CN107705821A - 一种二自由度尺蠖式微纳定位平台 - Google Patents
一种二自由度尺蠖式微纳定位平台 Download PDFInfo
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- CN107705821A CN107705821A CN201710828975.7A CN201710828975A CN107705821A CN 107705821 A CN107705821 A CN 107705821A CN 201710828975 A CN201710828975 A CN 201710828975A CN 107705821 A CN107705821 A CN 107705821A
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- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
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CN107705821A true CN107705821A (zh) | 2018-02-16 |
CN107705821B CN107705821B (zh) | 2019-11-15 |
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Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109140147A (zh) * | 2018-09-05 | 2019-01-04 | 三英精控(天津)仪器设备有限公司 | 一种三自由度的平行度调节器 |
CN109357651A (zh) * | 2018-12-04 | 2019-02-19 | 杨斌堂 | 精密驱动位移测量装置 |
CN111490700A (zh) * | 2020-04-23 | 2020-08-04 | 中国科学院光电技术研究所 | 一种多模式混合驱动二维并联运动平台及其控制方法 |
CN112720374A (zh) * | 2021-01-04 | 2021-04-30 | 山东建筑大学 | 三自由度精密微位移定位平台 |
CN113206615A (zh) * | 2021-04-26 | 2021-08-03 | 天津大学 | 一种带有静态自锁的尺蠖式线性驱动器 |
CN113219649A (zh) * | 2021-04-30 | 2021-08-06 | 哈尔滨芯明天科技有限公司 | 一种航天应用的高可靠压电偏摆镜 |
CN113513943A (zh) * | 2021-04-09 | 2021-10-19 | 南京航空航天大学 | 压电驱动的二维微动成像平台 |
CN115954043A (zh) * | 2022-12-15 | 2023-04-11 | 山东大学 | 一种非对称差分式微纳直线运动平台及工作方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07236287A (ja) * | 1993-10-01 | 1995-09-05 | Kanagawa Kagaku Gijutsu Akad | インチワーム・アクチュエータのチャック及びその製造方法 |
CN102291039A (zh) * | 2011-07-22 | 2011-12-21 | 吉林大学 | 多自由度仿生压电驱动装置 |
CN102664553A (zh) * | 2012-05-11 | 2012-09-12 | 哈尔滨工业大学 | 一种蠕动式被动箝位压电驱动器 |
CN103295651A (zh) * | 2013-05-10 | 2013-09-11 | 上海大学 | 基于柔性放大原理的压电驱动尺蠖式定位工作台 |
CN104320015A (zh) * | 2014-10-15 | 2015-01-28 | 吉林大学 | 仿生多自由度精密压电驱动装置 |
-
2017
- 2017-09-14 CN CN201710828975.7A patent/CN107705821B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07236287A (ja) * | 1993-10-01 | 1995-09-05 | Kanagawa Kagaku Gijutsu Akad | インチワーム・アクチュエータのチャック及びその製造方法 |
CN102291039A (zh) * | 2011-07-22 | 2011-12-21 | 吉林大学 | 多自由度仿生压电驱动装置 |
CN102664553A (zh) * | 2012-05-11 | 2012-09-12 | 哈尔滨工业大学 | 一种蠕动式被动箝位压电驱动器 |
CN103295651A (zh) * | 2013-05-10 | 2013-09-11 | 上海大学 | 基于柔性放大原理的压电驱动尺蠖式定位工作台 |
CN104320015A (zh) * | 2014-10-15 | 2015-01-28 | 吉林大学 | 仿生多自由度精密压电驱动装置 |
Non-Patent Citations (2)
Title |
---|
吴鹰飞 李勇 周兆英 刘钦彦: "蠕动式X-Y-θ微动工作台的设计实现", 《中国机械工程》 * |
陈海初 李满天 王振华 孙立宁 王建国: "压电陶瓷驱动三自由度精密移动定位微小机器人", 《压电与声光》 * |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109140147B (zh) * | 2018-09-05 | 2020-05-05 | 三英精控(天津)仪器设备有限公司 | 一种三自由度的平行度调节器 |
CN109140147A (zh) * | 2018-09-05 | 2019-01-04 | 三英精控(天津)仪器设备有限公司 | 一种三自由度的平行度调节器 |
CN109357651B (zh) * | 2018-12-04 | 2024-05-14 | 杨斌堂 | 精密驱动位移测量装置 |
CN109357651A (zh) * | 2018-12-04 | 2019-02-19 | 杨斌堂 | 精密驱动位移测量装置 |
CN111490700A (zh) * | 2020-04-23 | 2020-08-04 | 中国科学院光电技术研究所 | 一种多模式混合驱动二维并联运动平台及其控制方法 |
CN111490700B (zh) * | 2020-04-23 | 2023-09-19 | 中国科学院光电技术研究所 | 一种多模式混合驱动二维并联运动平台及其控制方法 |
CN112720374A (zh) * | 2021-01-04 | 2021-04-30 | 山东建筑大学 | 三自由度精密微位移定位平台 |
CN112720374B (zh) * | 2021-01-04 | 2024-06-04 | 山东建筑大学 | 三自由度精密微位移定位平台 |
CN113513943A (zh) * | 2021-04-09 | 2021-10-19 | 南京航空航天大学 | 压电驱动的二维微动成像平台 |
CN113513943B (zh) * | 2021-04-09 | 2022-06-17 | 南京航空航天大学 | 压电驱动的二维微动成像平台 |
CN113206615A (zh) * | 2021-04-26 | 2021-08-03 | 天津大学 | 一种带有静态自锁的尺蠖式线性驱动器 |
CN113219649A (zh) * | 2021-04-30 | 2021-08-06 | 哈尔滨芯明天科技有限公司 | 一种航天应用的高可靠压电偏摆镜 |
CN115954043A (zh) * | 2022-12-15 | 2023-04-11 | 山东大学 | 一种非对称差分式微纳直线运动平台及工作方法 |
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Effective date of registration: 20240208 Address after: Room 101, 1st Floor, Building 15, New Generation Information Technology Industrial Park, High tech Zone, Rizhao City, Shandong Province, 276801 Patentee after: Ami Precision Control Technology (Shandong) Co.,Ltd. Country or region after: China Address before: 250061, No. ten, No. 17923, Lixia District, Ji'nan City, Shandong Province Patentee before: SHANDONG University Country or region before: China |
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Effective date of registration: 20240228 Address after: Room 101, 1st Floor, Building 15, New Generation Information Technology Industrial Park, High tech Zone, Rizhao City, Shandong Province, 276801 Patentee after: Ami Precision Control Technology (Shandong) Co.,Ltd. Country or region after: China Address before: 250061, No. ten, No. 17923, Lixia District, Ji'nan City, Shandong Province Patentee before: SHANDONG University Country or region before: China |
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CI03 | Correction of invention patent | ||
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Correction item: transfer of patent right Correct: Revoke False: Transfer Number: 09-01 Volume: 40 |