CN105485481B - 一种位移可调节精密定位平台 - Google Patents
一种位移可调节精密定位平台 Download PDFInfo
- Publication number
- CN105485481B CN105485481B CN201510971324.4A CN201510971324A CN105485481B CN 105485481 B CN105485481 B CN 105485481B CN 201510971324 A CN201510971324 A CN 201510971324A CN 105485481 B CN105485481 B CN 105485481B
- Authority
- CN
- China
- Prior art keywords
- platform
- axis
- slide unit
- displacement
- locating platform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 31
- 230000008093 supporting effect Effects 0.000 claims description 11
- 229910000838 Al alloy Inorganic materials 0.000 claims description 8
- 239000000956 alloy Substances 0.000 claims description 7
- 238000005096 rolling process Methods 0.000 claims description 7
- 238000007743 anodising Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 239000004411 aluminium Substances 0.000 claims description 4
- 230000008569 process Effects 0.000 claims description 4
- 230000001681 protective effect Effects 0.000 claims description 3
- 230000008859 change Effects 0.000 description 8
- 238000010276 construction Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 4
- 238000009434 installation Methods 0.000 description 4
- 238000003754 machining Methods 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
- F16M11/043—Allowing translations
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Machine Tool Units (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510971324.4A CN105485481B (zh) | 2015-12-20 | 2015-12-20 | 一种位移可调节精密定位平台 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201510971324.4A CN105485481B (zh) | 2015-12-20 | 2015-12-20 | 一种位移可调节精密定位平台 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN105485481A CN105485481A (zh) | 2016-04-13 |
CN105485481B true CN105485481B (zh) | 2018-01-16 |
Family
ID=55672650
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201510971324.4A Active CN105485481B (zh) | 2015-12-20 | 2015-12-20 | 一种位移可调节精密定位平台 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN105485481B (zh) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106002877B (zh) * | 2016-07-19 | 2018-05-15 | 苏州誉衡昌精密机械有限公司 | 一种电磁驱动微动工作台 |
CN106595594B (zh) * | 2016-11-18 | 2019-11-15 | 华南理工大学 | 一种可调节的双目视觉传感装置及方法 |
CN107366692A (zh) * | 2017-08-05 | 2017-11-21 | 苏州方德锐精密机电科技有限公司 | 一种手调式高精度透明液粘调速离合器 |
CN107398913B (zh) * | 2017-08-08 | 2023-06-20 | 国网湖南省电力公司 | 一种模块检测线归正机构 |
CN107946226B (zh) * | 2017-12-25 | 2020-12-04 | 中国电子科技集团公司第四十八研究所 | 一种机械式电池片定位平台 |
CN108000459B (zh) * | 2018-01-15 | 2023-08-18 | 大连交通大学 | 一种六自由度混联曲梁空间柔顺机构 |
CN108621423A (zh) * | 2018-04-20 | 2018-10-09 | 陕西科技大学 | 一种柔性电子设备的制造装置及方法 |
CN108833913B (zh) * | 2018-08-24 | 2023-11-03 | 珠海市运泰利自动化设备有限公司 | 一种精密对位三向隔震装置 |
CN109140146B (zh) * | 2018-09-05 | 2020-08-18 | 三英精控(天津)仪器设备有限公司 | 一种基于柔性铰链的高精度升降平台 |
CN110039394B (zh) * | 2019-05-15 | 2020-04-14 | 昆山优力准模具科技有限公司 | 一种模具表面修复系统 |
CN110261081A (zh) * | 2019-06-06 | 2019-09-20 | 华南理工大学 | 一种基于微视觉系统的柔顺铰链柔度及旋转精度测量装置 |
CN110206975A (zh) * | 2019-06-27 | 2019-09-06 | 苏州泰科贝尔直驱电机有限公司 | 一种三轴联动微调平台 |
CN113967924B (zh) * | 2021-10-28 | 2024-02-09 | 郑州轻工业大学 | 薄壁易碎件作业机械手自适应柔顺特征测试分析平台 |
CN114171362B (zh) * | 2022-02-09 | 2022-05-24 | 之江实验室 | 微粒转移装置以及应用 |
