CN105510005B - A kind of optical element Transflective rate measuring instrument - Google Patents
A kind of optical element Transflective rate measuring instrument Download PDFInfo
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- CN105510005B CN105510005B CN201610019864.7A CN201610019864A CN105510005B CN 105510005 B CN105510005 B CN 105510005B CN 201610019864 A CN201610019864 A CN 201610019864A CN 105510005 B CN105510005 B CN 105510005B
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- optical element
- laser
- lock
- amplifier
- photodiode
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
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- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The present invention provides a kind of optical element Transflective rate measuring instruments, the present invention through Amici prism is divided into reference light and incident light after being modulated using chopper to laser signal, incident light irradiates optical element and generates transmitted light and reflected light, photodiode acquires reference light, transmitted light and reflected light signal are simultaneously converted to electric signal, electric signal is amplified into lock-in amplifier by preamplifier, lock-in amplifier exports the DC voltage directly proportional to light intensity, transmitted light and the corresponding DC voltage of reflected light DC voltage corresponding with reference light compare, obtain the transmissivity and reflectivity of optical element.The present invention is corrected the amplification factor of measuring instrument signal amplification unit by setting optical standard piece.The configuration of the present invention is simple, it is easy to use, it is especially suitable for the transmissivity and reflectivity of online measurement larger size optical element.
Description
Technical field
The invention belongs to instrumental science fields, and in particular to a kind of optical element Transflective rate measuring instrument.
Background technique
High power laser light is used widely in many high-technology fields, is the important neck that contemporary various countries are competitively studied
Domain.With the continuous development of High-power Laser Technologies, the especially development of inertial confinement fusion system, optical system each unit device
The required power density born of part is higher and higher.
In device of high power laser, an important feature is the use of numerous heavy calibers and high precision optical element,
Used amplification and modulation crystal such as in laser amplifier and focusing.The transmitance and reflectivity of these optical elements
Loss and focusing greatly during the transmission of influence laser, such as reflectivity are excessively high, are just very easy to generate ghost luminous point, to dress
Other elements in setting damage.Massive optics is in use, and coating film treatment, optical lens are all passed through in most surfaces
It crosses rate and reflectivity is also the important indicator for evaluating optical element film coated quality.
When high-throughput laser aid high throughput is run, if there are any dirts for optical element surface, meeting after laser is absorbed
Explosive evaporation occurs, causes glass or coated surface to damage, reduces the damage threshold of optical element, this requires optical element to have
There is very high cleanliness.The transmitance of optical element is also to measure an important indicator of optical element surface cleanliness.
Currently, the key instrument of the transmission and reflectivity that measure optical element is spectrophotometer, this apparatus measures knot
Fruit is accurate, and can measure optical element in the transmitance of some wave band.But spectrophotometer generally uses photomultiplier tube
The technological means of accretion bulb separation, photomultiplier tube need to use in dark environment, cause this instrument that can only measure smaller
The transmitance of the optical element of size, and be not suitable for the optics member of measurement larger size (side to light product is greater than 200 × 200mm)
Part especially can not achieve on-line measurement.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of optical element Transflective rate measuring instruments.
Optical element Transflective rate measuring instrument of the invention, including laser, chopper, spectroscope, photodiode
I, photodiode II, photodiode III, preamplifier I, preamplifier II, preamplifier III, lock-in amplifier
I, lock-in amplifier II, lock-in amplifier III, optical element fixture, optical standard piece and computer；
The continuous laser that the laser issues is modulated into pulse laser, modulated pulse laser warp by chopper
It crosses spectroscope and is divided into the identical two bundle of pulsed laser of energy, a bundle of pulsed laser is received and converted to telecommunications by photodiode I
Number, electric signal is transmitted directly to computer after the amplification of preamplifier I and the amplification again of lock-in amplifier I；
Another bundle of pulsed laser direct irradiation generates on the optical element to be measured being placed on optical element fixture
Transmitted pulse laser and reflected impulse laser, reflected impulse laser therein are received and converted to telecommunications by photodiode II
Number, preamplifier II receives the electric signal that photodiode II generates and amplifies, and amplified electric signal passes through locking phase
Computer is directly passed to after amplifier II；Transmitted pulse laser receives and is converted into electric signal by photodiode III, preposition
Amplifier III receives the electric signal that photodiode III generates and amplifies, and amplified electric signal exists through lock-in amplifier III
Computer is directly delivered to after amplifying again；
The optical element fixture is used to be loaded optical element to be measured and optical standard piece, and optical standard piece is for surveying
Measure calibration of the optical element to be measured before to each amplifying unit amplification factor of instrument.
The laser that the laser generates is continuous light, and output power is less than or equal to 20 milliwatts.
The photodiode I, photodiode II are identical with the model of photodiode III.
