CN105510357A - Smart chip defect inspection machine - Google Patents
Smart chip defect inspection machine Download PDFInfo
- Publication number
- CN105510357A CN105510357A CN201510673011.0A CN201510673011A CN105510357A CN 105510357 A CN105510357 A CN 105510357A CN 201510673011 A CN201510673011 A CN 201510673011A CN 105510357 A CN105510357 A CN 105510357A
- Authority
- CN
- China
- Prior art keywords
- charging tray
- waste material
- inspection machine
- material tray
- chip defect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The present invention discloses a smart chip defect inspection machine, and relates to the field of visual inspection of surface fine features of a semiconductor, the smart chip defect inspection machine includes a machine base and a master controller, the machine base is provided with testing equipment used to detect the surface features of a semiconductor product, a material placing device for automatic placement of a material tray, a material unloading device for automatic collection of the material tray after detection, a material tray movement device for moving and positioning the material tray and a material taking and placing machine hand, the movement step distance of the material tray movement device is same as the distance between to-be-tested devices on the material tray, the material tray is delivered to the material tray movement platform by the material placing device and the material taking and placing machine hand, after the material tray is positioned and fixed on the material tray movement platform, the material tray can be detected, a lot of manual operation can be saved, and after one device on the material tray is detected, the material tray movement platform may moves by one step distance to detect next device to achieve assembly-line-type material tray detection.
Description
Technical field
The present invention is provided with semiconductor material surface feature detection field, has a kind of material tray type semiconductor surface tiny characteristics to being loaded with device of design and carries out complete detection, and the equipment that can detect each device,
Background technology
The vision-based detection of the fine feature of semiconductor surface generally needs to pass through microscopic examination, existing detection method is first put under the microscope by the charging tray being loaded with device, then microscopical focal length is regulated, then the situation on charging tray surface is observed by display, after having detected a certain position, mobile microscope is now needed to measure next position, adopt said method, often measure a position and all will move microscope, and cannot ensure all to detect the every part on charging tray, the mode of sampling Detection can only be adopted, the quality of each charging tray cannot be ensured.And above-mentioned detection method inefficiency, need a large amount of manual operations.
Summary of the invention
The technical problem to be solved in the present invention solves above-mentioned the deficiencies in the prior art, provides a kind of efficiency high, the chip defect intelligence inspection machine that can detect one by one the device on charging tray surface.
In order to solve the problems of the technologies described above, the technical solution used in the present invention is: a kind of chip defect intelligence inspection machine, comprise support and main control, described support is provided with the checkout equipment detecting semiconductor product surface characteristics, described support is also provided with, the discharging device of automatic placement charging tray, automatically the blanking device of charging tray after detecting is collected, for charging tray mobile device that is mobile and location charging tray, by charging tray from discharging device move to charging tray mobile device picking and placeing material mechanical arm and charging tray moved to blanking device from charging tray mobile device pick and place material mechanical arm, the moving step pitch of described charging tray mobile device is identical with the spacing between the device on charging tray to be detected, described checkout equipment, discharging device, blanking device, charging tray mobile device, first picks and places material mechanical arm, second picks and places material mechanical arm all connects in controller.
As improvement, described support is also provided with one by the waste material ejection assembly of defective position excision on charging tray, described waste material ejection assembly is arranged on and checkout equipment correspondence position.
As preferably, described waste material ejection assembly comprises a slide rail and drift, and described drift and slide rail are slidably matched, and described drift is arranged on and checkout equipment correspondence position.
As improvement, described support is also provided with the waste material removing the rejected part that drift ejects and discharges assembly.
As preferably, described waste material discharges the mechanical arm that assembly comprises slide rail and slides on slide rail, and described mechanical arm end is provided with the waste material suction nozzle drawing waste material.
As preferably, described discharging device comprises a pallet and charging tray box, described charging tray box is arranged on pallet, charging tray box is provided with the groove of several levels, charging tray to be detected is placed in a groove one by one, tray bottom also has a jacking gear, and the step pitch of jacking gear is identical with the flute pitch of charging tray box.
As preferably, described charging tray mobile platform comprises a chassis, outward flange on described chassis is provided with two limited posts, two sensors corresponding with charging tray outward flange are provided with above described chassis, also be provided with two briquettings matched with chassis above described chassis, described support is provided with the slide rail that supply disk mobile platform slides in the horizontal direction.