CN114800606A (zh) * | 2022-03-30 | 2022-07-29 | 国网湖南省电力有限公司 | 一种连续体机械臂直线距离传感器标定系统及标定方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4298547B2 (ja) * | 2004-03-01 | 2009-07-22 | キヤノン株式会社 | 位置決め装置およびそれを用いた露光装置 |
US7187107B2 (en) * | 2004-12-29 | 2007-03-06 | Industrial Technology Research Institute | Closed-loop feedback control positioning stage |
CN102723298A (zh) * | 2012-05-11 | 2012-10-10 | 哈尔滨工业大学 | 一种电磁预紧xy精密运动平台 |
CN103078568B (zh) * | 2012-12-26 | 2015-12-02 | 清华大学 | 并联运动解耦伺服控制平台 |
CN103557412B (zh) * | 2013-11-06 | 2015-12-02 | 山东大学 | 双极二维全柔性高精度伺服平台 |
CN203830045U (zh) * | 2014-04-23 | 2014-09-17 | 西北农林科技大学 | 一种电磁控制移动式实验平台 |
CN204488182U (zh) * | 2014-12-24 | 2015-07-22 | 湖南三兴精密工业股份有限公司 | 物料定位平台的精确调节装置 |
CN205331721U (zh) * | 2015-12-20 | 2016-06-22 | 华南理工大学 | 一种位移可调节精密定位平台 |
-
2015
- 2015-12-20 CN CN201510971324.4A patent/CN105485481B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
CN105485481A (zh) | 2016-04-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN105485481B (zh) | 一种位移可调节精密定位平台 | |
CN101807010B (zh) | 纳米精度六自由度磁浮微动台及应用 | |
US20100187917A1 (en) | Micro stage with 6 degrees of freedom | |
US9755493B2 (en) | Linear motor and stage apparatus | |
CN107942622B (zh) | 一种基于双柔性副的三自由度精密调节并联机构 | |
CN103226296B (zh) | 一种带激光干涉仪测量的粗精动叠层工作台 | |
CN102723842B (zh) | 多自由度长行程磁悬浮工作台 | |
CN107705821A (zh) | 一种二自由度尺蠖式微纳定位平台 | |
CN103226287A (zh) | 一种双并联平行解耦柔性微定位机构 | |
CN108240802B (zh) | 一种四自由度微调机构 | |
CN104362888A (zh) | 一种压电驱动的八绞同轴微位移放大机构 | |
CN103383526B (zh) | 一种粗精动叠层工作台 | |
CN110449916B (zh) | 采用磁悬浮式直线电机驱动的二维平台及其工作方法 | |
CN210757607U (zh) | 一种具有双位移的二维精密微动工作台 | |
CN110497363B (zh) | 一种模块化宏微结合的三自由度微夹持平台及其使用方法 | |
CN205331721U (zh) | 一种位移可调节精密定位平台 | |
CN110524500B (zh) | 磁浮导轨运动平台 | |
CN102496391B (zh) | 一种组装式二维微位移台 | |
CN215452761U (zh) | 基于永磁同步直线电机的稳定结构对位平台 | |
CN115912812A (zh) | 直线电机安装方法、结构及其用电设备 | |
CN104070518A (zh) | 一种基于偏心结构的三自由度精密调节装置 | |
CN113126444B (zh) | 一种垂向支撑组件、垂向支撑装置以及光刻机 | |
CN114825854A (zh) | 一种具有双层绕组粗精驱动的磁浮平面电机工作台 | |
CN116381892B (zh) | 一种基于直驱式气浮平台的二级宏微相机镜头调焦装置 | |
CN214412607U (zh) | 一种超声电机夹持定位装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CB03 | Change of inventor or designer information | ||
CB03 | Change of inventor or designer information |
Inventor after: Wang Nianfeng Inventor after: Zhang Zhiyuan Inventor after: Zhang Xianmin Inventor after: Zheng Yongzhong Inventor after: Zhou Shengyong Inventor before: Wang Nianfeng Inventor before: Zhang Zhiyuan Inventor before: Zhang Xianmin Inventor before: Zheng Yongzhong Inventor before: Zhou Shengyong |
|
CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: 510700 Yuexiu Patent Technology Service Center, South China University of Technology, 83 Xianliezhong Road, Yuexiu District, Guangzhou City, Guangdong Province Patentee after: SOUTH CHINA University OF TECHNOLOGY Patentee after: Sanji precision technology (Guangdong) Co.,Ltd. Address before: 510700 Yuexiu Patent Technology Service Center, South China University of Technology, 83 Xianliezhong Road, Yuexiu District, Guangzhou City, Guangdong Province Patentee before: SOUTH CHINA University OF TECHNOLOGY Patentee before: SON-TECH PRECISION MACHINERY Co.,Ltd. |