The lock-in amplifier I, lock-in amplifier II are identical with the model of lock-in amplifier III.
The reflectivity of the optical standard piece is less than or equal to 4%.
The course of work of this optical element Transflective rate measuring instrument of the invention is as follows:
A. lock-in amplifier I, lock-in amplifier II and lock-in amplifier III power on；
B. preamplifier I, preamplifier II and preamplifier III power on；
C. chopper powers on；
D. computer is opened；
E. optical standard piece is placed on optical element fixture；
F. laser is opened；
G. it is rectified an instrument according to optical standard piece, the reference light, transmitted light and three channels of reflected light after being corrected are put
Amplification factor A1, A2 and the A3 of big unit.
H. laser is closed；
I. it takes optical standard piece away, places optical element to be measured；
J. laser is opened；
K. the output DC voltage of lock-in amplifier I, lock-in amplifier II and lock-in amplifier III is respectively V1, V2 and
V3, the transmissivity for calculating optical element to be measured is T=A1 × V2/A2 × V1, reflectivity R=A1 × V3/A3 × V1；
L. the power supply of each element is closed.
Optical element Transflective rate measuring instrument of the invention is by setting Transflective rate rate standard film, to measuring instrument
Amplification factor is corrected.This optical element Transflective rate measuring instrument of the invention has structure simple, easy to use, is suitble to
Transmission and the reflectivity of larger size optical element are measured, it, can be because light source part and probe portion are separation
In the case where optical element fixture, on-line measurement is realized, without by optical element undercarriage.
Detailed description of the invention
Fig. 1 is the theory structure schematic diagram of optical element Transflective rate measuring instrument of the invention；
In figure, 1. laser, 2. chopper, 3. spectroscope, 4. photodiode, I 5. photodiode II 6.
II 9. preamplifier of photodiode III 7. preamplifier, I 8. preamplifier, III 10. lock-in amplifier I
11. 14. optical standard piece of lock-in amplifier II 12. lock-in amplifier, III 13. optical element fixture, 15. computer.
Specific embodiment
This present invention is illustrated with reference to the accompanying drawings and examples.
Embodiment 1
Referring to Fig. 1, optical element Transflective rate measuring instrument of the invention, including laser 1, chopper 2, spectroscope 3,
Photodiode I 4, photodiode II 5, photodiode III 6, preamplifier I 7, preamplifier II 8, preposition amplification
Device III 9, lock-in amplifier I 10, lock-in amplifier II 11, lock-in amplifier III 12, optical element fixture 13, optical standard piece 14
With computer 15；
The continuous laser that the laser 1 issues is modulated into pulse laser, modulated pulse laser by chopper 2
It is divided into the identical two bundle of pulsed laser of energy by spectroscope 3, a bundle of pulsed laser is received and converted to by photodiode I 4
Electric signal, electric signal are transmitted directly to computer after the amplification of preamplifier I 7 and the amplification again of lock-in amplifier I 10
15；
Another bundle of pulsed laser direct irradiation produces on the optical element to be measured being placed on optical element fixture 13
Raw transmitted pulse laser and reflected impulse laser, reflected impulse laser therein are received and converted to electricity by photodiode II 5
Signal, preamplifier II 8 receive the electric signal that photodiode II 5 generates and amplify, and amplified electric signal passes through
Computer 15 is directly passed to after lock-in amplifier II 11；
Transmitted pulse laser receives and is converted into electric signal by photodiode III 6, and preamplifier III 9 receives photoelectricity two
The electric signal of the generation of pole pipe III 6 simultaneously amplifies, and amplified electric signal is direct after amplifying again through lock-in amplifier III 12
It is transmitted to computer 15.
The optical element fixture 13 is used to be loaded optical element to be measured and optical standard piece 14, and optical standard piece 14 is used
In the calibration before measuring optical element to be measured to each amplifying unit amplification factor of instrument.
The laser that the laser 1 generates is continuous light, and output power is less than or equal to 20 milliwatts.
The photodiode I 4, photodiode II 5 are identical with the model of photodiode III 6.
The lock-in amplifier I 10, lock-in amplifier II 11 are identical with the model of lock-in amplifier III 12.
The reflectivity of the optical standard piece 14 is equal to 4%.
Optical element Transflective rate measuring instrument of the invention is placed on optical platform, laser uses output wavelength
For the green (light) laser of 532nm.Successively give lock-in amplifier I 10, lock-in amplifier II 11, lock-in amplifier III 12, preceding storing
Big device I 7, preamplifier II 8, preamplifier III 9 and chopper open computer after powering on；Laser works and stabilization
Afterwards, according to the amplification factor of the transmission of optical standard piece and each amplifying unit of Planar mirror；It closes laser source and takes optics away
Standard film places optical element K9 glass to be measured, incident laser and K9 glass surface angle at 45 °, after reopening laser, root
According to the DC voltage that lock-in amplifier I, lock-in amplifier II and lock-in amplifier III export, the transmission of optical element to be measured is calculated
And reflectivity, measuring transmissivity is 91.523%, reflectivity 1.029%.