Can the present invention have the following advantages from technique scheme: expect that charging tray is delivered to mobile platform by mechanical arm by discharging device with picking and placeing, fixing behind location on a mobile platform, after this just can detect charging tray, a large amount of manual operation can be saved, after often having detected a device on charging tray, charging tray mobile platform can move a step pitch and detect next device, realizes carrying out pipeline system detection to charging tray.
Jacking gear on discharging device and blanking device can realize automatic discharging blanking, drift is utilized to eject underproof waste material, and can realize classifying to waste material, deflect when the limited post on charging tray mobile platform can prevent charging tray from placing or pros and cons inversion.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention;
Fig. 2 is the enlarged drawing of charging tray mobile platform in the present invention;
Fig. 3 is the enlarged drawing of waste material ejection assembly in the present invention;
Fig. 4 is the enlarged drawing that in the present invention, waste material discharges assembly;
Fig. 5 is the enlarged drawing picking and placeing material mechanical arm in the present invention;
Shown in figure: 1, support; 2, discharging device; 3, material mechanical arm is picked and placeed; 3.1, clamping part; 3.2, pusher portion; 4 charging tray mobile platforms; 4.1, chassis; 4.2, sensor; 4.3, briquetting; 5, microscope is detected; 6, display; 7, waste material discharges assembly; 7.1, slide rail; 7.2, mechanical arm; 7.3, waste material; 7.4, waste material box; 8, waste material ejection assembly; 8.1, drift; 9, control panel.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is elaborated.
As shown in the figure, the present invention includes a support 1, support is provided with discharging device 2, this device is provided with a pallet, charging tray box is arranged on pallet, charging tray box is provided with the groove of several levels, and charging tray box is provided with snap close, charging tray to be detected is placed in a groove one by one, this device is also provided with two sensors, whether a sensor is placed on pallet for detecting charging tray box, whether another sensor detects snap close and opens, tray bottom also has a jacking gear, the step pitch of jacking gear is identical with the spacing of charging tray box, when the charging tray on charging tray box is at every turn after removed one, jacking gear rises a step, the charging tray being positioned at charging tray box top is made to remain at same level.
Support 1 is also provided with two groups and picks and places material mechanical arm 3, this mechanical arm has clamping part 3.1 and pusher portion 3.2, on clamping part and pusher portion and charging tray box, the charging tray of top remains on same level, support 1 is provided with horizontal slide rail, this mechanical arm can slide on slide rail, first group picks and places material mechanical arm for capturing charging tray in charging tray box and promoting charging tray, and second group of mechanical arm is used for the tablet after detecting to be transported in material-storing box.
Support is also provided with charging tray mobile platform 4, mobile platform is provided with a rotatable chassis 4.1, edge, chassis 4.1 is provided with two limited posts 4.2, edge on charging tray to be detected is provided with two breach, if charging tray is placed correct, two limited posts overlap with the breach on charging tray, if charging tray has the deflection in horizontal direction when placing, limited post 4.2 cannot overlap with breach, two sensors are also provided with above chassis, sensor is corresponding with the outward flange of charging tray, the outward flange of charging tray is irregular arc, in nonaxisymmetrical shape, therefore when charging tray pros and cons is inverted, this sensor can detect, two briquettings 4.3 are provided with above chassis, when behind charging tray location, charging tray and chassis 4.1 are fixed by briquetting 4.3, chassis 4.1 is driven by belt pulley and rotates, the slide rail of horizontal direction is provided with below charging tray mobile platform 4, charging tray mobile platform 4 can move left and right after slide rail is gone forward (on surface level direction), moving of charging tray mobile platform 4 is controlled by primary controller.
On support 1 and the position corresponding with chassis 4.1 is provided with the scanner detecting microscope 5 and scan the information such as Quick Response Code or bar code, detection microscope connects a display 6.
This support 1 is also provided with waste material ejection assembly 8, this assembly has a slide rail and drift 8.1, drift 8.1 can slide on slide rail, this drift is arranged on and detects microscope correspondence position, and drift is arranged on below chassis 4.1, when detection microscope inspection measures rejected part, now drift 8.1 ejects this rejected part, and this waste material ejection assembly 8 is by main controller controls.
Support is also provided with waste material and discharges assembly 7, this assembly has a slide rail 7.1, on slide rail, 7.1 are provided with a mechanical arm 7.2, mechanical arm 7.2 is provided with waste material suction nozzle 7.3, this assembly is also provided with several waste material boxes 7.4, and waste material box 7.4 is arranged on waste material suction nozzle 7.3 correspondence position, is provided with slide rail bottom waste material box 7.4, waste material box can slide on slide rail, and the drive unit of waste material box is controlled by primary controller.
