作的修改、等同替换和改进等，均应包含在该技术方案的保护范围之内。
请参阅图2，本发明的第二种实施方式与第一种实施方式的区别点在于，本实施方式的间隔垫42包括粘接片421和胶垫422，所述胶垫422通过高粘性粘合剂贴附于所述粘接片421两侧。也就是说所述胶垫422与所述粘接片421为不可分离的。在其他实施方式中，粘接片421和胶垫422还可以为一体成型。所述胶垫422在远离所述粘接片421的一侧涂覆有光敏粘合剂。也就是说所述间隔垫42与所述载板11、所述基板50都是通过光敏粘合剂粘接。所述粘接片421上还设有与所述针孔30相连通的通孔(图未编号)，所述真空针脚21可以穿过所述针孔30和所述通孔以吸附基板50。
进一步的，所述载板11为透明材料制成。以便紫外线光源能够通过所述载板11，对光敏粘合剂进行光照，以分离所述载板11和所述间隔垫42。
由于在基板50的蒸镀过程是在真空环境下进行的，在第一种实施方式中，当需要蒸镀下一个基板时，需要在间隔垫12上重复涂覆光敏粘合剂，但在真空环境中重复涂覆光敏粘合剂比较困难。因此本实施方式中将间隔垫42与载板11之间也通过光敏粘合剂进行贴附，在将基板50与间隔垫42分离后，对胶垫422与载板11之间的光敏粘合剂也进行光照，以将间隔垫42从所述载板11上取下。进行下一个基板的蒸镀过程时，可以更换新的间隔垫。从而省去了在真空环境中涂覆光敏粘合剂的过程。
本发明提供的蒸镀装置将基板通过光敏粘合剂贴附在载台上，然后通过移动载台完成对基板的蒸镀过程，蒸镀完成后通过光源照射所述光敏粘合剂，以使得光敏粘合剂粘性降低，然后通过真空针脚将基板顶起，使其与载台分离，从而实现较小的形变，达到提升产品良率的技术效果。本发明的蒸镀方法在基板与间隔垫分离时能实现较小的形变，达到提升产品良率的技术效果。
本发明还提供一种蒸镀方法，包括如下步骤：
先将载台放置于底座上，所述底座上的真空针脚伸出于所述底座，且穿过所述载台上的针孔；
然后再将基板放置于所述真空针脚上，真空针脚吸附所述基板；
所述真空针脚缩回所述底座，使得所述基板与所述载台接触，两者之间通过光敏粘合剂粘接；此时所述针脚继续缩回底座，以使得针脚与所述基板分离，所述基板被粘贴在所述载台上；
再者，移动和旋转所述载台，以对所述基板进行蒸镀，蒸镀完成后将所述载台放回所述底座上；
通过光源照射所述基板与所述载台之间的光敏粘合剂，以使得所述光敏粘合剂的粘性下降；
最后，底座上的真空针脚伸出并穿过所述载台上的针孔30将所述基板顶起，使所述基板与所述载台分离。在这个过程中，所述真空针脚可以不用吸附所述基板。
进一步具体的，所述载台包括载板和间隔垫，所述间隔垫两侧通过光敏粘合剂分别贴附所述载板和所述基板，所述基板与所述间隔垫分离后，所述光源照射所述载板和所述间隔垫之间的光敏粘合剂，所述光敏粘合剂的粘性下降后，将所述间隔垫从所述载板上去除。当需要对下一个基板进行蒸镀时，可以更换新的间隔垫。
进一步具体的，所述光源为紫外线(Ultraviolet，简称UV)光源。
在本说明书的描述中，参考术语“一个实施例”、“一些实施例”、“示例”、“具体示例”或“一些示例”等的描述意指结合该实施例或示例描述的具体特征、结构、材料或者特点包含于本发明的至少一个实施例或示例中。在本说明书中，对上述术语的示意性表述不一定指的是相同的实施例或示例。而且，描述的具体特征、结构、材料或特点可以在任何的一个或多个实施例或示例中以合适的方式结合。
以上所述的实施方式，并不构成对该技术方案保护范围的限定。任何在上述实施方式的精神和原则之内所作的修改、等同替换和改进等，均应包含在该技术方案的保护范围之内。

Claims (8)

1.一种蒸镀装置，其特征在于，包括载台、底座和光源，所述载台放置于所述底座上，所述载台包括载板和间隔垫，所述间隔垫贴附于所述载板上，所述载板上设置有针孔，所述间隔垫包括粘接片和固定于所述粘接片两侧的胶垫，所述粘接片上设有与所述针孔相连通的通孔，所述胶垫在远离所述粘接片的一侧涂覆有光敏粘合剂，所述底座上还设置有真空针脚，所述真空针脚能够相对所述底座移动，所述真空针脚穿过所述针孔以吸附基板，所述光源用于照射介于所述载台与所述基板之间的所述光敏粘合剂，使其粘性下降。
2.如权利要求1所述的蒸镀装置，其特征在于，所述载板为透明材料制成，所述光源能够透过所述载板照射所述光敏粘合剂。
3.如权利要求1所述的蒸镀装置，其特征在于，所述胶垫通过粘合剂贴附于所述粘接片两侧。
4.如权利要求1所述的蒸镀装置，其特征在于，所述针孔呈阵列分布，所述针孔与真空针脚一一对应。
5.如权利要求1所述的蒸镀装置，其特征在于，所述光源为紫外线光源。
6.一种蒸镀方法，其特征在于，包括如下步骤：
将载台放置于底座上，所述底座上的真空针脚伸出并穿过所述载台上的针孔，所述载台包括载板和间隔垫，所述间隔垫两侧通过光敏粘合剂分别贴附所述载板和基板；
将所述基板放置于所述真空针脚上，所述真空针脚吸附所述基板；
所述真空针脚缩回所述底座，使得所述基板与所述载台接触，所述基板与所述载台之间通过所述光敏粘合剂粘接；
对所述基板进行蒸镀后，光源照射所述基板与所述载台之间的光敏粘合剂，以使得所述光敏粘合剂的粘性下降；
底座上的真空针脚伸出并穿过所述载台上的针孔将所述基板顶起，使所述基板与所述载台分离。
7.如权利要求6所述的蒸镀方法，其特征在于，所述载台包括载板和间隔垫，所述间隔垫两侧通过光敏粘合剂分别贴附所述载板和所述基板，所述基板与所述间隔垫分离后，所述光源照射所述载板和所述间隔垫之间的光敏粘合剂，所述光敏粘合剂的粘性下降后，将所述间隔垫从所述载板上去除。
8.如权利要求6所述的蒸镀方法，其特征在于，所述光源为紫外线光源。
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