Embodiment 2
Embodiment 2 and the embodiment of embodiment 1 are essentially identical, and the main distinction is to replace 3.5% optics of reflectivity
Standard film 14 is used to measure the transmissivity and reflectivity of optical element to be measured.
The present invention is not limited to above-mentioned specific embodiment, person of ordinary skill in the field from the above idea,
Without creative labor, made various transformation are all fallen within this protection scope of the present invention.
Claims (4)
1. a kind of optical element Transflective rate measuring instrument, which is characterized in that including laser (1), chopper (2), spectroscope
(3), photodiode I (4), photodiode II (5), photodiode III (6), preamplifier I (7), preamplifier
II (8), preamplifier III (9), lock-in amplifier I (10), lock-in amplifier II (11), lock-in amplifier III (12), optics
Element fixture (13), optical standard piece (14) and computer (15)；
The continuous laser that the laser (1) issues is modulated into pulse laser, modulated pulse laser by chopper (2)
It is divided into the identical two bundle of pulsed laser of energy by spectroscope (3), a bundle of pulsed laser is received and turned by photodiode I (4)
It is changed to electric signal, electric signal directly transmits after preamplifier I (7) amplification and the amplification again of lock-in amplifier I (10)
To computer (15)；
Another bundle of pulsed laser direct irradiation generates on the optical element to be measured being placed on optical element fixture (13)
Transmitted pulse laser and reflected impulse laser, reflected impulse laser therein are received and converted to electricity by photodiode II (5)
Signal, preamplifier II (8) receive the electric signal that photodiode II (5) generate and amplify, amplified electric signal
Computer (15) are directly passed to after lock-in amplifier II (11)；Transmitted pulse laser is received by photodiode III (6)
And it is converted into electric signal, preamplifier III (9) receives the electric signal that photodiode III (6) generate and amplifies, and amplifies
Electric signal afterwards is directly delivered to computer (15) after amplifying again through lock-in amplifier III (12)；
The optical element fixture (13) is used to be loaded optical element to be measured and optical standard piece (14), optical standard piece (14)
For the calibration before measuring optical element to be measured to each amplifying unit amplification factor of instrument, the optical standard piece (14)
Reflectivity be less than or equal to 4%.
2. optical element Transflective rate measuring instrument according to claim 1, which is characterized in that the laser (1)
The laser of generation is continuous laser, and output power is less than or equal to 20 milliwatts.
3. optical element Transflective rate measuring instrument according to claim 1, which is characterized in that the photodiode
I (4), photodiode II (5) are identical with the model of photodiode III (6).
4. optical element Transflective rate measuring instrument according to claim 1, which is characterized in that the lock-in amplifier
I (10), lock-in amplifier II (11) are identical with the model of lock-in amplifier III (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610019864.7A CN105510005B (en) | 2016-01-13 | 2016-01-13 | A kind of optical element Transflective rate measuring instrument |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610019864.7A CN105510005B (en) | 2016-01-13 | 2016-01-13 | A kind of optical element Transflective rate measuring instrument |
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| Publication Number | Publication Date |
|---|---|
| CN105510005A CN105510005A (en) | 2016-04-20 |
| CN105510005B true CN105510005B (en) | 2019-01-15 |
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| CN201610019864.7A Expired - Fee Related CN105510005B (en) | 2016-01-13 | 2016-01-13 | A kind of optical element Transflective rate measuring instrument |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106441817A (en) * | 2016-11-04 | 2017-02-22 | 电子科技大学 | Comprehensive measurement device for measuring reflectivity/transmittance of optical components |
| CN112229605A (en) * | 2020-09-22 | 2021-01-15 | 中国科学院上海光学精密机械研究所 | Device and method for measuring reflectivity and transmissivity of optical component |
| CN114264453A (en) * | 2021-12-21 | 2022-04-01 | 电子科技大学 | Measuring method for improving reflectivity/transmissivity of high-precision optical element |
| US20230251161A1 (en) * | 2022-02-10 | 2023-08-10 | Applied Materials, Inc. | High-precision and high-throughput measurement of percentage light loss of optical devices |
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|---|---|---|---|---|
| JPH11274606A (en) * | 1998-03-25 | 1999-10-08 | Laser Atom Separation Eng Res Assoc Of Japan | Apparatus for measuring ase component of laser beam |
| JP2003028716A (en) * | 2001-07-11 | 2003-01-29 | Canon Inc | Spectrometric instrument and method for spectrometric measurement |
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| AU2008331441A1 (en) * | 2007-12-05 | 2009-06-11 | The Australian National University | Spectroscopic detection system and method |
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