Support is also provided with blanking device, and this device and discharging device are substantially identical, and second group picks and places material mechanical arm and be arranged between charging tray mobile platform and blanking device.
That the master controller of this equipment adopts is Mitsubishi FX3UPLC, each block motion of equipment is controlled, the present invention is provided with an operating platform 9, operating platform is provided with keyboard and various function button, the various instructions that operating platform sends are controlled through row each assembly by primary controller, as controlled the movement of mobile platform, pick and place the movement etc. of material mechanical arm, each sensor is also connected with primary controller, master controller connects alarm again, when sensor sensing places mistake to charging tray, alarm can give the alarm.
Workflow of the present invention is: place on the pallet of discharging device by the charging tray box that charging tray is housed, sensor detects through row charging tray box, master controller will judge detection signal, if do not sense charging tray box, master controller arrestment quits work and reports to the police, the snap close of another sensor to charging tray box detects, if buckle structure is not opened, now also can send signal and remind staff; After snap close is opened, the clamping part 3.1 that main controller controls picks and places material mechanical arm 3 captures a charging tray, then charging tray is placed on charging tray mobile platform 4, with pusher portion 3.2, charging tray is all pushed on the chassis 4.1 of charging tray mobile platform 4 again, the limited post 4.2 at the breach of charging tray and edge, chassis 4.1 is coincide, the outward flange of sensor on this platform to charging tray detects, and judges whether to there is the inverted situation of charging tray pros and cons; Charging tray box removed one of charging tray after, the jacking gear below pallet can move up a step pitch, makes the charging tray of charging tray box top expect that mechanical arm keeps a surface level with picking and placeing all the time; After sensor detection is errorless, controller sends instruction, charging tray and chassis 4.2 compress by the briquetting 4.3 on charging tray mobile platform 4, whole charging tray mobile platform 4 starts to slide subsequently, on charging tray first device is moved to and detects below microscope 5, scanner scans the Quick Response Code on charging tray or bar code, according to the unlike signal scanned, the step pitch of master controller setting charging tray mobile platform 4 and movement locus, the device detected on microscope 5 pairs of charging trays detects, and image display on the display 6; After on charging tray, device often detects one, charging tray mobile platform, according to the step pitch size of a setting mobile step pitch automatically, makes next device be positioned at the center detecting microscope 6, and the movement locus of charging tray mobile device can be determined according to the information of scanner reading; When finding that there is underproof device, by the drift 8.1 of parametric controller operation waste material liftout attachment, waste material is ejected charging tray, the waste material ejected is drawn and is put into waste material box 7.4 by the waste material suction nozzle 7.3 of junk remover subsequently, waste material box is controlled mobile by controller, according to the Exception Type of device, controller can control corresponding waste material box and move to below suction nozzle, realizes the classification to waste material; After detecting charging tray, blowing mechanical arm 3 charging tray moves on blanking device, often detects a charging tray, and the jacking gear of rewinding end can decline a step pitch, thus realizes automatic blanking.
In sum, the present invention can realize the trickle detection of semiconductor product minutiae, realizes stacked material loading, the automatic fetching of machine is loaded into detection platform, accurate alignment is located, Quick Response Code identification, ethernet communication reads panel information, and machine carries out according to information the detection that walks.NG particle, according to NG situation, is discharged to appointment deposit position automatically.Automatic blanking, the panel automatic landing after detection stacks into magazine.Equipment can be programmed by man-machine interface, is applicable to other specification products.
Claims (10)
1. a chip defect intelligence inspection machine, comprises support (1) and master controller, and described support (1) is provided with the checkout equipment detecting semiconductor product surface characteristics, it is characterized in that: (1) is also provided with described support
-automatic the discharging device (2) placing charging tray;
-automatically collect the blanking device detecting rear charging tray;
-for charging tray mobile platform (4) that is mobile and location charging tray;
-by charging tray from discharging device move to charging tray mobile device picking and placeing material mechanical arm (3) and by charging tray from charging tray mobile device move to blanking device pick and place material mechanical arm (3);
The moving step pitch of described charging tray mobile platform (4) is identical with the spacing between the device on charging tray to be detected, described checkout equipment, discharging device (2), blanking device, charging tray mobile platform (4), pick and place material mechanical arm (3) all connect in master controller.
