CN105503195B - 高圆形度高纯度碳化硅超细粉体材料 - Google Patents

高圆形度高纯度碳化硅超细粉体材料 Download PDF

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CN105503195B
CN105503195B CN201610067578.8A CN201610067578A CN105503195B CN 105503195 B CN105503195 B CN 105503195B CN 201610067578 A CN201610067578 A CN 201610067578A CN 105503195 B CN105503195 B CN 105503195B
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杨东平
杨洋
王力
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Henan Sheng Dao Science And Technology Ltd
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Abstract

本发明公开了一种高圆形度高纯度碳化硅超细粉体材料,通过气流介质粉碎整形、研磨整形并加分析提纯的两次整形粉碎,将原位合成高纯6H‑SiC微粉加工成圆形度0.950以上,D50值1.6~2.0微米的超细粉体材料,满足了烧结精密陶瓷产品的需求,使用此超细粉体材料烧结出的精密陶瓷产品(如碳化硅陶瓷密封轴套,碳化硅陶瓷轧辊,碳化硅陶瓷喷嘴等)克服了传统烧结中容易出现的成产品率低,致密度不一致等烧结缺陷,使烧结出的碳化硅陶瓷品质一致性好,使用时抗热震、抗高温性、使用寿命不同等的弊端。经测试,采用本发明制备出的碳化硅超细粉体烧结出的成品零部件体积密度≥3.04g/cm³,气孔率<0.3%,使用温度最高1380℃,可完全满足精密碳化硅产品的使用要求。