2. chip defect intelligence inspection machine according to claim 1, it is characterized in that: described support (1) is also provided with one by the waste material ejection assembly (8) of defective position excision on charging tray, described waste material ejection assembly (8) is arranged on and checkout equipment correspondence position.
3. chip defect intelligence inspection machine according to claim 2, it is characterized in that: described waste material ejection assembly (8) comprises a slide rail and drift (8.1), described drift (8.1) and slide rail are slidably matched, and described drift (8.1) is arranged on the position corresponding with checkout equipment.
4. chip defect intelligence inspection machine according to claim 3, is characterized in that: described support (1) is also provided with the waste material removing the rejected part that drift ejects and discharges assembly (7).
5. chip defect intelligence inspection machine according to claim 4, it is characterized in that: described waste material is discharged assembly (7) and comprised slide rail (7.1) and the mechanical arm (7.2) in the upper slip of slide rail (7.1), and described mechanical arm (7.2) end is provided with the waste material suction nozzle (7.3) drawing waste material.
6. chip defect intelligence inspection machine according to claim 5, it is characterized in that: described support (1) is gone up and suction nozzle (7.3) correspondence position is also provided with several moveable waste material boxes (7.4), and the device of mobile waste material box is by main controller controls.
7. chip defect intelligence inspection machine according to claim 1, it is characterized in that: described discharging device (2) comprises a pallet and charging tray box, described charging tray box is arranged on pallet, charging tray box is provided with the groove of several levels, charging tray to be detected is placed in a groove one by one, tray bottom also has a jacking gear, and the step pitch of jacking gear is identical with the flute pitch of charging tray box.
8. chip defect according to claim 7 intelligence inspection machine, is characterized in that: described discharging device (2) also comprises one and whether is placed on sensor on pallet for detecting charging tray box.
9. chip defect intelligence inspection machine according to claim 1, it is characterized in that: described support (1) is provided with for picking and placeing the slide rail of expecting that mechanical arm (3) slides, described material mechanical arm and the slide rail of picking and placeing is slidably matched, described in pick and place and expect that robot end is provided with a charging tray clamping part (3.1) and pusher portion (3.2).
10. chip defect intelligence inspection machine according to claim 1, it is characterized in that: described charging tray mobile platform (4) comprises a chassis (4.1), outward flange on described chassis (4.1) is provided with two limited posts (4.2), two sensors corresponding with charging tray outward flange are provided with above described chassis, top, described chassis (4.1) is also provided with two briquettings matched with chassis (4.3), and described support is provided with the slide rail that supply disk mobile platform (4) slides in the horizontal direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510673011.0A CN105510357A (en) | 2015-10-15 | 2015-10-15 | Smart chip defect inspection machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510673011.0A CN105510357A (en) | 2015-10-15 | 2015-10-15 | Smart chip defect inspection machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105510357A true CN105510357A (en) | 2016-04-20 |
Family
ID=55718489
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510673011.0A Pending CN105510357A (en) | 2015-10-15 | 2015-10-15 | Smart chip defect inspection machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105510357A (en) |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106123825A (en) * | 2016-08-30 | 2016-11-16 | 苏州万商集包装设备有限公司 | Charging tray automatic measuring thickness machine |
| CN106501282A (en) * | 2016-10-26 | 2017-03-15 | 中源智人科技（深圳）股份有限公司 | The automatic inspection machine people of FPC and its intelligent detecting method |
| CN106903069A (en) * | 2017-02-24 | 2017-06-30 | 广东正业科技股份有限公司 | A kind of X-ray detection equipment |
| CN106933257A (en) * | 2017-03-15 | 2017-07-07 | 无锡百立德自动化有限公司 | Chip intelligent check machine detent mechanism |
| CN107345914A (en) * | 2016-05-04 | 2017-11-14 | 住华科技股份有限公司 | Automatic checkout system and apply its automatic testing method |
| CN107838058A (en) * | 2016-09-19 | 2018-03-27 | 深圳市炫硕智造技术有限公司 | Sorter |
| CN108181325A (en) * | 2018-01-31 | 2018-06-19 | 深圳精创视觉科技有限公司 | Glass defect automatic detection device |
| CN108672327A (en) * | 2018-05-18 | 2018-10-19 | 张荣哲 | One kind treasuring animal-breeding device |
| CN108891919A (en) * | 2018-05-18 | 2018-11-27 | 陈杰 | A kind of environment-protecting clean robot |
| CN108957287A (en) * | 2018-05-18 | 2018-12-07 | 孙丽荣 | A kind of desert photovoltaic plant technology |
| CN110137129A (en) * | 2019-05-30 | 2019-08-16 | 湖州靖源信息技术有限公司 | A kind of coring piece machine |
| CN110404801A (en) * | 2019-07-01 | 2019-11-05 | 孙广静 | A kind of dielectric ceramic and its method of inspection and equipment |
| CN110632097A (en) * | 2018-06-22 | 2019-12-31 | 柯尼卡美能达株式会社 | Image inspection apparatus, image forming system, and recording medium |
| CN111721778A (en) * | 2020-05-21 | 2020-09-29 | 深圳格兰达智能装备股份有限公司 | Vertical visual inspection equipment for chip defects |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101540291A (en) * | 2009-03-23 | 2009-09-23 | 常州新区爱立德电子有限公司 | Automatic sorting machine for semiconductor chip |
| CN202169251U (en) * | 2011-08-02 | 2012-03-21 | 四川索牌科技股份有限公司 | Bowl bottom defect detecting device for low-speed bowl maker |
| CN102519982A (en) * | 2011-12-29 | 2012-06-27 | 东莞市精研自动化机械有限公司 | Method for detecting appearance of capacitance product and detector implementing method |
| CN202304824U (en) * | 2011-10-10 | 2012-07-04 | 上海踏飞机电设备有限公司 | Fully automatic triple light detector |
| CN102673968A (en) * | 2012-04-28 | 2012-09-19 | 惠州市得天自动化设备有限公司 | Automatic loading and unloading system of light-emitting diode (LED) chip sorting device |
| CN102698969A (en) * | 2012-05-29 | 2012-10-03 | 格兰达技术（深圳）有限公司 | Automatic testing and sorting machine for integrated circuit IC chip |
| CN103252320A (en) * | 2013-05-06 | 2013-08-21 | 佛山市多谱光电科技有限公司 | Automatic chip on board (COB) optical assembly testing and sorting machine |
| CN204247811U (en) * | 2015-01-27 | 2015-04-08 | 上海强毅紧固件有限公司 | Receiver lower cover iron plate bender |
| CN104567697A (en) * | 2015-01-21 | 2015-04-29 | 苏州博众精工科技有限公司 | Component height difference detecting device |
-
2015
- 2015-10-15 CN CN201510673011.0A patent/CN105510357A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101540291A (en) * | 2009-03-23 | 2009-09-23 | 常州新区爱立德电子有限公司 | Automatic sorting machine for semiconductor chip |
| CN202169251U (en) * | 2011-08-02 | 2012-03-21 | 四川索牌科技股份有限公司 | Bowl bottom defect detecting device for low-speed bowl maker |
| CN202304824U (en) * | 2011-10-10 | 2012-07-04 | 上海踏飞机电设备有限公司 | Fully automatic triple light detector |
| CN102519982A (en) * | 2011-12-29 | 2012-06-27 | 东莞市精研自动化机械有限公司 | Method for detecting appearance of capacitance product and detector implementing method |
| CN102673968A (en) * | 2012-04-28 | 2012-09-19 | 惠州市得天自动化设备有限公司 | Automatic loading and unloading system of light-emitting diode (LED) chip sorting device |
| CN102698969A (en) * | 2012-05-29 | 2012-10-03 | 格兰达技术（深圳）有限公司 | Automatic testing and sorting machine for integrated circuit IC chip |
| CN103252320A (en) * | 2013-05-06 | 2013-08-21 | 佛山市多谱光电科技有限公司 | Automatic chip on board (COB) optical assembly testing and sorting machine |
| CN104567697A (en) * | 2015-01-21 | 2015-04-29 | 苏州博众精工科技有限公司 | Component height difference detecting device |
| CN204247811U (en) * | 2015-01-27 | 2015-04-08 | 上海强毅紧固件有限公司 | Receiver lower cover iron plate bender |
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107345914A (en) * | 2016-05-04 | 2017-11-14 | 住华科技股份有限公司 | Automatic checkout system and apply its automatic testing method |