Description

高圆形度高纯度碳化硅超细粉体材料
技术领域
本发明涉及烧结碳化硅精密陶瓷产品用原料 ,尤其是涉及一种用于烧结碳化硅精密陶瓷产品的高圆形度高纯度碳化硅超细粉体材料。
背景技术
碳化硅陶瓷材料由于其密度低、高温强度大、抗氧化性强、耐磨损性好,热稳定性佳,热膨胀系数小,热导率大,硬度高及抗热震和耐化学腐蚀等优良特性,在汽车工业、机械化工、环境保护、空间技术、高技术信息产业等领域受到了广泛应用。如碳化硅在石油化工中用于各种耐腐蚀容器及管道,在机械工业中制作各种耐磨、耐高温部件,在汽车工业中被成功用于密封部件及各种有特殊要求的零部件,例如汽车用传感器就要求能长久适用于汽车特有恶劣环境(高温、低温、振动、加速、潮湿、声、废气),并应当具有小型轻量,重复使用性好,输出范围广等,近年来随着制造技术的进步,利用碳化硅陶瓷材料制成传感器已完全成为可能。
碳化硅超细粉材料,是烧结碳化硅精密陶瓷制品的重要材料,它决定了精密陶瓷烧结产品的成品率、使用寿命、使用环境,及陶瓷产品抗高温级抗热震等各种特性。
我公司于2014年元月4日申请的发明专利《用于烧结碳化硅陶瓷膜的专用陶瓷材料》(专利号201410002513.6),已可以将碳化硅陶瓷材料处理成圆形度大于0.95,D50 值分别为170-190微米和190-230微米的两种微粉料,这两种颗粒料在烧结碳化硅陶瓷膜时效果较好,可完全满足设计要求和使用要求,但是,如果将其用于烧结碳化硅精密陶瓷产品,如耐磨耐腐泵高速旋转时护轴用的轴套,单向阀陶瓷阀芯等精密陶瓷产品时,由于碳化硅细粉的粒度较大,导致烧结出的产品因公差配合,表面粗糙度等因素,满足不了所需产品的质量要求。
为保证碳化硅精密陶瓷产品的烧结质量,需要加工出圆形度0.950,中值小于5微米及更细的碳化硅超细粉体,但是由于目前的加工工艺所限,超细碳化硅粉体的加工已成为业界的技术难题。
发明内容
本发明的目的在于提供一种可满足烧结碳化硅精密陶瓷产品的高圆形度高纯度碳化硅超细粉体材料。
为实现上述目的,本发明可采取下述技术方案:
本发明所述的高圆形度高纯度碳化硅超细粉体材料,包括下述加工步骤:
第一步,原料采用原位合成高纯6H-SiC微粉,其中的6H碳化硅结构纯度在90%以上,碳化硅含量≥99%;采用卧式球磨机,将所述高纯6H-SiC微粉研磨至D50值10微米、圆形度0.89以上的粉料,其中卧式球磨机中加入的研磨介质球配φ30:φ40:φ50=2:2:1,给料速度600kg/h,磨体转速28r/min;
第二步,将第一步得到的粉料采用0.6Mpa的高压空气从拉瓦尔喷咀射入流化床气流磨的粉碎整形腔内进行粉碎整形,粉碎整形腔内加入的碳化硅陶瓷球直径3mm,调整分级机转速2000r/min,进料速度400kg/min,粉碎整形后圆形度达到0.930以上、D50值2.6~3.4微米的超细粉料通过分级机进入旋风收集器被收集;
第三步,将第二步收集的超细粉料与水按1:1的比例混合后投入砂浆缸中,并加入物料总量10%的混合酸液,密封搅拌30分钟后,再通过循环泵打入超细粉体砂磨机中,砂磨机中加入直径2mm的碳化硅陶瓷球,在工作电流10A条件下进行研磨,将细粉整形到圆形度0.950以上,D50值1.6~2.0微米,然后化学提纯至碳化硅含量≥99.0%后收集浆料;
第四步,将第三步处理后的浆料打入储料缸中,加入纯水将pH值调节至6.5~7.5;
第五步,将第四步处理好的浆料注入离心机中进行脱水,调节离心机转速3500rpm,使微粉含水量<10%,然后采用微波烘干至水分含量<0.05%后,筛松包装即可。
第三步添加的混合酸液为质量比10%的硫酸、8%的硝酸和5%的盐酸按10:8:5之比例混合而成。
本发明的优点在于使用科学的工艺,通过气流介质粉碎整形、研磨整形并加分析提纯的两次整形粉碎,将原位合成高纯6H-SiC微粉加工成圆形度0.950以上,D50值1.6~2.0微米的超细粉体材料,满足了烧结精密陶瓷产品的需求,使用此超细粉体材料烧结出的精密陶瓷产品(如碳化硅陶瓷密封轴套,碳化硅陶瓷轧辊,碳化硅陶瓷喷嘴等)克服了传统烧结中容易出现的成产品率低,致密度不一致等烧结缺陷,使烧结出的碳化硅陶瓷品质一致性好,使用时抗热震、抗高温性、使用寿命不同等的弊端。经测试,采用本发明制备出的碳化硅超细粉体烧结出的成品零部件体积密度≥3.04g/cm³,气孔率<0.3%,使用温度最高1380℃,可完全满足精密碳化硅产品的使用要求。
具体实施方式
本发明所述的高圆形度高纯度碳化硅超细粉体材料,包括下述加工步骤:
第一步,原料采用原位合成高纯6H-SiC微粉,其中的6H碳化硅结构纯度在90%以上,碳化硅含量≥99%;采用卧式球磨机,其中加入的研磨介质球配φ30:φ40:φ50=2:2:1,给料速度600kg/h,磨体转速28r/min;将高纯6H-SiC微粉在摩擦力、冲击力和重力三力合一剪切力的作用下研磨至D50值10微米左右、圆形度0.89以上的粉料;
第二步,将第一步得到的粉料通过0.6Mpa的高压空气从拉瓦尔喷咀加速成超音速射流射入流化床气流磨的粉碎整形腔内进行粉碎整形,粉碎整形腔内加入的碳化硅陶瓷球直径2mm,一次装球量为100kg,物料在气流和碳化硅陶瓷球作用下进行反复碰撞、摩擦、研磨粉碎整形,将D50值10微米左右、圆形度0.89以上的粉料粉碎整形到圆形度达到0.930以上、D50值2.6~3.4微米的超细粉料,合格的粉料通过高速旋转的整形分级机(分级机转速2000r/min,进料速度400kg/min,)进入旋风收集器被收集,圆形度小于0.930、D50值>3.4微米的粉体无法通过整形分级机,会再次进入流化床气流磨的粉碎整形腔内进行反复气流碰撞、摩擦、整形;
第三步,将第二步收集的超细粉料与水按1:1的比例混合后投入砂浆缸中,一次投料量为500kg,并按物料总量的10%加入质量比10%的硫酸、8%的硝酸和5%的盐酸按10:8:5之比例混合而成的混合酸液(50kg),密封搅拌30分钟后,再通过耐腐蚀耐磨循环泵打入超细粉体砂磨机中,砂磨机中加入100kg碳化硅陶瓷球(直径2mm),在工作电流10A条件下进行研磨整形,将细粉整形到圆形度0.950以上,D50值1.6~2.0微米,然后化学提纯至碳化硅含量≥99.0%后收集浆料;所用的混合酸液不进行对外排放,进行封闭循环使用,一定周期后转化为铁肥使用;
第四步,将第三步处理后的浆料打入储料缸中,加入纯水将浆料的pH值调节至6.5~7.5;
第五步,将第四步处理好的浆料注入离心机中进行脱水,调节离心机转速3500rpm,脱水后微粉含水量<10%,然后采用微波烘干至水分含量<0.05%后,采用负压封闭式全自动超声波筛分,按5kg、10kg铁盒自动包装即可。