| CN106123825B (en) * | 2016-08-30 | 2019-01-25 | 苏州万商集包装设备有限公司 | Charging tray automatic measuring thickness machine |
| CN106123825A (en) * | 2016-08-30 | 2016-11-16 | 苏州万商集包装设备有限公司 | Charging tray automatic measuring thickness machine |
| CN107838058A (en) * | 2016-09-19 | 2018-03-27 | 深圳市炫硕智造技术有限公司 | Sorter |
| CN106501282A (en) * | 2016-10-26 | 2017-03-15 | 中源智人科技（深圳）股份有限公司 | The automatic inspection machine people of FPC and its intelligent detecting method |
| CN106903069A (en) * | 2017-02-24 | 2017-06-30 | 广东正业科技股份有限公司 | A kind of X-ray detection equipment |
| CN106903069B (en) * | 2017-02-24 | 2023-01-06 | 广东正业科技股份有限公司 | X-ray detection equipment |
| CN106933257A (en) * | 2017-03-15 | 2017-07-07 | 无锡百立德自动化有限公司 | Chip intelligent check machine detent mechanism |
| CN106933257B (en) * | 2017-03-15 | 2023-10-13 | 广西中科阿尔法科技有限公司 | Positioning mechanism of chip intelligent inspection machine |
| CN108181325A (en) * | 2018-01-31 | 2018-06-19 | 深圳精创视觉科技有限公司 | Glass defect automatic detection device |
| CN108891919A (en) * | 2018-05-18 | 2018-11-27 | 陈杰 | A kind of environment-protecting clean robot |
| CN108957287A (en) * | 2018-05-18 | 2018-12-07 | 孙丽荣 | A kind of desert photovoltaic plant technology |
| CN108672327A (en) * | 2018-05-18 | 2018-10-19 | 张荣哲 | One kind treasuring animal-breeding device |
| CN110632097A (en) * | 2018-06-22 | 2019-12-31 | 柯尼卡美能达株式会社 | Image inspection apparatus, image forming system, and recording medium |
| CN110137129A (en) * | 2019-05-30 | 2019-08-16 | 湖州靖源信息技术有限公司 | A kind of coring piece machine |
| CN110404801A (en) * | 2019-07-01 | 2019-11-05 | 孙广静 | A kind of dielectric ceramic and its method of inspection and equipment |
| CN111721778A (en) * | 2020-05-21 | 2020-09-29 | 深圳格兰达智能装备股份有限公司 | Vertical visual inspection equipment for chip defects |
| CN111721778B (en) * | 2020-05-21 | 2023-01-24 | 深圳格芯集成电路装备有限公司 | Vertical visual inspection equipment for chip defects |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105510357A (en) | Smart chip defect inspection machine | |
| CN101539617B (en) | Automatic holographic management system integrating detection of electric energy meter and warehousing management | |
| CN207456383U (en) | A kind of electronic product casing detection device | |
| CN103921394A (en) | Automatic production and detection equipment of insert injection molding product | |
| CN104111260A (en) | Nondestructive ceramic detection device and detection method thereof | |
| CN101540291A (en) | Automatic sorting machine for semiconductor chip | |
| CN101327483B (en) | Device and method for classifying chips | |
| CN105904478A (en) | Mechanism for detecting feeding and discharging of automatic robot and grippers for mechanism | |
| CN101396692B (en) | Device capable of automatically detecting the electronic component appearance | |
| TWI460440B (en) | Electronic components operating machine | |
| CN203752405U (en) | Automated production and detection device for insert injection moulding products | |
| CN102812544A (en) | Method And Apparatus For Improved Sorting Of Diced Substrates | |
| CN211593186U (en) | Online material counting machine that throws | |
| CN111186620B (en) | Sampling processing device and method | |
| CN110672600B (en) | Optical filter online detection device and method | |
| CN209815112U (en) | Regulation and control system and detection production line | |
| CN115646855B (en) | Use method of robot vision device | |
| CN110632081A (en) | Bearing appearance detection equipment based on 2D and 3D vision | |
| CN110340025A (en) | Automatic letter sorting machine | |
| CN116448780A (en) | Chip defect detection device, method and equipment | |
| CN218591179U (en) | Code spraying detection device | |
| CN113049887B (en) | Automatic antenna testing equipment | |
| CN215157998U (en) | Feeding and discharging control system and detection assembly line | |
| CN213934073U (en) | Circulator vector net testing machine | |
| CN110217580B (en) | Using method for concrete compression resistance experiment mechanical device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20160420 |
|
| RJ01 | Rejection of invention patent application after publication |