Claims (1)

1.一种高圆形度高纯度碳化硅超细粉体材料,其特征在于:包括下述加工步骤:
第一步,原料采用原位合成高纯6H-SiC微粉,其中的6H碳化硅结构纯度在90%以上,碳化硅含量≥99%;采用卧式球磨机,将所述高纯6H-SiC微粉研磨至D50值10微米、圆形度0.89以上的粉料,其中卧式球磨机中加入的研磨介质球配φ30:φ40:φ50=2:2:1,给料速度600kg/h,磨体转速28r/min;
第二步,将第一步得到的粉料采用0.6MPa的高压空气从拉瓦尔喷嘴射入流化床气流磨的粉碎整形腔内进行粉碎整形,粉碎整形腔内加入的碳化硅陶瓷球直径3mm,调整分级机转速2000r/min,进料速度400kg/min,粉碎整形后圆形度达到0.930以上、D50值2.6~3.4微米的超细粉料通过分级机进入旋风收集器被收集;
第三步,将第二步收集的超细粉料与水按1:1的比例混合后投入砂浆缸中,并加入物料总量10%的混合酸液,密封搅拌30分钟后,再通过循环泵打入超细粉体砂磨机中,超细粉体砂磨机中加入直径2mm的碳化硅陶瓷球,在工作电流10A条件下进行研磨,将细粉整形到圆形度0.950以上, D50值1.6~2.0微米,然后化学提纯至碳化硅含量≥99.0%后收集浆料;所述混合酸液为质量百分比10%的硫酸、8%的硝酸和5%的盐酸按10:8:5之比例混合而成;
第四步,将第三步处理后的浆料打入储料缸中,加入纯水将pH值调节至6.5~7.5;
第五步,将第四步处理好的浆料注入离心机中进行脱水,调节离心机转速3500rpm,使微粉含水量<10%,然后采用微波烘干至水分含量<0.05%后,筛松包装即可。
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CN108892511A (zh) * 2018-08-20 2018-11-27 宁夏和兴碳基材料有限公司 一种制备亚微米级碳化硅粉体的方法
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CN111960419A (zh) * 2020-08-27 2020-11-20 惠州市中惠宇航半导体新材料有限公司 一种碳化硅超细微粉及其生产方法
CN113956048B (zh) * 2021-11-24 2022-10-14 唐山圣诺纳微科技有限公司 一种用于注浆注射挤压成型碳化硅陶瓷粉体的制备方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1915809A (zh) * 2006-09-07 2007-02-21 郑州华硕精密陶瓷有限公司 喷雾造粒制备亚微米级碳化硅微粉的方法
CN102249236A (zh) * 2011-06-02 2011-11-23 江苏大阳微粉科技有限公司 一种碳化硅微粉的生产工艺
CN102351180A (zh) * 2011-06-23 2012-02-15 阮秀春 一种碳化硅粒度砂和致密烧结用超细微粉的生产方法
CN103819194A (zh) * 2014-01-04 2014-05-28 河南晟道科技有限公司 用于烧结碳化硅陶瓷膜的专用陶瓷材料

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3957432B2 (ja) * 1999-09-02 2007-08-15 電気化学工業株式会社 β型炭化珪素粉末含有組成物、その製造方法及び用途

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1915809A (zh) * 2006-09-07 2007-02-21 郑州华硕精密陶瓷有限公司 喷雾造粒制备亚微米级碳化硅微粉的方法
CN102249236A (zh) * 2011-06-02 2011-11-23 江苏大阳微粉科技有限公司 一种碳化硅微粉的生产工艺
CN102351180A (zh) * 2011-06-23 2012-02-15 阮秀春 一种碳化硅粒度砂和致密烧结用超细微粉的生产方法
CN103819194A (zh) * 2014-01-04 2014-05-28 河南晟道科技有限公司 用于烧结碳化硅陶瓷膜的专用陶瓷材料

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
超细粉颗粒形貌控制技术的研究;陈海焱等;《金刚石与磨料磨具工程》;20030831(第4期);第65-68页 *

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